Wafer identification device

Abstract

The utility model relates to a wafer identification device, which comprises a slip sheet identification structure and a one-way plectrum structure, and is characterized in that the slip sheet identification structure is located on the outer wall of a box door of a wafer box and comprises a first identification form and a second identification form; the one-way plectrum structure is positioned in a process machine table loaded with the crystal box; in the opening process or the closing process of the box door, the sliding piece identification structure moves along with the box door, and the one-way shifting piece structure abuts against the sliding piece identification structure so that the sliding piece identification structure can be switched between the first identification form and the second identification form. According to the method and the device, whether the wafers in the wafer box are subjected to the corresponding technological process or not is visually reflected, special management and control of a certain batch of wafers can be identified in an auxiliary manner, and the condition of passing goods violating rules can be found, so that metal pollution and other risks caused by misjudgment or misoperation are reduced or avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a wafer identification device. Background Art

[0002] With the advancement of semiconductor technology, the demand for copper-based metal interconnects within wafers is increasing. When wafer lots pass through copper processing tools, copper (Cu) often remains on the wafer backside. Due to the high reactivity of copper ions, this can easily cause metal contamination of the wafer.

[0003] Therefore, after a batch of wafers undergoes copper processing, they typically undergo a backside clean to remove the copper on the wafer's backside. However, after the copper process is completed, the copper processing tool will be idle for a period of time. During this period, it is difficult for operators to determine whether the wafers have been backside cleaned. If improper operation allows the wafers to enter other non-copper processing tools, it will lead to metal contamination of the wafers, and in severe cases, even cause the failure of the wafer's back-end devices. Utility Model Content

[0004] Based on this, it is necessary to provide a wafer identification device to characterize the different states of the wafer and reduce or avoid metal contamination and other risks caused by misjudgment or improper operation.

[0005] The present application provides a wafer marking device, comprising:

[0006] A slide identification structure is located on the outer wall of a cassette door of a wafer cassette and includes a first identification form and a second identification form;

[0007] A one-way paddle structure is located in a process machine loaded with the wafer box;

[0008] During the opening or closing process of the box door, the slide identification structure moves together with the box door, and the one-way paddle structure abuts against the slide identification structure to switch the slide identification structure between the first identification form and the second identification form.

[0009] In one embodiment, the slide identification structure includes:

[0010] The slide rail includes a first identification portion and a second identification portion sequentially arranged along the opening direction of the box door;

[0011] A slide, slidably disposed on the slide rail, wherein a limiting protrusion is provided on the surface of the slide for contacting with the one-way paddle structure;

[0012] Wherein, when the slide identification structure is in the first identification form, the slide covers the second identification portion and leaves the first identification portion exposed;

[0013] When the slide identification structure is in the second identification form, the slide covers the first identification portion and exposes the second identification portion.

[0014] In one embodiment, the surface colors of the first identification portion and the surface of the second identification portion are different, or the surface of the first identification portion and the surface of the second identification portion are provided with different identification graphics or identification texts.

[0015] In one embodiment, the one-way paddle structure includes:

[0016] a rotatable component, wherein the extending direction of the rotatable component intersects with the moving direction of the box door during the opening process, so as to abut against the sliding identification structure during the opening and closing processes of the box door;

[0017] a limiting assembly abutting against one side of the rotatable assembly to limit the rotatable assembly from rotating in a set direction;

[0018] an elastic component abutting against the other side of the rotatable component to reset the rotatable component after rotation;

[0019] In which, the set direction is clockwise or counterclockwise, and the tangent of the set direction is the same as one of the opening direction and the closing direction of the box door. When the box door moves in the opposite direction of the tangent, the sliding identification structure switches between the first identification form and the second identification form.

[0020] In one embodiment, the process machine includes:

[0021] A copper processing machine, wherein the copper processing machine is provided with a first one-way paddle structure, wherein a rotatable component of the first one-way paddle structure rotates along a first set direction;

[0022] A wafer back cleaning machine, wherein the wafer back cleaning machine is provided with a second one-way paddle structure, the second one-way paddle structure being a mirror-symmetrical structure of the first one-way paddle structure with the rotatable component as the center, and the rotatable component of the second one-way paddle structure rotates along a second set direction;

[0023] The first setting direction and the second setting direction are opposite.

[0024] In one embodiment, the rotatable component includes:

[0025] A limiting end extending between the limiting component and the elastic component;

[0026] a pick end, configured to abut against the slide identification structure;

[0027] The rotating shaft is located between the limiting end and the paddle end.

