Photoetching machine lens

Abstract

The utility model discloses a lens of a photoetching machine, which comprises a reflection box provided with a reflection cavity, an optical reflection component arranged in the reflection cavity and comprising a digital micro-mirror device; the lens box is provided with a lens cavity communicated with the reflection cavity, and an optical lens assembly is arranged in the lens cavity; and the cooling device is in heat conduction connection with the reflection box and is used for cooling the reflection box. The lens of the photoetching machine is in heat conduction connection with the reflection box through the cooling device, so that the temperature of the reflection box is effectively reduced, the heat dissipation effect of the lens of the photoetching machine is improved, and the continuous working time of the lens of the photoetching machine is prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of photolithography machines, in particular to a lens of a photolithography machine. Background Art

[0002] Existing lithography machines use DMD projection technology to output exposure patterns. The DMD (digital micromirror device) is generally installed in the reflective box of the lithography machine lens. When the lithography machine needs to expose thicker photoresist thoroughly, a much higher-power laser is required for exposure. The laser will produce invalid light after passing through the DMD in the reflective box. The invalid light is continuously reflected in the reflective box, which will cause the energy of this part of the light to remain in the reflective box, causing the temperature of the reflective box to rise rapidly, affecting the continued use and safety of the lithography machine lens.

[0003] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0004] The purpose of the utility model is to provide a lithography machine lens, which has a good heat dissipation effect and can solve the problem of excessive temperature of the reflective box.

[0005] In order to achieve the above-mentioned purpose, a specific embodiment of the present invention provides a technical solution as follows: a lithography machine lens, comprising:

[0006] A reflective box having a reflective cavity, wherein an optical reflective component is provided in the reflective cavity, and the optical reflective component includes a digital micromirror device;

[0007] The lens box has a lens cavity connected to the reflection cavity, and an optical lens assembly is arranged in the lens cavity;

[0008] The cooling device is thermally connected to the reflecting box and is used for cooling the reflecting box.

[0009] In one or more embodiments of the present invention, the cooling device includes a heat dissipation unit, which is located outside the reflective box and is thermally connected to the reflective box.

[0010] In one or more embodiments of the present invention, the cooling device includes a connecting pipe thermally connected between the heat dissipation unit and the reflective box, and the connecting pipe contains a heat-conducting medium.

[0011] In one or more embodiments of the present invention, the cooling device further includes a heat absorbing unit, which is connected to the reflective box. The connecting pipe is wound around the heat absorbing unit and is thermally connected to the heat absorbing unit.

[0012] In one or more embodiments of the present invention, the heat absorption unit is disposed in the reflection cavity, and the heat absorption unit is disposed on the optical path of the invalid light reflected by the digital micromirror device.

[0013] In one or more embodiments of the present invention, the outer surface of the heat absorption unit is a frosted surface.

[0014] In one or more embodiments of the present invention, the lithography machine lens also includes a laser entrance assembly installed on the outer wall of the reflection box, and a connecting hole is opened on the side wall of the reflection box connected to the laser entrance assembly, and the connecting pipe is passed through the connecting hole.

[0015] In one or more embodiments of the present invention, the cooling device further comprises a plurality of heat sinks, and the plurality of heat sinks are thermally connected to the reflective box.

[0016] In one or more embodiments of the present invention, a light trap for attenuating invalid light is provided in the reflection cavity, and the connecting pipe is wound around the outer surface of the light trap.

[0017] In one or more embodiments of the present invention, the cooling device further comprises a driving pump installed on the connecting pipe, and the driving pump is used to drive the heat-conducting medium to flow in the connecting pipe.

[0018] Compared with the prior art, the lithography machine lens of the present invention is thermally connected to the reflective box through a cooling device, thereby effectively reducing the temperature of the reflective box and improving the heat dissipation effect and continuous working time of the lithography machine lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a cross-sectional schematic diagram of a lithography machine lens in one embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of a cooling device in one embodiment of the present invention;

[0022] Figure 3 This is a partial cross-sectional diagram of a lithography machine lens in one embodiment of the present invention;

[0023] Figure 4 It is a partial cross-sectional schematic diagram of a lithography machine lens in one embodiment of the present invention.

