Optical assembly and optical system

Abstract

The utility model provides an optical assembly and an optical system, and the optical assembly comprises a rotating wheel; the direction mirrors are arranged on the rotating wheel; and the driving assembly drives the rotating wheel to rotate so as to switch the different direction mirrors to preset positions, and the directions of the surface normal lines of the different direction mirrors located at the preset positions are different. The optical assembly can quickly form illumination light in different directions.

Description

Technical Field

[0001] The present application relates to the field of optical technology, and in particular to an optical component and an optical system. Background Art

[0002] For the semiconductor manufacturing industry, defects generated during the production process are the main reason for the reduction of chip reliability and manufacturing yield. Therefore, chip defect detection is of great significance in the semiconductor manufacturing process.

[0003] In semiconductor inspection equipment, it is often necessary to detect multiple types of defects on samples. Different defects have different detection effects under illumination beams at different incident angles. Therefore, defect detection equipment often requires incident light paths with multiple incident directions at the same time.

[0004] In an optical path with multi-angle incidence, in order to achieve multi-angle detection, related technologies need to use incident light of multiple different angles to detect the sample separately, which causes the detection efficiency to drop exponentially. Utility Model Content

[0005] An object of the embodiments of the present application is to provide an optical component and an optical system for rapidly forming illumination light in different directions.

[0006] The utility model provides an optical component, comprising: a rotating wheel; and a plurality of directional mirrors arranged on the rotating wheel; a driving component, wherein the driving component drives the rotating wheel to rotate so as to switch different directional mirrors to preset positions respectively, and the directions of the surface normals of the different directional mirrors at the preset positions are different.

[0007] Optionally, multiple directional mirrors are arranged as the first circle of directional mirrors to the Nth circle of directional mirrors, where N is an integer greater than or equal to 1; each circle of directional mirrors is arranged around the rotation center axis of the rotating wheel; when N is greater than or equal to 2, any nth circle of directional mirrors is arranged around the n-1th circle of directional mirrors, where n is an integer greater than or equal to 2 and less than or equal to N.

[0008] Optionally, multiple directional mirrors are reflectors, and the reflectors in different directions in each circle are alternately arranged along the circumferential direction around the rotation center axis; or, a part of the directional mirrors are reflectors, and another part of the directional mirrors are transmission mirrors, and the reflectors and transmission mirrors in each circle of the directional mirrors are alternately arranged along the circumferential direction around the rotation center axis; the arrangement surface of the multiple directional mirrors is perpendicular to the rotation center axis; the reflection surface of the reflector is a plane.

[0009] Optionally, the directional mirror is arranged on the side of the rotating wheel, and the side is parallel to the rotation center axis; each of the directional mirrors is a curved reflector; at least a part of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged along the circumferential direction around the rotation center axis.

[0010] Optionally, the reflecting surface of the directional mirror is a cylinder; the distances between the directional mirrors with different curvature radii and the rotation center axis are different, and the distances between the directional mirrors with the same curvature radii and the rotation center axis are the same; the center axes of each of the directional mirrors coincide with the rotation center axis.

[0011] The present application also provides an optical system, comprising: a light source for generating illumination light; the optical component of the present application; the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions, so that the illumination light is emitted in different directions; the preset position is the position where the illumination light path passes.

[0012] Optionally, it further includes: a guiding component, wherein the guiding component includes a plurality of guiding mirrors, and the plurality of guiding mirrors respectively guide the illumination light emitted from the direction mirror in different directions to the sample surface at a preset angle.

[0013] Optionally, the multiple guide mirrors are respectively the first guide mirror to the Mth guide mirror, M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted by the direction mirror to the sample surface at the mth preset angle; one of the first preset angle to the Mth preset angle is 90 degrees, and the other preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

[0014] Optionally, the illumination light is used to irradiate the surface of the sample; the optical system also includes: multiple collecting components, the collecting components including collecting mirrors and detectors; wherein, the surface of the sample is used to receive the illumination light and reflect or scatter the illumination light to form signal light; if the optical system includes multiple collecting components, different collecting mirrors are used to collect signal light from different directions of the surface of the sample, and the detector is used to obtain the signal light from the collecting mirrors.

