Anti-collision clamping jaw device

Abstract

The utility model discloses an anti-collision clamping jaw device, and relates to the technical field of wafer processing, and the anti-collision clamping jaw device comprises two clamping mechanisms which are oppositely arranged, and a driving mechanism which drives the two clamping mechanisms to be close to or far away from each other in a first direction. Each clamping mechanism comprises at least one clamping jaw, each clamping jaw comprises a connecting part and a clamping part, each connecting part is provided with an upper end and a lower end which are opposite in the second direction, each clamping part is elastically connected with the corresponding connecting part in the second direction, and at least part of each clamping part extends out of the lower end of the corresponding connecting part; at least one connecting part is provided with a proximity sensor located above the corresponding clamping part, and the proximity sensor is configured to send out a proximity signal after detecting that the clamping part approaches so as to enable a mechanical arm matched with the anti-collision clamping jaw device to stop running, so that the clamping jaw is prevented from further colliding with the storage table top, and damage to the clamping jaw is avoided.

Description

Technical Field

[0001] The present application relates to the field of wafer processing technology, and in particular to an anti-collision clamping device. Background Art

[0002] Wafers are the fundamental raw material for manufacturing semiconductor devices. Extremely high-purity semiconductors are produced through processes like crystal pulling and slicing to form wafers. These wafers undergo a series of semiconductor manufacturing processes to form extremely tiny circuit structures. They are then cut, packaged, and tested to become integrated circuit chips, which are widely used in various electronic devices.

[0003] A tray is a container for semiconductor devices, typically molded from conductive or dissipative plastic or carbon fiber to protect electrostatically sensitive devices. Trays are commonly used to handle and place IC chips. Their outer structure has standardized dimensions, while their inner structure features regularly arranged cavities designed to hold individual IC chips in specific packages. Trays are stackable, allowing multiple trays to be stacked and packaged for shipping by adding additional trays to the top of the tray.

[0004] A tray carrier is used to hold multiple pallets for batch processing during production and transportation. The size and shape of the tray carrier are adapted to the pallets to ensure that the pallets fit tightly within the tray carrier's internal structure during transportation.

[0005] During the transportation process, a gripper is often used to move pallets and / or pallet carriers back and forth between shelves and mobile carts under the drive of a robot. During this process, due to issues with the robot's movement accuracy and durability, when clamping the pallet and / or pallet carrier, the bottom of the gripper often touches the shelf or the storage surface of the mobile cart. The robot cannot stop moving in time when the gripper touches the shelf or the storage surface of the mobile cart, which can easily cause the gripper to further hit the storage table and be damaged. Utility Model Content

[0006] This application aims to solve at least one of the technical problems existing in the prior art. To this end, this application provides an anti-collision clamping device to solve the problem in the prior art that when the clamping claw of the manipulator contacts the storage surface of a shelf or mobile cart, it cannot stop moving in time, which easily causes the clamping claw to further strike the storage surface and cause damage.

[0007] The purpose of this application can be achieved through the following technical solutions:

[0008] The present application provides an anti-collision clamping claw device, which includes two clamping mechanisms arranged opposite to each other and a driving mechanism for driving the two clamping mechanisms to move closer to or away from each other in a first direction;

[0009] Each clamping mechanism includes at least one clamping claw, the clamping claw includes a connecting portion and a clamping portion, the connecting portion has an upper end and a lower end opposite to each other along the second direction, the clamping portion is elastically connected to the connecting portion along the second direction, and the clamping portion at least partially extends from the lower end of the connecting portion, and at least one connecting portion is equipped with a proximity sensor located above the corresponding clamping portion, and the proximity sensor is configured to send a proximity signal after detecting the approach of the clamping portion to stop the operation of the robotic arm cooperating with the anti-collision clamping claw device.

[0010] Optionally, a accommodating cavity is provided in the connecting part, which extends from the lower end of the connecting part toward the upper end of the connecting part along the second direction, the proximity sensor is fixedly installed in the accommodating cavity, the clamping part is movably provided in the accommodating cavity, and partially extends from the lower end of the connecting part.

[0011] Optionally, the connecting portion and the clamping portion are connected via a spring.

