Semiconductor material box

Abstract

The utility model provides a semiconductor material box which comprises a top plate and a bottom plate which are oppositely arranged on a box body, a first side plate and a second side plate which are oppositely arranged between the top plate and the bottom plate, and stepped clamping grooves which are formed in the inner walls of the first side plate and the second side plate and extend from the front side face of the box body to the rear side face of the box body. At least one step is arranged on the groove face of one side of the step clamping groove, so that the height of the step clamping groove is reduced step by step, the step clamping groove is matched with trays of different heights and different structures, the unification of the material box structure is achieved, the risk of using wrong material boxes is avoided, and the automation rate of a factory is increased.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to a semiconductor material box. Background Art

[0002] In the prior art, due to the differences in the track structure and vacuum table structure of printing equipment and patch equipment, the size and structure of the trays used in the process are different, and the trays cannot be universal. For example, the dimensions of the first tray (length * width * thickness) are 200mm * 130mm * 3.5mm, and the dimensions of the second tray (length * width * height) are 206mm * 138mm * 3mm. In addition, the two ends of the first tray are rectangular parallelepipeds with the same height, and the two ends of the second tray are stepped structures. Trays of different sizes and structures need to be designed to correspond to material boxes of different sizes / structures. Not only does it increase the types and costs of materials in the factory, but it is also inconvenient for unified management and there is a risk of using the wrong material box.

[0003] How to provide a unified material box that can adapt to pallets of different sizes and shapes, not only to improve the utilization rate of the material box and save material costs, but also to avoid the risk of using the wrong material box and improve the factory's automation rate. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a semiconductor material box that can adapt to trays of different sizes and shapes, save material costs, avoid the risk of using the wrong material box, and improve the automation rate of the factory.

[0005] In order to solve the above problems, the utility model provides a semiconductor material box, comprising: a box body, the box body comprising a top plate and a bottom plate arranged opposite to each other, a first side plate and a second side plate arranged between the top plate and the bottom plate and opposite to each other, the front side surface of the box body is an opening, and the inner walls of the first side plate and the second side plate are both formed with a stepped groove extending from the front side surface to the rear side surface of the box body, and one side groove surface of the stepped groove has at least one step so that the height of the stepped groove decreases step by step.

[0006] In some embodiments, the stepped slot includes a first area and a second area, the height of the second area is smaller than the height of the first area, the first area is used to place a tray with a first height, and the first area and the second area are jointly used to place a tray with a stepped end.

[0007] In some embodiments, the height of the second region is less than the first height.

[0008] In some embodiments, the top side groove surface of the stepped slot close to the top plate is substantially parallel to the bottom plate, and the step is provided on the bottom side groove surface of the stepped slot close to the bottom plate.

[0009] In some embodiments, the stepped slot has one or two steps on the bottom side of the slot near the bottom plate.

[0010] In some embodiments, at the end of the stepped slot located at the opening, a side slot surface of the stepped slot has a sloped guide surface that slopes from the inner side of the stepped slot toward the opening.

[0011] In some embodiments, a bottom groove surface of the stepped slot close to the bottom plate has a sloped guide surface inclined from the inner side of the stepped slot toward the opening.

[0012] In some embodiments, it also includes: a locking plate, which is arranged on the outside of the opening and can slide up and down, and the locking plate has a first side edge arranged at the end of the first side plate and a second side edge arranged at the end of the second side plate, and the inner edges of the first side edge and the second side edge are both formed with a stepped bayonet, and the cross-sectional shape of the stepped bayonet is consistent with the cross-sectional shape of the stepped slot. When the locking plate is in the first position, the stepped bayonet is aligned with the stepped slot, and when the locking plate is in the second position, the stepped bayonet is misaligned with the stepped slot, and the stepped slots of the first side plate and the second side plate are at least partially blocked by the locking plate.

[0013] In some embodiments, the size of the cross section of the stepped bayonet is greater than or equal to the size of the cross section of the stepped slot.