[0015] Optionally, the frame frequency of the detector is greater than or equal to the switching frequency of mirrors in different directions.

[0016] The technical solution of this application has the following beneficial effects:

[0017] In the optical assembly provided by the present invention, the drive assembly drives the rotating wheel to rotate to switch different directional mirrors to preset positions. The normal lines of the surfaces of the different directional mirrors at the preset positions are in different directions. This allows for rapid switching of different directional mirrors to meet needs.

[0018] Furthermore, the directional mirrors are disposed on the side of the rotating wheel, the side being parallel to the central axis of rotation; each of the directional mirrors is a curved reflector; at least some of the curved reflectors have different curvatures; and the curved reflectors with different curvatures are alternately disposed along a circumferential direction around the central axis of rotation. This ensures that the emission direction of the same directional mirror remains unchanged during the rotation of the rotating wheel, thereby stabilizing the incident angle of the illumination light on the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 A schematic diagram of an optical system provided in one embodiment of the present invention;

[0021] Figure 2 A schematic diagram of an optical system provided in another embodiment of the present invention;

[0022] Figure 3 A schematic diagram of an optical assembly provided in one embodiment of the present invention;

[0023] Figure 4 A schematic diagram of an optical component provided in another embodiment of the present invention. DETAILED DESCRIPTION

[0024] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0027] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0028] Example 1

[0029] The present invention provides an optical component 101 according to an embodiment of the present invention. Figure 1 、 Figure 3 and Figure 4 The optical component 101 includes: a rotating wheel 1011 and a plurality of directional mirrors 1012 arranged on the rotating wheel 1011; a driving component, which drives the rotating wheel 1011 to rotate to switch different directional mirrors 1012 to preset positions respectively, and the directions of the surface normals of different directional mirrors 1012 at the preset positions are different.

[0030] In this embodiment, the driving assembly drives the rotating wheel 1011 to rotate to switch different directional mirrors 1012 to preset positions respectively. The directions of the surface normals of different directional mirrors at the preset positions are different. In this way, different directional mirrors can be quickly switched to meet needs.

[0031] refer to Figure 3 The optical assembly 101 includes a rotating wheel 1011 and a plurality of directional mirrors 1012 disposed on the rotating wheel 1011. The plurality of directional mirrors 1012 are arranged as a first circle of directional mirrors to an Nth circle of directional mirrors, where N is an integer greater than or equal to 1; each circle of directional mirrors 1012 is disposed around the rotation center axis of the rotating wheel 1011. Figure 3 In the embodiment, N=1, and a circle of directional mirrors 1012 is provided. In other embodiments, when N is greater than or equal to 2, any nth circle of directional mirrors is provided around the n-1th circle of directional mirrors, where n is an integer greater than or equal to 2 and less than or equal to N.

[0032] In this embodiment, reference Figure 3 The direction mirror 1012 passes through the rotating wheel 1011 along a direction parallel to the rotation center axis.

[0033] In this embodiment, reference Figure 3The multiple directional mirrors 1012 are reflectors, with the reflectors in different directions in each circle alternately arranged along the circumference around the central axis of rotation. The reflective surface of each reflector is a flat surface. The angle between the reflective surface of each reflector and the horizontal plane is different. The drive assembly rotates the rotating wheel 1011 to switch the different reflectors to predetermined positions.

[0034] In another embodiment of the present application, a portion of the directional mirrors 1012 are reflective mirrors, and another portion of the directional mirrors 1012 are transmissive mirrors. The reflective mirrors and transmissive mirrors in each circle of the directional mirrors 1012 are alternately arranged along the circumferential direction around the rotational center axis. The drive assembly drives the rotation of the rotating wheel 1011 to switch the reflective mirrors and transmissive mirrors to preset positions. In this case, the angles between the reflective surfaces of the multiple reflective mirrors and the horizontal plane can be the same, or the angles between the reflective surfaces of the multiple reflective mirrors and the horizontal plane can be at least partially different. The reflective surface of the reflective mirror is a plane.

