Spindle body inclination angle adjusting device and wafer thinning machine

Abstract

The utility model provides a main shaft body dip angle adjusting device and a wafer thinning machine, and relates to the technical field of semiconductor manufacturing, the main shaft body dip angle adjusting device comprises a main shaft body and a shaft shell, the main shaft body is arranged in the shaft shell in a penetrating mode, the main shaft body dip angle adjusting device further comprises a main shaft flange located below the main shaft body and detachably connected with the bottom of the main shaft body; the shaft shell flange is positioned below the main shaft flange and is detachably connected with the bottom of the shaft shell; the adjusting mechanism is located between the main shaft flange and the shaft shell flange and used for changing the inclination angle of the main shaft flange and the inclination angle of the main shaft body. The defect that a main shaft body is inconvenient to install in the related technology is overcome.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a spindle tilt adjustment device and a wafer thinning machine. Background Art

[0002] In the semiconductor manufacturing process, wafer thinning is an important process step that directly affects the quality of subsequent processes and product performance. Traditional wafer thinning machines usually use a fixed tilt angle for thinning. However, in actual applications, wafers of different materials and thicknesses have different requirements for thinning angles. Fixed tilt angles may lead to problems such as low processing efficiency, poor surface quality, and material waste. With the rapid development of semiconductor technology, especially in the fields of high-performance computing, mobile devices, and the Internet of Things, higher requirements are placed on the thickness and surface quality of wafers. Therefore, it is particularly important to develop a wafer thinning machine that can flexibly adjust the tilt angle.

[0003] Prior art, such as Chinese patent document CN221129999U, discloses a grinding wheel spindle inclination adjustment structure, which includes a grinding wheel spindle body, a grinding wheel, a spindle body seat, and three legs. The grinding wheel is fastened to the lower end face of the grinding wheel spindle body, and the grinding wheel spindle body is connected to the spindle body seat through the three legs evenly distributed on the circumference of its grinding wheel spindle flange. One of the three legs is an adjustable leg and the other two are fixed legs. The two ends of the double-headed screw of the adjustable leg are respectively connected and fastened to the connecting parts on the grinding wheel spindle flange and the spindle body seat, and the pitches of the two ends of the double-headed screw are unequal.

[0004] In the prior art, since the spindle body and the spindle flange are an integrated structure, and there is interference between the shaft housing and the spindle body, the spindle body can only be installed from the bottom of the equipment during installation. However, there is a workbench at the bottom of the thinning machine, so the shaft housing must be removed during installation, which results in the defect of inconvenience in installing the spindle body. Utility Model Content

[0005] The purpose of this application is to provide a spindle inclination adjustment device and a wafer thinning machine, aiming to solve the defect of inconvenient spindle installation in related technologies.

[0006] Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

[0007] According to a first aspect of the present application, a spindle body inclination angle adjustment device is provided, comprising a spindle body and a shaft housing, wherein the spindle body is disposed inside the shaft housing, and comprises:

[0008] A spindle flange is located below the spindle body and is detachably connected to the bottom of the spindle body;

[0009] A shaft housing flange is located below the main shaft flange and is detachably connected to the bottom of the shaft housing;

[0010] The adjusting mechanism is located between the main shaft flange and the shaft housing flange and is used to change the inclination angle of the main shaft flange and the main shaft body.

[0011] In an exemplary embodiment of the present application, the main shaft body and the main shaft flange are connected by fastening bolts.

[0012] In an exemplary embodiment of the present application, the shaft housing and the shaft housing flange are connected by fastening bolts.

[0013] In an exemplary embodiment of the present application, the adjustment mechanism includes:

[0014] A support portion is provided between the main shaft flange and the shaft housing flange;

[0015] The adjusting portion is provided between the main shaft flange and the shaft housing flange and is capable of adjusting its length between the main shaft flange and the shaft housing flange.

[0016] In an exemplary embodiment of the present application, the support portion is configured as a support column, the bottom of the support column is fixedly connected to the upper surface of the shaft housing flange, and the top of the support column is spherically hinged to the lower surface of the main shaft flange.

[0017] In an exemplary embodiment of the present application, the adjustment part is configured as an adjustment column, and the part above the middle of the adjustment column and the part below the middle of the adjustment column are processed with two sections of threads with unequal pitches, the top of the adjustment column is threadedly connected to the main shaft flange, and the bottom of the adjustment column is threadedly connected to the shaft housing flange; the length of the adjustment column between the main shaft flange and the shaft housing flange is changed by rotating the adjustment column.