[0012] Optionally, a guide hole arranged along the second direction is opened on the clamping portion, and a guide rod passing through the guide hole is provided on the clamping portion.

[0013] Optionally, the clamping portion has a lower end surface facing away from the connecting portion, and a buffer pad is provided on the lower end surface.

[0014] Optionally, each clamping mechanism includes a connecting rod and at least two clamping jaws arranged on the connecting rod at intervals perpendicular to the first direction, and the driving mechanism includes an electric cylinder with two output shafts, which are respectively fixedly connected to the two connecting rods so that the clamping jaws on the two connecting rods are relatively close to or far away from each other.

[0015] Optionally, the anti-collision clamping device also includes a bracket, the bracket has relative upper and lower ends, and the bracket is also provided with an avoidance hole passing through the upper and lower ends of the bracket. The electric cylinder is fixedly installed on the upper end of the bracket, and the lower end of the bracket is fixedly installed with a slide rail extending along the first direction. The connecting rod is slidably installed on the slide rail through a slider, and the output shaft passes through the avoidance hole and is mortised with the connecting rod.

[0016] Optionally, a first sensor is provided on one side of at least one clamping jaw, and the first sensor is used to emit a first detection signal to detect whether the clamping portion is clamped in place.

[0017] Optionally, a mounting shell corresponding to the first sensor is installed on one side of the clamping jaw, and the first sensor is installed inside the mounting shell by two bolts. An arc-shaped adjustment groove is provided on the mounting shell, and one bolt is passed through the arc-shaped adjustment groove. The position of the bolt in the arc-shaped adjustment groove is adjusted to adjust the distance of the object to be clamped detected by the first sensor along the first direction.

[0018] Optionally, the anti-collision clamping claw device further includes at least one second sensor, and the second sensor is used to emit a second detection signal to detect the height of the stack of objects to be clamped.

[0019] Beneficial effects:

[0020] By elastically connecting the clamping part and the connecting part along the second direction, when the clamping claw collides with the storage table during the descent process, the movement can be buffered by the relative movement between the clamping part and the connecting part. Moreover, by providing a proximity sensor, when the clamping part moves to a certain distance relative to the connecting part, the approach of the clamping part can be sensed, thereby stopping the operation of the mechanical arm driving the anti-collision clamping claw device, thereby preventing the clamping claw from further colliding with the storage table and thus avoiding damage to the clamping claw. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present application will be further described below with reference to the accompanying drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of the anti-collision clamping device in one embodiment of the present application;

[0023] Figure 2 This is a schematic diagram of the structure in which the connecting rod and the bracket are slidably engaged through the slider and the slide rail in one embodiment of the present application;

[0024] Figure 3 This is a schematic structural diagram of the cooperation between the mounting block and the clamping portion in one embodiment of the present application.

[0025] Description of reference numerals:

[0026] 10. Clamping jaw; 101. Connecting portion; 1011. Mounting block; 102. Clamping portion; 1021. Support plate; 11. Driving mechanism; 111. Output shaft; 12. Spring; 13. Guide hole; 14. Guide rod; 15. Connecting rod; 16. Bracket; 161. Avoidance hole; 17. Slide rail; 18. Slider; 19. First sensor; 20. Mounting housing; 201. Arc-shaped adjustment slot; 21. Second sensor; 22. Buffer block; 23. Aviation plug; 24. Proximity sensor. DETAILED DESCRIPTION

[0027] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0028] See also Figure 1-3 As shown, in some embodiments, the present application provides an anti-collision clamping claw device to prevent damage caused by excessive impact on the storage table (table on which the object to be clamped is placed) when grabbing the object to be clamped (not shown).

[0029] The anti-collision clamping device includes two clamping mechanisms arranged opposite to each other and a device for driving the two clamping mechanisms to move in a first direction (see Figure 1 ) driving mechanism 11 that moves closer or further away.

[0030] Each clamping mechanism includes at least one clamping jaw 10 , and the driving mechanism 11 can drive the clamping jaws 10 of the two clamping mechanisms to move closer to or farther away from each other so as to clamp and release the object to be clamped.

