Purification and recovery device for chlorosilane waste liquid

Abstract

The utility model relates to the technical field of chlorosilane recovery, in particular to a chlorosilane waste liquid purification and recovery device which comprises an evaporation kettle, a supporting frame is fixedly connected to the bottom of the evaporation kettle, a sealing cover is fixedly connected to the left side of the evaporation kettle, a connecting block is fixedly connected to the top of the evaporation kettle, and a waste liquid tank is fixedly connected to the top of the connecting block. The bottom of the waste liquid tank is fixedly communicated with a feeding pipe, the bottom of the feeding pipe is communicated with the evaporation kettle, the feeding pipe is provided with a pipeline valve, the right side of the evaporation kettle is provided with a mounting frame, the inner wall of the mounting frame is fixedly connected with a liquidation tank, and the evaporation kettle is provided with a recovery assembly for purifying and recovering chlorosilane waste liquid. Chlorosilane in the evaporation kettle can be heated to boil and evaporate, the evaporated gaseous chlorosilane preheats chlorosilane waste liquid in the waste liquid tank, the energy utilization efficiency can be improved, the energy consumption can be reduced, and an anti-blocking assembly for reducing pipeline blockage is installed on the evaporation kettle.

Description

Technical Field

[0001] The utility model relates to the technical field of chlorosilane recovery, in particular to a purification and recovery device for chlorosilane waste liquid. Background Art

[0002] The silicon tetrachloride cold hydrogenation system, trichlorosilane synthesis system or distillation purification system in the polysilicon preparation process usually discharges a certain amount of chlorosilane waste liquid. The residual liquid contains a large amount of chlorosilane. If the chlorosilane waste liquid is directly discharged, it will not only cause the loss of chlorosilane, but also pollute the environment. Therefore, it is necessary to purify and recover the chlorosilane in the chlorosilane waste liquid generated in the polysilicon production process.

[0003] The main methods for recovering chlorosilane waste liquid at home and abroad include hydrolysis, filtration, incineration and evaporation. Among them, the evaporation method is to pass the chlorosilane waste liquid into an evaporator, evaporate the chlorosilane under external heat, and recover it after condensation. This method recovers some chlorosilane to a certain extent, but the disadvantage is that the chlorosilane waste liquid contains silicon powder and metal chloride, which can easily clog equipment and pipelines. In addition, the heat exchange effect of the evaporator is poor and the energy consumption is high. In order to improve the heat exchange effect of the evaporator, reduce energy consumption, and reduce the blockage of equipment pipelines, we propose a purification and recovery device for chlorosilane waste liquid. Utility Model Content

[0004] In response to the deficiencies in the prior art, the utility model provides a purification and recovery device for chlorosilane waste liquid, which can improve the heat exchange effect of the evaporator, reduce energy consumption, and reduce equipment pipeline blockage.

[0005] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] A purification and recovery device for chlorosilane waste liquid comprises an evaporating kettle, wherein a support frame is fixedly connected to the bottom of the evaporating kettle, a sealing cover is fixedly connected to the left side of the evaporating kettle, a connecting block is fixedly connected to the top of the evaporating kettle, a waste liquid tank is fixedly connected to the top of the connecting block, a feed pipe is fixedly connected to the bottom of the waste liquid tank, the bottom of the feed pipe is connected to the evaporating kettle, a pipeline valve is provided on the feed pipe, a mounting frame is provided on the right side of the evaporating kettle, a liquefaction tank is fixedly connected to the inner wall of the mounting frame, a recovery component for purifying and recovering chlorosilane waste liquid is installed on the evaporating kettle, an anti-blocking component for reducing pipeline blockage is installed on the evaporating kettle, and the recovery component comprises an electric heater, which is fixedly mounted on the bottom of the evaporating kettle.

[0007] Preferably, the recovery component further comprises a heat exchange pipe, which is fixedly connected to the top of the evaporator and passes through the waste liquid tank. The right end of the heat exchange pipe is connected to a condenser, which passes into the liquefaction tank.

[0008] Preferably, the anti-blocking component includes an air pump, which is fixedly installed on the top of the bottom plate of the mounting frame. The air suction port of the air pump is fixedly connected to an air suction pipe, and the air suction pipe is passed through the liquefied tank. The exhaust port of the air pump is fixedly connected to a drive pipe, and the end of the drive pipe away from the air pump is connected to the sealing cover. The top of the sealing cover is fixedly connected to a connecting pipe, and the end of the connecting pipe away from the sealing cover is connected to the waste liquid tank.