[0028] In one embodiment, the one-way paddle structure further includes a shell having an opening, the rotatable component, the limiting component and the elastic component are all located in the shell, and the paddle end extends out of the shell from the opening.

[0029] In one embodiment, the paddle end is provided with an elastic abutment portion for abutting the sliding identification structure. After the sliding identification structure switches between the first identification form and the second identification form, and the box door is still moving in the opposite direction to the tangential direction, the elastic abutment portion is deformed and separated from the sliding identification structure.

[0030] In one embodiment, the paddle end is made of an elastic deformable material. After the sliding identification structure switches between the first identification form and the second identification form, and the box door is still moving in the opposite direction to the tangential direction, the paddle end is deformed and separated from the sliding identification structure.

[0031] In one embodiment, the elastic component includes at least a spring.

[0032] The unexpected effect of the present application is that by setting a slide identification structure on the outer wall of the box door of the crystal box and setting a corresponding one-way paddle structure in the process machine, the slide identification structure can be switched between the first identification form and the second identification form during the opening or closing process of the crystal box, which intuitively reflects whether the wafers in the crystal box have completed the corresponding process, can assist in identifying the special control of a batch of wafers, and help to discover the violation of the rules of passing goods, thereby reducing or avoiding metal contamination and other risks caused by misjudgment or improper operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 A schematic side view of the structure of a wafer marking device provided in one embodiment of the present application;

[0035] Figure 2A schematic diagram of the front structure of a wafer marking device provided in one embodiment of the present application;

[0036] Figure 3 A schematic structural diagram of a wafer identification structure in a wafer identification device according to an embodiment of the present application when the slide identification structure is in a first identification form;

[0037] Figure 4 A schematic structural diagram of a wafer identification structure in a wafer identification device according to an embodiment of the present application when the slide identification structure is in a second identification form;

[0038] Figure 5 A schematic structural diagram of a one-way paddle structure when the direction is set to clockwise in a wafer marking device provided by an embodiment of the present application;

[0039] Figure 6 A schematic structural diagram of a one-way paddle structure when the direction is set to counterclockwise in a wafer marking device provided by an embodiment of the present application;

[0040] Figure 7 A schematic diagram of a process in which a wafer marking device according to an embodiment of the present application switches to a second marking mode;

[0041] Figure 8 A schematic diagram of a process in which a wafer marking device according to an embodiment of the present application switches to a first marking mode;

[0042] Description of reference numerals:

[0043] 1-wafer identification device; 11-slide identification structure; 111-slide rail; m-first identification portion; n-second identification portion; 112-slide; p-limiting protrusion; 12-one-way paddle structure; 121-rotatable component; a-limiting end; b-paddle end; c-rotating axis; d-elastic abutment portion; 122-limiting component; 123-elastic component;

[0044] 2-crystal box; 21 box door;

[0045] 3-Processing machines;

[0046] X-opening direction; A-setting direction; T-tangential direction of setting direction. DETAILED DESCRIPTION

[0047] To facilitate understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The accompanying drawings provide embodiments of the present application. However, the present application may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of the present application more thorough and comprehensive.

[0048] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0049] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it can be directly on, adjacent to, connected to, or coupled to the other element or layer, or there can be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, doping types, and / or portions, these elements, components, regions, layers, doping types, and / or portions should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, doping type, or portion from another element, component, region, layer, doping type, or portion. Therefore, without departing from the teachings of the present invention, the first element, component, region, layer, doping type or portion discussed below may be represented as a second element, component, region, layer or portion; for example, the first doping type may be referred to as the second doping type, and similarly, the second doping type may be referred to as the first doping type; the first doping type and the second doping type are different doping types, for example, the first doping type may be P-type and the second doping type may be N-type, or the first doping type may be N-type and the second doping type may be P-type.

[0050] Spatially relative terms such as "under," "beneath," "beneath," "under," "above," "above," etc., may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that in addition to the orientations shown in the figures, spatially relative terms also include different orientations of the device in use and operation. For example, if the device in the drawings is turned over, the element or feature described as "under" or "beneath" or "beneath" the other elements will be oriented as "above" the other elements or features. Thus, the exemplary terms "under" and "under" can include both upper and lower orientations. In addition, the device can also include alternative orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0051] As used herein, the singular forms "a," "an," and "the" may also include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include," "comprising," "having," and the like specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Also, in this specification, the term "and / or" includes any and all combinations of the relevant listed items.

