Novel cold head for low-temperature pump and low-temperature pump
By designing structures such as a connecting shell and a limit groove in the cryopump, the problem of easy damage to the connection between the cold head and the helium pipe is solved, a more stable fixation and a more compact structure are achieved, and the service life and operational stability of the cryopump are improved.
Patent Information
- Application Number
- CN202422800685.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-18
- Publication Date
- 2025-09-26
- Estimated Expiration
- 2034-11-18
AI Technical Summary
Existing cryopumps lack effective protection at the connection between the cold head and the helium pipe, which is prone to leakage or damage due to external impact or vibration, affecting the service life and normal operation of the equipment, and the helium pipe is not fixed stably.
A new type of cold head for a cryogenic pump is designed, including a first cold head, a second cold head, a first flange, a second flange and a helium pipe. By connecting structures such as a shell and a limit groove, the fixation and protection of the helium pipe are enhanced, collision damage is prevented, and space is saved.
It effectively protects the helium tube from damage, enhances the fixing effect, improves the structural compactness and reliability of the cryopump, and reduces maintenance costs.
Smart Images
Figure CN223387472U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of cryogenic pumps, in particular to a novel cold head for a cryogenic pump and a cryogenic pump. Background Art
[0002] A cryopump is a vacuum pump that captures gas molecules onto a cryopanel, cooled to an ultra-low temperature, through condensation or adsorption, for exhaust. The helium tube is a critical component in a cryopump that connects the refrigeration system to the cold head. It is responsible for transporting low-temperature helium and ensuring that the temperature of the cold head remains within the required range. Currently, during use, existing cryopumps often lack effective protection for the connection between the cold head and the helium tube, making them susceptible to leakage or damage due to external shock or vibration. These issues not only affect the service life of the cold head and increase equipment maintenance costs, but can also affect the normal operation of the entire system. Furthermore, over extended use, the helium tube fixings can easily loosen. Utility Model Content
[0003] To solve the above problems, the present invention provides a new cold head for a cryogenic pump, comprising a first cold head, a second cold head, a first flange, a second flange and a helium pipe, wherein the first flange is connected to the first cold head and has a through hole on its surface, the helium pipe passes through the through hole and is connected to the first cold head in the middle section, the second flange is connected to the second cold head and is fixedly installed with a connecting shell, the connecting shell is spliced by the first component and the second component, and covers part of the helium pipe and the second cold head.
[0004] On the basis of the above solution, a first piston and a second piston are respectively provided in the first cold head and the second cold head.
[0005] Based on the above solution, the first cold head includes a cylinder, a connecting pipe and a connecting column, the cylinder is installed at the upper end of the connecting pipe, the lower end of the connecting pipe is integrally formed with the connecting column, and the end of the connecting column is connected to the first flange.
[0006] Based on the above solution, a limiting groove is provided on the edge of the second flange, a helium tube is fixed in the limiting groove, and the connection portion between the helium tube and the first cold head is covered by a limiting plate.
[0007] On the basis of the above solution, a piston rod is installed on the cylinder, a connector is installed on the upper end of the piston rod, and a side wall of the connector is fixedly connected to the upper end of the helium tube.
[0008] The utility model also provides a cryogenic pump, comprising the novel cold head for the cryogenic pump described in the above technical solution.
[0009] Compared with the prior art, the beneficial effects of the present invention are as follows: by setting up the connecting shell, not only the internal components are protected to prevent collision or damage during installation and use, but also the overall structure is made more compact, saving the space occupied by the device; the helium tube is fixed by the limiting groove and the limiting plate, which further enhances the fixing effect of the helium tube. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Figure 1 It is a schematic diagram of the planar structure of the utility model;
[0011] Figure 2 It is a three-dimensional structural diagram of the utility model; DETAILED DESCRIPTION
[0012] The present invention will be further described below with reference to the accompanying drawings:
[0013] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; they can refer to direct connection or indirect connection through an intermediate medium; they can refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.
[0014] In the description of the present invention, it should be understood that the terms "left", "right", "front", "back", "top", "bottom", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.
