Full basket overturning type conveying mechanism for silicon wafer processing

Abstract

The utility model discloses a full basket turnover type conveying mechanism for silicon wafer processing, and particularly relates to the field of silicon wafer processing equipment, the full basket turnover type conveying mechanism comprises a mounting frame, a turnover frame is mounted on one side of the mounting frame, a steering assembly is arranged between the outer wall of the mounting frame and the turnover frame, and a silicon wafer storage basket is detachably arranged on the turnover frame. After the silicon wafer storage basket is loaded on the turnover frame, the transmission motor works to drive the transmission shaft to rotate to drive the whole turnover frame to turn over, and the correlation type sensor detects a moving signal of the indicating plate, so that the next vacant storage frame on the turnover frame rotates to a placing position at the top of the mounting frame to adapt to the placement of the next silicon wafer storage basket; the full silicon wafer storage baskets are rotated to be in a horizontal placement state, great progress is made for stable transportation, silicon wafers are prevented from being broken in the conveying process, and compared with a traditional long production line, due to the arrangement of the cross-shaped turnover frame, the cross-shaped turnover frame can adapt to a small machining site.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing equipment, and more specifically, to a full basket flipping type conveying mechanism for silicon wafer processing. Background Art

[0002] The development of silicon wafer technology has provided a solid foundation for the modern electronics industry. Silicon wafers, a crucial raw material for transistors and integrated circuits, are typically made from high-purity crystalline silicon, often sliced ​​from single crystals. Silicon's unique physical and chemical properties, such as a stable molecular structure and low conductivity, make it suitable for applications in the chemical industry, photovoltaics, and chips. Silicon wafers are primarily used in the semiconductor and photovoltaic sectors, with semiconductor wafers being more valuable due to their difficulty in manufacturing and widespread application. Silicon wafer manufacturing requires a series of physical and chemical operations, including single crystal pulling, cutting, grinding, polishing, and cleaning. High purity and precision are crucial.

[0003] In silicon wafer processing technology, there are longitudinal conveying, lateral conveying, or a combination of the two conveying methods according to the processing requirements. This requires a flipping mechanism and a corresponding conveying mechanism to cooperate. The existing technical solutions mostly use a hydraulic cylinder telescopic method to complete the flipping work, but this will cause the conveying mechanism production line to be too long and cannot adapt to some small processing sites. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a full basket flipping conveying mechanism for silicon wafer processing. The technical problem to be solved by the present invention is: how to improve the flipping mechanism in the existing silicon wafer processing and conveying equipment, thereby shortening the production line length and improving processing efficiency.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a full basket flipping conveyor mechanism for silicon wafer processing, comprising a mounting frame, a flipping frame mounted on one side of the mounting frame, a steering assembly provided between an outer wall of the mounting frame and the flipping frame, and a silicon wafer storage basket detachably provided on the flipping frame;

[0006] The flip frame includes a central base, and four groups of "L"-shaped storage racks are evenly arranged on the outer wall of the central base in a cross shape. The storage rack includes a load-bearing plate and a support plate. The load-bearing plate is arranged perpendicular to the support plate. A locking groove is provided on the load-bearing plate. A group of clamping blocks are provided at the center of both sides of the central base. A placement groove is provided on the inner wall of one side of the clamping block, and a positioning protrusion is movably provided inside the placement groove;

[0007] The steering assembly includes a fixing seat I and a fixing seat II, which are respectively fixed on both sides of the mounting frame. A transmission shaft is provided between the fixing seat I and the fixing seat II. A transmission motor is provided on one side of the fixing seat I. The output shaft of the transmission motor is connected to the end of the transmission shaft through a coupling. A directional turntable is provided at the end of the transmission shaft outside the fixing seat II. Four indicator plates are evenly fixed in a circular array on the outer wall of the directional turntable, and the four indicator plates are distributed in a cross shape along the center point of the directional turntable.

