CVD (Chemical Vapor Deposition) material growth equipment

Abstract

The utility model discloses CVD (chemical vapor deposition) material growth equipment in the field of growth equipment, which comprises a mounting box, a moving plate is slidably mounted in the middle of the mounting box along the horizontal direction, a plurality of bearing plates are fixed on the surface of one side of the moving plate along the vertical direction at intervals, and a first baffle is fixed between the surfaces of one ends, far away from the moving plate, of the bearing plates; a second baffle is fixed to the surface of the side, away from the bearing plate, of the first baffle, heating plates are mounted at the two ends of the inner surface of the top of the mounting box correspondingly, in the using process, CVD material growth machining can be conveniently conducted on multiple products at the same time, and the products with the surfaces subjected to CVD material growth machining can be taken out easily; and the working efficiency of taking out the product after the CVD material growth processing on the surface is conveniently ensured, and the CVD material growth equipment is favorably used.

Description

Technical Field

[0001] The utility model relates to the field of growth equipment, in particular to CVD material growth equipment. Background Art

[0002] CVD refers to chemical vapor deposition. CVD materials are materials prepared through chemical vapor deposition technology. CVD material growth equipment is a device used to prepare various materials through chemical vapor deposition process.

[0003] Chemical vapor deposition is a commonly used material growth method, widely used in semiconductor, optics, electronics and other fields. CVD material growth is a process in which a gaseous precursor containing the elements that constitute the material is introduced into the reaction chamber. Under certain temperature, pressure and atmospheric conditions, the precursor undergoes a chemical reaction and the desired material is deposited on the substrate surface.

[0004] However, when using existing growth equipment, it is not convenient to perform CVD material growth processing on multiple products at the same time, and it is not conducive to removing the products after the CVD material growth processing on the surface is completed. This will affect the work efficiency of removing the products after the CVD material growth processing on the surface is completed, and is not conducive to the use of CVD material growth equipment.

[0005] Therefore, we propose a CVD material growth apparatus. Utility Model Content

[0006] The purpose of the present invention is to provide a CVD material growth device to solve the problems raised in the above background technology.

[0007] To achieve the above objectives, the present invention provides the following technical solutions:

[0008] A CVD material growth device includes an installation box, wherein a movable plate is installed in the middle of the installation box for sliding in the horizontal direction, a plurality of supporting plates are fixed at intervals in the vertical direction on one side surface of the movable plate, a first baffle is fixed between the end surfaces of the supporting plates away from the movable plate, a side of the installation box close to the first baffle is in an open state, a second baffle is fixed to the side surface of the first baffle away from the supporting plate, a plurality of first air inlet pipes connected to the installation box are installed in the middle of the surface of one end of the installation box at intervals in the vertical direction, a first exhaust pipe connected to the installation box is installed in the middle of the surface of the end of the installation box away from the first air inlet pipe, and heating plates are installed at both ends of the inner surface of the top of the installation box.

[0009] As a further solution of the present invention: a hydraulic cylinder is installed in the middle of the surface of the side of the installation box away from the second baffle, the output rod of the hydraulic cylinder faces the installation box and passes through the inner surface and outer surface of the corresponding position on the installation box, the output rod of the hydraulic cylinder is fixedly connected between one end close to the movable plate and the middle of the opposite surface of the movable plate, and limiting rods are fixed at the middle of the upper end and the middle of the lower end of the surface of the movable plate close to the hydraulic cylinder. The limiting rods are both horizontal and pass through the inner surface and outer surface of the corresponding position on the installation box.

[0010] By adopting the above technical solution: the provision of the installation box can fix and limit the hydraulic cylinder, making it easy to use the hydraulic cylinder stably.

[0011] As a further solution of the present invention: matching notches are provided at both ends of the inner surface of the top of the installation box corresponding to the heating plates, and blocks are fixed in the middle of the upper surface and the middle of the lower surface of the movable plate. Matching and horizontal slots are provided in the middle of the inner surface of the top and the middle of the inner surface of the bottom of the installation box corresponding to the blocks, and the blocks are slidably connected to the corresponding slots on the installation box in the horizontal direction.