[0035] refer to Figure 3 The arrangement plane of the plurality of directional mirrors 1012 is perpendicular to the central axis of rotation. The reflecting surface of the reflecting mirror is a plane.

[0036] refer to Figure 3 The optical assembly 101 further includes a support structure 1014 supporting the rotating wheel 1011; and a rotating shaft 1013 extending through the rotating wheel 1011. The rotating wheel 1011 rotates about the rotating shaft 1013. A driving assembly is configured to drive the rotating shaft 1013 to rotate, thereby driving the rotating wheel 1011 to rotate. The rotating wheel 1011 rotates about the rotating shaft 1013. The rotating center axis is located at the rotating shaft 1013.

[0037] In another embodiment of the present application, reference Figure 4 The optical assembly 101 includes: a rotating wheel 1011 and a plurality of directional mirrors 1012 disposed on the rotating wheel 1011; and a driving assembly, wherein the driving assembly drives the rotating wheel 1011 to rotate so as to switch different directional mirrors 1012 to preset positions, wherein the directions of the surface normals of the different directional mirrors at the preset positions are different. The directional mirrors 1012 are disposed on the side of the rotating wheel 1011. The side of the rotating wheel 1011 is parallel to the rotation center axis of the rotating wheel 1011. Each of the directional mirrors 1012 is a curved reflector, and at least a portion of the curved reflectors have different curvatures. The curved reflectors with different curvatures are alternately disposed along the circumferential direction around the rotation center axis. Figure 4 In the embodiment, the plurality of directional mirrors 1012 include a directional mirror 1012-1 and a directional mirror 1012-2. Both the directional mirror 1012-1 and the directional mirror 1012-2 are curved reflectors. The directional mirror 1012-1 and the directional mirror 1012-2 have different curvatures.

[0038] refer to Figure 4 , the reflecting surface of the directional mirror 1012 is a cylinder; the distances between the directional mirrors 1012 with different curvature radii and the rotation center axis are different, and the distances between the directional mirrors 1012 with the same curvature radius and the rotation center axis are the same; the center axes of the directional mirrors 1012 coincide with the rotation center axis.

[0039] It should be noted that the central axis of the directional mirror 1012 refers to: the central axis corresponding to the reflection surface of the directional mirror 1012, and the distance from the central axis to each point on the reflection surface of the same directional mirror 1012 is equal.

[0040] refer to Figure 4 , the distances between multiple directional mirrors 1012-1 and the rotation center axis are the same, the distances between multiple directional mirrors 1012-2 and the rotation center axis are the same, and the distance between the directional mirror 1012-1 and the rotation center axis is smaller than the distance between the directional mirror 1012-2 and the rotation center axis.

[0041] refer to Figure 4 Rotating wheel 1011 includes a main wheel 1011-1 and a plurality of supporting protrusions 1011-2 disposed on the sidewalls of main wheel 1011-1. The plurality of supporting protrusions 1011-2 are spaced apart around the rotation axis of rotating wheel 1011. The distance between the side of main wheel 1011-1 and the rotation axis is different from the distance between the side of supporting protrusions 1011-2 and the rotation axis. A direction mirror 1012-1 is disposed on the side of main wheel 1011-1, and a direction mirror 1012-2 is disposed on the side of supporting protrusions 1011-2.

[0042] Example 2

[0043] This embodiment provides a working method of the optical component of embodiment 1, including: the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, and the directions of the surface normals of different directional mirrors at the preset positions are different.

