Single crystal silicon rod crystal pulling device and single crystal furnace

Abstract

The utility model provides a single crystal silicon rod crystal pulling device and a single crystal furnace, and relates to the technical field of single crystal furnace production. The utility model provides a single crystal silicon rod crystal pulling device which comprises a base, a first rotating mechanism, a second rotating mechanism, a guide assembly and a pulling assembly, the first rotating mechanism is rotatably arranged on the base, and the second rotating mechanism is rotatably arranged on the first rotating mechanism; the guide assembly comprises a guide cylinder, telescopic units, a guide seat and universal balls, the guide cylinder is arranged on the first rotating mechanism, the multiple telescopic units are arranged in the guide cylinder, the guide seat is arranged at the ends of the telescopic units, and the multiple universal balls are arranged on the guide seat; the pulling assembly comprises a winding mechanism, a rope and a seed crystal shaft, the winding mechanism is arranged on the second rotating mechanism, one end of the rope is wound on the winding mechanism, the other end of the rope is connected with the seed crystal shaft, and the seed crystal shaft is clamped between the universal balls. The utility model provides a single crystal silicon rod crystal pulling device and a single crystal furnace, which can improve the quality of a single crystal silicon rod.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a single crystal silicon rod pulling device and a single crystal furnace. Background Art

[0002] The crystal pulling method is one of the main methods for producing single crystal silicon rods. When using the crystal pulling method to produce single crystal silicon rods, a pulling device is used. The pulling device generally includes a rope and a seed crystal clamp. The seed crystal clamp is used to clamp the seed crystal. During the crystal rod pulling process, the rope needs to complete rotation and lifting movements to enable the crystal rod to complete growth. However, in the existing technology, the rope is prone to swinging left and right when rotating, thereby affecting the quality of the single crystal silicon rod. Utility Model Content

[0003] In order to solve at least one of the problems mentioned in the background technology, the present invention provides a single crystal silicon rod pulling device and a single crystal furnace, which can improve the quality of the single crystal silicon rod.

[0004] In order to achieve the above purpose, the present invention provides the following technical solutions:

[0005] In a first aspect, the present invention provides a single crystal silicon ingot pulling device, comprising a base, a first rotating mechanism, a second rotating mechanism, a guide assembly, and a pulling assembly, wherein the first rotating mechanism is rotatably disposed on the base, the second rotating mechanism is rotatably disposed on the first rotating mechanism, and both the first rotating mechanism and the second rotating mechanism rotate in a horizontal plane;

[0006] The guide assembly includes a guide cylinder, a telescopic unit, a guide seat and a universal ball. The guide cylinder is fixedly arranged on the first rotating mechanism. A plurality of telescopic units are arranged on the inner side of the guide cylinder. The telescopic end of the telescopic unit is provided with a guide seat, and a plurality of universal balls are provided on the guide seat.

[0007] The pulling assembly includes a winding mechanism, a rope and a seed crystal shaft. The winding mechanism is arranged on the second rotating mechanism. One end of the rope is wound around the winding mechanism. The other end of the rope is connected to the seed crystal shaft. The bottom of the seed crystal shaft has a clamp for clamping the seed crystal. The seed crystal shaft is passed through the guide cylinder, and at least part of the seed crystal shaft is clamped between the universal balls on different guide seats.

[0008] As an optional embodiment, the telescopic units are arranged opposite to each other along the radial direction of the guide cylinder, and the seed crystal axis is clamped between two guide seats opposite to each other along the diameter direction of the guide cylinder.

[0009] As an optional embodiment, the cross-section of the guide seat along the radial direction of the guide cylinder is arc-shaped, and two guide seats opposite to each other along the diameter direction of the guide cylinder are spliced ​​to form a cylindrical shape.