[0012] By adopting the above technical solution: the provision of the card slot and the card block helps to limit the position between the installation box and the movable plate.

[0013] As a further solution of the present invention: a side surface of the second baffle close to the first baffle is located on the outside of the first baffle and is fixed with a matching frame-shaped sealing gasket, and a side surface of the frame-shaped sealing gasket away from the second baffle is in a matching fit with the corresponding position on the installation box.

[0014] By adopting the above technical solution: the provision of a frame-shaped sealing gasket helps to seal the second baffle and the installation box.

[0015] As a further solution of the present invention: the box body of the installation box close to one end of the first air inlet pipe is provided with a plurality of matching notches spaced apart from each other on the inner annular surface corresponding to the first air inlet pipe, and the notches on the installation box corresponding to the first air inlet pipe all pass through the inner surface and outer surface of the corresponding positions on the installation box.

[0016] By adopting the above technical solution: the provision of the mounting box, the first air intake pipe can be fixed and limited.

[0017] As a further solution of the present invention: a matching notch is opened in the middle of the box body near one end of the first exhaust pipe, corresponding to the inner ring surface of the first exhaust pipe, and the notch on the installation box corresponding to the first exhaust pipe passes through the inner surface and outer surface of the corresponding position on the installation box.

[0018] By adopting the above technical solution: providing the installation box, the first exhaust pipe can be fixed and limited.

[0019] As a further solution of the present invention: a matching first solenoid valve is installed at one end of the first air intake pipe away from the installation box, and a matching second air intake pipe is installed at one side of the first solenoid valve away from the first air intake pipe.

[0020] By adopting the above technical solution: the provision of the first solenoid valve can open and close the first air intake pipe and the second air intake pipe.

[0021] As a further solution of the present invention: a second solenoid valve is installed at one end of the first exhaust pipe away from the installation box, a matching second exhaust pipe is installed on the side of the second solenoid valve away from the first exhaust pipe, and support legs are fixed at the four corners of the lower surface of the installation box.

[0022] By adopting the above technical solution: the provision of the second solenoid valve can open and close the first exhaust pipe and the second exhaust pipe.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] 1. In the present invention, multiple products can be placed on the supporting plates arranged at intervals along the vertical direction, and the products placed on the supporting plates can be moved to the outside of the installation box by the movable plate. When in use, it is convenient to perform CVD material growth processing on multiple products at the same time, which helps to remove the products after the CVD material growth processing on the surface is completed, and it is convenient to ensure the work efficiency of removing the products after the CVD material growth processing on the surface is completed, which helps to use the present CVD material growth equipment.

[0025] 2. In the utility model, the output rod of the hydraulic cylinder can drive the movable plate to move. When the movable plate moves, it can drive the limiting rod to move along the installation box. The installation box can limit the movable plate through the limiting rod. When the movable plate moves, it can drive the card block to move along the card slot on the installation box. The installation box can limit the movable plate through the card slot and the card block, which helps to move the movable plate stably. When the movable plate moves, it can drive the carrying plate to move, so as to move the carrying plate to the outside of the installation box. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural diagram of the utility model;

[0027] Figure 2 This is a schematic diagram of the limit rod structure of the utility model;

[0028] Figure 3 This is a schematic diagram of the first exhaust pipe structure of the present utility model;

[0029] Figure 4This is a schematic diagram of the load-bearing plate structure of the present utility model;

[0030] Figure 5 This is a schematic diagram of the card slot structure of the present utility model;

[0031] Figure 6 This is a schematic diagram of the movable plate structure of the present utility model.

[0032] In the figure: 1. Installation box; 2. Support legs; 3. Moving plate; 4. Hydraulic cylinder; 5. Limit rod; 6. Load-bearing plate; 7. Heating plate; 8. Block; 9. Slot; 10. First baffle; 11. Second baffle; 12. Frame-type sealing gasket; 13. First air intake pipe; 14. Second air intake pipe; 15. First exhaust pipe; 16. Second exhaust pipe; 17. First solenoid valve; 18. Second solenoid valve. DETAILED DESCRIPTION

