Left-right centering adjusting device convenient for clamping mask plate

Abstract

The utility model discloses a left-right centering adjusting device convenient for clamping a mask plate, which comprises two support rods respectively arranged on two sides, and the mask plate is positioned between the two support rods; the two supporting rods are located at the four corners of the mask, and the opposite faces of the two supporting rods are each provided with a bearing block used for bearing the four corners of the mask and a clamping block used for clamping the four corners of the mask. The first driving piece is used for driving the clamping block to rotate out of the front projection range of the mask plate or enter the front projection range of the mask plate to clamp the corners of the mask plate on the bearing block; and the second driving piece is used for driving the two supporting rods to get close to each other or get away from each other. By the adoption of the scheme, the problems that in the process that the mask plate is grabbed by the AGV, the mask plate makes contact with the left side and the right side of the holder, and the mask plate is scratched can be avoided, and the risks of displacement, scratching, plate falling and the like when the AGV grabs the mask plate are further avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of mask clamp equipment, in particular to a left-right centering adjustment device which is convenient for clamping a mask. Background Art

[0002] A photomask, also known as a photomask or reticle, is a masking tool used in the fabrication of microelectronic chips. It is created using photolithography. The fabrication process begins by creating a transparent mask with the design pattern of the chip to be fabricated. This mask is then bonded to a semiconductor silicon wafer, and a series of processes, including exposure and development, are performed using a photolithography machine to produce the microelectronic chip.

[0003] Photolithography machines are the jewel of the modern optical industry and a core technology in industries like semiconductors and flat panel displays. They primarily use optical imaging technology to transfer chip design patterns on photomasks to the surface of silicon wafers, thereby producing microelectronic devices with the desired functions. Flippers, process machines, cleaning machines, and laminating machines are key components of the mask manufacturing process. When docking with automated guided vehicles (AGVs), these machines must be positioned at a 75-degree angle to facilitate product capture by the AGV. However, in existing technologies, because the mask is clamped and fixed circumferentially, the clamping gaps on both sides of the mask are small or unevenly distributed. This causes the mask to come into contact and scrape with the load while being captured by the AGV, further risking displacement, scratches, and even drop of the mask when the AGV captures it. Utility Model Content

[0004] The utility model aims to solve the deficiencies of the prior art and aims to provide a left-right centering adjustment device for facilitating the clamping of a mask. By adopting this solution, the left-right centering of the mask is achieved by adjusting the order in which the clamping claws clamp and place the mask, and adjusting the gap between the mask and the holder in the left and right directions, thereby leaving a clamping gap for the AGV, thereby avoiding the mask from contacting or scratching the holder on the left and right during the process of being grasped by the AGV, and further avoiding the risks of displacement, scratching, and dropping of the mask when the AGV grasps the mask.

[0005] The utility model is achieved through the following technical solutions:

[0006] A left-right centering adjustment device for facilitating the clamping of a mask, comprising:

[0007] Two support rods are provided on both sides, and the mask is located between the two support rods; at the four corners of the mask, the opposing surfaces of the two support rods are provided with supporting blocks for supporting the four corners of the mask, and clamping blocks for clamping the four corners of the mask;

[0008] a first driving member, configured to drive the clamping block to rotate out of the front projection range of the mask, or to enter the front projection range of the mask to clamp the edge of the mask on the carrying block;

[0009] A second driving member is used to drive the two support rods to move closer to or away from each other.