[0010] As an optional embodiment, the first rotating mechanism includes a first mounting frame, a first driving unit, a rotating shaft, and a second mounting frame, wherein the first mounting frame is disposed on the base, and the first end of the rotating shaft is rotatably disposed on the first mounting frame and is in transmission connection with the first driving unit;

[0011] The second mounting bracket is connected to the second end of the rotating shaft, and the guide cylinder and the second rotating mechanism are both arranged on the second mounting bracket.

[0012] As an optional embodiment, the second rotating mechanism includes a mounting seat, a connecting tube and a second driving unit. The mounting seat is arranged on the second mounting frame, the connecting tube is rotatably arranged on the mounting seat, the second driving unit is arranged on the second mounting frame, the second driving unit and the connecting tube are transmission-connected to drive the connecting tube to rotate on the mounting seat, the connecting tube and the guide tube are coaxially arranged, and the connecting tube is located above the guide tube, the rope passes through the connecting tube, and the winding mechanism is arranged on the top of the connecting tube.

[0013] As an optional embodiment, it further includes at least two limiting wheels, which are arranged in the connecting cylinder along the radial direction of the connecting cylinder relative to each other, and the rope is clamped between the limiting wheels.

[0014] As an optional embodiment, the winding mechanism includes a third mounting frame, a third drive unit and a winding roller. The third mounting frame is arranged on the top of the connecting tube, the third drive unit is arranged on the third mounting frame, the winding roller and the third drive unit are transmission connected, and the rope is wound on the winding roller.

[0015] As an optional embodiment, it also includes a protective shell, which is arranged on the second mounting frame. The protective shell has a cavity, the cavity is connected to the connecting cylinder and the guide cylinder, the rope passes through the cavity, and a laser ranging sensor for detecting the amplitude of the rope shaking is arranged in the cavity.

[0016] As an optional embodiment, it also includes a controller and a display. The display, laser ranging sensor, telescopic unit, first drive unit, second drive unit and third drive unit are all electrically connected to the controller. The controller receives data detected by the laser ranging sensor and processes the data and displays it through the display.

[0017] In a second aspect, the present invention further provides a single crystal furnace, comprising the single crystal silicon rod pulling device in the first aspect.

[0018] The single crystal silicon rod pulling device provided by the utility model includes a base, a first rotating mechanism, a second rotating mechanism, a guide assembly and a pulling assembly. The first rotating mechanism can be rotatably arranged on the base, and the second rotating mechanism can be rotatably arranged on the first rotating mechanism, and the first rotating mechanism and the second rotating mechanism both rotate in a horizontal plane; the guide assembly includes a guide cylinder, a telescopic unit, a guide seat and a universal ball, the guide cylinder is fixedly arranged on the first rotating mechanism, a plurality of telescopic units are arranged on the inner side of the guide cylinder, the telescopic end of the telescopic unit is provided with a guide seat, and a plurality of universal balls are provided on the guide seat; the pulling assembly includes a winding mechanism, a rope and a seed crystal shaft, the winding mechanism is arranged on the second rotating mechanism, one end of the rope is wound around the winding mechanism, and the other end of the rope is connected to the seed crystal shaft, the bottom of the seed crystal shaft has a clamp for clamping the seed crystal, the seed crystal shaft is passed through the guide cylinder, and at least part of the seed crystal shaft is clamped between the universal balls on different guide seats. During the production of single crystal silicon, the seed crystal can be clamped at the clamp at the bottom of the seed crystal shaft, and the seed crystal shaft can be rotated to above the furnace mouth of the single crystal furnace by rotating the first rotating mechanism. Then, the rope can be loosened by controlling the winding mechanism, and the seed crystal can be placed in the furnace. Thereafter, the rope can be rotated and pulled up by controlling the second rotating mechanism and the winding mechanism respectively, so as to grow the single crystal silicon rod. The rotation and pulling process of the rope can drive the seed crystal shaft to rotate and rise together, and the seed crystal shaft can complete the rotation and rising action under the clamping of the universal ball. The universal ball can limit the seed crystal shaft to prevent the seed shaft from swinging left and right, thereby limiting the left and right swing of the rope connected to the seed shaft, thereby improving the quality of the produced single crystal silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 A schematic diagram of the overall structure of a single crystal silicon rod pulling device provided in an embodiment of the present utility model;