[0044] In this embodiment, reference Figure 3 , multiple directional mirrors 1012 are arranged as a first circle of directional mirrors to an Nth circle of directional mirrors, where N is an integer greater than or equal to 1; each circle of directional mirrors 1012 is arranged around the rotation center axis of the rotating wheel 1011; the arrangement surface of multiple directional mirrors 1012 is perpendicular to the rotation center axis; the driving component drives the rotating wheel 1011 to rotate to switch different directional mirrors to preset positions respectively, including: the driving component drives the rotating wheel 1011 to rotate to switch different directional mirrors in any circle to preset positions respectively.

[0045] In this embodiment, reference Figure 3 , the multiple directional mirrors 1012 are all reflectors, and the reflectors in different directions in each circle are alternately arranged along the circumferential direction around the rotation center axis; the reflective surface of the reflector is a plane; the driving component drives the rotating wheel 1011 to rotate to switch the different directional mirrors in any circle to the preset positions, including: the driving component drives the rotating wheel 1011 to rotate to switch the different directional mirrors in any circle to the preset positions.

[0046] In another embodiment of the present application, a portion of the directional mirrors are reflective mirrors, and another portion of the directional mirrors are transmissive mirrors, and the reflective mirrors and the transmissive mirrors in each circle of the directional mirrors are alternately arranged along the circumferential direction around the rotation center axis; the reflective surface of the reflective mirror is a plane; the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, including: the driving component drives the rotating wheel to rotate to switch the reflective mirror and the transmissive mirror to preset positions respectively.

[0047] In this embodiment, the working method of the optical component further includes: switching the directional mirrors of different circles to preset positions respectively by changing the overall position of the rotating wheel.

[0048] In another embodiment, reference Figure 4 The directional mirrors 1012 are disposed on a side surface of the rotating wheel 1011, the side surface being parallel to the central axis of rotation; each of the directional mirrors 1012 is a curved reflector; at least some of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately disposed along a circumferential direction around the central axis of rotation; the driving assembly drives the rotating wheel 1011 to rotate to switch the different directional mirrors 1012 to preset positions, including: the driving assembly drives the rotating wheel 1011 to rotate to switch the curved reflectors with different curvatures to preset positions. This ensures that the emission direction of the same directional mirror remains unchanged during the rotation of the rotating wheel, thereby stabilizing the incident angle of the illumination light on the sample.

[0049] Example 3

[0050] This embodiment provides an optical system, referring to Figure 1 ,include:

[0051] A light source for generating illumination light;

[0052] The optical component 101 of Example 1; the optical component 101 includes: a rotating wheel; a plurality of directional mirrors arranged on the rotating wheel; and a driving component, which drives the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, so that the illumination light is emitted in different directions; the preset position is the position where the illumination light path passes.

[0053] In this embodiment, the optical system further includes: a guiding component, the guiding component including a plurality of guiding mirrors, and the plurality of guiding mirrors respectively guide the illumination light emitted from the direction mirror in different directions to the surface of the sample 120 at a preset angle.

[0054] In this embodiment, the multiple guide mirrors are respectively the first guide mirror to the Mth guide mirror, where M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted by the direction mirror to the sample surface at the mth preset angle; one of the first preset angle to the Mth preset angle is 90 degrees, and the other preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

[0055] The optical system also includes: multiple collecting components, each of which includes a collecting mirror and a detector; wherein the surface of the sample 120 is used to receive the illumination light and reflect or scatter the illumination light to form signal light, different collecting mirrors are used to collect signal light from different directions of the surface of the sample, and the detector is used to obtain the signal light from the collecting mirror.

[0056] refer to Figure 1 The plurality of guide mirrors include a first guide mirror 330 and a second guide mirror 331. The first guide mirror 330 is a beam splitter, and the second guide mirror 331 is a reflector. The first guide mirror 330 guides illumination light A in a first direction to the surface of the sample 120 at a first preset angle. The sample 120 reflects the illumination light A in the first direction to form a first signal light. The first signal light is transmitted through the first guide mirror 330 and then illuminates the detector 401. The second guide mirror 331 guides illumination light B in a second direction to the surface of the sample 120 at a second preset angle. The sample 120 reflects the illumination light B in the second direction to form a second signal light. The second signal light illuminates the detector 406. The second preset angle is different from the first preset angle.

