Detection system
By using light sources and multiple detection areas of detectors in a semiconductor thin film inspection system to simultaneously detect reflective interfaces at different heights, and combining imaging components and processors for image processing, the problem of high detection cost and low efficiency in the existing technology is solved, and efficient and low-cost thin film defect detection is achieved.
Patent Information
- Application Number
- CN202422514543.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-17
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2034-10-17
AI Technical Summary
In the prior art, defect detection on the upper and lower surfaces of semiconductor thin films requires two systems, which increases detection costs and reduces efficiency.
A detection system is adopted, which uses a light source to emit detection light and detects the feedback light of reflective interfaces at different heights in the sample through multiple detection areas of the detector, so as to obtain the targets to be measured with reflective interfaces at different heights. The imaging component and the processor are combined to perform image processing to achieve accurate positioning of the targets to be measured.
It improves detection efficiency, reduces detection costs, and realizes simultaneous detection of the upper and lower surfaces of semiconductor films, thereby improving detection accuracy and efficiency.
Smart Images
Figure CN223400837U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of detection, in particular to a detection system. Background Art
[0002] Defect detection is a critical step in ensuring product quality during semiconductor manufacturing. Defect detection in semiconductor thin films is particularly important because these defects can affect device performance and reliability. Defects can exist on both the top and bottom surfaces of semiconductor thin films. During the inspection process, defects must be detected on both surfaces and determined to determine which layer the defect is located.
[0003] In the related art, two detection systems are often used to detect the upper and lower surfaces of the film respectively, which leads to an increase in detection cost and a decrease in detection efficiency. Utility Model Content
[0004] The purpose of the present invention is to provide a detection system to improve detection efficiency and reduce detection costs in response to the above-mentioned deficiencies in the prior art.
[0005] The present application provides a detection system for detecting reflective interfaces of different heights formed in a sample in a direction perpendicular to the sample surface, including: a light source for emitting detection light to the sample, wherein the detection light at least partially passes through the sample and is reflected by reflective interfaces of different heights of the sample to form feedback light, and the detection light has an acute angle with the normal of the sample surface; a detector including multiple detection areas, wherein the multiple detection areas are used to respectively detect the feedback light of reflective interfaces of different heights to obtain targets to be measured with reflective interfaces of different heights.
[0006] Optionally, it also includes: an imaging component located between the light source and the detector, the detection light and the reflection interface at different heights of the sample have multiple intersection positions, and the multiple intersection positions are in the same intersection plane; the imaging component is used to make the detection surfaces of the multiple detection areas conjugate with the intersection plane.
[0007] Optionally, the incident angle of the detection light is 45°, and the detection surface of the detector is perpendicular to the direction of the feedback light reflected by the reflection interface; the multiple detection areas are arranged at least along a first direction, and the first direction is parallel to the incident direction of the detection light on the sample.
[0008] Optionally, the detection surface of the detector, the principal optical axis of the detection light, and the principal plane of the imaging component intersect at a point.
[0009] Optionally, the light source is a point light source, and the detector is a linear array detector; or, the light source is a linear light source, and the detector is a planar array detector.
[0010] Optionally, the plurality of detection areas are photodiode arrays, photomultiplier tube arrays or avalanche photodiode arrays.
[0011] Optionally, the light source is a line light source, which projects onto the reflective interface to form a line light spot, the extension direction of the line light spot is perpendicular to the incident direction of the main optical axis of the detection light, and the detection surface of the detector is parallel to the incident direction.
[0012] Optionally, the detector is also used to form a target image of a reflection interface of different heights according to the feedback light; the detection system also includes: a first processor, used to obtain the target to be measured according to the target image, and obtain the position of the target to be measured in the sample according to the relative position of the image of the target to be measured in the target image.
[0013] Optionally, the light source and the detector are detection units; the detection system also includes: a moving unit, which is used to drive any one of the detection unit and the sample or a combination of the two to cause relative movement between the detection unit and the sample, so that the detection unit scans the sample; a controller, which is used to control the detector to capture multiple target images during the scanning process.
[0014] Optionally, a second processor is further included, which is used to obtain a target image of the same detection area and stitch multiple target images of the same detection area to obtain an interface image of a reflective interface at the same height.
[0015] Optionally, the second processor is further configured to acquire a target to be measured according to the interface image, and determine a reflective interface where the target to be measured is located.