[0015] like Figure 1 and Figure 2 As shown, the present invention provides a new type of cold head for a cryogenic pump, comprising: a first cold head, a second cold head, a first flange 107, a second flange 111 and a helium tube 108, wherein the first flange 107 is connected to the first cold head and has a through hole on its surface, the helium tube 108 passes through the through hole and is connected to the first cold head in the middle section, and the helium flowing in the helium tube 108 cools the first cold head.
[0016] Furthermore, the second flange 111 is connected to the second cold head and fixedly mounted with a connecting shell. The connecting shell is formed by splicing the first component 103 and the second component 109 together, and partially covers the helium tube 108 and the second cold head. By further covering the helium tube and the second cold head, they are better protected and can prevent collisions with the helium tube during installation of the cryopump. The connecting shell formed by splicing the first and second components not only protects the internal components, but also has a more integrated design, saving space in the device.
[0017] Furthermore, a first piston and a second piston are respectively provided in the first cold head and the second cold head. Specifically, the pistons are driven to reciprocate by a driving mechanism of the cryopump, so that the refrigerant gas expands and absorbs heat in the first cold head and the second cold head, thereby reducing the temperature.
[0018] Furthermore, the first cold head includes a cylinder 104, a connecting pipe 105 and a connecting column 106, the cylinder is installed at the upper end of the connecting pipe, the lower end of the connecting pipe is integrally formed with the connecting column, and the end of the connecting column is connected to the first flange.
[0019] Furthermore, a limiting groove is provided on the edge of the second flange, in which the helium tube 108 is fixed. The connection between the helium tube 108 and the first cold head is covered by a limiting plate 110. The fixing of the helium tube by the limiting groove and the limiting plate saves space in the device and prevents the helium tube from loosening.
[0020] Furthermore, a piston rod 102 is mounted on the cylinder, a connector 101 is mounted on the upper end of the piston rod, and a side wall of the connector is fixedly connected to the upper end of the helium tube.
[0021] The present invention also provides a cryogenic pump, comprising an outer shell, a cylinder shell, a cold shield, a cold umbrella, and a refrigeration device. The refrigeration device comprises the novel cold head for the cryogenic pump described in the above embodiment. The first cold head and the second cold head create a low temperature for the cold shield and the cold umbrella, thereby achieving a vacuum environment.
[0022] The basic principles and main features of the present invention are shown and described above. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments. Therefore, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the appended claims rather than the above description. Therefore, it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present invention.
[0023] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.
Claims
1. A new type of cold head for cryopump, characterized in that: The invention comprises a first cold head, a second cold head, a first flange (107), a second flange (111) and a helium tube (108), wherein the first flange (107) is connected to the first cold head and has a through hole on its surface, the helium tube (108) passes through the through hole and is connected to the first cold head in the middle section, the second flange (111) is connected to the second cold head and is fixedly installed with a connecting shell, the connecting shell is formed by splicing the first component (103) and the second component (109), and covers part of the helium tube (108) and the second cold head.
2. A novel cold head for cryopump according to claim 1, characterized in that: A first piston and a second piston are respectively disposed in the first cold head and the second cold head.
3. The novel cold head for cryopump according to claim 1, characterized in that: The first cold head comprises a cylinder (104), a connecting pipe (105) and a connecting column (106), wherein the cylinder (104) is mounted on the upper end of the connecting pipe (105), the lower end of the connecting pipe (105) and the connecting column (106) are integrally formed, and the end of the connecting column (106) is connected to the first flange (107).
4. The novel cold head for cryopump according to claim 1, characterized in that: A limiting groove is provided on the edge of the second flange (111), a helium tube (108) is fixed in the limiting groove, and the connection portion between the helium tube (108) and the first cold head is covered by a limiting plate (110).
5. The novel cold head for cryopump according to claim 3, characterized in that: A piston rod (102) is mounted on the cylinder (104), a connector (101) is mounted on the upper end of the piston rod (102), and a side wall of the connector (101) is fixedly connected to the upper end of the helium tube (108).
6. A cryopump, characterized in that: The invention comprises the novel cold head for cryopump according to any one of claims 1 to 5.