[0014] In some embodiments, a dimension of an end of the stepped bayonet away from the opening is larger than a dimension of an end of the stepped bayonet toward the opening.

[0015] In some embodiments, the corners of the opening of the stepped bayonet are arc-shaped.

[0016] In some embodiments, the locking plate also includes a top edge and a bottom edge arranged opposite to each other. When the locking plate is in the first position, the lower edge of the top edge is higher than the inner wall of the top plate of the box body or is flush with the inner wall of the top plate of the box body, and the upper edge of the bottom edge is lower than the inner wall of the bottom plate of the box body or is flush with the inner wall of the bottom plate of the box body.

[0017] In some embodiments, the first side and the second side are provided with sliding grooves, the length of the sliding grooves is less than the maximum height of the step slots, and the first side panels and the second side panels are provided with positioning bolts, and the locking plate is enabled to slide up and down on the outside of the opening by the positioning bolts sliding up and down in the sliding grooves.

[0018] The above technical solution is to arrange a top plate and a bottom plate opposite to each other on the box body, and a first side plate and a second side plate opposite to each other between the top plate and the bottom plate, and to arrange a stepped card groove extending from the front side to the rear side of the box body on the inner walls of the first side plate and the second side plate, and one side groove surface of the stepped card groove has at least one step so that the height of the stepped card groove decreases step by step. By adapting the stepped card groove to trays of different heights and different structures, the unified structure of the material box is achieved, the risk of using the wrong material box is avoided, and the automation rate of the factory is improved.

[0019] It should be understood that the above general description and the detailed description below are merely exemplary and explanatory and do not limit the present invention. Technologies, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be considered part of the specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 This is an overall schematic diagram of a semiconductor material box provided by the first embodiment of the present utility model;

[0022] Figure 2A The semiconductor material box provided by the first embodiment of the present invention is provided along the box body Figure 1 Schematic diagram of the cross section along the D1-D1 direction;

[0023] Figure 2B The first embodiment of the present invention provides Figure 2A Enlarged view of the structure within the middle dashed box;

[0024] Figure 3A This is a schematic diagram of the overall structure of the first tray provided by the first embodiment of the present utility model;

[0025] Figure 3B This is a schematic front view of the first tray in the Y direction provided by the first embodiment of the present invention;

[0026] Figure 3C This is a schematic diagram of the overall structure of the second tray provided by the first embodiment of the present utility model;

[0027] Figure 3D This is a schematic front view of the second tray in the Y direction provided by the first embodiment of the present utility model;

[0028] Figure 4A This is a side structural diagram of the end portion of the stepped slot located at the opening of the box body provided by the first embodiment of the present invention;

[0029] Figure 4B This is another side structural diagram of the end portion of the stepped card slot provided in the first embodiment of the present utility model, which is located at the opening of the box body;

[0030] Figure 5A This is a structural diagram of the locking plate provided in the first embodiment of the present utility model;

[0031] Figure 5B The first embodiment of the present invention provides Figure 5A Enlarged view of the structure within the middle dashed box;

[0032] Figure 6A The first embodiment of the present invention provides a locking plate that is in the first position along the Figure 1 Schematic diagram of the front view in the direction of D2;

[0033] Figure 6B The first embodiment of the present invention provides Figure 6A Enlarged view of the structure within the middle dashed box;

[0034] Figure 7A The first embodiment of the present invention provides a locking plate that is in the second position along the Figure 1 Schematic diagram of the front view in the direction of D2;

[0035] Figure 7B The first embodiment of the present invention provides Figure 7A Enlarged view of the structure within the middle dashed box;

[0036] Figure 8A It is a cross-sectional schematic diagram of a stepped slot provided in the second embodiment of the present utility model;

[0037] Figure 8B It is a structural schematic diagram of the stepped bayonet provided in the second embodiment of the present utility model. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] Figure 1 This is an overall schematic diagram of the semiconductor material box provided by the first embodiment of the present invention. Figure 1As shown, the semiconductor material box includes: a box body 11.

