Vacuum sputtering coating machine for full-automatic spraying line

Abstract

The utility model relates to the technical field of coating machines, and discloses a vacuum sputtering coating machine for a full-automatic spraying line. The vacuum sputter coating main machine is mounted on the bottom frame, an automatic sealing gate is arranged on the vacuum sputter coating main machine, and a material positioning and supporting assembly is arranged in the vacuum sputter coating main machine; the two six-axis mechanical arms are mounted on the bottom frame; the grabbing clamp comprises a connecting base, the connecting base is fixedly installed on the six-axis mechanical arm, a square aluminum profile is fixedly installed on the connecting base, two transverse plates are installed on the square aluminum profile, and two suction cups are installed on the transverse plates. According to the utility model, the six-axis mechanical arms, the grabbing clamp, the automatic sealing gate and the material positioning and supporting component are matched for use, so that the automatic continuous coating operation of a coated workpiece can be realized, the automation degree is high, the automatic coating device can be well matched with an automatic spraying line for use, and meanwhile, the two six-axis mechanical arms are matched for use, so that the processing efficiency can be effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of coating machines, in particular to a vacuum sputtering coating machine for a full-automatic spraying line. Background Art

[0002] A vacuum sputtering coating machine is a surface treatment device based on sputtering technology. It is mainly used to sputter metal or non-metallic materials onto the surface of a substrate in a vacuum environment to form a thin film. This equipment is widely used in optics, electronics, decoration, machinery, anti-corrosion and other fields, such as surface treatment of eyeglass lenses, mobile phone screens, jewelry, mechanical parts and other products. The working principle of a vacuum sputtering coating machine is to have ions collide with a metal target, sputtering out metal atoms and depositing them on the substrate to form a thin film. The specific process is: in a vacuum environment, voltage is applied to generate a glow discharge between the cathode and anode, releasing electrons and ions. The electrons and ions are accelerated in the electric field and impact the target material. The atoms on the surface of the target material are knocked out and fly to the surface of the substrate under the action of the electric field, depositing to form a thin film.

[0003] During the use of the existing vacuum sputtering coating machine, the applicant found that the existing vacuum sputtering coating machine has a low degree of automation and cannot meet the use requirements of a fully automatic spraying line. Therefore, a highly automated vacuum sputtering coating machine is continued to adapt to the fully automatic production line. In order to solve the above-mentioned problems, a vacuum sputtering coating machine for a fully automatic spraying line is proposed. Utility Model Content

[0004] The purpose of the present utility model is to provide a vacuum sputtering coating machine for a fully automatic spraying line in order to solve the above-mentioned problems.

[0005] The technical solution adopted by the utility model is as follows: a vacuum sputtering coating machine for a fully automatic spraying line, comprising:

[0006] chassis;

[0007] A vacuum sputtering coating main unit, which is mounted on the base frame, is provided with an automatic sealing gate at the feed inlet of the vacuum sputtering coating main unit, and a material positioning and supporting assembly is provided inside the vacuum sputtering coating main unit;

[0008] Two six-axis robotic arms, each of which is mounted on the chassis;

[0009] The grabbing fixture includes a connecting seat, which is fixedly mounted on the six-axis robotic arm. A square aluminum profile is fixedly mounted on the connecting seat. The square aluminum profile is adjustable with two cross plates by bolts, and the cross plates are adjustable with two suction cups by nuts.

[0010] In a preferred embodiment, the automatic sealing gate includes a gate and a cylinder. A storage chamber is provided in the vacuum sputtering coating main unit. The gate can be guided to move up and down in the storage chamber. The cylinder is fixedly mounted on the outer shell of the vacuum sputtering coating main unit. A connecting plate is fixedly mounted on the lower part of the gate, and the end of the piston rod of the cylinder is fixedly connected to the connecting plate.

[0011] In a preferred embodiment, the material positioning and supporting assembly includes a positioning tray, which is installed at the anode facing the cathode rake surface inside the vacuum sputtering coating host, and is provided with a stepped positioning and supporting hole adapted to the shape of the material to be coated.

[0012] In a preferred embodiment, T-shaped locking grooves are provided on all four sides of the square aluminum profile, and the T-shaped locking grooves connect the connecting seat and the transverse plate to the square aluminum profile through bolts.

[0013] In a preferred embodiment, waist-shaped holes are provided on both sides of the horizontal plate, and the threaded air pipe of the suction cup passes through the waist-shaped holes.

[0014] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0015] 1. In the present invention, the six-axis robotic arm, the grabbing fixture, the automatic sealing gate and the material positioning and supporting assembly are used in conjunction with each other, thereby realizing the automatic continuous coating operation of the plated workpiece. The degree of automation is high and it can be well adapted to the use of the automatic spraying line. At the same time, the use of two six-axis robotic arms can effectively improve the processing efficiency.