[0018] In an exemplary embodiment of the present application, a connecting bolt is provided at the bottom of the adjusting column, the bottom of the adjusting column extends into the interior of the connecting bolt and is threadedly connected to the inner side of the connecting bolt, the connecting bolt passes through the shaft housing flange and is threadedly connected to a nut below the shaft housing flange.

[0019] In an exemplary embodiment of the present application, the number of the supporting portion is one, the number of the adjusting portions is two, and the supporting portion and the two adjusting portions are evenly spaced and distributed around the main shaft flange and the shaft housing flange.

[0020] In an exemplary embodiment of the present application, an operating portion for operating the rotation is processed on the top of the adjusting column.

[0021] According to a second aspect of the present application, a wafer thinning machine is provided, comprising any one of the spindle inclination adjustment devices described above.

[0022] The exemplary embodiments of the present application may have some or all of the following beneficial effects:

[0023] In a spindle body inclination adjustment device provided in an example embodiment of the present application, by setting the spindle body and the spindle flange as a split structure, the staff only needs to operate the adjustment mechanism to adjust the spindle body to the same inclination angle as the spindle flange. After removing the spindle flange as a structural feature of the spindle body, the interference that exists when the spindle body is installed from above the shaft housing can be eliminated, thereby simplifying the installation operation of the spindle body. The staff can directly insert the spindle body into the shaft housing from the top of the thinning machine without the need for tedious shaft housing disassembly steps. When the spindle body inclination angle needs to be adjusted, the operation process is also smooth and efficient. The staff first uses the adjustment mechanism to adjust the spindle flange to the ideal inclination angle, and then installs the adjustment device into the thinning machine from the bottom of the shaft housing, and then connects the spindle body to the spindle flange. The spindle body will automatically align with the inclination angle consistent with the spindle flange. Finally, the connection between the shaft housing and the shaft housing flange completes the entire adjustment process. Through the above structure, not only can the staff operate the spindle angle adjustment work outside the thinning machine, expanding the staff's operating space and making the adjustment work more convenient; at the same time, the assembly work of the spindle body is also optimized because there is no need to disassemble the shaft housing, which provides convenience for the assembly work of the spindle body.

[0024] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are incorporated into and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification, are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can derive other drawings based on these drawings without inventive effort.

[0026] Figure 1 A schematic structural diagram of a spindle inclination adjustment device according to an embodiment of the present application is shown;

[0027] Figure 2 A schematic structural diagram showing the connection between the spindle body and the spindle flange in an embodiment of the present application is shown;

[0028] Figure 3 An exploded view of the main shaft flange, the adjustment mechanism, and the shaft housing flange along the axis direction in an embodiment of the present application is shown;

[0029] Figure 4 A partial cross-sectional view showing the connection structure between the main shaft flange, the support column and the shaft housing flange in an embodiment of the present application is shown;

[0030] Figure 5 A partial cross-sectional view of the connection structure between the main shaft flange, the adjustment column and the shaft housing flange in an embodiment of the present application is shown.

[0031] Description of reference numerals:

[0032] 1. Spindle body; 2. Shaft housing; 3. Spindle flange; 4. Shaft housing flange; 5. Adjustment mechanism; 51. Support column; 52. Adjustment column; 521. Operating part; 6. Connecting sleeve; 7. Threaded sleeve; 8. Connecting bolt; 9. Nut. DETAILED DESCRIPTION

[0033] Example embodiments will now be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the figures represent like or similar structures, and thus their detailed descriptions will be omitted. Furthermore, the figures are merely schematic illustrations of the present application and are not necessarily drawn to scale.

[0034] While relative terms such as "upper" and "lower" are used in this specification to describe the relationship of one illustrated component to another, these terms are used for convenience only, such as in accordance with the orientation of the illustrations in the accompanying drawings. It should be understood that if the illustrated device were flipped upside down, the component described as "upper" would become the component "lower." When a structure is referred to as "on" another structure, this may mean that the structure is integrally formed with the other structure, that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through the other structure.

[0035] The terms "a", "an", "the" and "at least one" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express open-ended inclusion and mean that additional elements / components / etc. may be present in addition to the listed elements / components / etc.; the terms "first" and "second" are used only as labels and do not limit the quantity of their objects.