[0040] like Figure 1 As shown, the box body 11 includes a top plate 118 and a bottom plate 119 disposed opposite each other, and a first side plate 111 and a second side plate 112 disposed opposite each other between the top plate 118 and the bottom plate 119. The front side of the box body 11 is an opening 117. The inner walls of the first side plate 111 and the second side plate 112 are each formed with a stepped slot 110 extending from the front side to the rear side of the box body 11. One side of the stepped slot 110 has at least one step, so that the height of the stepped slot 110 decreases stepwise. In the direction D2, the surface that appears first is the front side, and the surface that appears later is the rear side. The inner wall of the first side plate 111 refers to the surface of the first side plate 111 facing the interior of the box body 11, and the inner wall of the second side plate 112 refers to the surface of the second side plate 112 facing the interior of the box body 11. The inner walls of the first side plate 111 and the second side plate 112 are each formed with multiple stepped slots 110.

[0041] Figure 2A The semiconductor material box provided by the first embodiment of the present invention is provided along the box body Figure 1 Schematic diagram of the cross section in the D1-D1 direction. Figure 1 and Figure 2A The top surface of the stepped slot 110 near the top plate 118 is substantially parallel to the bottom plate 119, and the step is provided on the bottom surface of the stepped slot 110 near the bottom plate 119. The stepped slots 110 on the inner walls of the first side plate 111 and the second side plate 112 are arranged relative to each other so that the tray can be engaged between the stepped slots of the first side plate 111 and the stepped slots of the second side plate 112.

[0042] In some embodiments, the bottom groove surface of the stepped slot close to the bottom plate is substantially parallel to the bottom plate, and the step is provided on the top groove surface of the stepped slot close to the top plate.

[0043] Figure 2B The first embodiment of the present invention provides Figure 2A A magnified view of the structure within the dotted box. Figure 2BAs shown, the stepped slot 110 includes a first area 1101 and a second area 1102. The height of the second area 1102 is smaller than that of the first area 1101. The first area 1101 is used to accommodate a tray of a first height. The first and second areas 1101, 1102, are used together to accommodate trays with stepped ends. The height of the first area 1101 is greater than the first height, while the height of the second area 1102 is less than the first height. This allows the tray of the first height to be retained in the first area 1101, while the end of the tray with a stepped end is partially retained in the second area 1102 and the other portion retained in the first area 1101.

[0044] Figure 3A This is a schematic diagram of the overall structure of the first tray provided by the first embodiment of the present utility model; Figure 3B This is a schematic front view of the first tray in the Y direction provided by the first embodiment of the present invention; Figure 3C This is a schematic diagram of the overall structure of the second tray provided by the first embodiment of the present utility model; Figure 3D It is a schematic front view in the Y direction of the second tray provided by the first embodiment of the present utility model.

[0045] In this embodiment, please refer to Figures 3A to 3D , the tray includes a first tray 13 and a second tray 14. Figure 3A The first tray 13 is a rectangular parallelepiped as a whole, and the two ends of the first tray 13 are as follows Figure 3B As shown in the dashed box 130. Figure 3C , both ends of the second tray 14 are as follows Figure 3D The dotted line frame 140 shows a stepped structure.

[0046] The first tray 13 is a tray having the first height, and the height of the first tray 13 is less than Figure 2B The height of the first region 1101 is greater than Figure 2B The height of the second area 1102 in the first tray 13 is greater than the height of the second tray 14. Specifically, the height of the first tray 13 along the Z direction is greater than the height of the second tray 14 along the Z direction. Furthermore, the length of the first tray 13 is less than the length of the second tray 14. Specifically, the length of the first tray 13 along the X direction is less than the length of the second tray 14 along the X direction. Specifically, the length of the first tray 13 along the X direction is 200 mm, and the height along the Z direction is 3.5 mm. The length of the second tray 14 along the X direction is 206 mm, and the height along the Z direction is 3 mm.

