Electric heating type multi-stage tail gas treatment equipment

Abstract

The utility model provides electric heating type multi-stage tail gas treatment equipment which comprises a first water washing assembly, a first electric heating assembly, a second electric heating assembly and a second water washing assembly. According to the method, the tail gas is subjected to first-time water washing, first-time electric heating, second-time electric heating and second-time water washing in sequence, water-soluble harmful substances in the tail gas can be effectively removed through two times of water washing, and in the water washing process, the harmful gas is absorbed by water to form a corresponding water solution so as to be separated from the tail gas; through two times of electric heating, some organic matters and incomplete combustion products in the tail gas can be decomposed into harmless substances, and the electric heating can promote the chemical reaction to further remove harmful substances; by means of the combined design of multi-stage washing and multi-stage electric heating, tail gas can be fully treated in each treatment stage, it is ensured that harmful substances are thoroughly removed, and the overall treatment efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing tail gas treatment equipment, and in particular to an electrically heated multi-stage tail gas treatment equipment. Background Art

[0002] In the field of semiconductor manufacturing, the chip production process involves many complex and precise process steps, each of which may produce specific by-products and exhaust gases. For example, in the epitaxial growth process of silicon carbide chips, chemical vapor deposition technology is usually used, which uses hydrogen and other gases as precursor gases.

[0003] During the silicon carbide epitaxial growth process, the precursor gas enters the reaction chamber and reacts chemically with other gases in the reaction chamber under high temperature conditions to form a silicon carbide film. However, this process not only produces the required silicon carbide film, but also produces exhaust gas containing various components such as hydrogen, hydrogen chloride, and solid particles. If these exhaust gases are directly discharged without proper treatment, they will not only pollute the environment, but may also cause safety hazards. Therefore, in order to ensure production safety and comply with environmental protection standards, the exhaust gas generated in the silicon carbide epitaxial process must be effectively treated. Common exhaust gas treatment equipment usually has the problem of insufficient exhaust gas treatment. Utility Model Content

[0004] In order to solve the above technical problems, the present application provides an electrically heated multi-stage exhaust gas treatment equipment, including a first water washing component, a first electric heating component, a second electric heating component, a second water washing component, a first water tank, and a second water tank; the first water washing component and the first electric heating component are arranged on the upper part of the first water tank; the second electric heating component and the second water washing component are arranged on the upper part of the second water tank; an air intake pipe is provided on the first water washing component; the bottom of the first water washing component is interconnected with the first water tank; the bottom of the first electric heating component is interconnected with the first water tank, and the top is interconnected with the top of the second electric heating component; the bottom of the second electric heating component is interconnected with the second water tank; the bottom of the second water washing component is interconnected with the second water tank.

[0005] In some embodiments of the present application, the first water tank and the second water tank are not connected to each other.

[0006] In some embodiments of the present application, the first water tank includes a first part and a second part that are interconnected; the second water tank includes a third part and a fourth part that are interconnected; and the second part and the third part are arranged side by side.

[0007] In some embodiments of the present application, the first water washing component includes an air mixing chamber and a first water washing chamber arranged in sequence from top to bottom, and a spray component is provided in the first water washing chamber.

[0008] In some embodiments of the present application, the second water washing component includes an exhaust chamber and a second water washing chamber arranged in sequence from top to bottom, and a spray component is provided in the second water washing chamber.

[0009] In some embodiments of the present application, the exhaust cavity includes a first exhaust cavity, a second exhaust cavity, and a third exhaust cavity connected in sequence from bottom to top, and the diameter of the second exhaust cavity gradually decreases from bottom to top.

[0010] In some embodiments of the present application, an air intake cavity is provided outside the first exhaust cavity, and a plurality of communication holes are provided between the air intake cavity and the second exhaust cavity.

[0011] In some embodiments of the present application, the plurality of communicating holes are arranged at equal intervals along the circumferential direction, and the extending direction of the communicating holes converges from bottom to top toward the center of the second exhaust cavity.