[0008] In a preferred embodiment, fixed angle brackets and support rods are provided between adjacent storage racks and between a storage rack and a central base, and the flip rack system is supported and positioned by the fixed angle brackets and support rods through bolt fixation.

[0009] In a preferred embodiment, each group of clamping blocks is provided with two blocks, which are fixed by bolts, one clamping block is fixedly connected to the center base, and the other clamping block is movably provided, and an installation groove is provided at the connection between each group of clamping blocks and the center base and the transmission shaft, and a placement groove adapted to the size of the positioning protrusion is also provided on the outer wall of the transmission shaft.

[0010] In a preferred embodiment, the mounting frame includes a main frame, and a through cavity with a size comparable to that of the flip frame is provided inside the main frame. A through-type sensor is provided at the position where the outer wall of the main frame is aligned with the directional turntable. The through-type sensor is fixed to the main frame by a fixing frame, and a controller is also provided outside the main frame. The through-type sensor and the transmission motor are both electrically connected to the controller.

[0011] In a preferred embodiment, the silicon wafer storage basket includes a basket body, and backboards are provided at the top and bottom ends of the basket body. The backboard is fixed to the basket body by bolts, and a plurality of positioning posts are fixed on the outer wall of the backboard. The positioning posts are aligned with the fixing grooves.

[0012] The technical effects and advantages of this utility model are:

[0013] The utility model cooperates with the turning frame and the steering assembly to load the silicon wafer storage basket onto the turning frame. The transmission motor works to drive the transmission shaft to rotate and drive the turning frame to turn over as a whole. The through-beam sensor detects the movement signal of the indicator plate, so that the next empty storage rack on the turning frame is rotated to the placement position on the top of the mounting frame to accommodate the placement of the next silicon wafer storage basket. The silicon wafer storage basket after the basket is full is rotated to a horizontal placement state, which greatly improves the transportation stability. The placed silicon wafers are broken during the transportation process. The cross-shaped turning frame is set up, and multiple silicon wafer storage basket placement positions can be completed in a small space, thereby forming a small-sized conveying equipment. Compared with the traditional long production line, it can adapt to smaller processing sites. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0015] Figure 2 This is a schematic diagram of the overall structure of the utility model from a second perspective.

[0016] Figure 3 For the utility model Figure 2 Enlarged view of the structure of part A in the middle.

[0017] Figure 4 This is a schematic diagram of the assembly structure of the turning frame, steering assembly, and silicon wafer storage basket of the utility model.

[0018] Figure 5 This is a schematic structural diagram of the steering assembly of the present utility model.

[0019] Figure 6 This is a schematic structural diagram of the turning frame of the present utility model.

[0020] Figure 7 For the utility model Figure 6 Enlarged view of the structure of part B in the middle.

[0021] Figure 8 This is a schematic structural diagram of the silicon wafer storage basket of the present invention.

[0022] The accompanying drawings are marked as follows: 1 mounting frame, 2 turning frame, 3 steering assembly, 4 silicon wafer storage basket;

[0023] 11 main frame, 12 through-beam sensor, 13 fixing frame;

[0024] 21 center base, 22 bearing plate, 23 support plate, 24 clamping block, 25 placement groove, 26 positioning protrusion, 27 fixed angle bracket, 28 support rod, 29 locking groove;

[0025] 31 fixed seat I, 32 transmission motor, 33 fixed seat II, 34 transmission shaft, 35 directional turntable;

[0026] 41 flower basket body, 42 backboard, 43 positioning post. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] The utility model provides Figure 1-8 The illustrated embodiment shows a full basket flipping conveyor mechanism for silicon wafer processing, comprising a mounting frame 1, a flipping frame 2 mounted on one side of the mounting frame 1, a steering assembly 3 disposed between the outer wall of the mounting frame 1 and the flipping frame 2, and a detachable silicon wafer storage basket 4 disposed on the flipping frame 2;

[0029] The mounting frame 1 includes a main frame 11, and a through cavity of comparable size to the flip frame 2 is provided inside the main frame 11. A through-beam sensor 12 is provided at a position where the outer wall of the main frame 11 is aligned with the directional turntable 35. The through-beam sensor 12 is fixed to the main frame 11 by a fixing frame 13. A controller is also provided on the outside of the main frame 11. The through-beam sensor 12 and the transmission motor 32 are both electrically connected to the controller.

