EFEM device with ventilation opening safety door structure

Abstract

The utility model belongs to the technical field of EFEM equipment, in particular to an EFEM device with a ventilation opening safety door structure, which comprises EFEM equipment and a through-flow component, the EFEM equipment comprises an equipment cabinet, a filter screen, a safety door and a groove, the top of the equipment cabinet is provided with the filter screen, the side edge of the equipment cabinet is provided with the safety door, and the lower part of the safety door is provided with the groove; the through-flow component is arranged in the groove, the through-flow component comprises a mounting plate and a through hole, the mounting plate is arranged in the groove, the through hole is formed in the mounting plate, so that clean gas can flow out of the opening area of the safety door of the EFEM equipment, the clean gas is prevented from flowing into a reflow soldering furnace cavity, and the clean gas with the air pressure larger than the external air pressure in a machine table is kept; the problem that clean gas flows into the reflow soldering furnace chamber is effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of EFEM equipment, in particular to an EFEM device with a vent safety door structure. Background Art

[0002] EFEM equipment is an essential wafer transfer machine in semiconductor fabs. A HEPA (High-Efficiency Particulate Air) filter is installed inside the EFEM to maintain internal cleanliness. Its operating principle is to utilize the higher air pressure after filtration than outside air to prevent external particles from entering the EFEM, thereby maintaining wafer cleanliness. Wafer surface cleanliness is the most important factor affecting the subsequent semiconductor process and product qualification rate.

[0003] During the reflow process, nitrogen is filled into the reflow oven chamber to prevent air from entering the oven and effectively prevent oxidation of the wafer bumps during the reflow process. Nitrogen ensures that the reflow process is performed in an environment with an extremely low oxygen content (100 PPM), thus preventing oxidation of the wafer surface. Therefore, controlling the oxygen content during reflow is crucial.

[0004] During the operation of the SIKAMA reflow soldering machine, it was found that the oxygen content often fluctuated abnormally. After repeated verification, it was found that the factor affecting the oxygen content was the clean gas generated by the HEPA in the subsequent EFEM equipment being blown into the reflow oven chamber.

[0005] Currently, due to the good internal sealing of EFEM equipment, the clean gas generated will be blown into the reflow soldering chamber through the pipeline formed by the docking track and dust cover between the two devices, eventually causing abnormal fluctuations in the oxygen content in the reflow oven chamber.

[0006] In order to solve the problem of clean gas being blown into the reflow furnace chamber through the pipeline formed by the conveying track and the dust cover, it is necessary to change the flow direction of the clean gas. For this purpose, the present application proposes an EFEM device with a vent safety door structure. Utility Model Content

[0007] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract and title of the utility model to avoid obscuring the purpose of this section, the abstract and the title of the utility model, and such simplifications or omissions shall not be used to limit the scope of the present invention.

[0008] In view of the above problems and / or problems existing in existing EFEM equipment, the present utility model is proposed.

[0009] Therefore, the purpose of the present invention is to provide an EFEM device with a vent safety door structure. Through a simple design, it is possible to achieve partial outflow of clean gas from the safety door opening area of ​​the EFEM device without affecting the cleanliness inside the EFEM device without too many modifications, thereby preventing the flow into the reflow oven chamber and maintaining the clean gas pressure inside the machine greater than the external air pressure, thereby effectively solving the problem of clean gas flowing into the reflow oven chamber.

[0010] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0011] An EFEM device with a vent safety door structure, comprising:

[0012] EFEM equipment, including an equipment platform, a filter, a safety door and a groove, wherein the filter is provided on the top of the equipment platform, the safety door is provided on the side of the equipment platform, and a groove is provided at the bottom of the safety door;

[0013] The flow-through component is arranged in the groove, and the flow-through component includes a mounting plate and a through hole. The mounting plate is arranged in the groove, and the through hole is provided in the mounting plate.

[0014] As a preferred solution of the EFEM device with a vent safety door structure described in the utility model, a card slot is provided on the inner side of the groove, and a locking tooth corresponding to the card slot is provided on the outer side of the mounting plate, and the mounting plate is buckled on the card slot on the inner side of the groove through the locking tooth.

[0015] As a preferred solution of the EFEM device with a vent safety door structure described in the utility model, the mounting plate is an acrylic plate.

[0016] As a preferred solution of the EFEM device with a ventilation safety door structure described in the utility model, the through holes are evenly distributed in three rows on the mounting plate.