[0012] In some embodiments of the present application, the second water washing assembly further includes a water vapor separation assembly disposed at an upper portion of the second water washing chamber.

[0013] In some embodiments of the present application, the first electric heating component includes a first heating chamber arranged on the first water tank, and a first heating component is arranged in the first heating chamber; the second electric heating component includes a second heating chamber arranged on the second water tank, and a second heating component is arranged in the second heating chamber; the upper parts of the first heating chamber and the second heating chamber are both connected to the connecting chamber.

[0014] Compared with the prior art, the present invention has the following advantages and beneficial effects: the electric heating multi-stage exhaust gas treatment equipment of the present application includes a first water washing component, a first electric heating component, a second electric heating component, and a second water washing component. The exhaust gas first enters the interior of the equipment through the air intake pipe, and then undergoes the first water washing, the first electric heating, the second electric heating, and the second water washing in sequence. The specific beneficial effects are as follows:

[0015] 1. Able to efficiently remove harmful substances: Through two water washings, water-soluble harmful substances in the exhaust gas can be effectively removed. During the water washing process, the harmful gases are absorbed by water to form corresponding aqueous solutions, thereby separating them from the exhaust gas; through two electric heatings, certain organic matter and incomplete combustion products in the exhaust gas can be decomposed into harmless substances. Electric heating can also promote the progress of chemical reactions and further remove harmful substances.

[0016] 2. Improved treatment efficiency: The combined design of multi-stage water washing and multi-stage electric heating ensures that the exhaust gas can be fully treated at each treatment stage, ensuring that harmful substances are completely removed and improving the overall treatment efficiency.

[0017] 3. Adaptability to different working conditions: The multi-stage treatment design of the equipment in this application can adapt to the tail gas treatment requirements under different process conditions, and both high-concentration and low-concentration harmful substances can be effectively treated.

[0018] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which constitute part of this document, are intended to provide a further understanding of this document. The exemplary embodiments and descriptions herein are intended to explain this document and do not constitute an improper limitation on this document. In the accompanying drawings:

[0020] Figure 1 This is a front view of an electrically heated multi-stage exhaust gas treatment device provided by an exemplary embodiment of the present application;

[0021] Figure 2 is a top view of an electrically heated multi-stage exhaust gas treatment device provided by an exemplary embodiment of the present application;

[0022] Figure 3 This is a right side view of an electrically heated multi-stage exhaust gas treatment device provided by an exemplary embodiment of the present application;

[0023] Figure 4 yes Figure 3 Cross-sectional view at AA in the middle;

[0024] Figure 5 Figure 4 Enlarged view of the dotted box in the middle.

[0025] In the picture:

[0026] 10. First water washing component; 101. Gas mixing chamber; 102. First water washing chamber; 103. Spraying component; 20. First electric heating component; 201. Connecting chamber; 202. First heating chamber; 30. Second electric heating component; 301. Second heating chamber; 40. Second water washing component; 401. Second water washing chamber; 402. Exhaust chamber; 4021. First exhaust chamber; 4022. Second exhaust chamber; 4023. Third exhaust chamber; 4024. Air inlet chamber; 4025. Connecting hole; 50. First water tank; 501. First part; 502. Second part; 60. Second water tank; 601. Third part; 602. Fourth part. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application. It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments can be combined with each other in any way.

[0028] In the field of semiconductor manufacturing, the chip production process involves many complex and precise process steps, each of which may produce specific by-products and exhaust gases. For example, in the epitaxial growth process of silicon carbide (SiC) chips, chemical vapor deposition technology is usually adopted, which uses hydrogen (H2) as a precursor gas.