[0052] Figure 1 and Figure 2 This is a schematic diagram of the structure of a wafer marking device provided in one embodiment of the present application, wherein: Figure 1 Showing the side view of the process machine, Figure 2 Shows the front view of the process machine. Figure 1 and Figure 2 The present application provides a wafer identification device 1, including a slide identification structure 11 and a one-way paddle structure 12, wherein the slide identification structure 11 is located on the outer wall of a box door 21 of a crystal box 2, including a first identification form and a second identification form; the one-way paddle structure 12 is located in a process machine 3 loaded with a crystal box 2; during the opening or closing process of the box door 21, the slide identification structure 11 moves together with the box door 21, and the one-way paddle structure 12 abuts against the slide identification structure 11 to switch the slide identification structure 11 between the first identification form and the second identification form.

[0053] Continue reading Figure 1 and Figure 2 By arranging the wafer identification device 1 on the crystal box 2 and the process machine 3, the slide identification structure 11 in the wafer identification device 1 will abut against the one-way paddle structure 12 in the process machine 3 during the opening process of the crystal box 2, and the shape of the slide identification structure 11 will be converted into the first identification shape or the second identification shape, thereby indicating whether the wafers loaded in the crystal box 2 have undergone the corresponding process of the process machine 3. Based on this, the operator can intuitively judge the status of the wafers in the crystal box 2 by observing the shape of the slide identification structure 11 in the wafer identification device 1, which can assist in identifying the special control of a batch of wafers and help to discover the violation of the rules of the goods, thereby reducing or avoiding metal contamination and other risks caused by misjudgment or improper operation.

[0054] Figure 3 and Figure 4 They are schematic structural diagrams of the slide identification structure in the wafer identification device provided in an embodiment of the present application when they are in the first identification form and the second identification form, Figure 5 and Figure 6This is a schematic diagram of a one-way paddle structure with different setting directions in a wafer marking device provided in an embodiment of the present application. Figures 1 to 6 The specific structure of the wafer marking device 1 provided in this application is described in detail.

[0055] See Figure 3 and Figure 4 In one embodiment, the slide identification structure 11 includes a slide rail 111 and a slide 112, wherein the slide rail 111 includes a slide rail along the opening direction of the box door 21 (ie Figure 1 The first identification portion m and the second identification portion n are sequentially arranged in the X direction in the direction of the slide 112. The slide 112 is slidably arranged on the slide rail 111. The surface of the slide 112 is provided with a limiting protrusion p for contacting with the one-way paddle structure 12. Figure 3 When the slide identification structure 11 is in the first identification form, the slide 112 covers the second identification portion n and exposes the first identification portion m; Figure 4 When the slide identification structure 11 is in the second identification state, the slide 112 covers the first identification portion m and leaves the second identification portion n exposed. Optionally, multiple slide identification structures 11 can be provided on the cassette door 21. The number and arrangement of the one-way paddle structures in the process machine 3 need to correspond to the number and position of the slide identification structures 11.

[0056] In one embodiment, the surface colors of the first identification portion m and the second identification portion n are different, or the surface of the first identification portion m and the surface of the second identification portion n are provided with different identification graphics or identification texts. It should be emphasized that in the slide identification structure 11 provided in the present application, the specific settings of the surface colors, identification graphics or identification texts of the first identification portion m and the second identification portion n can be reasonably selected according to actual needs, and it is only necessary to ensure that the operator can intuitively and clearly distinguish whether the slide identification structure 11 is in the first identification form or the second identification form through the set colors, identification graphics or identification texts. This application does not impose any restrictions on this. Optionally, the surface color of the slide 112 can be the same as or different from the surface color of the first identification portion m or the second identification portion n, and the surface of the slide 112 is usually not provided with special identification graphics or identification texts to avoid affecting the operator's judgment of the identification form of the slide identification structure 11.

[0057] See Figure 1 and Figure 5In one embodiment, the one-way paddle structure 12 includes a rotatable component 121, a limiting component 122 and an elastic component 123, wherein the extension direction of the rotatable component 121 intersects with the moving direction of the box door 21 during the opening process (i.e., the opening direction X), so as to abut against the slide identification structure 11 during the opening and closing processes of the box door 21; the limiting component 122 abuts against one side of the rotatable component 121 to limit the rotatable component 121 from moving along a set direction (i.e., Figure 5 The rotatable component 121 rotates in the direction A of the axis of rotation. The elastic component 123 abuts the other side of the rotatable component 121 to reset the rotatable component 121 after rotation. Optionally, the elastic component 123 includes at least one spring. Optionally, the one-way paddle structure 12 is located at the load port of the process tool 3.