[0016] The utility model has the following beneficial effects:
[0017] The utility model sets a light source and a detector with multiple detection areas to detect reflective interfaces formed at different heights in the sample; the light source is used to emit detection light to the sample, and the detection light forms feedback light through the sample. The multiple detection areas of the detector respectively detect the feedback light of reflective interfaces at different heights to obtain the targets to be measured at reflective interfaces at different heights, and then determine the position of the targets to be measured, thereby realizing simultaneous detection of the targets to be measured on the sample and accurate positioning of which reflective interface the targets to be measured are located, thereby improving detection efficiency and reducing detection costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solution of the embodiment of the present invention, the following will briefly introduce the drawings required for use in the description of the embodiment. Obviously, the drawings described below are only one embodiment of the embodiment of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0019] Figure 1 A structural diagram of a detection system is provided for the first embodiment of the present utility model;
[0020] Figure 2 A schematic diagram of the incident angle of detection light in the detection system provided in the first embodiment of the present utility model;
[0021] Figure 3 A schematic diagram showing the positional relationship between the detection surface of the detector, the principal optical axis of the detection light, and the principal plane of the imaging assembly in the detection system is provided for the first embodiment of the present utility model;
[0022] Figure 4 A schematic diagram of a motion situation when the detection system provided in the first embodiment of the present utility model scans a sample;
[0023] Figure 5 A schematic diagram of the structure of the detection system provided in Example 2 of the present utility model;
[0024] Figure 6 This is a schematic diagram of the three-dimensional structure of the detection system provided in Example 2 of the present utility model.
[0025] Description of reference numerals:
[0026] 1. Light source; 11. First feedback light; 12. Second feedback light; 13. Third feedback light; 2. Detector; 21. First detection area; 22. Second detection area; 23. Third detection area; 3. Imaging component; 31. First lens; 32. Second lens; 4. Sample; 41. First reflection interface; 42. Second reflection interface; 43. Third reflection interface. DETAILED DESCRIPTION
[0027] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.
[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0029] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; they may refer to internal connections between two components; they may refer to wireless connections or wired connections. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.
[0030] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0031] Example 1
[0032] This application provides a detection system, such as Figure 1 As shown, the detection system is used to detect reflective interfaces with different heights formed in the sample 4 along a direction perpendicular to the surface of the sample 4, including:
[0033] Light source 1, for emitting detection light toward sample 4, wherein the detection light at least partially passes through the sample 4 and is reflected by reflective interfaces at different heights of the sample 4 to form feedback light, and the detection light forms an acute angle with the surface normal of the sample 4;
[0034] The detector 2 includes a plurality of detection areas, and the plurality of detection areas are used to respectively detect feedback light from reflection interfaces at different heights to obtain targets to be measured at reflection interfaces at different heights.
[0035] In this embodiment, the light source 1 emits detection light to the sample 4, and the detection light is reflected by the reflection interfaces at different heights in the sample 4 to form different feedback lights. The feedback light is detected by the detector 2, and the multiple detection areas of the detector 2 respectively detect the feedback lights of the reflection interfaces at different heights to obtain the targets to be measured at the reflection interfaces at different heights, and then determine the position of the target to be measured, that is, determine on which reflection interface of the sample 4 the target to be measured is specifically located, thereby improving the detection efficiency and reducing the detection cost.
[0036] Specifically, in this embodiment, the target to be tested is a defect. In other embodiments, the target to be tested is a solder ball or a TSV (Through Silicon Via) hole.
[0037] In this embodiment, the plurality of detection areas are arranged at least along a first direction.
[0038] In this embodiment, the first direction is parallel to the incident direction of the detection light on the sample 4 .
[0039] In this embodiment, the principal optical axis of the feedback light is perpendicular to the detection surface of the detector 2. The optical path length of the feedback light from the reflection point at each reflection interface to its corresponding detection area is the same, ensuring that the imaging point on the detector 2 is equidistant from the incident plane of the detection light, preventing defocus. In this case, the first direction is perpendicular to the optical path of the feedback light, and each detection area of the detector 2 is conjugate with the incident plane of the incident light.