[0033] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] See also Figures 1 to 6 In an embodiment of the present invention, a CVD material growth device includes an installation box 1, a movable plate 3 is installed in the middle of the installation box 1 along the horizontal direction, a plurality of supporting plates 6 are fixed to one side surface of the movable plate 3 at intervals in the vertical direction, a first baffle 10 is fixed between the end surfaces of the supporting plates 6 away from the movable plate 3, a side of the installation box 1 close to the first baffle 10 is in an open state, a second baffle 11 is fixed to the side surface of the first baffle 10 away from the supporting plate 6, a plurality of first air inlet pipes 13 connected to the installation box 1 are installed in the middle of one end surface of the installation box 1 along the vertical direction, and the installation box 1 is away from the first air inlet pipe 13. A first exhaust pipe 15 connected to the installation box 1 is installed in the middle of the end surface, and heating plates 7 are installed at both ends of the top inner surface of the installation box 1. Multiple products can be placed on the supporting plates 6 arranged at intervals in the vertical direction, and the products placed on the supporting plates 6 can be moved to the outside of the installation box 1 by the movable plate 3. When in use, it is convenient to perform CVD material growth processing on multiple products at the same time, which is helpful to remove the products after the CVD material growth processing on the surface is completed, and it is convenient to ensure the work efficiency of removing the products after the CVD material growth processing on the surface is completed, which is helpful to use the present CVD material growth equipment.

[0035] Among them, a hydraulic cylinder 4 is installed in the middle of the surface of the side of the installation box 1 away from the second baffle 11, and the output rod of the hydraulic cylinder 4 faces the installation box 1 and passes through the inner surface and outer surface of the corresponding position on the installation box 1. The output rod of the hydraulic cylinder 4 is fixedly connected between one end of the mobile plate 3 and the middle of the opposite surface of the mobile plate 3. The middle of the upper end and the middle of the lower end of the surface of the mobile plate 3 close to the hydraulic cylinder 4 are fixed with limit rods 5. The limit rods 5 are all horizontal and pass through the inner surface and outer surface of the corresponding position on the installation box 1. The installation box 1 can move the hydraulic cylinder 4 The fixing and limiting are convenient for the stable use of the hydraulic cylinder 4; matching notches are provided at both ends of the top inner surface of the installation box 1 corresponding to the heating plates 7, and blocks 8 are fixed in the middle of the upper surface and the middle of the lower surface of the movable plate 3. Matching and horizontal card grooves 9 are provided in the middle of the top inner surface and the middle of the bottom inner surface of the installation box 1 corresponding to the card blocks 8, and the card blocks 8 are slidably connected with the corresponding card grooves 9 on the installation box 1 in the horizontal direction. The card grooves 9 and the card blocks 8 help to limit the position between the installation box 1 and the movable plate 3.

[0036] The second baffle 11 is located on the outer side of the first baffle 10 and is fixed with a matching frame-shaped sealing gasket 12. The frame-shaped sealing gasket 12 is in a matching and fitting state between the side surface of the frame-shaped sealing gasket 12 away from the second baffle 11 and the corresponding position on the installation box 1. The frame-shaped sealing gasket 12 helps to seal between the second baffle 11 and the installation box 1; the box body of the installation box 1 near one end of the first air inlet pipe 13 is provided with a plurality of matching notches at intervals on the inner annular surface corresponding to the first air inlet pipe 13, and the notches on the installation box 1 corresponding to the first air inlet pipe 13 all penetrate the inner surface and outer surface of the corresponding position on the installation box 1, so that the installation box 1 can fix and limit the first air inlet pipe 13; the middle part of the box body of the installation box 1 near one end of the first exhaust pipe 15 is provided with a matching notch on the inner annular surface corresponding to the first exhaust pipe 15, and the notches on the installation box 1 corresponding to the first exhaust pipe 15 penetrate the inner surface and outer surface of the corresponding position on the installation box 1, so that the installation box 1 can fix and limit the first exhaust pipe 15.

