Stirring and dissolving device for negative photoresist production

Abstract

The utility model discloses a stirring and dissolving device for negative photoresist production, which comprises a base, a box body, a feeding pipe and a cleaning component, the box body is mounted on the top surface of the base, the whole box body is of a horizontally placed cylindrical structure, the feeding pipe is mounted on the rear end surface of the box body, a stirring component is mounted on the top of the box body, and the cleaning component is mounted on the bottom surface of the box body. The stirring and dissolving device for negative photoresist production solves the problem that in the using process of an existing stirring device, due to the fact that substances in a mixed solution have moving viscosity in the stirring and mixing process, the substances in the mixed solution are not prone to moving, and therefore the stirring and dissolving device is not prone to being damaged. Along with the operation process of stirring and mixing, part of the mixed solution adheres to the inner wall of a box body, part of the mixed solution still adheres to the inner wall of the box body after mixing and stirring are completed and liquid extraction is completed, the extraction effect is poor, the residual mixed solution is inconvenient to clean, and the use effect is poor.

Description

Technical Field

[0001] The utility model relates to the technical field of stirring device processing, in particular to a stirring and dissolving device for producing negative photoresist. Background Art

[0002] Negative photoresist is a mixed liquid that is sensitive to light of a specific wavelength. It is mainly composed of photosensitive resin, sensitizer and solvent. This material will undergo a photocuring reaction after exposure to light, causing the physical properties of the exposed area to change, thereby retaining the desired pattern during the development process. When negative photoresist receives light or rays of a certain wavelength, it will undergo a photochemical reaction or excitation. The exposed photoresist will become insoluble and harden due to cross-linking, forming the desired pattern. Stirring negative photoresist is a key process step. It involves the uniformity and stability of the photoresist and has a direct impact on the quality of the final pattern. Stirring can ensure that the solid particles and solvent in the photoresist are fully mixed to avoid precipitation or stratification, thereby ensuring the uniformity of the photoresist during the spin coating process, which is crucial for forming precise and clear patterns.

[0003] At present, during the use of the stirring device, since the substances in the mixed solution have mobile viscosity during the stirring and mixing process, part of the mixed solution adheres to the inner wall of the box during the stirring and mixing operation. After the mixing and stirring are completed and the liquid is extracted, part of the mixed solution is still adhered to the inner wall of the box, the extraction effect is poor, the residual mixed solution is inconvenient to clean, and the use effect is poor.

[0004] Therefore, it is necessary to provide a stirring and dissolving device for producing negative photoresist to solve the above technical problems. Utility Model Content

[0005] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a stirring and dissolving device for the production of negative photoresist to solve the problem that during the use of the current stirring device, the substances in the mixed solution have mobile viscosity during the stirring and mixing process. As the stirring and mixing operation proceeds, part of the mixed solution adheres to the inner wall of the box. After the mixing and stirring is completed and the liquid is extracted, part of the mixed solution still adheres to the inner wall of the box, the extraction effect is poor, the residual mixed solution is inconvenient to clean, and the use effect is poor.

[0006] In order to achieve the above purpose, the technical solution adopted by the present utility model is as follows:

[0007] A stirring and dissolving device for producing negative photoresist, comprising: a base, a box, a feed pipe, and a cleaning component;

[0008] The top surface of the base is installed with a box body, and the box body is a horizontally placed cylindrical structure as a whole. A feeding pipe is installed on the rear end surface of the box body, and a stirring component is installed on the top of the box body. A cleaning component is installed on the outside of the stirring component. The cleaning component consists of a first motor, a screw rod, a movable frame, and a scraper. The first motor is installed and connected to the screw rod, and the screw rod is connected to the screw hole of the movable frame. A scraper is installed at the bottom of the movable frame, and an opening is provided on the top of the scraper, which is installed and connected to the two sides of the bottom of the movable frame. The scraper is an annular structure as a whole, and the outer peripheral surface of the scraper abuts against the inner wall of the box. Both sides of the movable frame are in the limit opening at the top of the box body, and a water inlet pipe is installed on the right side of the box body.

[0009] In one embodiment, a discharge pipe is installed on the bottom surface of the box body, a liquid discharge pipe is installed on the left side of the port of the discharge pipe, and an electric control valve is installed at the connection between the discharge pipe and the liquid discharge pipe.

[0010] In one embodiment, the stirring component is composed of a mounting box, a second motor, a stirring shaft, a driving tooth, a transmission tooth, and a stirring rod. A second motor is installed on the top of one end of the mounting box, and the bottom of the second motor is connected to the transmission tooth. A driving tooth engaged with the transmission tooth is installed on the left side of the transmission tooth. A plurality of driving teeth are arranged at intervals, and a transmission tooth is installed between adjacent driving teeth. The bottom of the driving tooth is connected to the stirring shaft. The bottom of the stirring shaft extends to the interior of the box, and a stirring rod is installed on the outer peripheral surface of the extended end. A plurality of stirring rods are arranged in a circular array.