[0040] In this embodiment, the sample 4 is a multi-layer structure, and the sample 4 has more than or equal to three reflective interfaces. Figure 1 As shown, when the sample 4 has a double-layer structure, the sample 4 has three reflective interfaces, namely a first reflective interface 41, a second reflective interface 42, and a third reflective interface 43. The second reflective interface 42 is located between the first reflective interface 41 and the third reflective interface 43. The light source 1 emits detection light, and the detection light is reflected by reflective interfaces at different heights in the sample to form different feedback lights, including: the detection light is reflected by the first reflective interface 41 of the sample 4 to form a first feedback light 11, the detection light is reflected by the second reflective interface 42 of the sample 4 to form a second feedback light 12, and the detection light is reflected by the third reflective interface 43 of the sample 4 to form a third feedback light 13. The detector 2 includes at least three detection areas, namely a first detection area 21, a second detection area 22, and a third detection area 23. Exemplarily, the third detection area 23 is used to detect the first feedback light 11 to obtain a first target to be measured, the first detection area 21 is used to detect the third feedback light 13 to obtain a third target to be measured, and the second detection area 22 is used to detect the second feedback light 12 to obtain a second target to be measured. When the sample 4 is a multi-layer structure, each layer can be made of different materials.
[0041] Each layer of sample 4 can be a semiconductor chip thin film. The material properties of the semiconductor chip thin film have a significant impact on the performance of the semiconductor chip. The types of semiconductor chip thin films include conductive films and insulating films.
[0042] In another embodiment of the present application, the sample 4 is a single-layer structure, and there are two reflective interfaces in the sample 4, namely a first reflective interface and a second reflective interface. One of the first reflective interface and the second reflective interface is the upper surface of the sample 4 to be tested, and the other is the lower surface of the sample 4 to be tested. The light source 1 emits detection light, and the detection light forms feedback light through the sample 4. The detection light is reflected from the first reflective interface of the sample 4 to form a first feedback light, and the detection light is reflected from the second reflective interface of the sample 4 to form a second feedback light. The detector 2 includes at least two detection areas, and the detector 2 includes at least a first detection area and a second detection area. Exemplarily, the first detection area is used to detect the second feedback light to obtain the second target to be tested, and the second detection area is used to detect the first feedback light to obtain the first target to be tested. By confirming in which detection area the image of the target to be tested appears, it can be determined on which reflective interface of the sample 4 the target to be tested is specifically located, that is, it can be determined whether the target to be tested is located on the first reflective interface or the second reflective interface of the sample 4 to be tested.
[0043] The position of the target image in each detection zone can be used to determine which reflective interface the target is located on. By setting up a plurality of detection zones so that each detection zone detects a different layer of the sample 4, simultaneous detection of targets in different layers can be achieved, and the specific location of the target can be determined.
[0044] When performing thin film defect detection, the detection system can simultaneously detect targets in different layers of the sample, for example, simultaneously detect defects in different layers of the sample, thereby improving detection efficiency.
[0045] In this embodiment, Figure 1 As shown, the light source 1 is a point light source, the detector 2 is a linear array detector, and the plurality of detection areas are arranged along a first direction parallel to the incident direction of the detection light on the sample 4 .
[0046] In other embodiments of the present application, the light source is a linear light source, the detector is an area array detector, and the plurality of detection areas are arranged along a first direction and a second direction, the second direction intersecting the first direction, for example, the second direction being perpendicular to the first direction. The linear light source combined with the area array detector can achieve rapid scanning of a large area, improving detection speed and coverage, and is suitable for rapid detection of large samples 4, significantly improving detection efficiency.
[0047] When the light source is a linear light source, the light source 1 projects a linear light spot on the reflective interface. The extension direction of the linear light spot is perpendicular to the incident direction of the main optical axis of the detection light. The detection surface of the detector 2 is parallel to the incident direction of the main optical axis of the detection light. This ensures that the detection surface of the detector 2 is equidistant from the incident plane of the detection light, prevents defocusing, and obtains a clear image.
[0048] When the light source 1 is a linear light source, the illumination area of the detection light is a linear light spot, the detector 2 is a planar array detector, and the multiple detection areas are arranged along a first direction and a second direction. The first direction is parallel to the incident direction of the detection light on the sample, and the second direction is parallel to the extension direction of the linear light spot.
[0049] The plurality of detection areas are photodiode arrays, photomultiplier tube arrays or avalanche photodiode arrays. The detection area is a photodiode (PDA) array or a photomultiplier tube (PMT) array or an avalanche photodiode (APD) array. Photodiodes provide high spectral resolution and cost-effectiveness, and are suitable for chromatographic analysis; photomultiplier tubes provide high sensitivity and high gain, and are suitable for extremely weak light signal detection; and avalanche photodiodes provide single-photon detection capability and high temporal resolution, and are suitable for high-precision measurement and three-dimensional imaging. The use of these high-performance detection areas can provide high-sensitivity and fast-response detection, which is suitable for capturing weak feedback light signals and improving the detection capability of the system.
