Micro-vibration signal detection device based on optical fiber MEMS

Abstract

The utility model relates to the technical field of optical fiber sensors, and particularly discloses a micro-vibration signal detection device based on an optical fiber MEMS (Micro Electro Mechanical System), which comprises a light source unit, a micro-vibration signal acquisition unit, a micro-vibration signal processing unit and a main control unit, the light source unit is used for emitting a constant light signal; the micro-vibration signal acquisition unit is used for receiving the optical signal and obtaining a first micro-vibration signal located at a first preset position and a second micro-vibration signal located at a second preset position; the micro-vibration signal processing unit is used for respectively amplifying and filtering the first micro-vibration signal and the second micro-vibration signal to obtain a first processing signal and a second processing signal; and the main control unit is used for controlling the operation of the micro-vibration signal acquisition unit and performing analysis and processing according to the first processing signal and the second processing signal to obtain a normal operation signal of the tested equipment. The micro-vibration signal detection device based on the optical fiber MEMS provided by the utility model can obtain accurate equipment vibration signals.

Description

Technical Field

[0001] The utility model relates to the technical field of optical fiber sensors, in particular to a micro-vibration signal detection device based on optical fiber MEMS. Background Art

[0002] Under the concept of smart mining, the traditional energy industry, especially the coal mining sector, faces an increasingly urgent need to upgrade to artificial intelligence, digitization, and information-based database classification. The collection of vibration signals from large electromechanical equipment in coal mines, such as generators, conveyors, and motors, requires high quality, high precision, and a high sampling rate. Environmental noise and interference significantly impact the quality of this information. Removing interference signals to obtain high-quality information facilitates algorithm analysis, enabling immediate fault identification.

[0003] Therefore, how to obtain a more accurate vibration signal to improve the detection accuracy of the equipment working signal has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Invention

[0004] The utility model provides a micro-vibration signal detection device based on optical fiber MEMS, which solves the technical problem in related technologies that accurate equipment vibration signals cannot be obtained.

[0005] As one aspect of the present invention, a micro-vibration signal detection device based on optical fiber MEMS is provided, which includes: a light source unit, a micro-vibration signal acquisition unit, a micro-vibration signal processing unit and a main control unit, wherein the light source unit, the micro-vibration signal acquisition unit and the micro-vibration signal processing unit are all communicatively connected to the main control unit;

[0006] The light source unit is used to emit a constant light signal;

[0007] The micro-vibration signal acquisition unit is used to receive the optical signal and obtain a first micro-vibration signal located at a first preset position and a second micro-vibration signal located at a second preset position, wherein the first micro-vibration signal includes a normal operating signal of the device under test and an interference signal, and the second micro-vibration signal includes an interference signal;

[0008] The micro-vibration signal processing unit is used to amplify and filter the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first processed signal and a second processed signal;

[0009] The main control unit is used to control the operation of the micro-vibration signal acquisition unit and to analyze and process the first processed signal and the second processed signal to obtain a normal working signal of the device under test.

[0010] Furthermore, the micro-vibration signal acquisition unit includes: an optical fiber MEMS sensor and a motion mechanism, wherein the optical fiber MEMS sensor is connected to the motion mechanism;

[0011] The motion mechanism can drive the optical fiber MEMS sensor to move to a first preset position or a second preset position under the control of the main control unit;

[0012] The optical fiber MEMS sensor is used to receive a first optical signal when located at a first preset position and obtain a first micro-vibration signal based on the first optical signal, and is used to receive a second optical signal when located at a second preset position and obtain a second micro-vibration signal based on the second optical signal.

[0013] Furthermore, the motion mechanism includes a bearing part and a motion part, the bearing part is connected to the motion part, the bearing part is used to install the optical fiber MEMS sensor, and the motion part is used to drive the bearing part to move under the control of the main control unit.

[0014] Furthermore, the moving part includes a gear lifter.

[0015] Furthermore, the light source unit includes: a light source driving module and a laser constant module, wherein the light source driving module is electrically connected to the laser constant module;

[0016] The light source driving module is used to generate a constant light source driving signal;

[0017] The laser constant module is used to emit a constant laser signal according to the constant light source driving signal.