[0021] Figure 2 A schematic cross-sectional view of a single crystal silicon rod pulling device provided in an embodiment of the present invention;

[0022] Figure 3 A schematic diagram of a guide assembly in a single crystal silicon rod pulling device provided by an embodiment of the present invention;

[0023] Figure 4 for Figure 2 Enlarged view of point A in the middle;

[0024] Figure 5 for Figure 2 Enlarged view of point B in the middle.

[0025] Description of reference numerals:

[0026] 100-Single crystal silicon rod pulling device;

[0027] 110-base;

[0028] 120 - first rotating mechanism; 121 - first mounting bracket; 122 - first driving unit; 123 - rotating shaft; 124 - second mounting bracket;

[0029] 130 - second rotating mechanism; 131 - mounting seat; 132 - connecting cylinder; 133 - second driving unit;

[0030] 140-guide assembly; 141-guide cylinder; 142-telescopic unit; 143-guide seat; 144-universal ball;

[0031] 150-limiting wheel;

[0032] 160 - pulling assembly; 161 - winding mechanism; 1611 - third mounting frame; 1612 - third driving unit; 1613 - winding roller; 162 - rope; 163 - seed crystal shaft; 164 - clamp;

[0033] 170-protective case;

[0034] 180-laser ranging sensor;

[0035] 200-seed crystal. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the present invention and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0038] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0039] Furthermore, the terms "installed," "disposed," "provided with," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0040] Furthermore, the terms "first," "second," etc., are primarily used to distinguish between different devices, elements, or components (which may or may not be of the same type and configuration), and are not intended to indicate or imply the relative importance or quantity of the devices, elements, or components indicated. Unless otherwise specified, "plurality" means two or more.

[0041] The crystal pulling method is one of the main methods for producing single crystal silicon rods. When using the crystal pulling method to produce single crystal silicon rods, a pulling device is used. The pulling device generally includes a rope and a seed crystal clamp. The seed crystal clamp is used to clamp the seed crystal. During the crystal rod pulling process, the rope needs to complete rotation and lifting movements to enable the crystal rod to complete growth. However, in the existing technology, the rope is prone to swinging left and right when rotating, thereby affecting the quality of the single crystal silicon rod.

[0042] In view of this, the present invention provides a single crystal silicon rod pulling device 100. When producing single crystal silicon, the seed crystal 200 can be clamped at the clamp 164 at the bottom of the seed crystal shaft 163, and the seed crystal shaft 163 is rotated to above the furnace mouth of the single crystal furnace by rotating the first rotating mechanism 120. Then, the rope 162 is loosened by controlling the winding mechanism 161, and the seed crystal 200 is placed in the furnace. Thereafter, the rope 162 can be rotated and pulled up respectively by controlling the second rotating mechanism 130 and the winding mechanism 161, so as to grow the single crystal silicon rod. During the rotation and pulling process of the rope 162, the seed crystal shaft 163 can be driven to rotate and rise together. The seed crystal shaft 163 can complete the rotation and rising action under the clamping of the universal ball 144. The universal ball 144 can limit the seed crystal shaft 163 to prevent the seed crystal shaft 163 and the rope 162 from swinging left and right, thereby improving the quality of the produced single crystal silicon rod.

[0043] Figure 1 A schematic diagram of the overall structure of a single crystal silicon rod pulling device 100 provided in an embodiment of the present utility model; Figure 2A schematic cross-sectional view of a single crystal silicon rod pulling device 100 provided in an embodiment of the present invention; Figure 3 A schematic diagram of a guide assembly 140 in a single crystal silicon rod pulling device 100 provided in an embodiment of the present invention; Figure 4 for Figure 2 Enlarged view of point A in the middle; Figure 5 for Figure 2 Enlarged view of point B in the middle.