[0036] like Figure 1 and Figure 2As shown, a spindle body inclination angle adjustment device includes a spindle body 1 and a shaft housing 2, wherein the spindle body 1 is arranged inside the shaft housing 2, and includes:

[0037] The spindle flange 3 is located below the spindle body 1 and is detachably connected to the bottom of the spindle body 1;

[0038] The shaft housing flange 4 is located below the main shaft flange 3 and is detachably connected to the bottom of the shaft housing 2;

[0039] The adjustment mechanism 5 is located between the main shaft flange 3 and the shaft housing flange 4 and is used to change the inclination angle of the main shaft flange 3 and the main shaft body 1 .

[0040] In the embodiment of the present application, the staff first adjusts the main shaft flange 3 to a preset tilt angle through the adjustment mechanism 5. Subsequently, the main shaft body 1 is inserted into the shaft housing 2 from the top of the thinning machine. After the installation of the main shaft body 1 is completed, the main shaft flange 3, the shaft housing flange 4, and the adjustment mechanism 5 are placed into the thinning machine from the bottom of the shaft housing 2, and the main shaft body 1 is connected to the main shaft flange 3. At the same time, the shaft housing 2 and the shaft housing flange 4 are also connected accordingly. Since the main shaft flange 3 has been pre-adjusted to an appropriate tilt angle, after the main shaft body 1 and the main shaft flange 3 are connected, the main shaft flange 3 can guide the main shaft body 1 to maintain the adjusted tilt angle.

[0041] Through the above structure, compared to conventional techniques, this embodiment utilizes a separate structure for the spindle body 1 and the spindle flange 3, eliminating the complex operation of directly adjusting the angle of the spindle body 1. As a result, after the spindle flange 3 is separated from the spindle body 1, the spindle body 1 can be smoothly installed into the shaft housing 2 from above, completely avoiding interference between the spindle flange 3 and the shaft housing 2. Consequently, when assembling the spindle body 1, there is no need to disassemble the shaft housing 2, greatly simplifying the assembly process. This not only significantly improves assembly efficiency but also provides great convenience for operators, ensuring a smooth and efficient assembly process.

[0042] To adjust the angle of the spindle body 1, the operator first adjusts the spindle flange 3 to the appropriate angle, then installs it under the shaft housing 2 and connects the spindle body 1 to the spindle flange 3. Once installed, the spindle body 1 automatically adjusts to maintain the same inclination angle as the spindle flange 3. This allows operators to perform angle adjustments from outside the milling machine, expanding their operating space and making adjustments more convenient.

[0043] In the embodiments of the present application, no specific restrictions are imposed on the detachable connection structure between the main shaft body 1 and the main shaft flange 3, and between the shaft housing 2 and the shaft housing flange 4. Various connection methods, such as snap-fitting, are possible, but in the current embodiment, fastening bolts are used to connect the main shaft body 1 and the main shaft flange 3, and between the shaft housing 2 and the shaft housing flange 4. These fastening bolts not only ensure a secure connection but also facilitate assembly and disassembly, providing a convenient connection between the main shaft body 1 and the main shaft flange 3, and between the shaft housing 2 and the shaft housing flange 4.

[0044] like Figure 3 As shown, in the embodiment of the present application, the adjustment mechanism 5 includes a support portion and an adjustment portion. The two are arranged between the main shaft flange 3 and the shaft housing flange 4, forming a coordinated whole. Specifically, the support portion cannot adjust its own length between the main shaft flange 3 and the shaft housing flange 4, and mainly plays the key role of providing stable support for the main shaft flange 3. The adjustment portion can adjust its own length between the main shaft flange 3 and the shaft housing flange 4. Therefore, when the adjustment portion is adjusted, the support portion maintains the same size, and the inclination angle of the main shaft flange 3 can be adjusted. This ensures precise control of the main shaft flange 3 at different inclination angles.

[0045] like Figure 3 and Figure 4 As shown, in the embodiment of the present application, the support portion is configured as a support column 51, the length of which is arranged in the vertical direction to ensure the stability of the structure. The bottom of the support column 51 is firmly connected to the upper surface of the shaft housing flange 4, forming a solid base. The top of the support column 51 is connected to the lower surface of the main shaft flange 3 via a spherical hinge, enabling the main shaft flange 3 to tilt and rotate under the action of the adjustment portion. Specifically, the top of the support column 51 is configured as a spherical surface, and the lower surface of the main shaft flange 3 is fixedly provided with a connecting sleeve 6. The lower surface of the connecting sleeve 6 has a spherical groove to adapt to the top of the support column 51. Bolts are threadedly connected to the connecting sleeve 6 after passing through the support column 51 from the bottom of the shaft housing flange 4. Because the main shaft flange 3 needs to rotate very little on the support column 51, there is a thread gap when the bolts are threadedly connected to the connecting sleeve 6. This thread gap is sufficient to achieve the desired tilt state of the main shaft flange 3 at the support column 51. When the adjustment portion adjusts its length between the spindle flange 3 and the shaft housing flange 4, the spindle flange 3 can smoothly rotate to the desired tilt position using the spherical surface at the top of the support column 51. This improves the smoothness and stability of the spindle flange 3 during rotation, ensuring the accuracy and reliability of the spindle inclination adjustment.