[0047] Furthermore, the widths of the first tray 13 and the second tray 14 along the Y direction may be the same or different, and the width of the box body 11 is greater than the maximum widths of the first tray 13 and the second tray 14 along the Y direction to ensure that the trays can be placed in the box body 11.

[0048] In some embodiments, at the end of the stepped slot located at the opening 117, the side groove surface of the stepped slot has a slope guide surface that tilts from the inner side of the stepped slot toward the opening 117. For example, Figure 4A This is a side structural diagram of the end portion of the stepped slot provided in the first embodiment of the present invention at the opening of the box body, as shown in FIG. Figure 4A As shown, at the end of the stepped slot 110 located at the opening 117, the side groove surface of the stepped slot 110 has a sloped guide surface 1103 that slopes from the inside of the stepped slot 110 toward the opening 117. That is, both the top and bottom groove surfaces of the stepped slot 110 have sloped guide surfaces 1103. The sloped guide surfaces 1103 can expand the entrance of the stepped slot 110, making it easier to insert a tray into the stepped slot 110 from the opening 117 of the box body.

[0049] In some embodiments, the bottom groove surface of the stepped slot close to the bottom plate has a slope guide surface that tilts from the inside of the stepped slot toward the opening 117. For another example, Figure 4B This is another side structural diagram of the end portion of the stepped slot provided in the first embodiment of the present invention at the opening of the box body. Figure 4B As shown, the bottom groove surface of the stepped slot 110 close to the bottom plate has a slope guide surface 1103 inclined from the inner side of the stepped slot 110 toward the opening 117. Figure 4B The slope guide surface 1103 and Figure 4A The slope guide surface 1103 in has a similar function.

[0050] The width of the interval between the stepped slots 110 can be selected. Figure 4A or Figure 4B structure.

[0051] In some embodiments, Figure 4A and Figure 4B The two structures can be mixed and exist in the same semiconductor material box.

[0052] Figure 5A It is a structural schematic diagram of the locking plate provided in the first embodiment of the present utility model.

[0053] For reference Figure 1 and Figure 5AThe semiconductor material box further includes a locking plate 12, which is disposed outside the opening 117 and is capable of sliding up and down. The locking plate 12 has a first side 121 disposed at the end of the first side plate 111 and a second side 122 disposed at the end of the second side plate 112. The inner edges of the first side 121 and the second side 122 are both formed with a stepped bayonet 120, and the cross-section of the stepped bayonet 120 is consistent with the cross-section of the stepped slot 110. When the locking plate 12 is in a first position, the stepped bayonet 120 is aligned with the stepped slot 110. When the locking plate 12 is in a second position, the stepped bayonet 120 is offset from the stepped slot 110, and the stepped slots 110 of the first side plate 111 and the second side plate 112 are at least partially blocked by the locking plate 12. In this embodiment, when the locking plate 12 is in the first position, the bottom of the locking plate 12 is flush with the bottom of the box body. When the locking plate 12 is in the second position, there is a height difference between the bottom of the locking plate 12 and the bottom of the box body.

[0054] Figure 5B The first embodiment of the present invention provides Figure 5A A magnified view of the structure within the dotted box. Figure 5A and Figure 5B , one side of the stepped bayonet 120 has at least one step. In this embodiment, the top side of the stepped bayonet 120 close to the top plate is substantially parallel to the bottom plate, and the step is provided on the bottom side of the stepped bayonet 120 close to the bottom plate. The cross-sectional shape of the stepped bayonet 120 is similar to Figure 2B The cross-sectional shape of the stepped slot 110 is consistent.

[0055] In this embodiment, the corners of the opening of the stepped bayonet 120 are arc-shaped, so that the tray can smoothly enter the stepped slot from the opening of the stepped bayonet 120 .

[0056] The cross-sectional dimensions of the stepped bayonet 120 are greater than or equal to the cross-sectional dimensions of the stepped slot. In this embodiment, the cross-sectional dimensions of the stepped bayonet 120 are greater than the cross-sectional dimensions of the stepped slot, making it easier for the tray to enter the stepped slot from the stepped bayonet 120.