[0011] In one embodiment, the bottom of the extended end of the stirring rod is an arc surface, and the arc surfaces of adjacent stirring rods are arranged in an up-down staggered manner.

[0012] In one embodiment, a protective sleeve is installed on the top of the limiting opening, and an opening with the same inner width as the limiting opening is formed inside the protective sleeve.

[0013] The beneficial effects of the utility model are as follows:

[0014] (1) The utility model introduces water in the water inlet pipe into the box body, drives the screw to rotate through the operation of the first motor, and simultaneously drives the movable frame to move linearly under the limit of the limit port, thereby moving the scraper to scrape off the attachments on the inner wall of the box body, and connects with the external pump body through the discharge pipe to extract the stirred material inside the box body. When cleaning, the electric control valve of the discharge pipe is closed, and the electric control valve of the liquid discharge pipe is opened to discharge the waste water after cleaning.

[0015] (2) The utility model starts the second motor to drive the driving gear and the transmission gear to rotate, and synchronously rotates the stirring shaft and the stirring rod. The multiple sets of stirring shafts and stirring rods arranged at intervals help to increase the stirring area of ​​the material. Compared with the traditional overall stirring structure, the small unit stirring area makes the material stirring and mixing more uniform, thereby improving the stirring efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is the overall structure diagram of the utility model;

[0017] Figure 2 This is a detailed diagram of the components of the utility model after being disassembled;

[0018] Figure 3 This is a detailed diagram of the stirring component of the utility model;

[0019] Figure 4 This is a detailed diagram of the cleaning components of this utility model.

[0020] Among them, the names corresponding to the figure marks are: base 1, box body 2, discharge pipe 21, liquid discharge pipe 22, water inlet pipe 23, limit port 24, feed pipe 3, stirring component 4, installation box 41, second motor 42, stirring shaft 43, driving gear 44, transmission gear 45, stirring rod 46, arc surface 47, cleaning component 5, first motor 51, screw 52, ​​movable frame 53, scraper 54, screw hole 55, protective cover 56. DETAILED DESCRIPTION

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments. The present invention includes but is not limited to the following embodiments.

[0022] like Figure 1-Figure 2 As shown, the stirring and dissolving device for producing negative photoresist provided by the present invention comprises: a base 1, a box 2, a feed pipe 3, and a cleaning component 5;

[0023] like Figures 1-4As shown, a box body 2 is installed on the top surface of the base 1. The box body 2 is a horizontally placed cylindrical structure. A feed pipe 3 is installed on the rear end surface of the box body 2. A stirring component 4 is installed on the top of the box body 2. A cleaning component 5 is installed on the outside of the stirring component 4. The cleaning component 5 consists of a first motor 51, a screw rod 52, a movable frame 53, and a scraper 54. The first motor 51 is installed and connected to the screw rod 52. The screw rod 52 is connected to the screw hole 55 of the movable frame 53. A scraper 54 is installed on the bottom of the movable frame 53. The top of the scraper 54 is opened. It is provided with an opening, which is installed and connected to the two sides of the bottom of the movable frame 53. The scraper 54 is an annular structure as a whole. The outer peripheral surface of the scraper 54 abuts against the inner wall of the box body 2. Both sides of the movable frame 53 are in the limit opening 24 at the top of the box body 2. A water inlet pipe 23 is installed on the right side of the box body 2. When working, the water in the water inlet pipe 23 is introduced into the box body 2, and the first motor 51 is used to drive the screw rod 52 to rotate, and the movable frame 53 is synchronously driven to move linearly under the limit of the limit opening 24, and then the scraper 54 is displaced to scrape off the attachments on the inner wall of the box body 2.

[0024] Preferably, in one embodiment, Figure 1-Figure 2 As shown, a discharge pipe 21 is installed on the bottom surface of the box body 2, and a liquid discharge pipe 22 is installed on the left side of the port of the discharge pipe 21. An electric control valve is installed at the connection between the discharge pipe 21 and the liquid discharge pipe 22. When working, the mixing material inside the box body 2 is extracted through the connection between the discharge pipe 21 and the external pump body. When cleaning, the electric control valve of the discharge pipe 21 is closed, and the electric control valve of the liquid discharge pipe 22 is opened to discharge the cleaned waste water.

[0025] Preferably, in one embodiment, Figure 2-Figure 3 As shown, the stirring component 4 consists of an installation box 41, a second motor 42, a stirring shaft 43, a driving gear 44, a transmission gear 45, and a stirring rod 46. The second motor 42 is installed on the top of one end of the installation box 41, and the bottom of the second motor 42 is installed and connected to the transmission gear 45. A driving gear 44 engaged with the transmission gear 45 is installed on the left side of the transmission gear 45. A plurality of driving teeth 44 are arranged at intervals, and a transmission gear 45 is installed between adjacent driving teeth 44. The bottom of the driving gear 44 is installed and connected to the stirring shaft 43. The bottom of the stirring shaft 43 extends to the interior of the box body 2, and a stirring rod 46 is installed on the outer peripheral surface of the extended end. A plurality of stirring rods 46 are arranged in a circular array. When working, by starting the second motor 42, the driving gear 44 and the transmission gear 45 are driven to rotate, and the stirring shaft 43 and the stirring rod 46 are rotated synchronously. The multiple groups of stirring shafts 43 and stirring rods 46 arranged at intervals help to increase the stirring area of ​​the material. Compared with the traditional overall stirring structure, the small unit stirring area makes the material stirring and mixing more uniform, thereby improving the stirring efficiency.