[0050] like Figure 3 As shown, the detection system provided in this embodiment also includes an imaging component 3, which is located between the light source 1 and the detector 2. The detection light and the reflection interface at different heights of the sample 4 have multiple intersection positions, and the multiple intersection positions are in the same intersection surface; the imaging component 3 is used to make the detection surfaces of the multiple detection areas conjugate with the intersection surface.
[0051] In this embodiment, the light source 1 emits detection light, and the detection light forms feedback light through the sample 4. The feedback light generated by the reflection interfaces at different heights is respectively received by the multiple detection areas of the detector 2 after adjusting the optical path of the imaging component 3. By setting the imaging component 3 so that the detection surfaces of the multiple detection areas are conjugated with the intersection surface, the imaging of the feedback light on the detector 2 can be made clearer, the grasp of the target to be measured can be more accurate, and the detection effect can be improved. By utilizing the imaging component 3 with a large depth of field to simultaneously detect each reflection surface of the sample 4, the target to be measured on each reflection surface of the sample 4 can be accurately detected by the detector 2. Conjugate imaging technology has the advantages of high resolution, high sensitivity and real-time dynamic observation, which can ensure detection clarity and improve detection accuracy.
[0052] In this embodiment, Figure 2As shown, the incident angle of the detection light can be 45°, and the detection surface of the detector 2 is perpendicular to the direction of the feedback light reflected by the reflection interface. The multiple detection areas are arranged at least along a first direction, and the first direction is parallel to the incident direction of the detection light on the sample 4. The main plane of the imaging component 3 is perpendicular to the direction of the detection light reflected by the reflection interface, so that the imaging effect is better. Specifically, as Figure 2 As shown, the first detection area 21, the second detection area 22 and the third detection area 23 are arranged along a direction parallel to the incident direction of the detection light on the sample 4, and the detection surface of each detection area and the main plane of the imaging component 3 are perpendicular to the direction of the feedback light reflected by the reflection interface. In this embodiment, the main optical axis of the feedback light is perpendicular to the detection surface of the detector 2, and the optical path of the feedback light from the reflection point of each reflection interface to its corresponding detection area is the same, which can ensure that the imaging point on the detector 2 is equidistant from the incident plane where the detection light is located, and no defocus occurs. At this time, the arrangement direction of the detection area is perpendicular to the optical path of the feedback light, and each detection area of the detector 2 is conjugate with the incident plane of the incident light. Through the conjugate optical path setting, the target to be measured can be clearly imaged on the detector 2, so that the target to be measured on each reflection surface of the sample 4 can be accurately detected by the detector 2.
[0053] In other embodiments of the present application, the incident angle of the detection light may not be 45°.
[0054] In this application, the detection surface of the detector 2, the principal optical axis of the detection light, and the principal plane of the imaging assembly 3 intersect at a point. In this case, the optical path design of the detection system complies with Scham's law, which states that a fully clear image can be obtained when the extended planes of the subject plane, the image plane, and the lens plane intersect in a straight line. The subject plane is the intersection plane, the image plane is the detection surface of the detector 2, and the lens plane is the principal plane of the imaging assembly 3.
[0055] In this embodiment, Figure 1 and Figure 2 As shown, the imaging assembly 3 includes a first lens 31 and a second lens 32. The second lens 32 is located between the first lens 31 and the detector 2. The focal point of the first lens 31 facing the second lens 32 coincides with the focal point of the second lens 32 facing the first lens 31. By precisely setting the focal points of the two lenses to coincide, imaging quality can be improved and aberrations can be reduced.
[0056] In this embodiment, Figure 1As shown, the focal length of the second lens 32 is greater than the focal length of the first lens 31. This configuration allows for adjustment of the magnification and field of view of the imaging assembly 3, and increases the spacing between feedback light from reflective interfaces at different heights, making it easier to differentiate the imaging of feedback light from reflective interfaces at different heights of the sample 4 in different detection areas of the detector 2.