[0018] Furthermore, the light source driving module includes an operational amplifier and a switch tube, the output end of the operational amplifier is connected to the driving end of the switch tube, the operational amplifier can generate a switch tube driving signal according to the output signal of the main control unit, and the switch tube can generate a constant light source driving signal according to the switch tube driving signal;

[0019] The laser constant module includes a laser.

[0020] Furthermore, the micro-vibration signal processing unit includes: an acquisition and driving module and an acquisition and analysis module, wherein the acquisition and driving module and the acquisition and analysis module are electrically connected;

[0021] The acquisition drive module is used to generate an acquisition drive signal according to the control of the main control unit;

[0022] The acquisition and analysis module is used to perform micro-vibration signal conversion processing according to the acquisition drive signal and perform signal analysis processing according to the micro-vibration signal conversion result to obtain a first processed signal and a second processed signal.

[0023] Furthermore, the acquisition and analysis module includes a collector and an analysis module, and the collector is electrically connected to the analysis module.

[0024] The collector is used to perform photoelectric conversion processing on the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first micro-vibration electrical signal and a second micro-vibration electrical signal;

[0025] The analysis module is used to perform amplification and filtering processing on the first micro-vibration electrical signal and the second micro-vibration electrical signal respectively to obtain a first processed signal and a second processed signal.

[0026] Furthermore, it also includes: a coupler, which is connected to the light source unit, the micro-vibration signal acquisition unit and the micro-vibration signal processing unit respectively, and is used to couple the light signal into the micro-vibration signal acquisition unit, and to couple the micro-vibration signal in the micro-vibration signal acquisition unit into the micro-vibration signal processing unit.

[0027] Furthermore, the main control unit includes a DSP processor.

[0028] The fiber-optic MEMS-based micro-vibration signal detection device provided by the utility model receives optical signals at different preset positions through a micro-vibration signal acquisition unit to obtain different micro-vibration signals. By processing the micro-vibration signals at different positions, the first micro-vibration signal obtained at the detection position is subtracted from the second micro-vibration signal obtained at the idle position to obtain the normal operating signal of the device under test. In addition, a more accurate normal operating signal of the device under test can be obtained through multiple repetitions. Therefore, the fiber-optic MEMS-based micro-vibration signal detection device of the utility model can obtain more accurate vibration signals and has a simple structure and is easy to implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present invention, but do not constitute a limitation to the present invention.

[0030] Figure 1 This is a structural block diagram of the micro-vibration signal detection device based on optical fiber MEMS provided by the utility model.

[0031] Figure 2 This is a structural diagram of the micro-vibration signal acquisition unit provided by the utility model.

[0032] Figure 3 This is a structural principle diagram of the light source unit provided by the utility model.

[0033] Figure 4a This is a structural block diagram of the micro-vibration signal processing unit provided by the utility model.

[0034] Figure 4b This is a structural principle diagram of the acquisition and analysis module provided by the utility model.

[0035] Figure 4c This is a structural principle diagram of the acquisition and driving module provided by the utility model.

[0036] Figure 5 This is a structural block diagram of a specific implementation of the optical fiber MEMS-based micro-vibration signal detection device provided by the utility model. DETAILED DESCRIPTION

[0037] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0038] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0039] It should be noted that the terms "first," "second," and the like in the specification and claims of the present invention and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate for the embodiments of the present invention described herein. In addition, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to these processes, methods, products, or apparatuses.

[0040] Currently, in the field of fiber optic sensing, the weak signals collected and transmitted by optical fibers are easily subject to interference, such as vibration, temperature, and environmental noise. Currently, most detection equipment adds filters at the end or uses software filtering, which does not fundamentally separate the signal from the interference.