[0037] A matching first solenoid valve 17 is installed at the end of the first air inlet pipe 13 away from the installation box 1, and a matching second air inlet pipe 14 is installed at the side of the first solenoid valve 17 away from the first air inlet pipe 13. The first solenoid valve 17 can open and close the first air inlet pipe 13 and the second air inlet pipe 14; a second solenoid valve 18 is installed at the end of the first exhaust pipe 15 away from the installation box 1, and a matching second exhaust pipe 16 is installed at the side of the second solenoid valve 18 away from the first exhaust pipe 15. Support legs 2 are fixed at the four corners of the lower surface of the installation box 1, and the second solenoid valve 18 can open and close the first exhaust pipe 15 and the second exhaust pipe 16.

[0038] The working principle of the present utility model is as follows: during use, the support legs 2 are stably placed at the position where they need to be used, which helps to stably use the support legs 2. The support legs 2 can support and limit the installation box 1 and the various components assembled on the installation box 1, which is convenient for stably using the installation box 1 and the various components assembled on the installation box 1. The installation box 1 can support and limit the movable plate 3 and the various components assembled on the movable plate 3 through the hydraulic cylinder 4 and the limiting rod 5, which helps to stably use the movable plate 3 and the various components assembled on the movable plate 3.

[0039] When it is necessary to perform CVD material growth processing on the product, the hydraulic cylinder 4 on the installation box 1 is opened, and the installation box 1 can fix and limit the hydraulic cylinder 4, which is convenient for the stable use of the hydraulic cylinder 4. When the hydraulic cylinder 4 is open, the output rod of the hydraulic cylinder 4 can drive the movable plate 3 to move in the direction away from the hydraulic cylinder 4. When the movable plate 3 moves, it can drive the limiting rod 5 to move along the installation box 1. The installation box 1 can limit the movable plate 3 through the limiting rod 5. When the movable plate 3 moves, it can drive the block 8 to move along the slot 9 on the installation box 1. The installation box 1 can limit the movable plate 3 through the slot 9 and the block 8, which helps to stably move the movable plate 3. When the movable plate 3 moves, it can drive the supporting plate 6 to move, so as to move the supporting plate 6 to the outside of the installation box 1.

[0040] After moving the carrier plate 6 to the outside of the installation box 1, the products that need to undergo CVD material growth processing are further placed on the upper side of the carrier plate 6. Multiple products can be placed on the carrier plates 6 arranged at intervals in the vertical direction. Since the carrier plates 6 are arranged at intervals in the vertical direction, it is possible to avoid mutual influence between the products placed on the carrier plate 6. The hydraulic cylinder 4 is further used to drive the movable plate 3 to move, so that the movable plate 3, the carrier plate 6, the products placed on the carrier plate 6 and the first baffle 10 are all moved into the installation box 1. The first baffle 10 and the frame-type sealing gasket 12 help to limit and seal the second baffle 11 and the installation box 1.

[0041] Further, the end of the second air inlet pipe 14 away from the first solenoid valve 17 is connected to different external air supply pipes, and the first solenoid valve 17 is opened. Different external air supply pipes can transport different gases required for CVD material growth processing to the installation box 1 through the second air inlet pipe 14, the first solenoid valve 17 and the first air inlet pipe 13. The heating plate 7 is further opened, and the installation box 1 can fix and limit the heating plate 7 to facilitate stable use of the heating plate 7. When the heating plate 7 is opened, the heating plate 7 can heat the mixed gas in the installation box 1 and the product on the carrier plate 6, which is helpful to perform CVD material growth processing on the product on the upper surface of the carrier plate 6.

[0042] After the product is subjected to CVD material growth processing, the second solenoid valve 18 is opened, so that the exhaust gas generated after the CVD material growth processing in the installation box 1 is discharged through the first exhaust pipe 15, the second solenoid valve 18 and the second exhaust pipe 16. After the product is subjected to CVD material growth processing, the hydraulic cylinder 4 is further opened, so that the output rod of the hydraulic cylinder 4 drives the movable plate 3, the supporting plate 6, the product on the supporting plate 6 and the first baffle 10 to move to the outside of the installation box 1. After moving the supporting plate 6 to the outside of the installation box 1, it is helpful to remove the product placed on the supporting plate 6 after the CVD material growth processing is completed.