[0057] In other embodiments of the present application, the focal length of the second lens 32 may be less than or equal to the focal length of the first lens 31. In this case, the magnification of the imaging assembly 3 can be adjusted to be less than or equal to 1, the feedback light can be relatively concentrated, and the detector 2 can be correspondingly reduced, making the overall structure of the device more compact.
[0058] In this embodiment, the detector 2 is also used to form a target image of a reflection interface of different heights according to the feedback light; the detection system also includes: a first processor, used to obtain the target to be measured according to the target image, and obtain the position of the target to be measured in the sample 4 according to the relative position of the image of the target to be measured in the target image. In this embodiment, the first detection area 21 is used to form a third target image of the third reflection interface 43 according to the third feedback light 13, and the first processor is used to obtain the third target to be measured according to the third target image, and obtain the position of the third target to be measured on the third reflection interface 43 according to the relative position of the image of the third target to be measured in the third target image; the second detection area 22 is used to form a second target image of the second reflection interface 42 according to the second feedback light 12, and the first processor is used to obtain the second target to be measured according to the second target image, and obtain the position of the second target to be measured on the second reflection interface 42 according to the relative position of the image of the second target to be measured in the second target image; the third detection area 23 is used to form a first target image of the first reflection interface 41 according to the first feedback light 11, and the first processor is used to obtain the first target to be measured according to the first target image, and obtain the position of the first target to be measured on the first reflection interface 41 according to the relative position of the image of the first target to be measured in the first target image.
[0059] In this embodiment, the light source 1 and the detector 2 are detection units; the detection system further includes: a moving unit, which is used to drive any one of the detection unit and the sample 4 or a combination of the two, so that the detection unit and the sample 4 produce relative movement, so that the detection unit scans the sample 4; a controller, which is used to control the detector 2 to collect multiple target images during the scanning process, which is suitable for detecting samples 4 with large areas or complex shapes, so that the detection system can comprehensively detect different areas of the sample 4, thereby improving the comprehensiveness and automation of the detection. Figure 4 As shown, Figure 4The direction of the middle arrow is the relative displacement direction of the detection unit to the sample 4. At this time, the detection unit and the sample 4 move relative to each other along the surface of the sample 4, and the detection unit performs scanning detection on the sample 4.
[0060] In this embodiment, the detection system further includes a second processor, which is used to obtain a target image of the same detection area and stitch together multiple target images of the same detection area to obtain an interface image of a reflective interface at the same height. Exemplarily, the second processor is used to obtain multiple third target images of the first detection area 21 and stitch together multiple third target images of the first detection area 21 to obtain an interface image of the third reflective interface 43. The second processor is used to obtain multiple second target images of the second detection area 22 and stitch together multiple second target images of the second detection area 22 to obtain an interface image of the second reflective interface 42. The second processor is used to obtain multiple first target images of the third detection area 23 and stitch together multiple first target images of the third detection area 23 to obtain an interface image of the first reflective interface 41.
[0061] The second processor is also used to obtain the target to be measured based on the interface image and determine the reflective interface where the target to be measured is located. Exemplarily, the second processor is used to obtain the first target to be measured based on the interface image of the first reflective interface, the second processor is used to obtain the second target to be measured based on the interface image of the second reflective interface, and the second processor is used to obtain the third target to be measured based on the interface image of the third reflective interface.
[0062] Example 2
[0063] The differences between this embodiment and the first embodiment include: Figure 5 and Figure 6 As shown, the imaging component 3 is not provided.
[0064] Figure 5 In the figure, light source 1 is a point light source and detector 2 is a linear array detector. Figure 6 In the figure, light source 1 is a linear light source and detector 2 is an array detector.
[0065] In this embodiment, since the imaging component 3 is not provided, the corresponding relationship between each feedback light and each detection area is different from that in the first embodiment, specifically:
[0066] like Figure 5 As shown, the first detection area 21 is used to detect the first feedback light 11 to obtain the first target to be measured, the third detection area 23 is used to detect the third feedback light 13 to obtain the third target to be measured, and the second detection area 22 is used to detect the second feedback light 12 to obtain the second target to be measured.