[0029] During the silicon carbide epitaxial growth process, the precursor gas enters the reaction chamber and reacts chemically with other gases in the reaction chamber under high temperature conditions to form a silicon carbide film. However, this process not only produces the required silicon carbide film, but also produces exhaust gas containing various components such as hydrogen, hydrogen chloride, and solid particles. If these exhaust gases are directly discharged without proper treatment, they will not only pollute the environment, but may also cause safety hazards. Therefore, in order to ensure production safety and comply with environmental protection standards, the exhaust gas generated in the silicon carbide epitaxial process must be effectively treated. Common exhaust gas treatment equipment usually has the problem of insufficient exhaust gas treatment.

[0030] Based on this, an exemplary embodiment of the present application provides an electrically heated multi-stage exhaust gas treatment device, which includes a first water washing component, a first electric heating component, a second electric heating component, and a second water washing component. The exhaust gas first passes through the first water washing component to enter the interior of the device, and then passes through the first water washing, the first electric heating, the second electric heating and the second water washing in sequence. Through two water washings, water-soluble harmful substances in the exhaust gas can be effectively removed. During the water washing process, the harmful gas is absorbed by water to form a corresponding aqueous solution, thereby separating it from the exhaust gas; through two electric heatings, certain organic matter and incomplete combustion products in the exhaust gas can be decomposed into harmless substances. Electric heating can also promote the progress of chemical reactions and further remove harmful substances; the combined design of multi-stage water washing and multi-stage electric heating enables the exhaust gas to be fully treated at each treatment stage, ensuring that harmful substances are completely removed, thereby improving the overall treatment efficiency.

[0031] An exemplary embodiment of the present application provides an electrically heated multi-stage exhaust gas treatment device, such as Figure 1As shown, the equipment includes a first water washing component 10, a first electric heating component 20, a second electric heating component 30, a second water washing component 40, a first water tank 50, and a second water tank 60; the first water washing component 10 and the first electric heating component 20 are arranged on the upper part of the first water tank 50; the second electric heating component 30 and the second water washing component 40 are arranged on the upper part of the second water tank 60; an air inlet pipe is provided on the first water washing component 10; the bottom of the first water washing component 10 is interconnected with the first water tank 50; the bottom of the first electric heating component 20 is interconnected with the first water tank 50, and the top is interconnected with the top of the second electric heating component 30; the bottom of the second electric heating component 30 is interconnected with the second water tank 60; the bottom of the second water washing component 40 is interconnected with the second water tank 60. The exhaust gas first enters the equipment through the air intake pipe, and then undergoes the first water washing, the first electric heating, the second electric heating and the second water washing in sequence. The two water washings can effectively remove water-soluble harmful substances in the exhaust gas. During the water washing process, the harmful gas is absorbed by water to form a corresponding aqueous solution, which is then separated from the exhaust gas; through the two electric heatings, certain organic matter and incomplete combustion products in the exhaust gas can be decomposed into harmless substances. Electric heating can also promote the chemical reaction and further remove harmful substances; the combined design of multi-stage water washing and multi-stage electric heating enables the exhaust gas to be fully treated in each treatment stage, ensuring that harmful substances are completely removed, thereby improving the overall treatment efficiency.

[0032] like Figure 2 and 4 As shown, the first water tank 50 and the second water tank 60 are not connected to each other. In this way, the exhaust gas can pass through the first water washing assembly 10, the first water tank 50, the first electric heating assembly 20, the second electric heating assembly 30, the second water tank 60, and the second water washing assembly 40 in sequence, and finally be discharged after two water washings and two electric heatings, without causing the exhaust gas to mix in the first water tank 50 and the second water tank 60. The first water tank 50 includes a first part 501 and a second part 502 that are interconnected; the second water tank 60 includes a third part 601 and a fourth part 602 that are interconnected; the second part 502 and the third part 601 are arranged side by side. In this way, the gap between the first water tank 50 and the second water tank 60 can be reduced, so that the first water tank 50 and the second water tank 60 are closely arranged, reducing the equipment footprint.

