Probe structure cantilever type tension sensor

Abstract

A cantilever type tension sensor with a probe structure relates to the technical field of force measuring structures and comprises a knife handle dynamometer, a knife head is detachably fixed at the head end of the knife handle dynamometer, a sensor signal leading-out wire is detachably fixed at the tail end of the knife handle dynamometer, and an elastomer beam is arranged on the knife handle dynamometer. And a metal resistance strain gauge connected with a sensor signal outgoing line is arranged on the elastomer beam. According to the utility model, the problem that the force value in the process cannot be detected and controlled in real time because the force value is controlled by the current of the motor or experience or displacement in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of force measurement structures, in particular to a cantilever tension sensor with a probe structure. Background Art

[0002] In the semiconductor industry, when grinding and cutting films, the force control of the grinding head, cutting head, or probe determines the quality of the manufactured product. Therefore, in actual work, the force values ​​of these three aspects are tested in real time to ensure the accuracy of the manufactured products.

[0003] The prior art discloses a patent with the announcement number CN207515943U. This solution includes a fixed head and a cantilever shaft connected to the fixed head. The working parts at both ends of the cantilever shaft include mounting seats fixedly mounted on the cantilever shaft. The mounting seats are connected to a movable sleeve via a bearing plate. A gap is formed between the movable sleeve and the cantilever shaft. A ceramic spring is provided in the gap. One end of the ceramic spring is fixed to the cantilever shaft, while the other end is suspended and abuts against the inner side of the movable sleeve. A bearing is installed on the movable sleeve. The bearings of the two working parts are matched with a housing, and the bearings are located at both ends of the housing. During operation, a strip of paper or other material passes through the housing to form a certain wrap angle. The resultant force of the strip tension is perpendicular to the ceramic spring, that is, downward, causing the bearing to move downward. The ceramic spring deforms and changes the electrical parameters to detect the tension. The position of the bearing in the housing can detect the tension on both sides of the strip separately to adjust the parallelism of the rewinding and unwinding shafts to prevent excessive tension difference on both sides.

[0004] As the existing devices are used, the shortcomings of the existing technology are gradually exposed, which are mainly manifested in the following aspects:

[0005] The existing methods all rely on the motor's current, experience, or displacement for control, and are unable to detect and control the force value in the process in real time.

[0006] In summary, the existing technology has obvious inconveniences and defects in actual use, so it is necessary to improve it. Utility Model Content

[0007] In response to the defects in the existing technology, the utility model provides a probe structure cantilever tension sensor to solve the problem that traditional technology relies on motor current, experience or displacement to control and cannot detect and control the force value in the process in real time.

[0008] To achieve the above objectives, the present invention provides the following technical solutions:

[0009] The probe structure cantilever tension sensor includes a tool handle dynamometer, a tool head is detachably fixed to the front end of the tool handle dynamometer, a sensor signal lead wire is detachably fixed to the rear end of the tool handle dynamometer, an elastic beam is provided on the tool handle dynamometer, and a metal resistance strain gauge connected to the sensor signal lead wire is provided on the elastic beam.

[0010] As an optimized solution, the elastic beam is a double-hole parallel beam structure.

[0011] As an optimized solution, the tool handle dynamometer is provided with a shell covering the elastomeric beam.

[0012] As an optimized solution, a lead channel connected to the elastic beam is provided at the end of the tool handle dynamometer, and the sensor signal lead wire is inserted into the lead channel.

[0013] As an optimized solution, an end pin hole perpendicular to the lead channel is provided on the end side wall of the tool handle dynamometer, a screw is threadedly connected to the end pin hole, and the end of the screw is against the outer wall of the sensor signal lead wire.

[0014] As an optimized solution, the head end of the tool handle dynamometer is provided with an insertion hole, and the tool head is inserted into the insertion hole.

[0015] As an optimized solution, a head screw hole perpendicular to the insertion hole is opened on the head side wall of the tool handle dynamometer, a screw is connected to the inner thread of the head screw hole, and the end of the screw is against the outer side wall of the tool head.

[0016] As an optimized solution, a force-bearing plane parallel to the axis of the insertion hole is provided on the side wall of the head end of the tool handle dynamometer.