[0010] Compared with the prior art, since the mask is clamped and fixed circumferentially, the clamping gaps on both sides of the mask are small, or the clamping gaps on both sides are unevenly distributed, resulting in the mask contacting and scratching with the carrier on the left and right during the process of being grasped by the AGV, further leading to risks of displacement, scratching, and falling when the AGV grasps the mask. The utility model provides a left-right centering adjustment device that is convenient for clamping the mask. By adopting this solution, the left-right centering of the mask is achieved by adjusting the order of clamping and placing the mask with the clamping claws and adjusting the gap between the mask and the holder in the left and right directions, thereby leaving a clamping gap for the AGV, avoiding the mask contacting and scratching with the holder on the left and right during the process of being grasped by the AGV, and further avoiding the risks of displacement, scratching, and falling when the AGV grasps the mask. The specific solution includes two support rods with a support gap between them. The mask can be placed between the two support rods, and the corners of the mask are supported by support blocks at the upper and lower ends of the support rods. When the mask is placed on the device, it is usually placed at 75° relative to the horizontal plane and is clamped at the corners by the clamping blocks to temporarily fix the mask, thereby completing the flipping, rotation, cleaning and processing processes. After completing the above processes, since the clamping gap between the mask and the support rods is small, the clamping gap needs to be adjusted to facilitate the grasping of the workpiece and the mask. During the specific adjustment process, the first driving member is controlled to first release the upper and lower clamping blocks on one side from clamping one side of the mask, and keep the upper and lower clamping blocks on the other side clamped, and then the second driving member drives the two support rods to gradually move away until a clamping gap of 5mm is left between one side of the mask and the support rod; then the upper and lower clamping blocks on one side are controlled to clamp, and the upper and lower clamping blocks on the other side are controlled to loosen, and again driven by the second driving member, the two support rods are moved away gradually until a clamping gap of 5mm is left between the other side of the mask and the support rod; after suitable clamping gaps are reserved on both sides, the AGV is controlled to extend into the clamping gaps on both sides to clamp the mask, and then the clamping blocks at the four corners are released from clamping the mask, so that the AGV can safely grasp the mask. In the above scheme, the first driving member is used to drive the clamping block to rotate out of the front projection range of the mask, or enter the front projection range of the mask to clamp the corners of the mask on the supporting block, that is, to rotate the clamping block out, so as to facilitate the AGV to lift up from the front of the mask to safely grasp the mask.

[0011] The AGV mentioned above is Automated Guided Vehicle, or AGV for short. Currently, its most common applications include AGV handling robots or AGV carts, whose main function is to automatically transport goods to designated locations by navigating through special landmarks.

[0012] As a specific embodiment for driving the clamping block to rotate forward, each carrier block is provided with a first driving member, which is a first rotary motor with its axis of rotation perpendicular to the reticle. The output sidewall of the first rotary motor is connected to the clamping block via a connecting rod. In this embodiment, the bottom of the clamping block may include a flexible layer or inclined surface. Driven by the first rotary motor, the clamping block is rotated directly above the reticle corner, thereby flexibly clamping the reticle corner.

[0013] In order to facilitate the rapid disassembly and replacement of the clamping block, the connecting rod and the clamping block are detachably connected.

[0014] To achieve stable clamping of the mask, the clamping block is L-shaped and adapted to the corners of the mask. The clamping block is L-shaped, and its two sides are respectively clamped along the two sides of the corners of the mask.

[0015] To facilitate adjustment of the spacing between the upper and lower bearing blocks on the same support rod, the bearing block is slidably connected to the support rod and can slide along the length of the support rod. After the bearing block is moved into place, it can be fixed with temporary fixing parts such as bolts and latches.

[0016] To locate the initial placement of the mask, the support block has an L-shaped section on its support surface. This L-shaped section is designed to fit the corners of the mask. When inserting the mask, the corners of the mask can be placed along the L-shaped section, ensuring stable clamping of the mask in the initial position, facilitating a series of construction steps.

[0017] To adjust the reticle's tilt angle and achieve other actions, such as flipping the reticle, two support rods are provided with upright posts on their opposing outer sides. The middle of the support rods is pivotally connected to the upright posts via a rotating shaft, allowing the support rods to rotate perpendicular to the reticle surface. The rotation direction of the support rods and reticle is the R-axis in the figure.

[0018] In order to automatically adjust the tilt angle of the mask, the column is equipped with a third rotary motor, which is connected to the middle part of the support rod through a rotating shaft; the two third rotary motors are used to drive the two support rods to rotate synchronously in the same direction to tilt the mask.

[0019] In a specific embodiment of driving the distance between the two support rods to change, the second driving member is a telescopic drive device, which is fixed to any one of the support rods, and the output end of the telescopic drive device is connected to the other support rod. The telescopic drive device can be a telescopic cylinder, a hydraulic rod, or other device.