[0033] like Figure 3 and 4As shown, the first water washing assembly 10 includes, from top to bottom, a mixing chamber 101 and a first water washing chamber 102. Multiple, evenly spaced air inlet pipes are located at the top of the mixing chamber 101, connecting to external exhaust gas delivery equipment to deliver exhaust gas to the system. Valves are installed on the air inlet pipes to control the air flow rate of each inlet pipe. A spray assembly 103 is located within the first water washing chamber 102. The spray assembly 103 can simultaneously spray water to wash the exhaust gas passing from top to bottom, effectively removing particulate impurities and water-soluble components in the exhaust gas. The spray assembly 103 is externally connected to the first water tank 50 and is externally connected to a filtration device and a circulation device to circulate the spray water.

[0034] The second water washing assembly 40 includes an exhaust chamber 402 and a second water washing chamber 401 arranged in sequence from top to bottom. A spray assembly 103 is provided in the second water washing chamber 401 to cool the exhaust gas after combustion and remove particulate matter and water-soluble components in the exhaust gas to further purify the exhaust gas.

[0035] like Figure 4 and 5 As shown, exhaust chamber 402 includes a first exhaust chamber 4021, a second exhaust chamber 4022, and a third exhaust chamber 4023, which are sequentially connected from bottom to top. The diameter of second exhaust chamber 4022 gradually decreases from bottom to top. Thus, a Venturi tube structure is formed between first, second, and third exhaust chambers 4021, 4022, and 4023. This allows the exhaust gas flow rate through each of these three chambers to gradually increase and then decrease, preventing exhaust gas backflow and the risk of explosion.

[0036] Further, such as Figure 5 As shown, an air inlet chamber 4024 is provided outside the upper portion of the first exhaust chamber 4021. The air inlet chamber 4024 is connected to compressed air. A plurality of connecting holes 4025 are provided between the air inlet chamber 4024 and the second exhaust chamber 4022. Compressed air can enter the second exhaust chamber 4022 through the connecting holes 4025 to accelerate the exhaust of the exhaust gas.

[0037] In one embodiment, the plurality of communication holes 4025 are arranged at equal intervals along the circumferential direction, and the extending direction of the communication holes 4025 converges from bottom to top toward the center of the second exhaust chamber 4022. In this way, the compressed air entering the second exhaust chamber 4022 through the communication holes 4025 can form the following Figure 5The compressed air flow shown in the direction of the middle arrow, multiple groups of compressed air flow converge toward the center of the second exhaust chamber 4022 and the third exhaust chamber 4023, so that a negative pressure area is formed in the center of the first exhaust chamber 4021, further accelerating the upward flow of the exhaust gas after water washing. At the same time, the formation of the negative pressure area can prevent the exhaust gas from circulating in the opposite direction, and prevent the risk of explosion caused by the reverse flow of the exhaust gas.

[0038] In one embodiment, in order to effectively remove moisture from the exhaust gas after water washing, a water vapor separation component is provided on the upper part of the second water washing chamber 401. The water vapor separation component can separate a large amount of water vapor contained in the exhaust gas after water washing from the exhaust gas, thereby achieving the purpose of drying the exhaust gas.

[0039] The first electric heating assembly 20 includes a first heating chamber 202 disposed on the first water tank 50. A first heating assembly is disposed within the first heating chamber 202. The first heating assembly can preheat the exhaust gas after water washing. The first heating assembly comprises multiple heating units, each equipped with a thermocouple to monitor the temperature within the first heating chamber 202 and maintain a constant temperature therein. The second electric heating assembly 30 includes a second heating chamber 301 disposed on the second water tank 60. A second heating assembly is disposed within the second heating chamber 301. The upper portions of the first and second heating chambers 202 and 301 are both interconnected with the connecting chamber 201. After being preheated in the first heating chamber 202, the exhaust gas flowing through the first heating chamber 202 enters the connecting chamber 201 and then enters the second heating chamber 301. The second heating assembly comprises multiple heating units, each equipped with a thermocouple to monitor the temperature within the second heating chamber 301 and maintain a constant temperature therein. While the tail gas is being heated, compressed air may be introduced into the second heating chamber 301 to provide sufficient oxygen for the combustion of the tail gas.