[0041] Based on this, in this embodiment, a micro-vibration signal detection device based on optical fiber MEMS is provided. Figure 1 FIG. 1 is a structural block diagram of a micro-vibration signal detection device 100 based on optical fiber MEMS according to an embodiment of the present invention. Figure 1As shown, it includes: a light source unit 110, a micro-vibration signal acquisition unit 120, a micro-vibration signal processing unit 130 and a main control unit 140, and the light source unit 110, the micro-vibration signal acquisition unit 120 and the micro-vibration signal processing unit 130 are all communicatively connected to the main control unit 140;

[0042] The light source unit 110 is used to emit a constant light signal;

[0043] The micro-vibration signal acquisition unit 120 is used to receive the optical signal and obtain a first micro-vibration signal located at a first preset position and a second micro-vibration signal located at a second preset position, wherein the first micro-vibration signal includes a normal operating signal of the device under test and an interference signal, and the second micro-vibration signal includes an interference signal;

[0044] The micro-vibration signal processing unit 130 is used to amplify and filter the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first processed signal and a second processed signal;

[0045] The main control unit 140 is used to control the operation of the micro-vibration signal acquisition unit and to analyze and process the first processed signal and the second processed signal to obtain a normal operating signal of the device under test.

[0046] In an embodiment of the present utility model, the light source unit 110 emits a constant light signal, and the micro-vibration signal acquisition unit 120 obtains different micro-vibration signals by receiving light signals at different preset positions, wherein the first preset position is the detection position, and the first micro-vibration signal obtained includes the normal working signal and the interference signal of the device under test; the second preset position is the idle position, and the second micro-vibration signal obtained includes the interference signal; the micro-vibration signal processing unit 130 obtains the processed signal by performing signal processing on the two micro-vibration signals respectively, and finally the main control unit 140 analyzes the processed signal to obtain the normal working signal of the device under test.

[0047] The fiber-optic MEMS-based micro-vibration signal detection device provided by the present invention receives optical signals at different preset positions through the micro-vibration signal acquisition unit 120 to obtain different micro-vibration signals. By processing the micro-vibration signals at different positions, the first micro-vibration signal obtained at the detection position is subtracted from the second micro-vibration signal obtained at the idle position to obtain the normal operating signal of the device under test. In addition, a more accurate normal operating signal of the device under test can be obtained through multiple repetitions. Therefore, the fiber-optic MEMS-based micro-vibration signal detection device of the present invention can obtain more accurate vibration signals and has a simple structure and is easy to implement.

[0048] In the embodiment of the present utility model, Figure 2As shown, the micro-vibration signal acquisition unit 120 includes: an optical fiber MEMS sensor 121 and a motion mechanism 122, and the optical fiber MEMS sensor 121 and the motion mechanism 122 are connected;

[0049] The motion mechanism 122 can drive the optical fiber MEMS sensor 121 to move to the first preset position or the second preset position under the control of the main control unit 140;

[0050] The optical fiber MEMS sensor 121 is configured to receive a first optical signal and obtain a first micro-vibration signal according to the first optical signal when located at a first preset position, and to receive a second optical signal and obtain a second micro-vibration signal according to the second optical signal when located at a second preset position.

[0051] Specifically, the micro-vibration signal acquisition unit 120 is arranged on the device under test, and a coupling material 123 is arranged between the micro-vibration signal acquisition unit 120 and the device under test. The coupling material (specifically, it can be a coupling agent) can better transmit the vibration signal to the optical fiber MEMS sensor, that is, by adding the coupling material, the transmission of the vibration signal can be promoted.

[0052] When the optical fiber MEMS sensor 121 is located at the first preset position A, that is, at the detection position, it can receive the first optical signal emitted by the light source unit at this location, and obtain a first micro-vibration signal based on the first optical signal, and the first micro-vibration signal includes an interference signal and a normal working signal of the device under test; when the optical fiber MEMS sensor 121 is located at the second preset position B, that is, at the idle position, it can receive the second optical signal emitted by the light source unit at this location, and obtain a second micro-vibration signal based on the second optical signal, and the second micro-vibration signal includes an interference signal.

[0053] In an embodiment of the present utility model, the motion mechanism 122 includes a bearing part 122a and a moving part 122b, the bearing part 122a is connected to the moving part 122b, the bearing part 122a is used to install the optical fiber MEMS sensor 121, and the moving part 122b is used to drive the bearing part 122a to move under the control of the main control unit 140.