[0017] As an optimized solution, the tool handle dynamometer is provided with a first cylindrical section and a second cylindrical section at both ends of the elastomeric beam, the outer shell is mounted on the first cylindrical section and the second cylindrical section, and a deformation gap is provided between the outer shell and the second cylindrical section.

[0018] As an optimized solution, the tool handle dynamometer is further provided with a transition cylindrical stage connected to the first cylindrical section, and one end of the housing is fixedly connected to the transition cylindrical stage.

[0019] As an optimized solution, the tool handle dynamometer is provided with a tail reinforcement cylindrical stage at the position on the other side of the transition cylindrical stage.

[0020] As an optimized solution, the length of the shell is greater than the sum of the lengths of the first cylindrical section, the second cylindrical section and the elastomeric beam.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] When the cutter head is subjected to force, the force felt perpendicular to the force plane acts on the elastic beam through the second cylindrical segment. Under the action of the force, the elastic beam deforms according to the structure of the double-hole parallel beam, forming strain, and causing the metal resistance strain gauge attached to it to change, thereby generating an electrical signal that changes corresponding to the force value, realizing real-time detection and control of the force value in the process. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly describes the drawings required for the specific embodiments or the description of the prior art. Similar elements or parts are generally identified by similar reference numerals throughout the drawings. Elements or parts in the drawings are not necessarily drawn to scale.

[0024] Figure 1 It is a structural diagram of the utility model;

[0025] Figure 2 This is a schematic structural diagram of the lead channel of the utility model;

[0026] Figure 3 It is a structural schematic diagram of the structure of the utility model in the assembled state.

[0027] In the figure: 1-sensor signal lead wire; 2-end pin hole; 3-tail reinforcement cylindrical stage; 4-transition cylindrical stage; 5-first cylindrical section; 6-second cylindrical section; 7-elastic beam; 8-force plane; 9-insertion hole; 10-head screw hole; 11-housing; 12-cutter head; 13-lead channel. DETAILED DESCRIPTION

[0028] The following embodiments of the technical solution of the present invention are described in detail with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention and are therefore only examples and are not intended to limit the scope of protection of the present invention.

[0029] like Figures 1 to 3 As shown, the probe structure cantilever tension sensor includes a tool handle dynamometer, the front end of the tool handle dynamometer is detachably fixed with a tool head 12, the rear end of the tool handle dynamometer is detachably fixed with a sensor signal lead wire 1, an elastic beam 7 is provided on the tool handle dynamometer, and a metal resistance strain gauge connected to the sensor signal lead wire 1 is provided on the elastic beam 7.

[0030] The elastic beam 7 is a double-hole parallel beam structure.

[0031] The tool handle dynamometer is provided with a housing 11 covering the elastic beam 7 .

[0032] A lead channel 13 connected to the elastic beam 7 is provided at the end of the tool handle dynamometer. The sensor signal lead wire 1 is inserted into the lead channel 13 and leads to the front elastic beam 7 for the installation of the lead wire.

[0033] An end pin hole 2 perpendicular to the lead channel 13 is provided on the end side wall of the tool handle dynamometer. A screw is connected to the inner thread of the end pin hole 2, and the end of the screw is against the outer wall of the sensor signal lead wire 1. The plug-in structure is convenient for installation, and the screws are used for easy positioning and fixing.

[0034] An insertion hole 9 is provided at the head end of the tool handle dynamometer, and a tool head 12 is inserted into the insertion hole 9 .

[0035] A head screw hole 10 perpendicular to the insertion hole 9 is provided on the head end side wall of the tool handle dynamometer. A screw is connected to the inner thread of the head screw hole 10 , and the end of the screw abuts against the outer side wall of the tool head 12 .

[0036] A force plane 8 parallel to the axis of the insertion hole 9 is provided on the side wall of the head end of the tool handle dynamometer.

[0037] The tool handle dynamometer is located at both ends of the elastomeric beam 7 and is respectively provided with a first cylindrical section 5 and a second cylindrical section 6. The outer shell 11 is mounted on the first cylindrical section 5 and the second cylindrical section 6, and a deformation gap is provided between the outer shell 11 and the second cylindrical section 6.