[0026] Preferably, in one embodiment, Figure 3 As shown, the bottom of the extended end of the stirring rod 46 is an arc surface 47, and the arc surfaces 47 of adjacent stirring rods 46 are staggered in the upper and lower directions. The purpose is that the staggered arrangement of the arc surfaces 47 can cause the material to produce small fluctuations during rotation, thereby further improving the mixing effect of the material.

[0027] Preferably, in one embodiment, Figure 4 As shown, a protective sleeve 56 is installed on the top of the limiting opening 24. An opening with the same inner width as the limiting opening 24 is opened inside the protective sleeve 56. The setting of the protective sleeve 56 enhances the sealing effect of the limiting opening 24.

[0028] Working principle of this utility model:

[0029] During operation, the water in the water inlet pipe 23 is introduced into the box body 2, and the first motor 51 is used to drive the screw 52 to rotate, and the movable frame 53 is synchronously driven to move linearly under the limit of the limit opening 24, and then the scraper 54 is moved to scrape off the attachments on the inner wall of the box body 2. The discharge pipe 21 is connected with the external pump body to extract the mixing material inside the box body 2. When cleaning, the electric control valve of the discharge pipe 21 is closed, and the electric control valve of the discharge pipe 22 is opened to discharge the cleaned waste water. By starting the second motor 42, the active gear 44 and the transmission gear 45 are driven to rotate, and the stirring shaft 43 and the stirring rod 46 are synchronously rotated. The multiple groups of stirring shafts 43 and stirring rods 46 arranged at intervals help to increase the stirring area of ​​the material. Compared with the traditional overall stirring structure, the small unit stirring area makes the material stirring and mixing more uniform, thereby improving the stirring efficiency.

[0030] The above embodiment is only one of the preferred implementation methods of the present invention and should not be used to limit the scope of protection of the present invention. Any changes or modifications that have no substantive meaning made to the main design concept and spirit of the present invention, as long as the technical problems they solve are still consistent with the present invention, should be included in the scope of protection of the present invention.

Claims

1. A stirring and dissolving device for producing negative photoresist, characterized in that: include: Base, box, feed pipe, cleaning parts; The top surface of the base is installed with a box body, and the box body is a horizontally placed cylindrical structure as a whole. A feeding pipe is installed on the rear end surface of the box body, and a stirring component is installed on the top of the box body. A cleaning component is installed on the outside of the stirring component. The cleaning component consists of a first motor, a screw rod, a movable frame, and a scraper. The first motor is installed and connected to the screw rod, and the screw rod is connected to the screw hole of the movable frame. A scraper is installed at the bottom of the movable frame, and an opening is provided on the top of the scraper, which is installed and connected to the two sides of the bottom of the movable frame. The scraper is an annular structure as a whole, and the outer peripheral surface of the scraper abuts against the inner wall of the box. Both sides of the movable frame are in the limit opening at the top of the box body, and a water inlet pipe is installed on the right side of the box body.

2. The stirring and dissolving device for producing negative photoresist according to claim 1, characterized in that: A discharge pipe is installed on the bottom surface of the box body, a liquid discharge pipe is installed on the left side of the port of the discharge pipe, and an electric control valve is installed at the connection between the discharge pipe and the liquid discharge pipe.

3. The stirring and dissolving device for producing negative photoresist according to claim 1, characterized in that: The stirring component consists of a mounting box, a second motor, a stirring shaft, a driving gear, a transmission gear, and a stirring rod. The second motor is installed on the top of one end of the mounting box, and the bottom of the second motor is installed and connected to the transmission gear. A driving gear that meshes with the transmission gear is installed on the left side of the transmission gear. There are multiple driving teeth arranged at intervals, and transmission teeth are installed between adjacent driving teeth. The bottom of the driving gear is installed and connected to the stirring shaft. The bottom of the stirring shaft extends to the interior of the box, and a stirring rod is installed on the outer peripheral surface of the extended end. There are multiple stirring rods arranged in a circular array.

4. The stirring and dissolving device for producing negative photoresist according to claim 3, characterized in that: The bottom of the extended end of the stirring rod is an arc surface, and the arc surfaces of adjacent stirring rods are arranged in an up-down staggered manner.

5. The stirring and dissolving device for producing negative photoresist according to claim 1, characterized in that: A protective cover is installed on the top of the limiting opening, and an opening with the same inner width as the limiting opening is opened inside the protective cover.

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