[0058] Figure 5 The schematic diagram of the structure of the one-way paddle structure 12 when the direction is set to clockwise is shown. Figure 6 The schematic diagram of the structure of the one-way paddle structure 12 when the direction is set to counterclockwise is shown. Figure 5 and Figure 6 The tangent direction (i.e., T direction) of the set direction (i.e., A direction) is the same as one of the opening direction (i.e., X direction) and the closing direction (i.e., the opposite direction of the X direction) of the box door 21, and when the box door 21 moves in the opposite direction to the tangent direction (i.e., T direction), the slide identification structure 11 switches between the first identification form and the second identification form.

[0059] Continue reading Figure 5 In one embodiment, the rotatable component 121 includes a limit end a, a paddle end b and a rotation axis c, wherein the limit end a extends between the limit component 122 and the elastic component 123; the paddle end b is used to abut the slide identification structure 11; the rotation axis c is located between the limit end a and the paddle end b, and the rotatable component 121 rotates around the rotation axis c.

[0060] In one embodiment, the one-way paddle structure 12 further includes a shell having an opening (not shown in the figure), the rotatable component 121, the limiting component 122 and the elastic component 123 are all located in the shell, and the paddle end b of the rotatable component 121 extends out of the shell from the opening so as to abut against the sliding identification structure 11, so as to reduce or avoid damage to the one-way paddle structure 12, thereby improving the service life of the one-way paddle structure 12.

[0061] Continue reading Figure 1 and Figure 5In one embodiment, the paddle end b is provided with an elastic abutment d for abutting the slide identification structure 11. After the slide identification structure 11 switches between the first identification form and the second identification form, and when the box door 21 is still moving in the opposite direction to the tangential direction (i.e., the T direction), the elastic abutment d is deformed and separated from the slide identification structure 11, so as to prevent the elastic abutment d from being broken or damaged due to excessive pressure from the slide identification structure 11 when the slide identification structure 11 moves with the box door 21.

[0062] In one embodiment, the pick end b can also be made of an elastically deformable material, such as rubber. After the slide identification structure 11 switches between the first identification form and the second identification form, and the cassette door 21 continues to move in the direction opposite to the tangential direction (i.e., the T direction), the pick end b deforms and separates from the slide identification structure 11, thereby preventing the pick end b from being broken or damaged due to excessive pressure from the slide identification structure 11 during the movement of the slide identification structure 11 with the cassette door 21.

[0063] In one embodiment, the process machine includes a copper process machine and a backside cleaning machine, wherein the copper process machine is provided with a first one-way paddle structure, and the rotatable component of the first one-way paddle structure rotates along a first set direction; the backside cleaning machine is provided with a second one-way paddle structure, the second one-way paddle structure is a mirror-symmetrical structure of the first one-way paddle structure with the rotatable component as the center, and the rotatable component of the second one-way paddle structure rotates along a second set direction; wherein the first set direction and the second set direction are opposite.

[0064] Figure 7 A schematic diagram showing the process of switching the wafer identification device in a copper process tool from the first identification mode to the second identification mode is shown. Figure 8 The following is a schematic diagram showing the process of the wafer marking device in the wafer back cleaning machine switching from the second marking form to the first marking form. Figure 7 and Figure 8 The application of the wafer identification device provided by this application is described in detail.

[0065] First, see Figure 5 and Figure 7 In the copper processing machine, the setting direction of the one-way paddle structure 12 is clockwise, and the opening direction of the box door 21 is opposite to the tangential direction of the setting direction. Figure 7 Part (a) of Figure 7), as shown in the left part of the figure, during the opening process of the box door 21, the paddle end b (or the elastic abutting portion d) of the rotatable component 121 abuts against the limiting protrusion p of the slide 112 and cannot rotate, so that the slide 112 slides relative to the slide rail 111 along the closing direction of the box door 21 (i.e., the opposite direction of the X direction) and covers the first identification portion m, thereby switching the slide identification structure 11 to the second identification form; then, the slide identification structure 11 continues to move along the opening direction, and the paddle end b (or the elastic abutting portion d) of the rotatable component 121 is deformed, passes over the limiting protrusion p of the slide 112 and separates from the limiting protrusion p, and the paddle end b (or the elastic abutting portion d) returns to its original shape after separation.