[0024] Description of main reference numerals:

[0025] 1. Reflection box; 11. Reflection cavity; 12. Optical reflection assembly; 121. Digital micromirror device; 122. Reflector; 13. Connection hole; 15. Light trap; 2. Lens box; 21. Lens cavity; 3. Cooling device; 31. Heat dissipation unit; 32. Connecting pipe; 33. Heat absorption unit; 34. Drive pump; 35. Heat sink; 4. Laser inlet assembly. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the following will be combined with the drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0027] like Figures 1 to 4 As shown, a lithography machine lens in one embodiment of the present invention includes a reflection box 1, a lens box 2 and a cooling device 3; the reflection box 1 has a reflection cavity 11, an optical reflection component 12 is provided in the reflection cavity 11, and the optical reflection component 12 includes a digital micromirror device 121; the lens box 2 has a lens cavity 21 connected to the reflection cavity 11, and an optical lens assembly (not shown in the figure) is provided in the lens cavity 21; the cooling device 3 is thermally connected to the reflection box 1 for cooling the reflection box 1.

[0028] Figure 1 、 3 In Figures 4 and 5, the dotted line with an arrow is a schematic diagram of the laser light path. One axial end of the lens box 2 is the laser outlet, and the other end is connected to the reflective box 1. The optical reflective assembly 12 may also include a reflector 122 for reflecting the laser light onto a digital micromirror device 121 (DMD). The DMD 121 reflects part of the laser light onto the optical lens assembly of the lens box 2, where it is emitted from the laser outlet and acts on the workpiece to be exposed. The DMD 121 also reflects some ineffective light, which is continuously reflected by the reflective box 1, causing the temperature of the reflective box 1 to increase.

[0029] It can be understood that the lithography machine lens of the present invention is thermally connected to the reflective box 1 through the cooling device 3, thereby effectively reducing the temperature of the reflective box 1 and improving the heat dissipation effect and continuous working time of the lithography machine lens.

[0030] like Figure 1 and 2As shown, the cooling device 3 includes a heat dissipation unit 31 and a connecting pipe 32. The connecting pipe 32 contains a heat-conducting medium and is thermally connected between the heat dissipation unit 31 and the reflective box 1. The heat dissipation unit 31 is located outside the reflective box 1. The connecting pipe 32 itself can be made of a thermally conductive material, such as metal. Heat from the reflective box 1 is transferred to the heat dissipation unit 31 through the connecting pipe 32 and the heat-conducting medium, dissipating the heat and thereby reducing the temperature of the reflective box 1.

[0031] Specifically, the heat dissipation unit 31 may be a fan assembly to dissipate heat from the connecting pipe 32 . The fan assembly may accelerate the gas flow rate at the connecting pipe 32 , thereby quickly dissipating heat from the heat-conducting medium in the connecting pipe 32 .

[0032] Specifically, the heat conducting medium may be water or other heat conducting media.

[0033] like Figure 1 As shown, in one embodiment, the connecting pipe 32 can be wrapped around the outside of the reflective box 1 to dissipate heat for the reflective box 1. In other embodiments, the connecting pipe 32 can also be partially located inside the reflective box 1 to also dissipate heat for the reflective box 1.

[0034] like Figure 4 As shown, in one specific embodiment, a light trap 15 for attenuating ineffective light is disposed within the reflective cavity 11, and the connecting pipe 32 is wound around the outer surface of the light trap 15. The light trap 15 includes an ineffective light attenuation cavity and an ineffective light inlet for allowing ineffective light to enter the ineffective light attenuation cavity. The light trap 15 is disposed on the inner sidewall of the emitting cavity based on the position where the ineffective light impinges on the inner sidewall of the emitting cavity, allowing at least a portion of the ineffective light to enter the ineffective light attenuation cavity through the ineffective light inlet. The light trap 15 includes a reflective bottom plate and a reflective side plate disposed on the reflective bottom plate. The reflective bottom plate is connected to at least one inner sidewall of the emitting cavity, and the light trap 15 is formed between the reflective side plate and the reflective bottom plate. Thus, the reflective side plate and the reflective bottom plate enclose the ineffective light attenuation cavity. Ineffective light reflects back and forth in the ineffective light attenuation cavity, consuming energy and preventing the ineffective light from re-entering the reflection cavity 11, thereby causing the temperature of the light trap 15 to rise rapidly. The connecting pipe 32 wrapped around the outer surface of the light trap 15 can effectively cool the light trap 15 and also cool the inside of the reflection cavity 11.

[0035] like Figure 3As shown, in one specific embodiment, the cooling device 3 further includes a heat absorbing unit 33, which is connected to the reflective box 1. The connecting pipe 32 is wound around the heat absorbing unit 33 and is thermally connected to the heat absorbing unit 33. The heat absorbing unit 33 can be a sheet-like structure, a columnar structure, a hollow frame structure, or the like made of a thermally conductive material. The heat transfer efficiency of the thermally conductive material is greater than that of air, thereby improving the cooling efficiency of the cooling device 3 on the reflective box 1. The heat absorbing unit 33 can be fixedly connected to the reflective box 1, and the connecting pipe 32 can also be fixedly connected to the reflective box 1.

