Bin gate structure

Abstract

The utility model discloses a bin gate structure which is installed at a hole opening of a bin wall and comprises a bin gate capable of opening or closing the hole opening and a lifting assembly located above the bin gate and used for driving the bin gate to ascend and descend, sealing strips are arranged on the peripheral edge of the bin gate, and the lifting assembly comprises a lifting air cylinder and a support driven by the lifting air cylinder. And the translation assembly is mounted on the bracket and is used for driving the bin door to move back and forth. The device has the advantages of high efficiency, sealing, stability, easiness in operation and the like.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a warehouse door structure. Background Art

[0002] The wafer production process typically involves multiple steps. Many of these processes take place within a chamber, where a hole is opened in one of the chamber walls to allow the wafers to enter and exit. To prevent disruption to the process conditions within the chamber during processing, the hole is sealed, ensuring the chamber is isolated from the outside environment.

[0003] Conventional methods for sealing a chamber involve installing a door at the opening, which is then driven to seal or open the opening. However, the door can only move up and down or left and right. To prevent friction with the chamber walls during movement, a gap is created between the door and the chamber walls during installation. This creates a gap when the door is located at the opening, allowing gas to leak through the gap and cause contamination. Utility Model Content

[0004] Based on this, in order to solve the above technical problems, the present invention provides a warehouse door structure.

[0005] The purpose of the utility model can be achieved through the following technical solutions:

[0006] A warehouse door structure is installed at the opening of the warehouse wall, including a warehouse door that can open or close the opening, a lifting assembly located above the warehouse door for driving the warehouse door to rise and fall, and sealing strips are provided on the edges of the warehouse door. The lifting assembly includes a lifting cylinder and a bracket driven by the lifting cylinder, and also includes a translation assembly installed on the bracket for driving the warehouse door to move forward and backward.

[0007] By adopting the above technical solution, the warehouse door is first driven to move to the rear position of the hole by the lifting component, and then the warehouse door is driven forward by the translation component to seal the hole. The operation is simple and the work efficiency is improved.

[0008] In a specific implementation manner of the present invention: the bracket is a U-shaped structure, including a cross beam plate and vertical beam plates connected to both ends of the cross beam plate.

[0009] In a specific implementation manner of the present utility model: the translation assembly includes horizontal cylinders respectively installed on the inner sides of the vertical beam plates, the horizontal cylinders have piston rods extending forward, and the two ends of the warehouse door are respectively installed on the piston rod ends of the two horizontal cylinders.

[0010] In a specific embodiment of the present invention, a pair of slide rails are provided on the left and right sides of the opening, with sliders slidably connected to the rails. The vertical beams are mounted on the corresponding sliders, and stoppers are fixed to the ends of the rails. Using this technical solution, a lifting cylinder is used to drive the door on the rails, ensuring that the door is not easily deviated or shaken during movement, and maintaining good stability.

[0011] In a specific implementation manner of the present utility model: an air curtain is further provided above the warehouse door for blowing away splashed liquid on the warehouse door.

[0012] In a specific implementation manner of the present invention: it also includes a cavity formed by a plurality of plates, and the lifting assembly and the translation assembly are located in the cavity.

[0013] In summary, the utility model has the advantages of high efficiency, sealing, stability and easy operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The present invention will be further described below with reference to the accompanying drawings.

[0015] Figure 1 This is a structural diagram of a warehouse door structure of the utility model;

[0016] Figure 2 It shows the horizontal cylinder mounted on the bracket;

[0017] Figure 3 yes Figure 2 Enlarged view of point A in the middle;

[0018] Figure 4 FIG. 1 shows that the slider is slidably connected to the slide rail. DETAILED DESCRIPTION

[0019] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0020] See also Figure 1 and Figure 2 As shown, the present invention is a door structure. An opening 8 for material entry and exit is formed in a wall 9 of a storage chamber. The door structure is mounted on the outer surface of the wall 9 and includes a door 11 capable of opening or closing the opening 8, a lifting assembly 13 for driving the door 11 up and down, and a translation assembly 14 for driving the door 11 forward and backward. Sealing strips are provided around the edges of the door.