[0054] Preferably, the moving portion 122b includes a gear lifter.

[0055] In the embodiment of the present utility model, the light source unit 110 includes: a light source driving module 111 and a laser constant module 112, and the light source driving module 111 is electrically connected to the laser constant module 112;

[0056] The light source driving module 111 is used to generate a constant light source driving signal;

[0057] The laser constant module 112 is configured to emit a constant laser signal according to the constant light source driving signal.

[0058] Specifically, if Figure 3 As shown, the light source driving module 111 includes an operational amplifier U9A and a switch tube. The output end of the operational amplifier U9A is connected to the driving end of the switch tube. The operational amplifier U9A can generate a switch tube driving signal according to the output signal of the main control unit, and the switch tube can generate a constant light source driving signal according to the switch tube driving signal.

[0059] The laser constant module 112 includes a laser.

[0060] More specifically, Figure 3 As shown, the light source driver module 111 primarily consists of an operational amplifier and a MOS transistor. The voltage Vref at the point between resistors R56 and R58 is the current Iout flowing through P1, where Iout = Vref / Rs. P1 is the laser interface, and C4 and C55 form the filter and coupling capacitors. The output voltage of the operational amplifier is divided down by R57 and R59 and fed to the MOS transistor, which controls the current flow in the circuit. R61 is the feedback resistor. The operational amplifier's power supply pins are connected to C53 and C56 to form the filter and coupling capacitors, ensuring stable operation of the operational amplifier. The operational amplifier provides a high-precision constant current, so the current sensing resistor R62 also requires a high-precision resistor.

[0061] In the embodiment of the present utility model, Figure 4a As shown, the micro-vibration signal processing unit 130 includes: an acquisition and driving module 131 and an acquisition and analysis module 132, and the acquisition and driving module 131 and the acquisition and analysis module 132 are electrically connected;

[0062] The acquisition driving module 131 is used to generate an acquisition driving signal according to the control of the main control unit;

[0063] The acquisition and analysis module 132 is configured to perform micro-vibration signal conversion processing according to the acquired driving signal and perform signal analysis processing according to the micro-vibration signal conversion result to obtain a first processed signal and a second processed signal.

[0064] More specifically, the acquisition and analysis module 132 includes a collector 132a and an analysis module 132b, and the collector 132a is electrically connected to the analysis module 132b;

[0065] The collector 132a is used to perform photoelectric conversion processing on the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first micro-vibration electrical signal and a second micro-vibration electrical signal;

[0066] The analysis module 132b is configured to amplify and filter the first micro-vibration electrical signal and the second micro-vibration electrical signal to obtain a first processed signal and a second processed signal.

[0067] Preferably, the collector 132a is implemented as a detector. In the embodiment of the present invention, the detector can perform photoelectric conversion processing on the micro-vibration signal to obtain a micro-vibration electrical signal. The analysis module 132b can specifically amplify and filter the micro-vibration electrical signal to obtain a processed signal.

[0068] like Figure 4b As shown, the circuit function of the acquisition and analysis module 132 is signal conversion and amplification, wherein the detector signal is converted to the IV conversion circuit, which converts the current signal into a voltage signal. The operational amplifier U1A, the current limiting resistor R3, the coupling capacitor C6, the resistor R2 and the capacitor C1 mainly convert the current signal into a voltage signal.

[0069] The converted voltage signal passes through coupling capacitor C8 and reaches the voltage amplifier circuit. Operational amplifier U1B, resistors R8 and R9, and C12 form a voltage divider circuit. RX1 and R5 form the amplification factor.

[0070] The amplified voltage signal reaches the high-pass filter circuit composed of U2. Capacitors C9, C11, C2, and R7 and the operational amplifier form the first-stage filter circuit. R1, R10, C5 and C10 form the second-stage filter circuit. C7 is the coupling capacitor at the power input.

[0071] The filtered signal enters U3's two operational amplifiers through C19 and C22, respectively. C19, R17, R15, and C18 form the amplifier-matching circuit, while C15 and R13 provide the output after high-pass filtering. C22, R16, R21, and C20 form the amplifier-matching circuit, while C17 and R55 provide the output after high-pass filtering. These two different output circuits provide signals of varying magnitudes.