[0016] 2. In the present invention, the adjustable suction cup structure in the grabbing fixture can be adjusted and used according to the size and shape of the workpiece, so that different workpieces can be adaptively grabbed, thereby improving the universal adaptability of the loading and unloading equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 For this utility model Figure 1 A magnified view of point A;

[0019] Figure 3 This is a schematic diagram of the interior of the utility model from the front.

[0020] Markings in the figure: 1-base, 2-vacuum sputtering coating main unit, 3-automatic sealing gate, 4-material positioning and supporting assembly, 5-six-axis robotic arm, 6-grabbing fixture, 7-connecting seat, 8-square aluminum profile, 9-horizontal plate, 10-suction cup, 11-gate, 12-cylinder, 13-storage chamber, 14-connecting plate, 15-positioning tray, 16-step positioning and supporting hole, 17-T-type lock slot, 18-waist-shaped hole. DETAILED DESCRIPTION

[0021] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0022] The following will be combined Figure 1-Figure 3 A vacuum sputtering coating machine for a fully automatic spraying line according to an embodiment of the present invention is described in detail.

[0023] Example:

[0024] The embodiment of the utility model provides a vacuum sputtering coating machine for a fully automatic spraying line, referring to Figures 1 to 3 As shown, including:

[0025] Base frame 1;

[0026] A vacuum sputtering coating main unit 2 is mounted on a base frame 1. An automatic sealing gate 3 is provided at the feed port of the vacuum sputtering coating main unit 2. A material positioning and supporting component 4 is provided inside the vacuum sputtering coating main unit 2.

[0027] Two six-axis robotic arms 5, the six-axis robotic arms 5 are installed on the base frame 1;

[0028] The grabbing fixture 6 includes a connecting base 7, which is fixedly mounted on the six-axis robot arm 5. A square aluminum profile 8 is fixedly mounted on the connecting base 7. The square aluminum profile 8 is adjustable by bolts and has two cross plates 9. The cross plates 9 are adjustable by nuts and have two suction cups 10.

[0029] In the above structure, one of the six-axis robotic arms 5 controls the suction cup 10 on the grabbing fixture 6 to grab the workpiece to be coated, and then transfers the workpiece to the material positioning and holding component 4 inside the vacuum sputtering coating host 2, thereby realizing automatic loading, and then closes the automatic sealing gate 3, and then the vacuum sputtering coating host 2 can perform vacuum sputtering coating. After the coating is completed, the automatic sealing gate 3 is opened, and then the other six-axis robotic arm 5 uses the suction cup 10 to grab the coated workpiece from the inside of the vacuum sputtering coating host 2 to unload the material, thereby realizing automatic and continuous coating operation of the material, with a high degree of automation, which can be well adapted to automatic spraying line processing. At the same time, the coordinated use of two six-axis robotic arms 5 can effectively improve processing efficiency;

[0030] It should be noted that the vacuum sputtering coating host 2 is mainly composed of a vacuum system, a power supply system, a cooling system, a control system and a sputtering system. The specific principle is that in the vacuum system, a vacuum pump extracts the indoor air to achieve a certain vacuum degree. Then, the power supply system generates a high-voltage electric field to ionize the gas to produce plasma. The plasma hits the target material, sputters out the target atoms, and deposits them on the substrate to form a thin film; the six-axis robot arm 5 is composed of six joints and corresponding connecting rods, and each joint is driven by a motor to achieve different degrees of freedom of movement. The structure of the six-axis robot arm 5 is similar to that of a human arm, and each joint has a specific function, which enables the robot arm to perform various complex movements. The above-mentioned six-axis robot arm 5 and the vacuum sputtering coating host 2 are both existing disclosed equipment, and this application does not improve the principle structure of the six-axis robot arm 5 and the vacuum sputtering coating host 2, so no further introduction is given here.

[0031] refer to Figures 1 to 3 As shown, the automatic sealing gate 3 includes a gate 11 and a cylinder 12. A storage chamber 13 is provided in the vacuum sputtering coating main unit 2. The gate 11 can be guided to move up and down in the storage chamber 13. The cylinder 12 is fixedly mounted on the outer shell of the vacuum sputtering coating main unit 2. A connecting plate 14 is fixedly mounted on the lower part of the gate 11. The piston rod end of the cylinder 12 is fixedly connected to the connecting plate 14. This structure uses the cylinder 12 to drive the gate 11 on the connecting plate 14 to move up and down, thereby realizing the opening and closing of the feed port of the vacuum sputtering coating main unit 2, and the storage chamber 13 in the vacuum sputtering coating main unit 2 can be used to guide and store the movement of the gate 11.

[0032] It should be noted that: when the gate 11 is closed, sealing gaskets are provided around the connection between the gate 11 and the feed port of the vacuum sputtering coating host 2 to ensure the sealing of the gate 11.

[0033] refer to Figures 1 to 3As shown, the material positioning and supporting assembly 4 includes a positioning tray 15, which is installed at the anode facing the cathode rake surface inside the vacuum sputtering coating host 2. The positioning tray 15 is provided with a stepped positioning and supporting hole 16 that is adapted to the shape of the material to be coated. In this structure, the workpiece to be plated can be placed in the stepped positioning and supporting hole 16 of the positioning tray 15, thereby limiting the position of the workpiece to be plated, thereby ensuring the stable position of the workpiece during coating.