[0009] Preferably, the inner wall of the evaporator is rotatably connected to a rotating rod, a plurality of stirring paddles are fixedly sleeved on the outside of the rotating rod, the left end of the rotating rod is rotatably passed through the evaporator, the left end of the rotating rod is fixedly connected to a rotating disk, and a plurality of fan blades are fixedly connected to the outside of the rotating disk.

[0010] Preferably, a plurality of groups of refrigeration fins are fixedly mounted on the inner wall of the liquefaction tank.

[0011] Preferably, the top of the waste liquid tank is fixedly connected to a feed port, and an inlet valve is provided on the feed port.

[0012] Beneficial effects

[0013] The utility model provides a purification and recovery device for chlorosilane waste liquid. Compared with the existing technology, it has the following beneficial effects:

[0014] The device for purifying and recovering chlorosilane waste liquid is provided with a recovery component, which can heat the chlorosilane in the evaporator to make it boil and evaporate. The evaporated gaseous chlorosilane preheats the chlorosilane waste liquid in the waste liquid tank, thereby improving energy utilization efficiency and reducing energy consumption. The chlorosilane liquid after heat dissipation is liquefied and stored in the liquefaction tank. The anti-blocking component creates an air pressure difference by reducing the air pressure in the liquefaction tank and increasing the air pressure in the waste liquid tank, thereby reducing the probability of blockage of connecting pipes, heat exchange pipes and condensing pipes and improving the recovery efficiency of the chlorosilane waste liquid. During operation, the anti-blocking component also drives a stirring paddle to rotate to stir the chlorosilane waste liquid in the evaporator, so that the waste liquid is heated more evenly, thereby reducing energy consumption to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the rear view structure of the main body of the utility model;

[0017] Figure 3 This is a schematic diagram of the cross-sectional structure of the main body of the utility model;

[0018] Figure 4 It is a schematic diagram of the internal structure of the main body of the utility model.

[0019] In the figure: 1. Evaporator; 2. Support frame; 3. Mounting frame; 4. Vacuum pump; 5. Liquefaction tank; 6. Condenser; 7. Rotating plate; 8. Inlet valve; 9. Feed port; 10. Waste liquid tank; 11. Connecting pipe; 12. Heat exchange pipe; 13. Sealing cover; 14. Drive pipe; 15. Pipe valve; 16. Electric heater; 17. Feed pipe; 18. Connecting block; 19. Fan blade; 20. Vacuum pipe; 21. Refrigeration plate; 22. Stirring paddle; 23. Rotating rod. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] See also Figure 1-4 The utility model provides a technical solution: a purification and recovery device for chlorosilane waste liquid, comprising an evaporating kettle 1, a supporting frame 2 fixedly connected to the bottom of the evaporating kettle 1, a sealing cover 13 fixedly connected to the left side of the evaporating kettle 1, a connecting block 18 fixedly connected to the top of the evaporating kettle 1, a waste liquid tank 10 fixedly connected to the top of the connecting block 18, a feed pipe 17 fixedly connected to the bottom of the waste liquid tank 10, the bottom of the feed pipe 17 is connected to the evaporating kettle 1, a pipeline valve 15 is provided on the feed pipe 17, a mounting frame 3 is provided on the right side of the evaporating kettle 1, a liquefaction tank 5 is fixedly connected to the inner wall of the mounting frame 3, a recovery component for purifying and recovering chlorosilane waste liquid is installed on the evaporating kettle 1, an anti-blocking component for reducing pipeline blockage is installed on the evaporating kettle 1, and the recovery component includes an electric heater 16, which is fixedly installed at the bottom of the evaporating kettle 1.

[0022] During use, the chlorosilane waste liquid is stored in the waste liquid tank 10. The pipeline valve 15 is opened to allow the waste liquid in the waste liquid tank 10 to flow into the evaporator 1 through the feed pipe 17. The chlorosilane waste liquid in the evaporator 1 is heated to a certain temperature by the electric heater 16 to boil and evaporate the chlorosilane. The gaseous chlorosilane is then liquefied and recovered by the recovery component. At the same time, the anti-blocking component is kept in operation, which can reduce pipeline blockage and speed up the recovery of chlorosilane.