[0057] like Figure 5A 、 Figure 5BAs shown, the dimension of the end of the stepped bayonet 120 away from the opening 117 is larger than the dimension of the end of the stepped bayonet 120 facing the opening 117. The end of the stepped bayonet 120 facing the opening 117, i.e., the junction of the stepped bayonet 120 and the stepped slot, further expands the dimension of the stepped bayonet 120, making it easier for a tray to enter the stepped slot from the stepped bayonet 120.

[0058] Combine Figure 1 When the locking plate 12 is in the first position, the stepped snap-in 120 of the first side edge 121 is aligned with the stepped slot 110 of the first side panel 111, and the stepped snap-in 120 of the second side edge 122 is aligned with the stepped slot 110 of the second side panel 112 and the stepped slot 110 is completely exposed, so that the tray can enter the corresponding stepped slot 110 from the stepped snap-in 120 of the locking plate 12.

[0059] In this embodiment, continue to refer to Figure 5A The first side edge 121 and the second side edge 122 are provided with sliding grooves 16, which cooperate with the positioning bolts provided on the first side panel 111 and the second side panel 112 to enable the locking plate 12 to be fixed to the outside of the opening 117 and to slide up and down. Specifically, the upper and lower ends of the first side edge 121 and the upper and lower ends of the second side edge 122 each have a sliding groove 16, and correspondingly, the upper and lower ends of the first side panel 111 and the second side panel 112 each have a positioning bolt.

[0060] Figure 6A The first embodiment of the present invention provides a locking plate that is in the first position along the Figure 1 Schematic diagram of the front view in the D2 direction. Figure 6A As shown, the locking plate 12 includes a first side 121 and a second side 122. When the locking plate 12 is in the first position, the stepped opening 120 of the first side 121 is aligned with the stepped slot 110 of the first side panel 111, and the stepped opening 120 of the second side 122 is aligned with the stepped slot 110 of the second side panel 112.

[0061] In this embodiment, the locking plate 12 further includes a top edge and a bottom edge disposed opposite each other. Furthermore, when the locking plate 12 is in the first position, the lower edge of the top edge is higher than or flush with the inner wall of the top plate of the box body, and the upper edge of the bottom edge is lower than or flush with the inner wall of the bottom plate of the box body, so that the top edge and the bottom edge do not affect the tray's entry from the locking plate 12 into the stepped slot of the box body.

[0062] The inner wall of the box body top plate refers to the surface of the box body top plate facing the inside of the box body, and the inner wall of the box body bottom plate refers to the surface of the box body bottom plate facing the inside of the box body.

[0063] Combine Figure 2A , Figure 6A The first side 121 in the Figure 2A The first side panel 111, Figure 6A The second side 122 in the Figure 2A The second side plate 112. At the same time, Figure 6A The first side 121 and the second side 122 can be completely exposed Figure 2A The stepped slot 110 shown in FIG.

[0064] like Figure 6A As shown, combined Figure 2B The first area 1101 of the stepped slot 110 is used to support the edge of the first tray 13, and the first area 1101 and the second area 1102 of the stepped slot 110 are used to support the edge of the second tray 14. Specifically, the first tray 13 is relatively high and can only be placed in the first area 1101 of the stepped slot 110, and will not be misplaced to the second area 1102 of the stepped slot 110; the second tray 14 is relatively long and can only place its longest edge in the second area 1102 of the stepped slot 110, and will not be placed only in the first area 1101 of the stepped slot 110. The stepped design of the stepped slot 110 can accommodate two different trays, and since there will be no misplacement, the type of tray can be automatically identified through the different positions of the stepped slot 110, providing convenience for factory automation.