[0020] As another specific embodiment for driving the distance between the two support rods to change, so as to improve the adjustment accuracy, the second driving member includes a second rotary motor, the second rotary motor is located between the two support rods, and the second rotary motor has output ends on both sides, and the two output ends are respectively threadedly connected to the opposite support rods through screw rods, and the threads on the two screw rods are in opposite directions;

[0021] The sidewall of the second rotary motor also includes a guide slide, which is parallel to the lead screw and slides through the support rod. Using a screw thread allows for greater precision adjustment, compared to using a telescopic drive mechanism, and allows for fine clearance adjustment. The second rotary motor in the middle position drives the two lead screws to rotate simultaneously, and due to the opposing threads, the two support rods can be moved closer or further apart. The guide slide prevents the support rods from rotating with it.

[0022] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0023] 1. The utility model provides a left-right centering adjustment device that is convenient for clamping the mask. With this solution, the mask is centered left and right by adjusting the order in which the clamping claws clamp and place the mask, and adjusting the gap between the mask and the holder in the left and right directions, thereby leaving a clamping gap for the AGV, avoiding the mask from contacting or scratching the holder left and right during the process of being grasped by the AGV, and further avoiding the risks of displacement, scratching, and dropping of the mask when the AGV grasps the mask.

[0024] 2. The utility model provides a left-right centering adjustment device that is convenient for clamping the mask. It has a wide range of practicability and can be used in flipping equipment, cleaning equipment, process equipment and other similar equipment; and can be applied to masks of different sizes to achieve left-right centering as needed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the accompanying drawings:

[0026] Figure 1 This is a schematic diagram of the structure of the left and right centering adjustment device provided by the utility model;

[0027] Figure 2 This is a state diagram of the left and right centering adjustment device provided by the utility model before centering;

[0028] Figure 3 This is a state diagram of the left and right centering adjustment device provided by the utility model when it is left-centered;

[0029] Figure 4 This is a state diagram of the left and right centering adjustment device provided by the utility model when it is right-centered;

[0030] Figure 5 This is a state diagram of the left and right centering adjustment device provided by the utility model after centering.

[0031] Markings and corresponding parts names in the accompanying drawings:

[0032] 1-support rod, 2-carrying block, 3-clamping block, 4-first rotating motor, 5-second rotating motor, 6-connecting rod, 7-column, 8-screw. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The schematic implementation methods of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0034] Example:

[0035] This embodiment provides a left-right centering adjustment device that is convenient for clamping the mask. Figure 1-Figure 5 Shown, including:

[0036] Two support rods 1 are provided on both sides, and the mask is located between the two support rods 1; at the four corners of the mask, the opposing surfaces of the two support rods 1 are provided with supporting blocks 2 for supporting the four corners of the mask, and clamping blocks 3 for clamping the four corners of the mask;

[0037] a first driving member, configured to drive the clamping block 3 to rotate out of the front projection range of the mask, or to enter the front projection range of the mask to clamp the corner of the mask on the carrying block 2;

[0038] The second driving member is used to drive the two support rods 1 to move closer to or away from each other.

[0039] Compared with the prior art, since the mask is clamped and fixed circumferentially, the clamping gaps on both sides of the mask are small, or the clamping gaps on both sides are unevenly distributed, resulting in the mask contacting and scratching with the carrier on the left and right during the process of being grasped by the AGV, further leading to risks of displacement, scratching, and falling when the AGV grasps the mask. The utility model provides a left-right centering adjustment device that is convenient for clamping the mask. By adopting this solution, the left-right centering of the mask is achieved by adjusting the order of clamping and placing the mask with the clamping claws and adjusting the gap between the mask and the holder in the left and right directions, thereby leaving a clamping gap for the AGV, avoiding the mask contacting and scratching with the holder on the left and right during the process of being grasped by the AGV, and further avoiding the risks of displacement, scratching, and falling when the AGV grasps the mask. The specific scheme includes two support rods 1, and there is a support gap between the two support rods 1. The mask can be placed between the two support rods 1, and the corners of the mask are supported by the support blocks at the upper and lower ends of the support rods 1; when the mask is placed on the device, it is usually placed at 75° relative to the horizontal plane, and is clamped by the clamping blocks 3 for corners to temporarily fix the mask, thereby completing the flipping, rotation, cleaning and processing processes. After completing the above processes, since the clamping gap between the mask and the support rods 1 is small, the clamping gap needs to be adjusted to facilitate the grasping of the workpiece and the mask. During the specific adjustment process, the first driving member is controlled to first release the upper and lower clamping blocks 3 on one side from clamping one side of the mask, and keep the upper and lower clamping blocks 3 on the other side clamped, and then the second driving member drives the two support rods 1 to gradually move away until a clamping gap of 5 mm is left between one side of the mask and the support rod 1; then the upper and lower clamping blocks 3 on one side are controlled to clamp, and the upper and lower clamping blocks 3 on the other side are controlled to loosen, and again driven by the second driving member, the two support rods 1 are gradually moved away from each other until a clamping gap of 5 mm is left between the other side of the mask and the support rod 1; after suitable clamping gaps are reserved on both sides, the AGV is controlled to extend into the clamping gaps on both sides to clamp the mask, and then the clamping blocks 3 at the four corners are all released from clamping the mask, so that the AGV can safely grasp the mask. In the above scheme, the first driving member is used to drive the clamping block 3 to rotate out of the front projection range of the mask, or to enter the front projection range of the mask to clamp the corners of the mask on the supporting block 2, that is, to rotate the clamping block 3 out, so as to facilitate the AGV to lift up from the front of the mask to safely grasp the mask.