[0043] During use, it is convenient to perform CVD material growth processing on multiple products at the same time, which helps to remove the products after the CVD material growth processing on the surface is completed, and it is convenient to ensure the work efficiency of removing the products after the CVD material growth processing on the surface is completed, which helps to use this CVD material growth equipment.

[0044] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A CVD material growth device, comprising a mounting box (1), characterized in that: A movable plate (3) is installed in the middle of the installation box (1) in a horizontally sliding manner. A plurality of supporting plates (6) are fixed at intervals along the vertical direction on one side surface of the movable plate (3). A first baffle (10) is fixed between the end surfaces of the supporting plates (6) away from the movable plate (3). The side of the installation box (1) close to the first baffle (10) is in an open state. A second baffle (11) is fixed on the side surface of the first baffle (10) away from the supporting plate (6). A plurality of first air inlet pipes (13) connected to the installation box (1) are installed at intervals along the vertical direction on the middle of the surface of one end of the installation box (1). A first exhaust pipe (15) connected to the installation box (1) is installed on the middle of the surface of the end of the installation box (1) away from the first air inlet pipe (13). Heating plates (7) are installed at both ends of the inner surface of the top of the installation box (1).

2. The CVD material growth apparatus according to claim 1, wherein: A hydraulic cylinder (4) is installed in the middle of the surface of the side of the installation box (1) away from the second baffle (11). The output rod of the hydraulic cylinder (4) faces the installation box (1) and penetrates the inner surface and the outer surface of the corresponding position on the installation box (1). The output rod of the hydraulic cylinder (4) is fixedly connected between one end of the hydraulic cylinder (4) close to the movable plate (3) and the middle of the opposite surface of the movable plate (3). The middle of the upper end and the middle of the lower end of the surface of the movable plate (3) close to the hydraulic cylinder (4) are fixed. The limiting rods (5) are all in a horizontal state and penetrate the inner surface and the outer surface of the corresponding position on the installation box (1).

3. The CVD material growth apparatus according to claim 2, wherein: Matching notches are provided at both ends of the inner surface of the top of the installation box (1) corresponding to the heating plate (7); a card block (8) is fixed in the middle of the upper surface and the middle of the lower surface of the movable plate (3); matching card slots (9) are provided in the middle of the inner surface of the top and the middle of the inner surface of the bottom of the installation box (1) corresponding to the card block (8); and the card blocks (8) are slidably connected to the corresponding card slots (9) on the installation box (1) in the horizontal direction.

4. The CVD material growth apparatus according to claim 3, wherein: A matching frame-shaped sealing gasket (12) is fixed on the outer side of the first baffle (10) on a side surface of the second baffle (11) close to the first baffle (10), and a matching frame-shaped sealing gasket (12) is fixed on a side surface of the frame-shaped sealing gasket (12) away from the second baffle (11) to a corresponding position on the installation box (1).

5. The CVD material growth apparatus according to claim 4, characterized in that: The box body of the installation box (1) close to one end of the first air inlet pipe (13) is provided with a plurality of matching notches at intervals on the inner annular surface corresponding to the first air inlet pipe (13); the notches on the installation box (1) corresponding to the first air inlet pipe (13) all penetrate the inner surface and outer surface of the corresponding positions on the installation box (1).

6. The CVD material growth apparatus according to claim 5, characterized in that: A matching notch is provided on the inner ring surface of the first exhaust pipe (15) in the middle of the box body of the installation box (1) near one end of the first exhaust pipe (15), and the notch on the installation box (1) corresponding to the first exhaust pipe (15) penetrates the inner surface and outer surface of the corresponding position on the installation box (1).

7. The CVD material growth apparatus according to claim 6, characterized in that: A matching first solenoid valve (17) is installed on one end of the first air inlet pipe (13) away from the installation box (1), and a matching second air inlet pipe (14) is installed on one side of the first solenoid valve (17) away from the first air inlet pipe (13).

8. The CVD material growth apparatus according to claim 7, wherein: A second solenoid valve (18) is installed at one end of the first exhaust pipe (15) away from the installation box (1), and a matching second exhaust pipe (16) is installed at one side of the second solenoid valve (18) away from the first exhaust pipe (15). Support legs (2) are fixed at the four corners of the lower surface of the installation box (1).

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