[0065] Figure 6B The first embodiment of the present invention provides Figure 6A A magnified view of the structure within the dotted box. Figure 6B As shown, the cross-sectional dimensions of the stepped bayonet 120 are larger than the cross-sectional dimensions of the stepped slot 110 . Furthermore, the opening corners of the stepped bayonet 120 are arc-shaped, so that the tray can smoothly enter and exit the stepped slot 110 .

[0066] In some embodiments, the size of the stepped latch 120 is equal to the cross-sectional size of the stepped latch slot 110 , but can ensure that the tray can smoothly enter and exit the stepped latch slot 110 .

[0067] Continue to refer Figure 6AThe first side 121 and the second side 122 are provided with a sliding groove 16 perpendicular to the bottom plate of the box body, and the first side panel (not labeled) and the second side panel (not labeled) are provided with a positioning bolt 17. The positioning bolt 17 slides up and down in the sliding groove 16 to enable the locking plate to slide up and down outside the opening 117. In this embodiment, the upper and lower ends of the first side 121 and the upper and lower ends of the second side 122 each have a sliding groove 16, and correspondingly, the upper and lower ends of the first side panel and the upper and lower ends of the second side panel each have a positioning bolt 17.

[0068] The maximum distance between the locking plate and the box body is limited by the length of the sliding slot 16 , so the sliding distance between the locking plate and the box body is the maximum distance that the positioning bolt 17 can slide in the sliding slot 16 .

[0069] In this embodiment, the length of the sliding slot 16 is less than the maximum height of the stepped slot. Accordingly, when the locking plate is in the second position, the stepped slot and the stepped bayonet are in an interlaced state.

[0070] like Figure 6A As shown, when the locking plate is in the first position, the positioning bolt 17 is at the bottom of the sliding groove 16 .

[0071] Figure 7A The first embodiment of the present invention provides a locking plate that is in the second position along the Figure 1 The front view of the D2 direction. Figure 7A As shown, when the box body 11 is lifted upward, the locking plate 12 is in the second position, and the stepped slot and the stepped bayonet are in a staggered state.

[0072] Figure 7B The first embodiment of the present invention provides Figure 7A A magnified view of the structure in the dotted box. Figure 7B As shown, the stepped slot 110 and the stepped opening 120 are interlaced with each other, so that the tray cannot be placed in the box body or taken out of the box body, thereby achieving locking of the box body.

[0073] In this embodiment, if Figure 7A As shown, when the box body 11 is lifted upward and the locking plate 12 is in the second position, the positioning bolt 17 is at the top of the sliding groove 16. That is, when the height of the box body 11 relative to the locking plate 12 reaches the maximum length of the sliding groove 16, the stepped slot 110 and the stepped bayonet 120 can be in a staggered state, thereby achieving automatic locking.

[0074] Figure 8AIt is a cross-sectional schematic diagram of a stepped slot provided in the second embodiment of the present utility model; Figure 8B It is a structural schematic diagram of the stepped bayonet provided in the second embodiment of the present utility model.

[0075] like Figure 8A 、 Figure 8B As shown, the differences between the second embodiment of the present invention and the first embodiment include: the stepped slot 210 is formed with two steps near the bottom side groove surface of the bottom plate, and the stepped bayonet 220 is formed with two steps near the bottom side surface of the bottom plate, and the shape of the stepped bayonet 220 is consistent with the cross-sectional shape of the stepped slot 210.

[0076] Correspondingly, the stepped slot 210 of the semiconductor material box formed in the second embodiment of the present invention can be used to store not only the first tray and the second tray, but also the third tray.

[0077] and Figure 3A 、 Figure 3B The third tray is similar in shape to the first tray in the embodiment. The third tray is shaped like a cuboid, and its length along the X-axis is greater than that of the first tray and less than that of the second tray. Specifically, both ends of the third tray can be placed in the space defined by the top groove surface 2101 of the stepped slot 210 and the groove surface 2102 formed by the second step.

[0078] The above technical solution realizes the unification of the material box structure by setting stepped slots on the inner walls of the first side panel and the second side panel of the box body to adapt to trays of different heights and structures, avoids the risk of using the wrong material box, and improves the automation rate of the factory.