[0031] The clamping jaw 10 comprises a connecting portion 101 and a clamping portion 102. The connecting portion 101 has a Figure 2 ) at opposite upper and lower ends, the clamping portion 102 at least partially extending from the lower end of the connecting portion 101, and the clamping portion 102 and the connecting portion 101 are elastically connected along the second direction. A proximity sensor 24 is mounted on at least one connecting portion 101, located above the corresponding clamping portion 102.

[0032] During the process of the robotic arm (not shown) driving the anti-collision clamping claw device to descend and pick up objects, when the lower end of the clamping part 102 touches the storage table, the clamping part 102 moves toward the upper end of the connecting part 101 along the second direction under the action of elasticity. After moving a set distance and entering the sensing area of ​​the proximity sensor 24 and being sensed by the proximity sensor 24, the proximity sensor 24 transmits a proximity signal to the robotic arm. The robotic arm stops running after receiving the proximity signal, effectively preventing the clamping part 102 from further touching the storage table and causing damage to the surrounding structure of the clamping part 102.

[0033] In some embodiments, a receiving cavity is provided in the connection portion 101, and the receiving cavity extends from the lower end of the connection portion 101 along the second direction toward the upper end of the connection portion 101. The receiving cavity has a first cavity opening located on the lower end surface of the connection portion 101 and a second cavity opening located on the side of the connection portion 101 opposite to the clamped object and connected to the first cavity opening. The proximity sensor 24 is fixedly installed in the receiving cavity and is blocked by the connection portion 101. The clamping portion 102 is elastically provided in the receiving cavity, and the clamping portion 102 partially extends from the first cavity opening out of the lower end of the connection portion 101, so that the clamping jaw 10 collides with the storage table through the clamping portion 102, and the clamping portion 102 can also retract relative to the connection portion 101 during the contact process to prevent the clamping jaw 10 from being damaged after colliding with the storage table. The clamping portion 102 partially extends from the second cavity, and the side of the clamping portion 102 facing the object to be clamped is flush with the side of the connecting portion 101 facing the object to be clamped, so that when clamping the object to be clamped, the connecting portion 101 can also participate in the clamping, thereby increasing the number of objects to be clamped (such as pallets) that the anti-collision clamping claw device can clamp at one time.

[0034] In some embodiments, the clamping portion 102 has a lower end surface facing away from the connecting portion 101. A buffer block 22 is provided on the lower end surface of the clamping portion 102. When the clamping portion 102 collides with the storage surface, the buffer block 22 can provide a buffer, thereby preventing hard contact between the clamping portion 102 and the storage surface. Preferably, the buffer block 22 is made of resin.

[0035] In some embodiments, the connecting portion 101 and the clamping portion 102 are connected via a spring 12. Specifically, a mounting block 1011 fixedly connected to the connecting portion 101 is provided in the accommodating cavity. The mounting block 1011 is located above the clamping portion 102. The spring 12 is disposed between the mounting block 1011 and the clamping portion 102, with one end fixedly connected to the mounting block 1011 and the other end fixedly connected to the clamping portion 102. The spring 12 is distributed along the second direction, so that the connecting portion 101 and the clamping portion 102 are elastically connected along the second direction.

[0036] In some embodiments, the proximity sensor 24 is also fixedly mounted on the mounting block 1011 .

[0037] In some embodiments, in order to further increase the stability of the movement of the clamping portion 102 relative to the connecting portion 101, a guide hole 13 arranged along the second direction is opened on the clamping portion 102, and a guide rod 14 passing through the guide hole 13 is provided on the clamping portion 102. Through the cooperation of the guide rod 14 and the guide hole 13, the movement of the clamping portion 102 relative to the connecting portion 101 can be guided, thereby improving the stability of the movement of the clamping portion 102 relative to the connecting portion 101.

[0038] In some embodiments, the clamping portion 102 is provided with a support plate 1021 extending from a side of the clamping portion 102 opposite to the object to be clamped. When the clamping portion 102 clamps the object to be clamped, the support plate 1021 supports the object from below to prevent it from falling off after clamping the object.