[0057] refer to Figure 2 The plurality of guide mirrors include a first guide mirror 1012 and a second guide mirror 1012. The first guide mirror 1012 guides the illumination light A in a first direction to the surface of the sample 120 at a first preset angle, and the second guide mirror 1012 guides the illumination light A in a second direction to the surface of the sample 120 at a second preset angle. Figure 2Multiple collecting components are schematically shown in the figure. The surface of the sample 120 is used to receive the illumination light and reflect or scatter the illumination light to form signal light. A part of the collecting components includes: a collecting mirror 32 and a detector. The collecting mirror 32 collects the signal light from the surface of the sample 120. Specifically, the collecting mirror 32 is used to reflect the signal light from the surface of the sample 120, and the detector is used to obtain the signal light from the collecting mirror 32. Another part of the collecting components includes: a collecting mirror 22 and a detector. The collecting mirror 22 is used to collect the signal light from the sample 120. Specifically, the collecting mirror 22 is used to focus the signal light from the surface of the sample 120.

[0058] In this embodiment, the illumination lights in different directions do not interfere with each other. The illumination light can be the illumination light.

[0059] Illumination light from different directions is used to be incident on the surface of the sample 120 at different preset angles. When the illumination light is illumination light, illumination light at different preset angles is used to detect different types of defects, thereby improving detection efficiency. The sample 120 can be, for example, a wafer or a semi-finished semiconductor structure or a finished semiconductor structure.

[0060] Combined with reference Figure 1 、 Figure 3 and Figure 4 The illumination light emitted by the directional mirror 1012 is used to illuminate the surface of the sample 120. The driving component drives the rotating wheel 1011 to rotate to switch the different directional mirrors to emit illumination light in a first direction to an M-th direction, where M is an integer greater than or equal to 2. One of the first to M-th directions is perpendicular to the surface of the sample 120, and the angles between the remaining directions and the surface of the sample 120 are not perpendicular. The first to M-th directions are all different. Figure 1 In the example, M is equal to 2. The driving assembly drives the rotating wheel 1011 to rotate to switch the directional mirror 1012 to emit illumination light A in a first direction to illumination light B in a second direction. The first direction and the second direction are different. It should be noted that in other embodiments, M can be greater than 2.

[0061] In this embodiment, reference Figure 2 The optical system further includes: a support table 115, the support table 115 is used to carry a sample 120. The collecting mirror 32 in a portion of the collecting components is a reflecting collecting mirror. The collecting mirror 22 in a portion of the collecting components is a focusing collecting mirror. The orthographic projection of the reflecting collecting mirror on the surface of the support table 115 is located around the side of the orthographic projection of the focusing collecting mirror on the surface of the support table 115. This ensures that the optical path of the focusing collecting mirror and the optical path of the reflecting collecting mirror do not interfere with each other.

[0062] In this embodiment, reference Figure 2A portion of the collection assembly further includes: a first reflector 24, located in the optical path between the focusing collection mirror and the detector. The detector in a portion of the collection assembly includes a first sub-detector 28 and a second sub-detector 30. A portion of the collection assembly further includes: a first beam selection element 26, located in the optical path between the first reflector 24 and the first sub-detector 28 and in the optical path between the first reflector 24 and the second sub-detector 30. The first beam selection element 26 is configured to transmit light from the first reflector 24 to the first sub-detector 28 and reflect light to the second sub-detector 30. The first beam selection element 26 is a beam splitter or a dichroic mirror.

[0063] In this embodiment, reference Figure 2 A portion of the collecting assembly further includes: a first aperture 30 , located in the optical path between the first reflecting mirror 24 and the first beam selecting element 26 .