[0079] It should be noted that, in this document, relational terms such as "first" and "second" are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprise," or any other variations thereof are intended to cover non-exclusive inclusion. The various embodiments in this specification are described in a related manner, and the same or similar parts between the various embodiments can be referenced to each other. Each embodiment focuses on the differences from other embodiments.

[0080] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. It should be noted that those skilled in the art may make improvements and modifications without departing from the principles of the present invention, and such improvements and modifications shall also be considered within the scope of protection of the present invention.

Claims

1. A semiconductor material box, characterized in that: include: The box body includes a top plate and a bottom plate arranged opposite to each other, a first side plate and a second side plate arranged between the top plate and the bottom plate and opposite to each other, the front side of the box body is an opening, and the inner walls of the first side plate and the second side plate are both formed with a stepped slot extending from the front side to the rear side of the box body, and a groove surface on one side of the stepped slot has at least one step so that the height of the stepped slot decreases step by step.

2. The semiconductor material box according to claim 1, characterized in that: The stepped slot includes a first area and a second area, the height of the second area is smaller than that of the first area, the first area is used to place a tray with a first height, and the first area and the second area are used together to place a tray with a stepped end.

3. The semiconductor material box according to claim 2, characterized in that: The height of the second region is smaller than the first height.

4. The semiconductor material box according to claim 1, characterized in that: The top side groove surface of the stepped slot close to the top plate is substantially parallel to the bottom plate, and the step is arranged on the bottom side groove surface of the stepped slot close to the bottom plate.

5. The semiconductor material box according to claim 1, characterized in that: The stepped slot has one or two steps on the bottom side slot surface close to the bottom plate.

6. The semiconductor material box according to claim 1, characterized in that: At an end portion of the stepped slot located at the opening, a side slot surface of the stepped slot has a slope guide surface inclined from an inner side of the stepped slot toward the opening.

7. The semiconductor cartridge according to claim 6, wherein: The bottom groove surface of the stepped slot close to the bottom plate has a slope guide surface inclined from the inner side of the stepped slot toward the opening.

8. The semiconductor cartridge according to claim 1, wherein: Also includes: The locking plate is arranged on the outer side of the opening and can slide up and down, and the locking plate has a first side edge arranged at the end of the first side plate and a second side edge arranged at the end of the second side plate, and the inner edges of the first side plate and the second side plate are both formed with a stepped bayonet, and the cross-sectional shape of the stepped bayonet is consistent with the cross-sectional shape of the stepped slot, when the locking plate is in the first position, the stepped bayonet is aligned with the stepped slot, and when the locking plate is in the second position, the stepped bayonet is misaligned with the stepped slot, and the stepped slots of the first side plate and the second side plate are at least partially blocked by the locking plate.

9. The semiconductor material box according to claim 8, characterized in that: The size of the cross section of the stepped bayonet is greater than or equal to the size of the cross section of the stepped slot.

10. The semiconductor material box according to claim 8, characterized in that: The dimension of one end of the stepped bayonet away from the opening is larger than the dimension of one end of the stepped bayonet toward the opening.

11. The semiconductor cartridge according to claim 8, wherein: The corners of the opening of the stepped bayonet are arc-shaped.

12. The semiconductor material box according to claim 8, characterized in that: The locking plate also includes a top edge and a bottom edge that are arranged opposite to each other. When the locking plate is in the first position, the lower edge of the top edge is higher than the inner wall of the box top plate or is flush with the inner wall of the box top plate, and the upper edge of the bottom edge is lower than the inner wall of the box bottom plate or is flush with the inner wall of the box bottom plate.

13. The semiconductor material box according to claim 8, characterized in that: The first side and the second side are provided with sliding grooves, the length of the sliding grooves is less than the maximum height of the step slots, and the first side panel and the second side panel are provided with positioning bolts, and the locking plate can slide up and down on the outside of the opening by sliding the positioning bolts up and down in the sliding grooves.

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