[0039] In some embodiments, to further enhance the stability of gripping and transporting an object, the gripping mechanism includes a connecting rod 15 and at least two clamping jaws 10 spaced apart on the connecting rod 15 perpendicular to a first direction. The upper ends of the connecting portions 101 of the clamping jaws 10 are fixedly connected to the connecting rod 15. The drive mechanism 11 includes an electric cylinder having two output shafts 111, each fixedly connected to the two connecting rods 15. The electric cylinder drives the clamping jaws 10 on the two connecting rods 15 toward or away from each other via the two output shafts 111. By providing at least four clamping jaws 10, the clamping jaws 10 cooperate with each other to grip the object, significantly enhancing the stability of the gripping.

[0040] In some embodiments, to improve the stability of the clamping jaw 10 during relative approaching or moving away, the anti-collision clamping jaw device further includes a bracket 16 having an upper end and a lower end opposite to each other, the electric cylinder being fixedly mounted on the upper end of the bracket 16, and a slide rail 17 extending along the first direction being fixedly mounted on the lower end of the bracket 16.

[0041] Specifically, a clearance hole 161 is formed in the middle of the bracket 16, extending through the upper and lower ends of the bracket 16. Two slide rails 17 are provided on either side of the clearance hole 161. Each connecting rod 15 slides with a slide rail 17 via a slider 18, allowing the connecting rod 15 to move smoothly along the slide rail 17. Two output shafts 111 pass through the clearance hole 161 and are mortised with corresponding connecting rods 15, respectively, to facilitate assembly and disassembly of the output shafts 111 and the connecting rods 15.

[0042] In some embodiments, a first sensor 19 is provided on one side of at least one clamping jaw 10 , and the first sensor 19 emits a first detection signal to detect whether the clamping portion 102 is clamped in place, thereby improving the clamping accuracy.

[0043] In some embodiments, four grippers 10 are arranged in a rectangular array, and two first sensors 19 are provided, one on each of the two diagonally spaced grippers 10. The first sensors 19 are located on the side of the grippers 10 that faces the other gripper 10 on the same connecting rod 15. Two proximity sensors 24 are also provided, one on each of the two diagonally spaced grippers 10.

[0044] Furthermore, a mounting housing 20 corresponding to the first sensor 19 is fixedly provided on the side of the clamping jaw 10. The first sensor 19 is disposed within the mounting housing 20, and an avoidance cavity is provided on the side of the mounting housing 20 facing the object to be clamped. The avoidance cavity extends to the lower end of the mounting housing 20 to prevent the mounting housing 20 from interfering with the detection signal emitted by the first sensor 19. An arc-shaped adjustment slot 201 is provided on the side of the mounting housing 20 facing away from the clamping jaw 10. The first sensor 19 is fixedly mounted within the mounting housing 20 by two bolts, one of which passes through the arc-shaped adjustment slot 201. By changing the position of the bolts within the arc-shaped adjustment slot 201, the inclination angle of the first sensor 19 can be adjusted, so that the detection distance of the first sensor 19 detecting the object to be clamped along the first direction can be adjusted. In addition, the object to be clamped can be detected when the object to be clamped is closer to or farther away from the clamping jaw 10 along the first direction, thereby improving the clamping accuracy of the clamping jaw 10.

[0045] In some embodiments, the anti-collision clamping device further includes at least one second sensor 21 , and the second sensor 21 is used to emit a second detection signal to detect the height of the stack of objects to be clamped.

[0046] Specifically, the second sensor 21 is mounted on the bracket 16, above the gripper 10 and outside the gripping area formed by the gripper 10. This prevents the gripper 10 from interfering with the gripper's detection. The second sensor 21 detects the height of the objects already stacked in the palletizing area, thereby determining how many more objects are needed to reach the desired stacking height. The second sensor 21 also detects the height of objects in the pickup area, enabling the gripper 10 to grasp objects of the desired height at once and transport them to the palletizing area for palletizing.

[0047] In some embodiments, the anti-collision clamp device further includes an aviation plug 23 , and the electrical circuits of the drive mechanism 11 , the first sensor 19 , and the second sensor 21 are all integrated on the same aviation plug 23 , and the anti-collision clamp device is electrically connected to external equipment.