[0030] The turning frame 2 includes a central base 21, and four groups of "L"-shaped storage racks are evenly arranged in a cross shape on the outer wall of the central base 21. The storage rack includes a load-bearing plate 22 and a support plate 23. The load-bearing plate 22 and the support plate 23 are arranged perpendicularly. A locking groove 29 is provided on the load-bearing plate 22. A group of clamping blocks 24 are provided at the center of both sides of the central base 21. A placement groove 25 is provided on the inner wall of one side of the clamping block 24. A positioning protrusion 26 is movably provided inside the placement groove 25. Fixed angle brackets 27 and support rods 28 are provided between adjacent storage racks and between the storage rack and the central base 21. The fixed angle brackets 27 and the support rods 28 are fixed by bolts to support and position the turning frame 2 system, and the fixed angle brackets 27 and the support rods 28 ensure the supporting strength of the turning frame 2;

[0031] The steering assembly 3 includes a fixing seat I 31 and a fixing seat II 33, which are respectively fixed to both sides of the mounting frame 1. A transmission shaft 34 is provided between the fixing seat I 31 and the fixing seat II 33. A transmission motor 32 is provided on one side of the fixing seat I 31. The output shaft of the transmission motor 32 is connected to the end of the transmission shaft 34 through a coupling. A directional turntable 35 is provided at the end of the transmission shaft 34 outside the fixing seat II 33. Four indicator plates are evenly fixed on the outer wall of the directional turntable 35 in a circular array. The four indicator plates are distributed in a cross shape along the center point of the directional turntable 35.

[0032] Each set of clamping blocks 24 is provided with two pieces, and the two clamping blocks 24 are fixed by bolts. One clamping block 24 is fixedly connected to the central base 21, and the other clamping block 24 is movably provided. A mounting groove is provided at the connection between each set of clamping blocks 24, the central base 21 and the transmission shaft 34. A placement groove 25 having a size adapted to the positioning protrusion 26 is also provided on the outer wall of the transmission shaft 34.

[0033] The silicon wafer storage basket 4 includes a basket body 41 , and backboards 42 are provided at the top and bottom ends of the basket body 41 . The backboard 42 is fixed to the basket body 41 by bolts. A plurality of positioning posts 43 are fixed on the outer wall of the backboard 42 , and the positioning posts 43 are aligned with the fixing grooves 29 and are connected thereto.

[0034] The specific implementation method is as follows: the robot / truss used in conjunction with the external production line loads the silicon wafer storage basket 4 onto one of the storage racks aligned with the turning rack 2. The positioning posts 43 engage with the locking grooves 29, and the backboard 42 at the bottom of the silicon wafer storage basket 4 is loaded onto the position of the carrier plate 22. The support plate 23 supports the back side of the basket body 41, thus forming a loading space between the silicon wafer storage basket 4 and the turning rack 2.

[0035] During this period, the transmission motor 32 works to drive the transmission shaft 34 to rotate, so that the entire turning frame 2 can be turned over by the rotation of the transmission shaft 34 through the limitation of the positioning protrusion 26 and the placement groove 25;

[0036] During the flipping of the flipping rack 2, the transmission shaft 34 rotates to drive the directional turntable 35 to rotate, and the movement signal of the indicator plate is detected by the through-beam sensor 12, that is, the transmission shaft 34 drives the directional turntable 35 to rotate 90°, and the signal is transmitted to the controller. The controller controls the transmission motor 32 to stop working, so that the next empty storage rack on the flipping rack 2 rotates to the placement position on the top of the mounting rack 1 to accommodate the placement of the next silicon wafer storage basket 4. This is repeated, and through the continuous operation of the flipping rack 2 and the steering assembly 3, the periodic full basket flipping conveying is completed.