[0064] In this embodiment, reference Figure 2 The detectors in another part of the collection assembly include a third sub-detector 36 and a fourth sub-detector 38. Another part of the collection assembly also includes: a second beam selection component 34, located in the optical path between the reflective collection mirror and the third sub-detector 36 and in the optical path between the reflective collection mirror and the fourth sub-detector 38. The second beam selection component 34 is used to transmit light from the focusing collection mirror to the third sub-detector 36 and reflect it to the fourth sub-detector 38. The second beam selection component 34 is a beam splitter or a dichroic mirror.

[0065] In this embodiment, reference Figure 2 Another part of the collecting component also includes: a second aperture 48, located in the optical path between the reflecting collecting mirror and the second beam selecting element 34.

[0066] In this embodiment, reference Figure 2 The optical system further includes a processor connected to the detector, and configured to process the image acquired by the detector. The processor may be a computer.

[0067] In this embodiment, the optical system further includes: a shaping element and a collimating element, which are located in the optical path between the collecting mirror and the detector.

[0068] In this embodiment, the optical system further includes a polarizer positioned in the outgoing light path of the directional mirror, which modifies the polarization direction of the illumination light. After the illumination light is emitted in different directions, the polarizer can be used to modify the polarization direction of the illumination light, thereby enabling detection of light with different polarization states on the sample. The polarizer can be positioned between the guide mirror and the directional mirror, or on the side of the guide mirror facing away from the directional mirror.

[0069] In other embodiments of the present application, the optical system of the present application can also be applied to acoustic and optical detection. After the illumination light is emitted in different directions, the wavelengths of the illumination light in different directions are different. The illumination lights of different wavelengths are used as excitation light (excitation sound waves) and detection light respectively, and there is a phase delay between the excitation light and the detection light.

[0070] In other embodiments of the present application, after the illumination light is emitted in different directions, the wavelengths of the illumination light in different directions are different, and the object to be detected can be detected using light of different wavelengths. At least one beam of illumination light can excite fluorescence to achieve fluorescence detection.

[0071] In this embodiment, the frame rate of the detectors is greater than or equal to the switching frequency of the different directional mirrors. The frame rate of the first sub-detector 28 is greater than or equal to the switching frequency of the different directional mirrors, and the frame rate of the second sub-detector 30 is greater than or equal to the switching frequency of the different directional mirrors. The frame rate of the third sub-detector 360 is greater than or equal to the switching frequency of the different directional mirrors, and the frame rate of the fourth sub-detector 38 is greater than or equal to the switching frequency of the different directional mirrors.

[0072] Example 4

[0073] This embodiment provides a working method of the optical system of embodiment 3, including: generating illumination light by the light source and irradiating the illumination light to the directional mirror; driving the rotating wheel to rotate by the driving component to switch different directional mirrors to emit illumination light in different directions.

[0074] In this embodiment, the working method of the optical system further includes: guiding the illumination light emitted from the direction mirror in different directions to the sample surface at preset angles by different guide mirrors in the guide assembly.

[0075] The optical system also includes: multiple collecting components, each of which includes a collecting mirror and a detector; the working method of the optical system also includes: reflecting or scattering the illumination light through the surface of the sample to form signal light; collecting signal light from different directions of the surface of the sample through different collecting mirrors; acquiring the signal light from the collecting mirror through the detector; the frame rate of the detector is greater than or equal to the switching frequency of mirrors in different directions.