[0040] The electric heating multi-stage exhaust gas treatment equipment of the present application includes a first water washing component 10, a first electric heating component 20, a second electric heating component 30 and a second water washing component 40. The exhaust gas first enters the interior of the equipment through an intake pipe, and then undergoes the first water washing, the first electric heating, the second electric heating and the second water washing in sequence. Through the combined treatment of multi-stage water washing and multi-stage electric heating, harmful substances in the exhaust gas can be effectively removed, and the exhaust gas can be fully purified and treated.

[0041] In this application, the terms "comprises," "comprising," or any other variations thereof are intended to encompass non-exclusive inclusion, such that an article or device comprising a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such article or device. In the absence of further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the article or device comprising the element.

[0042] Although the preferred embodiments of the present application have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present application.

[0043] Obviously, those skilled in the art may make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if such changes and modifications of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such changes and modifications.

Claims

1. An electrically heated multi-stage tail gas treatment device, characterized in that: It includes a first water-washing component, a first electric heating component, a second electric heating component, a second water-washing component, a first water tank, and a second water tank; the first water-washing component and the first electric heating component are arranged on the upper part of the first water tank; the second electric heating component and the second water-washing component are arranged on the upper part of the second water tank; an air inlet pipe is provided on the first water-washing component; the bottom of the first water-washing component is interconnected with the first water tank; the bottom of the first electric heating component is interconnected with the first water tank, and the top is interconnected with the top of the second electric heating component; the bottom of the second electric heating component is interconnected with the second water tank; the bottom of the second water-washing component is interconnected with the second water tank.

2. The electrically heated multi-stage tail gas treatment equipment according to claim 1, characterized in that: The first water tank and the second water tank are not connected to each other.

3. The electrically heated multi-stage tail gas treatment equipment according to claim 1, characterized in that: The first water tank includes a first part and a second part that are interconnected; the second water tank includes a third part and a fourth part that are interconnected; and the second part and the third part are arranged side by side.

4. The electrically heated multi-stage tail gas treatment equipment according to claim 1, characterized in that: The first water washing component includes an air mixing chamber and a first water washing chamber arranged in sequence from top to bottom, and a spray component is arranged in the first water washing chamber.

5. The electrically heated multi-stage tail gas treatment equipment according to claim 1, characterized in that: The second water washing component includes an exhaust chamber and a second water washing chamber arranged in sequence from top to bottom, and a spray component is arranged in the second water washing chamber.

6. The electrically heated multi-stage tail gas treatment equipment according to claim 5, characterized in that: The exhaust cavity comprises a first exhaust cavity, a second exhaust cavity and a third exhaust cavity which are sequentially connected from bottom to top, and the diameter of the second exhaust cavity gradually decreases from bottom to top.

7. The electrically heated multi-stage tail gas treatment equipment according to claim 6, characterized in that: An air intake cavity is provided outside the first exhaust cavity, and a plurality of communication holes are provided between the air intake cavity and the second exhaust cavity.

8. The electrically heated multi-stage tail gas treatment equipment according to claim 7, characterized in that: The plurality of communication holes are arranged at equal intervals along the circumferential direction, and the extending direction of the communication holes converges from bottom to top toward the center of the second exhaust chamber.

9. The electrically heated multi-stage tail gas treatment equipment according to claim 5, characterized in that: The second water washing assembly further includes a water vapor separation assembly disposed at the upper portion of the second water washing chamber.

10. The electrically heated multi-stage tail gas treatment equipment according to claim 1, characterized in that: The first electric heating component includes a first heating chamber arranged on the first water tank, and a first heating component is arranged in the first heating chamber; the second electric heating component includes a second heating chamber arranged on the second water tank, and a second heating component is arranged in the second heating chamber; the upper parts of the first heating chamber and the second heating chamber are both connected to the connecting chamber.

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