[0072] In the embodiment of the present utility model, the acquisition drive module 131 is specifically a drive circuit for generating ultra-low noise and achieving a high power supply rejection ratio, and its noise spectrum density can be specifically 32uVrms. The drive circuit structure specifically adopted by the acquisition drive module 131 is as follows Figure 4c As shown. Figure 4c In the example, U14 can be a TPS794, and D13 and D14 are voltage-stabilizing diodes to prevent voltage anomalies from damaging the next-stage circuit. Capacitors C102 and C103 are combined output filter capacitors. R60 is a pull-down resistor that turns off the power supply by default; when turned on, the resistor labeled P_EN must be pulled up to 3V. Capacitors C100 and C98 are combined input filter capacitors. C97, C68, L4, and L5 form a π-type filter circuit to filter out ripples in the input power supply.

[0073] In the embodiment of the present utility model, Figure 5 As shown, the micro-vibration signal detection device based on optical fiber MEMS also includes: a coupler 150, which is respectively connected to the light source unit 110, the micro-vibration signal acquisition unit 120 and the micro-vibration signal processing unit 130, and the coupler 150 is used to couple the optical signal into the micro-vibration signal acquisition unit 120, and to couple the micro-vibration signal in the micro-vibration signal acquisition unit 120 into the micro-vibration signal processing unit 130.

[0074] In the embodiment of the present invention, the main control unit 140 includes a DSP processor.

[0075] Specifically, in the embodiment of the present utility model, Figure 5 As shown, it also includes a power supply unit 160, which is used to connect the light source unit 110, the micro-vibration signal processing unit 130 and the main control unit 140 respectively, and is used to supply power to the light source unit 110, the micro-vibration signal processing unit 130 and the main control unit 140 respectively.

[0076] In the embodiment of the present invention, the power supply unit 160 may specifically be a power converter.

[0077] The light source unit 110 emits a stable laser light driven by a stable light source, and the laser light reaches the fiber optic MEMS micro-vibration probe through the coupler 150. After the fiber optic MEMS micro-vibration probe collects the signal, it is transmitted to the micro-vibration signal processing unit 130 through the coupler 150. The micro-vibration signal processing unit 130 sends the processed signal to the main control unit 140. The main control unit 140 performs signal analysis through the DSP processor to obtain the normal working signal of the device under test. In the embodiment of the present invention, the main control unit 140 can specifically monitor the stability of the power supply to ensure that the entire system is not affected by power ripple, harmonics, flicker, and other power quality. By adjusting the parameters of the light source unit 110, the light source unit can be adjusted to make the laser light emitted by the light source unit stable and constant. In addition, the time domain signal is converted into a frequency domain signal through Fourier transform, and the frequency domain characteristics of the signal are analyzed. The fiber optic MEMS micro-vibration probe can also produce two position changes by controlling the motion mechanism in the micro-vibration signal acquisition unit 120.

[0078] In summary, the fiber-optic MEMS-based micro-vibration signal detection device provided by the present invention emits a stable laser beam from a light source unit, which passes through a coupler to a fiber-optic MEMS micro-vibration probe. After collecting the micro-vibration signal, the laser beam returns to the coupler and reaches the acquisition and analysis unit. The detector in the acquisition and analysis unit converts the photocurrent into a voltage signal, which is then further processed by the main control unit to obtain a more accurate signal indicating the normal operation of the device under test. Therefore, the fiber-optic MEMS-based micro-vibration signal detection device of the present invention can obtain more accurate vibration signals, and its structure is simple and easy to implement.