[0076] refer to Figure 1The plurality of guide mirrors include a first guide mirror 330 and a second guide mirror 331, wherein the first guide mirror 330 is a beam splitter and the second guide mirror 331 is a reflector. The illumination light emitted from the direction mirror in different directions is guided to the sample surface at preset angles by different guide mirrors in the guide assembly, including: guiding the illumination light A in the first direction to the surface of the sample 120 at a first preset angle by the first guide mirror 330, and guiding the illumination light B in the second direction to the surface of the sample 120 at a second preset angle by the second guide mirror 331. The illumination light is reflected or scattered by the surface of the sample to form signal light, including: reflecting the illumination light A in the first direction by the sample 120 to form the first signal light, and reflecting the illumination light B in the second direction by the sample 120 to form the second signal light. Collecting the signal light from different directions on the surface of the sample by different collecting mirrors includes: collecting the first signal light from the surface of the sample by the first collecting mirror, and collecting the second signal light from the surface of the sample by the second collecting mirror. Acquiring the signal light from the collecting mirrors through the detectors includes: acquiring the first signal light from the first collecting mirror through the detector 401, and acquiring the second signal light from the second collecting mirror through the detector 4061. In this embodiment, the first collecting mirror and the first guide mirror 330 are the same component.

[0077] refer to Figure 2 The plurality of guide mirrors include a first guide mirror 1012 and a second guide mirror 1012. Different guide mirrors in the guide assembly guide illumination light emitted from the direction mirrors in different directions to the sample surface at preset angles, including: guiding illumination light A in a first direction to the surface of the sample 120 at a first preset angle by the first guide mirror 1012, and guiding illumination light B in a second direction to the surface of the sample 120 at a second preset angle by the second guide mirror 1012.

[0078] Figure 2 Multiple collecting components are schematically shown in the figure. The surface of the sample 120 is used to receive the illumination light and reflect or scatter the illumination light to form signal light. A part of the collecting components includes: a collecting mirror 32 and a detector. The collecting mirror 32 collects the signal light from the surface of the sample 120. Specifically, the collecting mirror 32 is used to reflect the signal light from the surface of the sample 120, and the detector is used to obtain the signal light from the collecting mirror 32. Another part of the collecting components includes: a collecting mirror 22 and a detector. The collecting mirror 22 is used to collect the signal light from the sample 120. Specifically, the collecting mirror 22 is used to focus the signal light from the surface of the sample 120.

[0079] refer to Figure 2, reflecting or scattering the illumination light by the surface of the sample 120 to form signal light, including: reflecting illumination light A in a first direction by the sample 120 to form a first signal light, and reflecting illumination light B in a second direction by the sample 120 to form a second signal light. Collecting signal light from different directions on the surface of the sample using different collecting mirrors includes: collecting the first signal light from the surface of the sample 120 using the collecting mirror 32, and collecting the second signal light from the surface of the sample using the collecting mirror 22.

[0080] In this embodiment, reference Figure 2 , a part of the collecting assembly further includes: a first reflector 24, located in the optical path between the focusing collecting mirror and the detector. The detector in a part of the collecting assembly includes a first sub-detector 28 and a second sub-detector 30; a part of the collecting assembly further includes: a first beam selecting element 26, located in the optical path between the first reflector 24 and the first sub-detector 28 and in the optical path between the first reflector 24 and the second sub-detector 30, the first beam selecting element 26 transmits the light from the first reflector 24 to the first sub-detector 28 and reflects it to the second sub-detector 30. The first beam selecting element 26 is a beam splitter or a dichroic mirror. The frame frequency of the first sub-detector 28 is greater than or equal to the switching frequency of mirrors in different directions, and the frame frequency of the second sub-detector 30 is greater than or equal to the switching frequency of mirrors in different directions.

[0081] In this embodiment, reference Figure 2 A portion of the collecting assembly further includes: a first aperture 30 , located in the optical path between the first reflecting mirror 24 and the first beam selecting element 26 .

[0082] In this embodiment, reference Figure 2 , the detectors in another part of the collection assembly include a third sub-detector 36 and a fourth sub-detector 38; another part of the collection assembly also includes: a second beam selection component 34, located in the optical path between the reflective collection mirror and the third sub-detector 36 and in the optical path between the reflective collection mirror and the fourth sub-detector 38, the second beam selection component 34 is used to transmit the light from the focusing collection mirror to the third sub-detector 36 and reflect it to the fourth sub-detector 38. The second beam selection component 34 is a beam splitter or a dichroic mirror. The frame frequency of the third sub-detector 360 is greater than or equal to the switching frequency of the different directional mirrors, and the frame frequency of the fourth sub-detector 38 is greater than or equal to the switching frequency of the different directional mirrors.