[0066] Next, see Figure 7 Part (b) of Figure 7 (As shown in the right portion of the figure), during the closing process of the cassette door 21, the slide identification structure 11 moves in the closing direction (i.e., opposite to the X-direction). The paddle end b (or elastic abutment d) of the rotatable component 121 contacts the limiting protrusion p of the slide 112 and rotates in the set direction until the paddle end b (or elastic abutment d) passes over the limiting protrusion p. Subsequently, the rotatable component 121 rotates under the elastic force of the elastic component 123 and abuts against the limiting component 122, thereby separating the slide identification structure 11 from the one-way paddle structure 12. It should be noted that, because during the closing process of the cassette door 21, the paddle end b (or elastic abutment d) of the rotatable component 121 only contacts but does not abut the limiting protrusion p of the slide 112, the slide 112 does not undergo relative displacement with the slide rail 111. Therefore, the slide identification structure 11 remains in the second identification state during the closing process of the cassette door 21.

[0067] It should be noted that the above process is only one possible situation in which the wafer identification device provided by the present application switches from the first identification form to the second identification form. In other embodiments of the present application, the transmission conditions of each component in the process of the wafer identification device switching from the first identification form to the second identification form may be different. For example, in one embodiment, the paddle end (or elastic abutment) of the rotatable component abuts against the limiting protrusion of the slide and cannot rotate, so that the slide slides relative to the slide rail in the closing direction of the box door and covers the first identification. After the slide identification structure is switched to the second identification form, the box door no longer moves in the opening direction, but moves in the closing direction. At this time, the paddle end (or elastic abutment) of the rotatable component does not pass over the limiting protrusion of the slide, but directly separates from the limiting protrusion. The slide identification structure remains in the second identification form during the closing process of the box door.

[0068] See Figure 6 and Figure 8In the wafer back cleaning machine, the setting direction of the one-way paddle structure 12 is counterclockwise, and the opening direction of the box door 21 is the same as the tangential direction of the setting direction. Figure 8 Part (a) of Figure 8 ), during the opening process of the box door 21, the paddle end b (or the elastic abutment portion d) of the rotatable component 121 contacts the limiting protrusion p of the slide 112 and rotates along the set direction until the paddle end b (or the elastic abutment portion d) passes over the limiting protrusion p; then, the rotatable component 121 rotates under the elastic force of the elastic component 123 and abuts against the limiting component 122, thereby separating the slide identification structure 11 from the one-way paddle structure 12.

[0069] Next, see Figure 8 Part (b) of Figure 8 ), as shown in the right part of the figure, during the closing process of the box door 21, the slide identification structure 11 moves in the closing direction (i.e., the opposite direction of the X direction), and the paddle end b (or the elastic abutting portion d) in the rotatable component 121 abuts against the limiting protrusion p of the slide 112 and cannot rotate, so that the slide 112 slides relative to the slide rail 111 in the opening direction of the box door 21 (i.e., the X direction) and covers the second identification portion n, thereby switching the slide identification structure 11 to the first identification form; subsequently, the slide identification structure 11 continues to move in the closing direction, and the paddle end b (or the elastic abutting portion d) of the rotatable component 121 is deformed, passes over the limiting protrusion p of the slide 112 and separates from the limiting protrusion p, and the paddle end b (or the elastic abutting portion d) returns to its original shape after separation.

[0070] It should be noted that, since the paddle end b (or the elastic abutment portion d) in the rotatable component 121 only contacts but does not abut the limiting protrusion p of the slide 112 during the opening process of the box door 21, the slide 112 does not undergo relative displacement with the slide rail 111, and the slide identification structure 11 does not switch the identification form during the opening process of the box door 21. At the same time, it should be emphasized that the above process is only an example of the wafer identification device provided in this application switching from the second identification form to the first identification form. In other embodiments of this application, the transmission conditions of each component in the process of the wafer identification device switching from the first identification form to the second identification form may be different, and this application does not impose any restrictions on this. The transmission conditions of each component in the process of the wafer identification device switching from the first identification form to the second identification form are the same as the process of the wafer identification device switching from the second identification form to the first identification form, and this application will not expand on this.

[0071] In one embodiment, the wafer identification device can not only be used to characterize the status of wafers in the wafer box, but also be used to assist in identifying special controls on a batch of wafers (Lot), or to assist in determining violations of regulations in the factory (Fab), so that operators can observe the real-time status of the wafers and intervene in time to reduce the degree of damage caused by metal contamination or eliminate other risks that affect product yield, thereby increasing customer satisfaction and enhancing customer confidence in wafer investment.