[0023] The recovery component also includes a heat exchange pipe 12, which is fixedly connected to the top of the evaporator 1 and passes through the waste liquid tank 10. The right end of the heat exchange pipe 12 is connected to the condenser 6, which passes into the liquefaction tank 5.

[0024] The gaseous chlorosilane evaporated in the evaporator 1 flows into the liquefaction tank 5 through the heat exchange tube 12 and the condenser 6 in sequence. Since the heat exchange tube 12 passes through the waste liquid tank 10, a portion of the heat of the gaseous chlorosilane is transferred to the chlorosilane waste liquid in the waste liquid tank 10 when passing through the heat exchange tube 12, thereby preheating the chlorosilane waste liquid and improving energy utilization efficiency. After the heat is dissipated, the gaseous chlorosilane is liquefied and stored in the liquefaction tank 5.

[0025] The anti-blocking component includes an air pump 4, which is fixedly installed on the top of the bottom plate of the mounting frame 3. The air suction port of the air pump 4 is fixedly connected to the air suction pipe 20, and the air suction pipe 20 is passed through the liquefied tank 5. The exhaust port of the air pump 4 is fixedly connected to the drive pipe 14, and the end of the drive pipe 14 away from the air pump 4 is connected to the sealing cover 13. The top of the sealing cover 13 is fixedly connected to a connecting pipe 11, and the end of the connecting pipe 11 away from the sealing cover 13 is connected to the waste liquid tank 10.

[0026] When the vacuum pump 4 is started, the vacuum pipe 20 draws air, causing the liquefaction tank 5 to be in a negative pressure state. Due to the boiling and evaporation of chlorosilane in the evaporator 1, the gaseous chlorosilane in the evaporator 1 is under a high pressure, which prompts the gaseous chlorosilane in the evaporator 1 to flow into the liquefaction tank 5. The gas discharged by the vacuum pump 4 passes through the drive pipe 14, the sealing cover 13 and the connecting pipe 11 in sequence and enters the waste liquid tank 10, increasing the pressure in the waste liquid tank 10. After the recovery of the chlorosilane in the evaporator 1 is completed, the pipeline valve 15 is opened, and the chlorosilane waste liquid in the waste liquid tank 10 flows rapidly into the evaporator 1 under the action of the gas pressure, which can reduce the blockage of the feed pipe 17.

[0027] The inner wall of the evaporator 1 is rotatably connected to a rotating rod 23, and a plurality of stirring paddles 22 are fixedly sleeved on the outside of the rotating rod 23. The left end of the rotating rod 23 is rotatably passed through the evaporator 1. The left end of the rotating rod 23 is fixedly connected to a rotating disk 7, and a plurality of fan blades 19 are fixedly connected to the outside of the rotating disk 7.

[0028] When the gas is discharged from the driving pipe 14, it will impact the fan blades 19 to drive the rotating disk 7 to rotate, drive the rotating rod 23 to rotate, and rotate the stirring paddle 22, thereby stirring the chlorosilane waste liquid in the evaporator 1, so that the chlorosilane waste liquid is heated more evenly.

[0029] Several groups of refrigeration fins 21 are fixedly mounted on the inner wall of the liquefied tank 5 .

[0030] The temperature in the liquefaction tank 5 can be lowered by the refrigeration fins 21, so that the gaseous chlorosilane is liquefied into liquid chlorosilane and maintained in the liquefied state.

[0031] The top of the waste liquid tank 10 is fixedly connected with a feed port 9 , and an inlet valve 8 is provided on the feed port 9 . Chlorosilane waste liquid can be added to the waste liquid tank 10 by opening the inlet valve 8 .