[0083] In this embodiment, reference Figure 2 Another part of the collecting component also includes: a second aperture 48, located in the optical path between the reflecting collecting mirror and the second beam selecting element 34.

[0084] In this embodiment, reference Figure 2 The optical system further includes: a processor connected to the detector, and the working method of the optical system further includes: processing the image acquired by the detector by the processor. The processor can be a computer.

[0085] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. An optical component, characterized in that: include: Spinning wheel; and a plurality of directional mirrors provided on the rotating wheel; A driving component drives the rotating wheel to rotate so as to switch different directional mirrors to preset positions respectively, and the directions of the surface normals of different directional mirrors at the preset positions are different.

2. The optical component according to claim 1, wherein The plurality of directional mirrors are arranged as a first circle of directional mirrors to an Nth circle of directional mirrors, where N is an integer greater than or equal to 1; each circle of directional mirrors is disposed around the central axis of rotation of the rotating wheel; When N is greater than or equal to 2, any n-th circle of directional mirrors is arranged around the (n-1)-th circle of directional mirrors, and n is an integer greater than or equal to 2 and less than or equal to N.

3. The optical component according to claim 2, wherein: The plurality of directional mirrors are all reflective mirrors, and the reflective mirrors in different directions in each circle are alternately arranged along the circumferential direction around the rotation center axis; or, a portion of the directional mirrors are reflective mirrors, and another portion of the directional mirrors are transmissive mirrors, and the reflective mirrors and the transmissive mirrors in each circle of the directional mirrors are alternately arranged along the circumferential direction around the rotation center axis; The arrangement surface of the plurality of directional mirrors is perpendicular to the central axis of rotation; the reflecting surface of the reflecting mirror is a plane.

4. The optical component according to claim 1, wherein The directional mirrors are arranged on the side surfaces of the rotating wheel, and the side surfaces are parallel to the rotation center axis of the rotating wheel; each of the directional mirrors is a curved reflector; at least a portion of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged along the circumferential direction around the rotation center axis.

5. The optical component according to claim 4, wherein: The reflecting surface of the directional mirror is a cylinder; the distances between the directional mirrors with different curvature radii and the rotation center axis are different, and the distances between the directional mirrors with the same curvature radius and the rotation center axis are the same; the center axes of the directional mirrors coincide with the rotation center axis.

6. An optical system, characterized in that include: A light source for generating illumination light; The optical assembly according to any one of claims 1 to 5, wherein the driving assembly drives the rotating wheel to rotate to switch different directional mirrors to preset positions, so that the illumination light is emitted in different directions; The preset position is the position through which the illumination light path passes.

7. The optical system according to claim 6, wherein: Also includes: The guiding assembly includes a plurality of guiding mirrors, and the plurality of guiding mirrors respectively guide the illumination light emitted from the direction mirror in different directions to the sample surface at a preset angle.

8. The optical system according to claim 7, wherein: The multiple guide mirrors are respectively the first guide mirror to the Mth guide mirror, where M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted by the direction mirror to the sample surface at the mth preset angle; one of the first preset angle to the Mth preset angle is 90 degrees, and the other preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

9. The optical system according to claim 6, wherein: The illumination light is used to irradiate the surface of the sample; The optical system further comprises: one or more collecting assemblies, the collecting assemblies comprising a collecting mirror and a detector; In which, the surface of the sample is used to receive the illumination light and reflect or scatter the illumination light to form signal light; if the optical system includes multiple collecting components, different collecting mirrors are used to collect signal light from different directions of the surface of the sample, and the detector is used to obtain the signal light from the collecting mirrors.

10. The optical system according to claim 9, wherein: The frame frequency of the detector is greater than or equal to the switching frequency of the mirrors in different directions.

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