[0034] refer to Figures 1 to 3 As shown, reference Figure 1 As shown, T-shaped locking grooves 17 are provided on the four sides of the square aluminum profile 8. The T-shaped locking grooves 17 connect the connecting seat 7 and the cross plate 9 to the square aluminum profile 8 through bolts. Waist-shaped holes 18 are provided on both sides of the cross plate 9. The threaded air pipe of the suction cup 10 passes through the waist-shaped holes 18. In this structure, the square aluminum profile 8 uses the T-shaped locking grooves 17 to facilitate the adjustment of the installation position of the cross plate 9, thereby adjusting the spacing between the cross plates 9, thereby adjusting the spacing between the suction cups 10 on the two cross plates 9 to adapt to the length of different workpieces, and using the waist-shaped holes 18 to facilitate the adjustment of the spacing between the two suction cups 10 on each cross plate 9 to adapt to the width of the workpiece. The entire structure enables the grasping fixture 6 to adjust the position of the suction cup 10 according to the size and shape of the workpiece, so that different workpieces can be adapted and grasped, thereby improving the universal adaptability of the grasping fixture 6.

[0035] It should be noted that the equipment in the above embodiment is applied to a fully automatic spraying line, and the cylinder control, six-axis robotic arm and suction cup control involved in the above structure are all collaboratively controlled and operated by the PLC control end. The specific control equipment and program existing technologies have been implemented and will not be introduced in detail here.

[0036] The implementation principle of a vacuum sputtering coating machine for a fully automatic spraying line in an embodiment of the present application is as follows: when in use, one of the six-axis robotic arms 5 controls the suction cup 10 on the grabbing fixture 6 to grab the workpiece to be coated, and then transfers the workpiece to the material positioning and supporting component 4 inside the vacuum sputtering coating host 2, thereby realizing automatic loading, and then closes the automatic sealing gate 3, and then the vacuum sputtering coating host 2 can perform vacuum sputtering coating. After the coating is completed, open the automatic sealing gate 3, and then the other six-axis robotic arm 5 uses the suction cup 10 to grab the coated workpiece from the inside of the vacuum sputtering coating host 2 to unload the material, thereby realizing automatic and continuous coating operation of the material, with a high degree of automation, and can be well adapted to the use of automatic spraying lines. At the same time, the use of two six-axis robotic arms 5 can effectively improve processing efficiency.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some of the technical features thereof can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A vacuum sputtering coating machine for a fully automatic spraying line, characterized in that: include: Base frame (1); A vacuum sputtering coating main unit (2), the vacuum sputtering coating main unit (2) being mounted on the base frame (1), an automatic sealing gate (3) being provided at a material inlet of the vacuum sputtering coating main unit (2), and a material positioning and supporting assembly (4) being provided inside the vacuum sputtering coating main unit (2); Two six-axis robotic arms (5), the six-axis robotic arms (5) being mounted on the base frame (1); A gripping fixture (6) includes a connecting seat (7), the connecting seat (7) is fixedly mounted on the six-axis robot arm (5), a square aluminum profile (8) is fixedly mounted on the connecting seat (7), the square aluminum profile (8) is adjustable and mounted with two transverse plates (9) via bolts, and the transverse plates (9) are adjustable and mounted with two suction cups (10) via nuts.

2. The vacuum sputtering coating machine for a fully automatic spray coating line according to claim 1, characterized in that: The automatic sealing gate (3) comprises a gate (11) and a cylinder (12); a storage chamber (13) is provided in the vacuum sputtering coating main unit (2); the gate (11) can be guided to move up and down in the storage chamber (13); the cylinder (12) is fixedly mounted on the outer shell of the vacuum sputtering coating main unit (2); a connecting plate (14) is fixedly mounted on the lower part of the gate (11); and the piston rod end of the cylinder (12) is fixedly connected to the connecting plate (14).

3. The vacuum sputtering coating machine for a fully automatic spray coating line according to claim 1, characterized in that: The material positioning and supporting assembly (4) comprises a positioning tray (15), which is installed inside the vacuum sputtering coating main unit (2) at the anode facing the cathode rake surface, and is provided with a stepped positioning and supporting hole (16) adapted to the shape of the coating material.

4. The vacuum sputtering coating machine for a fully automatic spray coating line according to claim 1, characterized in that: The four surfaces of the square aluminum profile (8) are each provided with a T-shaped locking groove (17), and the T-shaped locking groove (17) connects the connecting seat (7) and the transverse plate (9) to the square aluminum profile (8) through bolts.

5. The vacuum sputtering coating machine for a fully automatic spray coating line according to claim 1, characterized in that: Waist-shaped holes (18) are provided on both sides of the transverse plate (9), and the threaded air pipe of the suction cup (10) passes through the waist-shaped holes (18).

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