[0036] Preferably, the heat absorption unit 33 is disposed in the reflective cavity 11. This can improve heat dissipation or cooling efficiency.

[0037] Furthermore, the heat absorption unit 33 is disposed on the optical path of the ineffective light reflected by the digital micromirror device 121. Since ineffective light is the main cause of the temperature increase of the reflective box 1, the heat absorption unit 33 is located on the optical path of the ineffective light and can preferentially absorb the energy of the ineffective light. This arrangement not only cools the reflective box 1 but also reduces the temperature increase caused by the ineffective light.

[0038] Furthermore, the outer surface of the heat absorbing unit 33 is a frosted surface. This configuration can prevent invalid light from being repeatedly reflected in the reflective cavity 11 and prevent the reflective box 1 from heating up due to multiple reflections of invalid light on the inner wall of the reflective cavity 11.

[0039] like Figure 3 In the embodiment shown in FIG4 , the lithography lens assembly further includes a laser inlet assembly 4 mounted on the outer side wall of the reflective box 1. A connecting hole 13 is formed on the side wall of the reflective box 1 connected to the laser inlet assembly 4, and the connecting pipe 32 is passed through the connecting hole 13. That is, the connecting hole 13 and the laser inlet assembly 4 are located on the same side of the reflective box 1. This arrangement reduces the volume occupied by the lithography lens assembly in directions other than the laser inlet assembly 4, allowing the lithography lens assembly to be closer to other equipment in other directions.

[0040] like Figure 3 In the illustrated embodiment, the cooling device 3 further includes a plurality of heat sinks 35, which are thermally connected to the reflective box 1. The connection between the reflective box body and the heat sinks 35 may be made of a thermally conductive material. The heat sinks 35 can increase the contact area with the air, thereby improving heat dissipation efficiency.

[0041] Furthermore, the heat sink 35 and the laser entrance assembly 4 can be located on the same side of the reflective box 1, thereby reducing the volume occupied by the lithography machine lens in directions other than the laser entrance assembly 4, so that the lithography machine lens can be closer to other equipment in other directions.

[0042] like Figures 1 to 4 As shown, the cooling device 3 also includes a driving pump 34 installed on the connecting pipe 32, and the driving pump 34 is used to drive the heat-conducting medium to flow in the connecting pipe 32, that is, to drive the heat-conducting medium to circulate in the connecting pipe 32 to improve the heat conduction efficiency of the connecting pipe 32.

[0043] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0044] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A lithography machine lens, characterized in that: include: A reflective box having a reflective cavity, wherein an optical reflective component is provided in the reflective cavity, and the optical reflective component includes a digital micromirror device; The lens box has a lens cavity connected to the reflection cavity, and an optical lens assembly is arranged in the lens cavity; The cooling device is thermally connected to the reflecting box and is used for cooling the reflecting box.

2. The lithography machine lens according to claim 1, characterized in that: The cooling device includes a heat dissipation unit, which is located outside the reflective box and is thermally connected to the reflective box.

3. The lithography machine lens according to claim 2, characterized in that: The cooling device includes a connecting pipe thermally connected between the heat dissipation unit and the reflective box, wherein the connecting pipe contains a heat conducting medium.

4. The lithography machine lens according to claim 3, characterized in that: The cooling device further comprises a heat absorbing unit, which is connected to the reflective box. The connecting pipe is wound around the heat absorbing unit and is thermally connected to the heat absorbing unit.

5. The lithography machine lens according to claim 4, characterized in that: The heat absorption unit is arranged in the reflection cavity, and the heat absorption unit is arranged on the optical path of the invalid light reflected by the digital micromirror device.

6. The lithography machine lens according to claim 4, characterized in that: The outer surface of the heat absorption unit is a frosted surface.

7. The lithography machine lens according to claim 3, characterized in that: The lithography machine lens also includes a laser entrance assembly installed on the outer side wall of the reflection box. A connecting hole is opened on the side wall of the reflection box connected to the laser entrance assembly, and the connecting pipe is passed through the connecting hole.

8. The lithography machine lens according to claim 7, characterized in that: The cooling device further comprises a plurality of heat sinks, and the plurality of heat sinks are thermally connected to the reflective box.

9. The lithography machine lens according to claim 3, characterized in that: A light trap for weakening invalid light is provided in the reflection cavity, and the connecting pipe is wound around the outer surface of the light trap.

10. The lithography machine lens according to claim 3, characterized in that: The cooling device further comprises a driving pump installed on the connecting pipe, and the driving pump is used to drive the heat-conducting medium to flow in the connecting pipe.

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