[0046] like Figure 3 and Figure 5As shown, in the embodiment of the present application, the adjustment portion is configured as an adjustment column 52, and the adjustment column 52 is machined with threads of different pitches at positions above and below the middle of the adjustment column 52. Specifically, the pitch of the thread on the upper portion of the adjustment column 52 is set to 1.5 mm, while the pitch of the thread on the lower portion is 1.4 mm. The top of the adjustment column 52 is tightly connected to the spindle flange 3 via threads, and the bottom is threadedly connected to the shaft housing flange 4. The effect achieved is that when the adjustment column 52 rotates one circle, a slight displacement difference of 0.1 mm will be generated between the spindle flange 3 and the shaft housing flange 4, and the resulting displacement difference can be used to adjust the inclination angle of the spindle flange 3. Of course, the above pitch is only an example and can be adjusted according to needs in actual applications.

[0047] When the inclination angle of the spindle flange 3 needs to be adjusted, simply rotate the adjustment column 52 to induce relative displacement between the spindle flange 3 and the shaft housing flange 4 on one side of the adjustment column 52, while the clearance between the spindle flange 3 and the shaft housing flange 4 on the support column 51 side remains unchanged. This ensures that the spindle flange 3 can be precisely adjusted to the desired inclination. It is worth noting that due to the slight thread clearance at the threaded connection between the adjustment column 52, the spindle flange 3, and the shaft housing flange 4, the inclination angle of the spindle flange 3 requires a very small difference in displacement between the two on the one side of the adjustment column 52, generally within ±1 mm. Therefore, the existing thread clearance is sufficient to achieve the desired inclination of the spindle flange 3.

[0048] In this embodiment, to facilitate installation of the adjustment column 52 between the spindle flange 3 and the shaft housing flange 4, a threaded sleeve 7 is threadedly connected to the top of the adjustment column 52. The spindle flange 3 has a mounting hole through which the threaded sleeve 7 is fixedly mounted. This makes connection and removal of the adjustment column 52 to the spindle flange 3 faster and more convenient, significantly improving work efficiency and operational flexibility.

[0049] A connecting bolt 8 is provided at the bottom of the adjustment column 52. The bottom of the adjustment column 52 extends into the connecting bolt 8 and is threadedly connected to the connecting bolt 8. A through-hole is formed through the shaft housing flange 4. The connecting bolt 8 passes through the shaft housing flange 4 through the through-hole and is threadedly connected to a nut 9 on the lower surface of the shaft housing flange 4. The connecting bolt 8 passes through the through-hole and extends to the lower surface of the shaft housing flange 4. The connecting bolt 8 is threadedly connected to the nut 9 on the lower surface of the shaft housing flange 4. By tightening the nut 9, a secure connection is achieved between the connecting bolt 8 and the shaft housing flange 4, ensuring the strength and stability of the connection between the two.

[0050] First, the top of the adjustment column 52 is threadedly connected to the threaded sleeve 7. This step ensures a secure connection between the adjustment column 52 and the spindle flange 3. Subsequently, the bottom of the adjustment column 52 is threadedly connected to the connecting bolt 8. Finally, the connecting bolt 8 is passed through the through-hole in the shaft housing flange 4 and secured to the shaft housing flange 4 with a nut 9 from the bottom surface of the shaft housing flange 4. By tightening the nut 9, a secure connection between the connecting bolt 8 and the shaft housing flange 4 is achieved. This series of steps not only ensures a dual threaded connection between the adjustment column 52 and the spindle flange 3 and the shaft housing flange 4, but also greatly simplifies the assembly process, providing great convenience for workers. It also ensures the stability and reliability of the entire structure, laying a solid foundation for the efficient operation of the thinning machine.