[0067] like Figure 5As shown, the first detection area 21 is used to form a first target image of the first reflection interface 41 according to the first feedback light 11, and the first processor is used to obtain the first target to be measured according to the first target image, and obtain the position of the first target to be measured on the first reflection interface 41 according to the relative position of the image of the first target to be measured in the first target image; the second detection area 22 is used to form a second target image of the second reflection interface 42 according to the second feedback light 12, and the first processor is used to obtain the second target to be measured according to the second target image, and obtain the position of the second target to be measured on the second reflection interface 42 according to the relative position of the image of the second target to be measured in the second target image; the third detection area 23 is used to form a third target image of the third reflection interface 43 according to the third feedback light 13, and the first processor is used to obtain the third target to be measured according to the third target image, and obtain the position of the third target to be measured on the third reflection interface 43 according to the relative position of the image of the third target to be measured in the third target image.
[0068] like Figure 5 As shown, the second processor is used to acquire multiple first target images of the first detection zone 21 and stitch the multiple first target images of the first detection zone 21 to acquire an interface image of the first reflective interface 41. The second processor is used to acquire multiple second target images of the second detection zone 22 and stitch the multiple second target images of the second detection zone 22 to acquire an interface image of the second reflective interface 42. The second processor is used to acquire multiple third target images of the third detection zone 23 and stitch the multiple third target images of the third detection zone 23 to acquire an interface image of the third reflective interface 43.
[0069] The above embodiments of the present invention are described in detail through examples, but the contents described are only exemplary embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. The protection scope of the present invention is defined by the claims. Any use of the technical solutions described in the present invention, or any person skilled in the art who, inspired by the technical solutions of the present invention, designs similar technical solutions within the essence and protection scope of the present invention to achieve the above technical effects, or any equivalent changes and improvements made to the scope of application, shall still fall within the scope of protection covered by the patent of the present invention.
Claims
1. A detection system for detecting reflective interfaces having different heights formed in a sample along a direction perpendicular to the sample surface, characterized in that: include: a light source for emitting detection light toward the sample, wherein the detection light at least partially passes through the sample and is reflected by reflective interfaces at different heights of the sample to form feedback light, and the detection light forms an acute angle with a normal to the sample surface; The detector comprises a plurality of detection areas, wherein the plurality of detection areas are used to respectively detect feedback light from reflection interfaces at different heights to obtain targets to be detected at reflection interfaces at different heights.
2. The detection system according to claim 1, characterized in that Also includes: An imaging component is located between the light source and the detector, and the reflection interface of the detection light and the sample at different heights has multiple intersection positions, and the multiple intersection positions are on the same intersection surface; the imaging component is used to make the detection surfaces of the multiple detection areas conjugate with the intersection surface.
3. The detection system according to claim 2, characterized in that The incident angle of the detection light is 45°, and the detection surface of the detector is perpendicular to the direction of the feedback light reflected by the reflection interface; the multiple detection areas are arranged at least along a first direction, and the first direction is parallel to the incident direction of the detection light on the sample.
4. The detection system according to claim 2, characterized in that The detection surface of the detector, the main optical axis of the detection light and the main plane of the imaging component intersect at one point.
5. The detection system according to claim 1, characterized in that The light source is a point light source, and the detector is a linear array detector; or the light source is a linear light source, and the detector is a planar array detector.
6. The detection system according to claim 5, characterized in that: The plurality of detection areas are photodiode arrays, photomultiplier tube arrays or avalanche photodiode arrays.
7. The detection system according to claim 5 or 6, characterized in that: The light source is a linear light source, which projects onto the reflection interface to form a linear light spot. The extension direction of the linear light spot is perpendicular to the incident direction of the main optical axis of the detection light, and the detection surface of the detector is parallel to the incident direction.
8. The detection system according to claim 1, characterized in that The detector is also used to form a target image of a reflection interface of different heights according to the feedback light; the detection system also includes: a first processor, used to obtain the target to be measured according to the target image, and obtain the position of the target to be measured in the sample according to the relative position of the image of the target to be measured in the target image.
9. The detection system according to claim 1, characterized in that: The light source and detector constitute a detection unit; the detection system further comprises: a moving unit, which is used to drive any one of the detection unit and the sample or a combination of the two, so as to generate relative movement between the detection unit and the sample, so that the detection unit scans the sample; and a controller, which is used to control the detector to capture multiple target images during the scanning process.
10. The detection system according to claim 9, characterized in that: It also includes a second processor, which is used to obtain a target image of the same detection area and splice multiple target images of the same detection area to obtain an interface image of a reflective interface at the same height.
11. The detection system according to claim 10, characterized in that: The second processor is further configured to acquire a target to be measured according to the interface image and determine a reflective interface where the target to be measured is located.