[0038] The tool handle dynamometer is also provided with a transition cylindrical stage 4 connected to the first cylindrical section 5. One end of the outer shell 11 is fixedly connected to the transition cylindrical stage 4. The outer shell 11 is welded to the transition cylindrical stage 4. At the same time, the transition cylindrical stage 4 also serves as the base end of the elastomer beam 7.

[0039] The tool handle dynamometer is located at the other side of the transition cylindrical stage 4 and a tail reinforcement cylindrical stage 3 is provided for strengthening and transitioning the tail structure.

[0040] The length of the housing 11 is greater than the sum of the lengths of the first cylindrical section 5 , the second cylindrical section 6 and the elastomeric beam 7 .

[0041] The cutter head 12 may also be replaced by a probe or a grinding head.

[0042] The working principle of this device is:

[0043] When the cutter head 12 is subjected to force, the force felt in the direction perpendicular to the force plane 8 acts on the elastomer beam 7 through the second cylindrical section 6. Under the action of the force, the elastomer beam 7 deforms according to the structure of the double-hole parallel beam, forming strain, and causing the metal resistance strain gauge attached to it to change, thereby generating an electrical signal that changes corresponding to the force value, realizing real-time detection and control of the force value in the process.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and description of the present invention.

Claims

1. Probe structure cantilever tension sensor, characterized by: The invention comprises a tool handle dynamometer, wherein a tool head (12) is detachably fixed to the front end of the tool handle dynamometer, a sensor signal lead wire (1) is detachably fixed to the rear end of the tool handle dynamometer, an elastic beam (7) is provided on the tool handle dynamometer, and a metal resistance strain gauge connected to the sensor signal lead wire (1) is provided on the elastic beam (7).

2. The probe structure cantilever tension sensor according to claim 1, characterized in that: The elastic beam (7) is a double-hole parallel beam structure.

3. The probe structure cantilever tension sensor according to claim 1, characterized in that: The tool handle dynamometer is provided with a housing (11) covering the elastic beam (7).

4. The probe structure cantilever tension sensor according to claim 1, characterized in that: The end of the tool handle dynamometer is provided with a lead channel (13) connected to the elastic beam (7), the sensor signal lead wire (1) is inserted into the lead channel (13), and the end side wall of the tool handle dynamometer is provided with an end pin hole (2) perpendicular to the lead channel (13), the end pin hole (2) is threadedly connected with a screw, and the end of the screw is against the outer wall of the sensor signal lead wire (1).

5. The probe structure cantilever tension sensor according to claim 1, characterized in that: The head end of the tool handle dynamometer is provided with an insertion hole (9), and the tool head (12) is inserted into the insertion hole (9). The head end side wall of the tool handle dynamometer is provided with a head end screw hole (10) perpendicular to the insertion hole (9). The head end screw hole (10) is internally threaded with a screw, and the end of the screw is against the outer wall of the tool head (12).

6. The probe structure cantilever tension sensor according to claim 5, characterized in that: A force-bearing plane (8) parallel to the axis of the insertion hole (9) is provided on the side wall of the head end of the tool handle dynamometer.

7. The probe structure cantilever tension sensor according to claim 3, characterized in that: The tool handle dynamometer is provided with a first cylindrical section (5) and a second cylindrical section (6) at the two ends of the elastic beam (7), the housing (11) is fitted on the first cylindrical section (5) and the second cylindrical section (6), and a deformation gap is provided between the housing (11) and the second cylindrical section (6).

8. The probe structure cantilever tension sensor according to claim 7, characterized in that: The tool handle dynamometer is further provided with a transition cylindrical stage (4) connected to the first cylindrical section (5), and one end of the housing (11) is fixedly connected to the transition cylindrical stage (4).

9. The probe structure cantilever tension sensor according to claim 8, characterized in that: The tool handle dynamometer is located at the other side of the transition cylindrical stage (4) and is provided with a tail reinforcement cylindrical stage (3).

10. The probe structure cantilever tension sensor according to claim 7, characterized in that: The length of the shell (11) is greater than the sum of the lengths of the first cylindrical section (5), the second cylindrical section (6) and the elastic beam (7).

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