[0021] Combine Figure 3 and Figure 4 As shown, in this embodiment, the lifting assembly 13 includes a lifting cylinder 131 fixed above the opening and a bracket 132 driven to rise and fall by the lifting cylinder 131. The bracket 132 is a U-shaped structure, including a crossbeam 1321 and vertical beams 1322 connected to both ends of the crossbeam 1321. A pair of slide rails 133 are provided on the left and right sides of the opening. Slide blocks 134 are slidably connected to the slide rails 133. The two vertical beams 1322 are respectively fixed on the corresponding sliders 134. The translation assembly 14 includes horizontal cylinders respectively mounted on the inner sides of the two vertical beams 1322. The horizontal cylinder has a piston rod extending forward. The two ends of the warehouse door 11 are respectively mounted on the piston rod ends of the two horizontal cylinders.

[0022] In this way, by using a lifting cylinder and a horizontal cylinder to drive the warehouse door, the warehouse door can not only move quickly during the lifting and horizontal movement, but also move to the correct position. The warehouse door moves on the slide rail, ensuring that the warehouse door is not easy to deviate or shake during the up and down movement, and has good stability.

[0023] In the present invention, a stop block 135 is fixed at the end of the slide rail 133 .

[0024] In this embodiment, an air curtain 15 for blowing away the splashing liquid on the door is further provided above the door 11. The air curtain 15 is connected to a nitrogen gas source, and the air nozzle of the air curtain 15 faces the door 11.

[0025] In this embodiment, a cavity 7 formed by a plurality of plates is further included. A lifting assembly 13 and a translation assembly 14 are located in the cavity 7 .

[0026] The above is the structure of the warehouse door of the utility model. During operation, the robot first transfers the material into the warehouse through the hole; then, the lifting cylinder 131 drives the bracket 132 to descend, driving the warehouse door 11 to move to the rear of the hole; after that, the two translation cylinders drive the warehouse door 11 forward to seal the hole 8. After the operation is completed, nitrogen is controlled to be sprayed out from the injection nozzle of the air curtain 15 to blow off the splashing liquid on the warehouse door 11. When the blowing is completed, the two translation cylinders drive the warehouse door 11 to move away from the hole 8. Then, the lifting cylinder 131 drives the bracket 132 to rise, driving the warehouse door 11 to rise. Finally, the robot takes away the processed materials and transfers them to the next process.

[0027] In summary, the utility model has the advantages of high efficiency, sealing, stability and easy operation.

[0028] The above describes an embodiment of the present invention in detail. However, the above content is only a preferred embodiment of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent application of the present invention.

Claims

1. A door structure, installed at the opening of a warehouse wall, comprising a door capable of opening or closing the opening, a lifting assembly located above the door for driving the door to rise and fall, and sealing strips provided on the edges of the door, characterized in that: The lifting assembly includes a lifting cylinder and a bracket driven by the lifting cylinder, and also includes a translation assembly installed on the bracket for driving the warehouse door to move back and forth.

2. The door structure according to claim 1, characterized in that: The bracket is a U-shaped structure, comprising a crossbeam plate and vertical beam plates connected to both ends of the crossbeam plate.

3. The door structure according to claim 2, characterized in that: The translation assembly includes horizontal cylinders respectively installed on the inner sides of the vertical beam plates. The horizontal cylinders have piston rods extending forward. The two ends of the warehouse door are respectively installed on the piston rod ends of the two horizontal cylinders.

4. The door structure according to claim 3, characterized in that: A pair of slide rails are provided on the left and right sides of the opening, and sliders are slidably connected to the slide rails. The vertical beam plates are installed on the corresponding sliders, and stop blocks are fixed at the ends of the slide rails.

5. The door structure according to claim 1, characterized in that: An air curtain is also provided above the door for blowing away the splashing liquid on the door.

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