[0017] Compared with the existing technology: the utility model has a simple design and does not require too many modifications. Without affecting the cleanliness inside the EFEM equipment, the clean gas can be partially outflowed from the opening area of ​​the safety door of the EFEM equipment, preventing it from flowing into the reflow oven cavity, maintaining the clean gas pressure inside the machine greater than the external air pressure, and effectively solving the problem of clean gas flowing into the reflow oven cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive labor. Among them:

[0019] Figure 1 This is a schematic diagram of the shaft side structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the safety door structure of the present utility model.

[0021] In the figure: 100 EFEM equipment, 110 equipment machine, 120 filter screen, 130 safety door, 140 groove, 200 flow-through component, 210 mounting plate, 220 through hole. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0023] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0024] Next, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, cross-sectional views of device structures may be partially enlarged and not to scale when describing the embodiments of the present invention. Furthermore, the schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, three-dimensional dimensions, including length, width, and depth, should be included.

[0025] In order to make the purpose, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0026] The utility model provides an EFEM device with a vent safety door structure. Through a simple design, it is possible to achieve partial outflow of clean gas from the safety door opening area of ​​the EFEM device without requiring too much modification, without affecting the cleanliness of the interior of the EFEM device, thereby preventing the flow of clean gas into the reflow oven chamber and maintaining the clean gas pressure inside the machine greater than the external air pressure, effectively solving the problem of clean gas flowing into the reflow oven chamber. Figure 1-Figure 2 , including: an EFEM device 100 and a flow component 200.

[0027] The EFEM device 100 includes a device platform 110, a filter 120, a safety door 130, and a groove 140. The filter 120 is set on the top of the device platform 110, the safety door 130 is set on the side of the device platform 110, and the groove 140 is defined at the bottom of the safety door 130.

[0028] The flow component 200 is disposed in the groove 140 . The flow component 200 includes a mounting plate 210 and a through hole 220 . The mounting plate 210 is disposed in the groove 140 , and the through hole 220 is defined in the mounting plate 210 .

[0029] A locking groove is provided inside the groove 140 , and a locking tooth corresponding to the locking groove is provided outside the mounting plate 210 . The mounting plate 210 is buckled on the locking groove inside the groove 140 through the locking tooth.

[0030] The mounting plate 210 is made of an acrylic plate, and the through holes 220 are evenly distributed in three rows on the mounting plate 210 .

[0031] Among them, filter 120 (HEPA): installed on the top of the EFEM equipment, blows external air into the machine through the filter to maintain positive pressure inside the machine.

[0032] D1 safety door 140: Cut off a 40cm long * 15cm wide metal plate at the bottom of the safety door, and install an acrylic plate with 3 rows * 14 columns and 2cm diameter through holes.

[0033] During actual use, the clean gas flows out from the through-hole on the modified D1 safety door 140. A large amount of clean gas is no longer blown into the reflow soldering chamber through the pipeline formed by the docking track and the dust cover between the two devices. This not only keeps the inside of the EFEM clean, but also allows the oxygen content inside the reflow to remain within a normal range.

[0034] While the present invention has been described above with reference to specific embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, as long as no structural conflicts exist, the various features of the embodiments disclosed herein may be combined with one another in any manner, and the omission of an exhaustive description of these combinations in this specification is solely for the sake of space and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. An EFEM device with a vent safety door structure, characterized in that: include: An EFEM device (100) comprises a device platform (110), a filter (120), a safety door (130) and a groove (140), wherein the filter (120) is arranged on the top of the device platform (110), the safety door (130) is arranged on the side of the device platform (110), and the groove (140) is provided at the bottom of the safety door (130); A flow-through component (200) is arranged in the groove (140), and the flow-through component (200) includes a mounting plate (210) and a through hole (220). The mounting plate (210) is arranged in the groove (140), and the through hole (220) is provided in the mounting plate (210).

2. The EFEM device with a vent safety door structure according to claim 1, characterized in that: A clamping groove is provided on the inner side of the groove (140), and a clamping tooth corresponding to the clamping groove is provided on the outer side of the mounting plate (210). The mounting plate (210) is buckled on the clamping groove on the inner side of the groove (140) through the clamping tooth.

3. The EFEM device with a vent safety door structure according to claim 1, characterized in that: The mounting plate (210) is made of an acrylic plate.

4. The EFEM device with a vent safety door structure according to claim 1, characterized in that: The through holes (220) are evenly distributed in three rows on the mounting plate (210).

Images