[0044] You can refer to Figures 1 to 5 The embodiment of the present invention provides a single crystal silicon rod pulling device 100, comprising a base 110, a first rotating mechanism 120, a second rotating mechanism 130, a guide assembly 140 and a pulling assembly 160. The first rotating mechanism 120 is rotatably arranged on the base 110, and the second rotating mechanism 130 is rotatably arranged on the first rotating mechanism 120, and the first rotating mechanism 120 and the second rotating mechanism 130 both rotate in a horizontal plane; the guide assembly 140 comprises a guide cylinder 141, a telescopic unit 142, a guide seat 143 and a universal ball 144. The guide cylinder 141 is fixedly arranged on the first rotating mechanism 120, and the inner side of the guide cylinder 141 is fixedly arranged on the inner side of the guide cylinder 141. A plurality of telescopic units 142 are provided, a guide seat 143 is provided at the telescopic end of the telescopic unit 142, and a plurality of universal balls 144 are provided on the guide seat 143; the pulling assembly 160 includes a winding mechanism 161, a rope 162 and a seed crystal shaft 163, the winding mechanism 161 is provided on the second rotating mechanism 130, one end of the rope 162 is wound around the winding mechanism 161, and the other end of the rope 162 is connected to the seed crystal shaft 163, the bottom of the seed crystal shaft 163 has a clamp 164 for clamping the seed crystal 200, the seed crystal shaft 163 is passed through the guide cylinder 141, and at least part of the seed crystal shaft 163 is clamped between the universal balls 144 on different guide seats 143.

[0045] During the production of single crystal silicon, the seed crystal 200 can be clamped at the clamp 164 at the bottom of the seed crystal shaft 163, and the seed crystal shaft 163 can be rotated to above the furnace mouth of the single crystal furnace by rotating the first rotating mechanism 120. Then, the rope 162 can be loosened by controlling the winding mechanism 161, and the seed crystal 200 can be placed in the furnace. Thereafter, the rope 162 can be rotated and pulled up by controlling the second rotating mechanism 130 and the winding mechanism 161 respectively, so as to grow the single crystal silicon rod. In the process of rotation and pulling, the rope 162 can drive the seed crystal shaft 163 to rotate and rise together. The seed crystal shaft 163 can complete the rotation and rising action under the clamping of the universal ball 144. The universal ball 144 can limit the seed crystal shaft 163 to prevent the seed crystal shaft 163 from swinging left and right, thereby limiting the left and right swing of the rope 162 connected to the seed shaft 163, thereby improving the quality of the produced single crystal silicon rod.

[0046] like Figure 2 and Figure 3As shown, in the above embodiment, the telescopic units 142 can be arranged relatively along the radial direction of the guide cylinder 141, and the seed crystal shaft 163 is clamped between the two guide seats 143 opposite to each other along the diameter direction of the guide cylinder 141. It can be understood that the two telescopic units 142 opposite to each other along the diameter direction of the guide cylinder 141 can be extended toward each other, thereby clamping the seed crystal shaft 163 through the guide seats 143 at their ends, and contacting the seed crystal shaft 163 through the universal ball 144 on the guide seat 143. When the seed crystal shaft 163 is pulled upward along with the rope 162, the universal ball 144 can roll freely in the vertical plane, thereby facilitating the seed crystal shaft 163 to move upward along the guide cylinder 141 under the condition of clamping the seed crystal shaft 163, thereby limiting the seed crystal shaft 163 and preventing the seed crystal shaft 163 from shaking left and right, thereby affecting the growth quality of the single crystal silicon rod clamped below. When the seed shaft 163 rotates with the rope 162, the universal ball 144 can roll freely in the horizontal plane, thereby facilitating the rotation of the seed shaft 163 within the guide cylinder 141 while clamping the seed shaft 163 and preventing the seed shaft 163 from swinging left and right. Because the rope 162 and the seed shaft 163 are connected, the smooth movement of the seed shaft 163 can also make the rope 162 move more smoothly.