[0079] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A micro-vibration signal detection device based on optical fiber MEMS, characterized in that: include: A light source unit, a micro-vibration signal acquisition unit, a micro-vibration signal processing unit and a main control unit, wherein the light source unit, the micro-vibration signal acquisition unit and the micro-vibration signal processing unit are all communicatively connected to the main control unit; The light source unit is used to emit a constant light signal; The micro-vibration signal acquisition unit is used to receive the optical signal and obtain a first micro-vibration signal located at a first preset position and a second micro-vibration signal located at a second preset position, wherein the first micro-vibration signal includes a normal operating signal of the device under test and an interference signal, and the second micro-vibration signal includes an interference signal; The micro-vibration signal processing unit is used to amplify and filter the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first processed signal and a second processed signal; The main control unit is used to control the operation of the micro-vibration signal acquisition unit and to analyze and process the first processed signal and the second processed signal to obtain a normal working signal of the device under test.

2. The micro-vibration signal detection device based on optical fiber MEMS according to claim 1, characterized in that: The micro-vibration signal acquisition unit includes: an optical fiber MEMS sensor and a motion mechanism, wherein the optical fiber MEMS sensor is connected to the motion mechanism; The motion mechanism can drive the optical fiber MEMS sensor to move to a first preset position or a second preset position under the control of the main control unit; The optical fiber MEMS sensor is used to receive a first optical signal when located at a first preset position and obtain a first micro-vibration signal based on the first optical signal, and is used to receive a second optical signal when located at a second preset position and obtain a second micro-vibration signal based on the second optical signal.

3. The micro-vibration signal detection device based on optical fiber MEMS according to claim 2, characterized in that: The motion mechanism includes a bearing part and a motion part. The bearing part is connected to the motion part. The bearing part is used to install the optical fiber MEMS sensor. The motion part is used to drive the bearing part to move under the control of the main control unit.

4. The micro-vibration signal detection device based on optical fiber MEMS according to claim 3, characterized in that: The moving part includes a gear lifter.

5. The micro-vibration signal detection device based on optical fiber MEMS according to any one of claims 1 to 4, characterized in that: The light source unit includes: a light source driving module and a laser constant module, wherein the light source driving module is electrically connected to the laser constant module; The light source driving module is used to generate a constant light source driving signal; The laser constant module is used to emit a constant laser signal according to the constant light source driving signal.

6. The micro-vibration signal detection device based on optical fiber MEMS according to claim 5, characterized in that: The light source driving module includes an operational amplifier and a switch tube, wherein the output end of the operational amplifier is connected to the driving end of the switch tube, the operational amplifier can generate a switch tube driving signal according to the output signal of the main control unit, and the switch tube can generate a constant light source driving signal according to the switch tube driving signal; The laser constant module includes a laser.

7. The micro-vibration signal detection device based on optical fiber MEMS according to any one of claims 1 to 4, characterized in that: The micro-vibration signal processing unit includes: an acquisition and driving module and an acquisition and analysis module, wherein the acquisition and driving module and the acquisition and analysis module are electrically connected; The acquisition drive module is used to generate an acquisition drive signal according to the control of the main control unit; The acquisition and analysis module is used to perform micro-vibration signal conversion processing according to the acquisition drive signal and perform signal analysis processing according to the micro-vibration signal conversion result to obtain a first processed signal and a second processed signal.

8. The optical fiber MEMS-based micro-vibration signal detection device according to claim 7, characterized in that: The acquisition and analysis module includes a collector and an analysis module, wherein the collector is electrically connected to the analysis module. The collector is used to perform photoelectric conversion processing on the first micro-vibration signal and the second micro-vibration signal respectively to obtain a first micro-vibration electrical signal and a second micro-vibration electrical signal; The analysis module is used to perform amplification and filtering processing on the first micro-vibration electrical signal and the second micro-vibration electrical signal respectively to obtain a first processed signal and a second processed signal.

9. The micro-vibration signal detection device based on optical fiber MEMS according to any one of claims 1 to 4, characterized in that: Also includes: A coupler is connected to the light source unit, the micro-vibration signal acquisition unit and the micro-vibration signal processing unit respectively, and is used to couple the light signal into the micro-vibration signal acquisition unit, and to couple the micro-vibration signal in the micro-vibration signal acquisition unit into the micro-vibration signal processing unit.

10. The micro-vibration signal detection device based on optical fiber MEMS according to any one of claims 1 to 4, characterized in that: The main control unit includes a DSP processor.

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