[0040] The AGV mentioned above is Automated Guided Vehicle, or AGV for short. Currently, its most common applications include AGV handling robots or AGV carts, whose main function is to automatically transport goods to designated locations by navigating through special landmarks.

[0041] As a specific embodiment for driving the pre-rotation of the clamping block 3, a first driving member is provided on each carrier block 2. This first driving member is a first rotary motor 4, whose rotation axis is perpendicular to the reticle. The output sidewall of the first rotary motor 4 is connected to the clamping block 3 via a connecting rod 6. In this embodiment, the bottom of the clamping block 3 may include a flexible layer or inclined surface. Driven by the first rotary motor 4, the clamping block 3 is rotated directly above the reticle corner, thereby flexibly clamping the reticle corner.

[0042] In order to facilitate the rapid disassembly and replacement of the clamping block 3 , the connecting rod 6 and the clamping block 3 are detachably connected.

[0043] To achieve stable clamping of the mask, the clamping block 3 is L-shaped and adapted to the corners of the mask. The clamping block 3 is L-shaped, and its two sides are respectively clamped along the two sides of the corners of the mask.

[0044] In order to facilitate adjustment of the distance between the upper and lower bearing blocks 2 on the same support rod 1, the bearing block 2 is slidably connected to the support rod 1 and can slide along the length of the support rod 1. After the bearing block 2 is moved into place, the bearing block 2 can be fixed by temporary fixing parts such as bolts and latches.

[0045] To locate the initial placement of the mask, the support block 2 has an L-shaped section on its support surface. This L-shaped section is designed to fit the corners of the mask. When inserting the mask, the corners of the mask can be placed along the L-shaped section, thereby achieving stable clamping of the mask in the initial state and facilitating a series of construction steps.

[0046] To adjust the tilt angle of the mask and achieve other actions such as flipping the mask, two support rods 1 are provided with uprights 7 on their opposing outer sides. The middle portion of each support rod 1 is rotatably connected to the uprights 7 via a rotating shaft, allowing the support rods 1 to rotate perpendicular to the mask surface. The rotation direction of the support rods 1 and the mask is the R-axis in the figure.

[0047] In order to automatically adjust the tilt angle of the mask, the column 7 is equipped with a third rotary motor, which is connected to the middle part of the support rod 1 through a rotating shaft; the two third rotary motors are used to drive the two support rods 1 to rotate synchronously in the same direction to tilt the mask.

[0048] As a specific embodiment for driving the distance between the two support rods 1 to change, the second driving member is a telescopic driving device, which is fixed to any one of the support rods 1, and the output end of the telescopic driving device is connected to the other support rod 1. The telescopic driving device can be a telescopic cylinder, a hydraulic rod, or other device.

[0049] As another specific embodiment of driving the change in the distance between the two support rods 1 to improve the adjustment accuracy, the second driving member includes a second rotary motor 5, which is located between the two support rods 1. The second rotary motor 5 has output ends on both sides, and the two output ends are respectively threadedly connected to the opposite support rod 1 through a screw rod 8, and the threads on the two screw rods 8 are in opposite directions;

[0050] The sidewall of the second rotary motor 5 is also equipped with a guide slide. This guide slide is parallel to the screw rod 8 and slides through the support rod 1. This threaded engagement method improves adjustment precision and enables fine clearance adjustment compared to direct telescopic drive. The middle-positioned second rotary motor 5 drives the two screw rods 8 to rotate simultaneously. Due to the opposing threads, the two support rods can be moved closer or further apart. The guide slide guides the support rods, preventing them from rotating with it.