[0047] like Figure 2 and Figure 3 As shown, in the above embodiment, the cross-section of the guide seat 143 along the radial direction of the guide cylinder 141 can be arc-shaped, and the two guide seats 143 opposite to each other along the diameter direction of the guide cylinder 141 can be spliced ​​to form a cylindrical shape. In this way, the surfaces of the guide seat 143 and the seed crystal shaft 163 can be better matched, thereby improving the limiting effect of the guide seat 143.

[0048] In the above embodiment, the first rotating mechanism 120 may include a first mounting frame 121, a first driving unit 122, a rotating shaft 123, and a second mounting frame 124. The first mounting frame 121 is disposed on the base 110, and the first end of the rotating shaft 123 is rotatably disposed on the first mounting frame 121 and is in transmission connection with the first driving unit 122. The second mounting frame 124 is connected to the second end of the rotating shaft 123, and the guide cylinder 141 and the second rotating mechanism 130 are both disposed on the second mounting frame 124. The first driving unit 122 can drive the rotating shaft 123 to rotate, and the rotating shaft 123 drives the second mounting frame 124 thereon to rotate together, so as to rotate the seed crystal 200 to above the furnace port of the single crystal furnace. Specifically, as shown in FIG. Figure 1 and Figure 2 As shown, the first driving unit 122 can use a motor, and the motor and the rotating shaft 123 are rotated by meshing with a pair of helical gears.

[0049] In the above embodiment, the second rotating mechanism 130 may include a mounting base 131, a connecting cylinder 132, and a second driving unit 133. The mounting base 131 is mounted on the second mounting frame 124, the connecting cylinder 132 is rotatably mounted on the mounting base 131, and the second driving unit 133 is mounted on the second mounting frame 124. The second driving unit 133 is drivingly connected to the connecting cylinder 132 to drive the connecting cylinder 132 to rotate on the mounting base 131. The connecting cylinder 132 and the guide cylinder 141 are coaxially arranged, and the connecting cylinder 132 is located above the guide cylinder 141. The rope 162 passes through the connecting cylinder 132, and the winding mechanism 161 is disposed on the top of the connecting cylinder 132. It is understood that the second driving mechanism can drive the connecting cylinder 132 to rotate on the mounting base 131, and the connecting cylinder 132 drives the winding mechanism 161 thereon to rotate together, thereby driving the rope 162 to rotate, so that the seed shaft 163 connected below the rope 162 and the single crystal silicon rod rotate together, specifically, to grow the single crystal silicon rod. Specifically, the outer wall of the connecting cylinder 132 may be processed with meshing teeth, and the second driving unit 133 transmits power by meshing with the meshing teeth.

[0050] like Figure 5 As shown, the above embodiment may further include at least two limiting wheels 150, which are relatively arranged in the connecting cylinder 132 along the radial direction of the connecting cylinder 132, and the rope 162 is clamped between the limiting wheels 150. The two limiting wheels 150 clamp the rope 162 in the middle, thereby further preventing the rope 162 from swinging left and right. When the rope 162 rises or falls, the limiting wheel 150 rotates due to the friction of the rope 162.

[0051] In the above embodiment, the winding mechanism 161 may include a third mounting frame 1611, a third driving unit 1612, and a winding roller 1613. The third mounting frame 1611 is disposed on the top of the connecting cylinder 132, the third driving unit 1612 is disposed on the third mounting frame 1611, the winding roller 1613 and the third driving unit 1612 are in driving connection, and the rope 162 is wound around the winding roller 1613. The third driving unit 1612 can drive the winding roller 1613 to wind or release the rope 162, thereby controlling the lifting and lowering of the single crystal silicon ingot.