[0037] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense, and may refer to mechanical or electrical connections, internal communication between two components, or direct connection. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute positions of the objects being described change, the relative positional relationships may also change.

[0038] Secondly: The drawings of the embodiments disclosed in this utility model only involve structures related to the embodiments disclosed in this utility model. Other structures can refer to common designs. In the absence of conflicts, the same embodiment and different embodiments of the utility model can be combined with each other.

[0039] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A full basket flipping conveyor mechanism for silicon wafer processing, comprising a mounting frame (1), characterized in that: A turning frame (2) is installed on one side of the mounting frame (1), a steering assembly (3) is provided between the outer wall of the mounting frame (1) and the turning frame (2), and a silicon wafer storage basket (4) is detachably provided on the turning frame (2); The flip frame (2) includes a central base (21), and four groups of "L"-shaped storage racks are evenly arranged on the outer wall of the central base (21) in a cross shape. The storage rack includes a load-bearing plate (22) and a support plate (23). The load-bearing plate (22) and the support plate (23) are vertically arranged. A locking groove (29) is provided on the load-bearing plate (22). A group of clamping blocks (24) are provided at the center of both sides of the central base (21). A placement groove (25) is provided on the inner wall of the clamping block (24) on one side. A positioning protrusion (26) is movably provided inside the placement groove (25). The steering assembly (3) comprises a fixing seat I (31) and a fixing seat II (33), wherein the fixing seat I (31) and the fixing seat II (33) are respectively fixed on both sides of the mounting frame (1), a transmission shaft (34) is provided between the fixing seat I (31) and the fixing seat II (33), a transmission motor (32) is provided on one side of the fixing seat I (31), an output shaft of the transmission motor (32) is connected to the end of the transmission shaft (34) through a coupling, a directional turntable (35) is provided at the end of the transmission shaft (34) outside the fixing seat II (33), and four indicator plates are evenly fixed on the outer wall of the directional turntable (35) in a circular array, and the four indicator plates are distributed in a cross shape along the center point of the directional turntable (35).

2. The full basket flip-type conveying mechanism for silicon wafer processing according to claim 1, characterized in that: Fixed angle frames (27) and support rods (28) are provided between adjacent storage racks and between the storage racks and the central base (21). The fixed angle frames (27) and support rods (28) are fixed by bolts to support and position the turning rack (2) system.

3. The full basket flip-type conveying mechanism for silicon wafer processing according to claim 1, characterized in that: Each group of clamping blocks (24) is provided with two blocks, and the two clamping blocks (24) are fixed to each other by bolts. One clamping block (24) is fixedly connected to the central base (21), and the other clamping block (24) is movably provided. A mounting groove is provided at the connection between each group of clamping blocks (24), the central base (21) and the transmission shaft (34). A placement groove (25) having a size adapted to the positioning protrusion (26) is also provided on the outer wall of the transmission shaft (34).

4. The full basket flip-type conveying mechanism for silicon wafer processing according to claim 1, characterized in that: The mounting frame (1) includes a main frame (11), and a through cavity having a size comparable to that of the flip frame (2) is provided inside the main frame (11). A beam sensor (12) is provided at a position where the outer wall of the main frame (11) is aligned with the directional turntable (35). The beam sensor (12) is fixed to the main frame (11) via a fixing frame (13). A controller is also provided outside the main frame (11), and the beam sensor (12) and the transmission motor (32) are both electrically connected to the controller.

5. The full basket flip-type conveying mechanism for silicon wafer processing according to claim 1, characterized in that: The silicon wafer storage basket (4) comprises a basket body (41), and a backboard (42) is provided at the top and bottom ends of the basket body (41). The backboard (42) and the basket body (41) are fixed by bolts. A plurality of positioning posts (43) are fixed on the outer wall of the backboard (42), and the positioning posts (43) are aligned and engaged with the locking grooves (29).

Images