[0048] The above is a detailed description of an embodiment of the present application. However, the content is only a preferred embodiment of the present application and cannot be considered to limit the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope of the patent application.

[0049] It should be noted that the terms "first", "second" and similar terms used in this application do not indicate any order, quantity or importance, but are only used to distinguish different components. The descriptions of the directions of "left", "right", "left side", "right side", "upper", "lower", "top", "bottom" and so on in this application are all defined based on the relationship between the orientations or positions shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the structure must be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application. In the description of this application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0050] In the description of this application, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

Claims

1. An anti-collision clamping device, characterized in that: The anti-collision clamping device includes two clamping mechanisms arranged opposite to each other and a driving mechanism for driving the two clamping mechanisms to move closer to or away from each other in a first direction; Each of the clamping mechanisms includes at least one clamping claw, which includes a connecting portion and a clamping portion, the connecting portion having an upper end and a lower end opposite to each other along a second direction, the clamping portion being elastically connected to the connecting portion along the second direction, and the clamping portion at least partially extending from the lower end of the connecting portion, and at least one of the connecting portions is equipped with a proximity sensor located above the corresponding clamping portion, and the proximity sensor is configured to emit a proximity signal after detecting the approach of the clamping portion to stop the operation of the robotic arm cooperating with the anti-collision clamping claw device.

2. The anti-collision clamping device according to claim 1, characterized in that: A accommodating cavity is provided in the connecting portion, and the accommodating cavity extends from the lower end of the connecting portion toward the upper end of the connecting portion along the second direction. The proximity sensor is fixedly installed in the accommodating cavity, and the clamping portion is movably provided in the accommodating cavity and partially extends out from the lower end of the connecting portion.

3. The anti-collision clamping device according to claim 1, characterized in that: The connecting portion and the clamping portion are connected via a spring.

4. The anti-collision clamping device according to claim 1, characterized in that: A guide hole arranged along the second direction is opened on the clamping portion, and a guide rod passing through the guide hole is provided on the clamping portion.

5. The anti-collision clamping device according to claim 1, characterized in that: The clamping portion has a lower end surface facing away from the connecting portion, and a buffer pad is provided on the lower end surface.

6. The anti-collision clamping device according to claim 1, characterized in that: Each of the clamping mechanisms includes a connecting rod and at least two clamping jaws arranged on the connecting rod at intervals perpendicular to the first direction. The driving mechanism includes an electric cylinder with two output shafts, and the two output shafts are respectively fixedly connected to the two connecting rods so that the clamping jaws on the two connecting rods are relatively close to or far away from each other.

7. The anti-collision clamping device according to claim 6, characterized in that: The anti-collision clamping device also includes a bracket, which has an upper end and a lower end relative to each other. The bracket is also provided with an avoidance hole passing through the upper end and the lower end of the bracket. The electric cylinder is fixedly mounted on the upper end of the bracket, and the lower end of the bracket is fixedly mounted with a slide rail extending along the first direction. The connecting rod is slidably mounted on the slide rail through a slider, and the output shaft passes through the avoidance hole and is mortise-jointed with the connecting rod.

8. The anti-collision clamping device according to any one of claims 1 to 7, characterized in that: A first sensor is provided on one side of at least one of the clamping jaws, and the first sensor is used to emit a first detection signal to detect whether the clamping portion is clamped in place.

9. The anti-collision clamping device according to claim 8, characterized in that: A mounting shell corresponding to the first sensor is installed on one side of the clamping jaw. The first sensor is installed inside the mounting shell by two bolts. An arc-shaped adjustment groove is provided on the mounting shell, and one of the bolts is passed through the arc-shaped adjustment groove. By adjusting the position of the bolt in the arc-shaped adjustment groove, the distance of the object to be clamped detected by the first sensor along the first direction can be adjusted.

10. The anti-collision clamping jaw device according to any one of claims 1 to 7, characterized in that: The anti-collision clamping claw device further includes at least one second sensor, which is used to emit a second detection signal to detect the height of the stacked objects to be clamped.

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