[0052] The above embodiment further includes a protective housing 170, which is mounted on the second mounting bracket 124. The protective housing 170 defines a cavity that connects the connecting cylinder 132 and the guide cylinder 141. The rope 162 passes through the cavity, and a laser ranging sensor 180 is disposed within the cavity for detecting the amplitude of the rope 162's oscillation. It will be appreciated that when the rope 162 oscillates, the distance measured by the laser ranging sensor 180 to the rope 162 changes; the greater the oscillation, the greater the fluctuation in the measured distance.

[0053] The above embodiment may also include a controller and a display. The display, laser ranging sensor 180, telescopic unit 142, first drive unit 122, second drive unit 133, and third drive unit 1612 are all electrically connected to the controller. The controller receives data detected by the laser ranging sensor 180, processes the data, and displays it on the display. Specifically, the telescopic unit 142 may be a hydraulic cylinder or an electric cylinder, and the first drive unit 122, second drive unit 133, and third drive unit 1612 may be motors. The controller may control the telescopic unit 142, first drive unit 122, second drive unit 133, and third drive unit 1612 to perform precise movements.

[0054] In addition, the embodiment of the present invention further provides a single crystal furnace, including the single crystal silicon rod pulling device 100 in the above embodiment, the single crystal silicon rod pulling device 100 includes a base 110, a first rotating mechanism 120, a second rotating mechanism 130, a guide assembly 140 and a pulling assembly 160, the first rotating mechanism 120 is rotatably arranged on the base 110, the second rotating mechanism 130 is rotatably arranged on the first rotating mechanism 120, and the first rotating mechanism 120 and the second rotating mechanism 130 are both rotated in a horizontal plane; the guide assembly 140 includes a guide cylinder 141, a telescopic unit 142, a guide seat 143 and a universal ball 144, the guide The cylinder 141 is fixedly arranged on the first rotating mechanism 120, and a plurality of telescopic units 142 are arranged on the inner side of the guide cylinder 141. The telescopic end of the telescopic unit 142 is provided with a guide seat 143, and a plurality of universal balls 144 are provided on the guide seat 143; the pulling assembly 160 includes a winding mechanism 161, a rope 162 and a seed crystal shaft 163, the winding mechanism 161 is arranged on the second rotating mechanism 130, one end of the rope 162 is wound around the winding mechanism 161, and the other end is connected to the seed crystal shaft 163, and the bottom of the seed crystal shaft 163 has a clamp 164 for clamping the seed crystal 200, and the seed crystal shaft 163 is clamped between the universal balls 144 on different guide seats 143. During the production of single crystal silicon, the seed crystal 200 can be clamped at the clamp 164 at the bottom of the seed crystal shaft 163, and the seed crystal shaft 163 can be rotated to above the furnace mouth of the single crystal furnace by rotating the first rotating mechanism 120. Then, the rope 162 can be loosened by controlling the winding mechanism 161, and the seed crystal 200 can be placed in the furnace. Thereafter, the rope 162 can be rotated and pulled up by controlling the second rotating mechanism 130 and the winding mechanism 161 respectively, so as to grow the single crystal silicon rod. In the process of rotation and pulling, the rope 162 can drive the seed crystal shaft 163 to rotate and rise together. The seed crystal shaft 163 can complete the rotation and rising action under the clamping of the universal ball 144. The universal ball 144 can limit the seed crystal shaft 163 to prevent the seed crystal shaft 163 from swinging left and right, thereby limiting the left and right swing of the rope 162 connected to the seed shaft 163, thereby improving the quality of the single crystal silicon rod produced by the single crystal furnace.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A single crystal silicon rod pulling device, characterized in that: The invention comprises a base, a first rotating mechanism, a second rotating mechanism, a guide assembly and a pulling assembly, wherein the first rotating mechanism is rotatably disposed on the base, the second rotating mechanism is rotatably disposed on the first rotating mechanism, and both the first rotating mechanism and the second rotating mechanism rotate in a horizontal plane; The guide assembly includes a guide cylinder, a telescopic unit, a guide seat, and a universal ball. The guide cylinder is fixedly arranged on the first rotating mechanism. A plurality of the telescopic units are arranged on the inner side of the guide cylinder. The telescopic end of the telescopic unit is provided with the guide seat. The guide seat is provided with a plurality of the universal balls. The pulling assembly includes a winding mechanism, a rope and a seed crystal shaft. The winding mechanism is arranged on the second rotating mechanism. One end of the rope is wound around the winding mechanism. The other end of the rope is connected to the seed crystal shaft. The bottom of the seed crystal shaft has a clamp for clamping the seed crystal. The seed crystal shaft is passed through the guide cylinder, and at least part of the seed crystal shaft is clamped between the universal balls on different guide seats.