[0072] The unexpected effect of the present application is that by setting a slide identification structure on the outer wall of the box door of the crystal box and setting a corresponding one-way paddle structure in the process machine, the slide identification structure can be switched between the first identification form and the second identification form during the opening or closing process of the crystal box, which intuitively reflects whether the wafers in the crystal box have completed the corresponding process, or assists in identifying the special control of a batch of wafers, helps to discover the violation of the rules of the passing of goods, thereby reducing or avoiding metal contamination and other risks caused by misjudgment or improper operation.

[0073] Throughout this specification, references to terms such as "some embodiments," "other embodiments," and "desired embodiments" indicate that a particular feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative descriptions of these terms do not necessarily refer to the same embodiment or example.

[0074] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features of the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A wafer marking device, characterized in that: include: A slide identification structure is located on the outer wall of a cassette door of a wafer cassette and includes a first identification form and a second identification form; A one-way paddle structure is located in a process machine loaded with the wafer box; During the opening or closing process of the box door, the slide identification structure moves together with the box door, and the one-way paddle structure abuts against the slide identification structure to switch the slide identification structure between the first identification form and the second identification form.

2. The wafer marking device according to claim 1, characterized in that: The slide identification structure includes: The slide rail includes a first identification portion and a second identification portion sequentially arranged along the opening direction of the box door; A slide, slidably disposed on the slide rail, wherein a limiting protrusion is provided on the surface of the slide for contacting with the one-way paddle structure; Wherein, when the slide identification structure is in the first identification form, the slide covers the second identification portion and leaves the first identification portion exposed; When the slide identification structure is in the second identification form, the slide covers the first identification portion and leaves the second identification portion exposed.

3. The wafer marking device according to claim 2, characterized in that: The surfaces of the first identification portion and the second identification portion are different in color, or the surfaces of the first identification portion and the second identification portion are provided with different identification graphics or identification texts.

4. The wafer marking device according to claim 1, characterized in that: The one-way paddle structure includes: a rotatable component, wherein the extending direction of the rotatable component intersects with the moving direction of the box door during the opening process, so as to abut against the sliding identification structure during the opening and closing processes of the box door; a limiting assembly abutting against one side of the rotatable assembly to limit the rotatable assembly from rotating in a set direction; an elastic component abutting against the other side of the rotatable component to reset the rotatable component after rotation; In which, the set direction is clockwise or counterclockwise, and the tangent of the set direction is the same as one of the opening direction and the closing direction of the box door. When the box door moves in the opposite direction of the tangent, the sliding identification structure switches between the first identification form and the second identification form.

5. The wafer marking device according to claim 4, characterized in that: The process machine includes: A copper processing machine, wherein the copper processing machine is provided with a first one-way paddle structure, wherein a rotatable component of the first one-way paddle structure rotates along a first set direction; A wafer back cleaning machine, wherein the wafer back cleaning machine is provided with a second one-way paddle structure, the second one-way paddle structure being a mirror-symmetrical structure of the first one-way paddle structure with the rotatable component as the center, and the rotatable component of the second one-way paddle structure rotates along a second set direction; The first setting direction and the second setting direction are opposite.

6. The wafer marking device according to claim 4, characterized in that: The rotatable component comprises: A limiting end extending between the limiting component and the elastic component; a pick end, configured to abut against the slide identification structure; The rotating shaft is located between the limiting end and the paddle end.

7. The wafer marking device according to claim 6, characterized in that: The one-way paddle structure further includes a shell having an opening, the rotatable component, the limiting component and the elastic component are all located in the shell, and the paddle end extends out of the shell from the opening.

8. The wafer marking device according to claim 6, characterized in that: The paddle end is provided with an elastic abutment for abutting the slide identification structure. After the slide identification structure switches between the first identification form and the second identification form, and the box door is still moving in the opposite direction to the tangential direction, the elastic abutment is deformed and separated from the slide identification structure.

9. The wafer marking device according to claim 6, characterized in that: The paddle end is made of an elastic deformable material. After the slide identification structure switches between the first identification form and the second identification form, and the box door is still moving in the opposite direction to the tangential direction, the paddle end is deformed and separated from the slide identification structure.

10. The wafer marking device according to claim 4, characterized in that: The elastic component at least includes a spring.

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