[0051] In the embodiment of the present application, in order to ensure that the main shaft flange 3 has good stability and reliability, a three-point support design scheme is adopted. Specifically, one support portion is set, and two adjustment portions are set. The two adjustment portions and one support portion are evenly spaced and distributed around the main shaft flange 3 and the shaft housing flange 4 to form a stable triangular support structure. This structure not only significantly enhances the stability of the main shaft flange 3, but also provides a solid support foundation for the operation of the entire thinning machine. It is worth noting that the above-mentioned three-point support scheme is not the only option. According to actual needs, the number of support portions and adjustment portions can be flexibly adjusted. For example, the support portion can be set to two, and the adjustment portion can be set to one. Of course, the above description is only a preferred embodiment. In other embodiments, the support portion and the adjustment portion can also be a combination of other numbers.

[0052] In the embodiment of the present application, an operating portion 521 is processed on the top of the adjusting column 52, and the operating portion 521 is set on the top of the adjusting column 52 to facilitate the staff to rotate the adjusting column 52. There is no special restriction on the specific structure of the operating portion 521. In the current embodiment, the operating portion 521 is preferably set to an inner hexagonal hole structure to facilitate the staff to rotate the adjusting column 52 using a hexagonal wrench.

[0053] Example 2

[0054] In an embodiment of the present application, a wafer thinning machine is provided, comprising the spindle tilt angle adjustment device described in Example 1.

[0055] Those skilled in the art will readily appreciate other embodiments of the present invention after considering the specification and practicing the embodiments of the present invention. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not covered by this application. The specification and embodiments are intended to be exemplary only, and the true scope and spirit of the present invention are indicated by the appended claims.

Claims

1. A spindle body inclination adjustment device, comprising a spindle body (1) and a shaft housing (2), wherein the spindle body (1) is arranged inside the shaft housing (2), and is characterized in that: include: A spindle flange (3) is located below the spindle body (1) and is detachably connected to the bottom of the spindle body (1); A shaft housing flange (4) is located below the main shaft flange (3) and is detachably connected to the bottom of the shaft housing (2); An adjusting mechanism (5) is located between the main shaft flange (3) and the shaft housing flange (4) and is used to change the inclination angle of the main shaft flange (3) and the main shaft body (1).

2. The spindle inclination adjustment device according to claim 1, characterized in that: The main shaft body (1) and the main shaft flange (3) are connected via fastening bolts.

3. The spindle inclination adjustment device according to claim 1, characterized in that: The shaft housing (2) and the shaft housing flange (4) are connected via fastening bolts.

4. A spindle inclination adjustment device according to any one of claims 1 to 3, characterized in that: The regulating mechanism (5) comprises: A support portion is provided between the main shaft flange (3) and the shaft housing flange (4); The adjusting portion is arranged between the main shaft flange (3) and the shaft housing flange (4) and is capable of adjusting its own length between the main shaft flange (3) and the shaft housing flange (4).

5. The spindle inclination adjustment device according to claim 4, characterized in that: The support portion is configured as a support column (51), the bottom of the support column (51) is fixedly connected to the upper surface of the shaft housing flange (4), and the top of the support column (51) is spherically hinged to the lower surface of the main shaft flange (3).

6. The spindle inclination adjustment device according to claim 4, characterized in that: The adjusting portion is configured as an adjusting column (52), and the portion above the middle of the adjusting column (52) and the portion below the middle of the adjusting column (52) are processed with two sections of threads with unequal pitches. The top of the adjusting column (52) is threadedly connected to the main shaft flange (3), and the bottom of the adjusting column (52) is threadedly connected to the shaft housing flange (4); the length of the adjusting column (52) between the main shaft flange (3) and the shaft housing flange (4) is changed by rotating the adjusting column (52).

7. The spindle inclination adjustment device according to claim 6, characterized in that: A connecting bolt (8) is provided at the bottom of the adjusting column (52), and the bottom of the adjusting column (52) extends into the interior of the connecting bolt (8) and is threadedly connected to the inner side of the connecting bolt (8). The connecting bolt (8) passes through the shaft housing flange (4) and is threadedly connected to a nut (9) below the shaft housing flange (4).

8. The spindle inclination adjustment device according to claim 4, characterized in that: The supporting portion is provided as one, and the adjusting portion is provided as two. The supporting portion and the two adjusting portions are evenly spaced and distributed around the main shaft flange (3) and the shaft housing flange (4).

9. The spindle inclination adjustment device according to claim 6, characterized in that: An operating portion (521) for operating the rotation is processed on the top of the adjusting column (52).

10. A wafer thinning machine, comprising a spindle inclination adjustment device according to any one of claims 1 to 9.

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