2. The single crystal silicon rod pulling device according to claim 1, characterized in that: The telescopic units are arranged opposite to each other along the radial direction of the guide cylinder, and the seed crystal shaft is clamped between the two guide seats that are opposite to each other along the diameter direction of the guide cylinder.

3. The single crystal silicon rod pulling device according to claim 2, characterized in that: The cross section of the guide seat along the radial direction of the guide cylinder is in an arc shape, and two guide seats facing each other along the diameter direction of the guide cylinder are spliced ​​to form a cylindrical shape.

4. The single crystal silicon rod pulling device according to claim 3, characterized in that: The first rotating mechanism includes a first mounting frame, a first driving unit, a rotating shaft, and a second mounting frame, wherein the first mounting frame is disposed on the base, and the first end of the rotating shaft is rotatably disposed on the first mounting frame and is in transmission connection with the first driving unit; The second mounting bracket is connected to the second end of the rotating shaft, and the guide cylinder and the second rotating mechanism are both arranged on the second mounting bracket.

5. The single crystal silicon rod pulling device according to claim 4, characterized in that: The second rotating mechanism includes a mounting seat, a connecting tube and a second driving unit. The mounting seat is arranged on the second mounting frame. The connecting tube is rotatably arranged on the mounting seat. The second driving unit is arranged on the second mounting frame. The second driving unit and the connecting tube are transmission-connected to drive the connecting tube to rotate on the mounting seat. The connecting tube and the guide tube are coaxially arranged, and the connecting tube is located above the guide tube. The rope passes through the connecting tube, and the winding mechanism is arranged on the top of the connecting tube.

6. The single crystal silicon rod pulling device according to claim 5, characterized in that: It also includes at least two limiting wheels, which are arranged in the connecting cylinder in a radial direction relative to each other, and the rope is clamped between the limiting wheels.

7. The single crystal silicon rod pulling device according to claim 6, characterized in that: The winding mechanism includes a third mounting frame, a third driving unit and a winding roller. The third mounting frame is arranged on the top of the connecting cylinder, and the third driving unit is arranged on the third mounting frame. The winding roller and the third driving unit are transmission-connected, and the rope is wound on the winding roller.

8. The single crystal silicon rod pulling device according to claim 7, characterized in that: It also includes a protective shell, which is arranged on the second mounting frame. The protective shell has a cavity, which connects the connecting cylinder and the guide cylinder. The rope passes through the cavity. A laser ranging sensor for detecting the swing amplitude of the rope is arranged in the cavity.

9. The single crystal silicon rod pulling device according to claim 8, characterized in that: It also includes a controller and a display. The display, the laser ranging sensor, the telescopic unit, the first drive unit, the second drive unit and the third drive unit are all electrically connected to the controller. The controller receives data detected by the laser ranging sensor and processes the data and displays it through the display.

10. A single crystal furnace, characterized in that: The invention comprises a single crystal silicon rod pulling device as described in any one of claims 1 to 9.

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