[0032] Working principle: When in use, the chlorosilane waste liquid in the evaporator 1 is heated to a certain temperature by the electric heater 16, so that the chlorosilane boils and evaporates, and the vacuum pump 4 is started, and the vacuum pipe 20 is evacuated, so that the liquefaction tank 5 is in a negative pressure state. Due to the boiling and evaporation pressure of chlorosilane in the evaporator 1, the gaseous chlorosilane in the evaporator 1 is large, which prompts the gaseous chlorosilane in the evaporator 1 to flow into the liquefaction tank 5 through the heat exchange pipe 12 and the condenser 6 in turn. Since the heat exchange pipe 12 passes through the waste liquid tank 10, part of the heat of the gaseous chlorosilane is transferred to the chlorosilane waste liquid in the waste liquid tank 10 when passing through the heat exchange pipe 12, so as to preheat the chlorosilane waste liquid and improve the energy utilization efficiency. The gaseous chlorosilane after heat dissipation is liquefied and stored in the liquefaction tank 5. Several groups of refrigeration plates are fixedly installed on the inner wall of the liquefaction tank 5. 21. The temperature in the liquefaction tank 5 can be lowered by the refrigeration plate 21 to ensure that the chlorosilane remains in a liquefied state. The gas discharged by the vacuum pump 4 passes through the drive pipe 14, the sealing cover 13 and the connecting pipe 11 in sequence and enters the waste liquid tank 10, so that the air pressure in the waste liquid tank 10 increases. When the chlorosilane in the evaporator 1 is recovered, the pipeline valve 15 is opened, and the chlorosilane waste liquid in the waste liquid tank 10 flows rapidly into the evaporator 1 under the action of air pressure, which can reduce the blockage of the feed pipe 17. When the gas is discharged from the drive pipe 14, it will impact the fan blade 19 to drive the rotating disk 7 to rotate, drive the rotating rod 23 to rotate, and rotate the stirring paddle 22, thereby stirring the chlorosilane waste liquid in the evaporator 1, making the chlorosilane waste liquid heated more evenly, improving energy utilization efficiency to a certain extent, and reducing energy consumption.

[0033] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0034] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A purification and recovery device for chlorosilane waste liquid, comprising an evaporating kettle (1), characterized in that: The bottom of the evaporating kettle (1) is fixedly connected to a support frame (2), the left side of the evaporating kettle (1) is fixedly connected to a sealing cover (13), the top of the evaporating kettle (1) is fixedly connected to a connecting block (18), the top of the connecting block (18) is fixedly connected to a waste liquid tank (10), the bottom of the waste liquid tank (10) is fixedly connected to a feed pipe (17), the bottom of the feed pipe (17) is connected to the evaporating kettle (1), and a pipeline valve (15) is provided on the feed pipe (17), the right side of the evaporating kettle (1) is provided with a mounting frame (3), the inner wall of the mounting frame (3) is fixedly connected to a liquefaction tank (5), a recovery component for purifying and recovering chlorosilane waste liquid is installed on the evaporating kettle (1), and an anti-blocking component for reducing pipeline blockage is installed on the evaporating kettle (1), and the recovery component includes an electric heater (16), and the electric heater (16) is fixedly installed on the bottom of the evaporating kettle (1).

2. The purification and recovery device for chlorosilane waste liquid according to claim 1, characterized in that: The recovery component further comprises a heat exchange pipe (12), the heat exchange pipe (12) being fixedly connected to the top of the evaporator (1), the heat exchange pipe (12) passing through the waste liquid tank (10), the right end of the heat exchange pipe (12) being connected to a condenser pipe (6), and the condenser pipe (6) passing into the liquefaction tank (5).

3. The purification and recovery device for chlorosilane waste liquid according to claim 2, characterized in that: The anti-blocking component includes an air pump (4), which is fixedly mounted on the top of the bottom plate of the mounting frame (3), and the air outlet of the air pump (4) is fixedly connected to an air pump pipe (20), which is passed through the liquefied tank (5), and the exhaust port of the air pump (4) is fixedly connected to a drive pipe (14), and the end of the drive pipe (14) away from the air pump (4) is connected to the sealing cover (13), and the top of the sealing cover (13) is fixedly connected to a connecting pipe (11), and the end of the connecting pipe (11) away from the sealing cover (13) is connected to the waste liquid tank (10).

4. The purification and recovery device for chlorosilane waste liquid according to claim 3, characterized in that: The inner wall of the evaporating kettle (1) is rotatably connected to a rotating rod (23), and a plurality of stirring paddles (22) are fixedly sleeved on the outside of the rotating rod (23). The left end of the rotating rod (23) is rotatably passed through the evaporating kettle (1), and the left end of the rotating rod (23) is fixedly connected to a rotating disk (7), and a plurality of fan blades (19) are fixedly connected to the outside of the rotating disk (7).

5. The purification and recovery device for chlorosilane waste liquid according to claim 4, characterized in that: Several groups of refrigeration fins (21) are fixedly mounted on the inner wall of the liquefaction tank (5).

6. The purification and recovery device for chlorosilane waste liquid according to claim 5, characterized in that: The top of the waste liquid tank (10) is fixedly connected to a feed port (9), and an inlet valve (8) is provided on the feed port (9).

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