[0051] Specific working principle:

[0052] When the mask is placed on the device, it is clamped by the clamping block 3 to temporarily fix the mask, thereby completing the flipping, rotation, cleaning and processing steps. After completing the above steps, the third rotating motor is controlled to place the mask at 75° relative to the horizontal plane, as shown in FIG. Figure 2 As shown; then control the first rotary motor 4, first the upper and lower clamping blocks 3 on the left side are rotated out to loosen the clamping of one side of the mask, and the upper and lower clamping blocks 3 on the other side remain clamped, and then the second rotary motor 5 drives the two support rods 1 to gradually move away until a clamping gap of 5mm is left between one side of the mask and the support rod 1, as shown Figure 3 Then control the upper and lower clamping blocks 3 on one side to clamp, control the upper and lower clamping blocks 3 on the other side to loosen, and again drive the second rotary motor 5 to gradually move the two support rods 1 away from each other until a 5mm clamping gap is left between the other side of the mask and the support rod 1, as shown. Figure 4 After reserving appropriate clamping gaps on both sides, the AGV is controlled to extend into the clamping gaps on both sides to clamp the mask, and then the clamping blocks 3 at the four corners are released to clamp the mask, as shown. Figure 5 As shown, the AGV can safely grab the mask.

[0053] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only a specific implementation method of the utility model and is not intended to limit the scope of protection of the utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

Claims

1. A left-right centering adjustment device for facilitating the clamping of a mask, characterized in that: include: Two support rods (1) are provided on both sides, and the mask is located between the two support rods (1); at the four corners of the mask, the two support rods (1) are provided with supporting blocks (2) for supporting the four corners of the mask, and clamping blocks (3) for clamping the four corners of the mask on the opposite surfaces; A first driving member, the first driving member is used to drive the clamping block (3) to rotate out of the front projection range of the mask, or to enter the front projection range of the mask to clamp the edge of the mask on the carrier block (2); A second driving member is used to drive the two support rods (1) to move closer to or farther from each other.

2. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 1, characterized in that: A first driving member is provided on each of the supporting blocks (2), the first driving member being a first rotating motor (4), the rotation axis of the first rotating motor (4) being perpendicular to the mask; the output end side wall of the first rotating motor (4) is connected to the clamping block (3) via a connecting rod (6).

3. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 2, characterized in that: The connecting rod (6) and the clamping block (3) are detachably connected.

4. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 1, characterized in that: The clamping block (3) is L-shaped, and is used to adapt to the corners of the mask.

5. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 1, characterized in that: The bearing block (2) is slidably connected to the support rod (1) and can slide along the length direction of the support rod (1).

6. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 1, characterized in that: The bearing surface of the bearing block (2) is provided with an L-shaped segment, and the L-shaped segment is used to adapt to the corners of the mask.

7. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 1, characterized in that: A column (7) is provided on the opposite outer sides of the two support rods (1); the middle portion of the support rod (1) is rotatably connected to the column (7) via a rotating shaft; and the support rod (1) can rotate in a direction perpendicular to the surface of the mask.

8. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 7, characterized in that: The column (7) is provided with a third rotary motor, which is connected to the middle portion of the support rod (1) via a rotating shaft; the two third rotary motors are used to respectively drive the two support rods (1) to rotate synchronously in the same direction, so as to tilt the mask.

9. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 7, characterized in that: The second driving member is a telescopic driving device, the telescopic driving device is fixed to any one of the support rods (1), and the output end of the telescopic driving device is connected to the other support rod (1).

10. The left-right centering adjustment device for facilitating the clamping of a mask according to claim 7, characterized in that: The second driving member comprises a second rotary motor (5), the second rotary motor (5) being located between the two support rods (1), the second rotary motor (5) having output ends on both sides, the two output ends being respectively connected to the opposite support rods (1) by screw rods (8), and the threads on the two screw rods (8) being in opposite directions; The side wall of the second rotary motor (5) is also provided with a guide slide bar, which is parallel to the screw rod (8) and slides through the support rod (1).

Images