Mask scrubbing equipment

Abstract

The utility model discloses mask scrubbing equipment. The mask scrubbing equipment comprises an inclined plate, a water collection tank; a robot arm; the placing table is arranged at the bottom in the water collecting tank, and a mask plate is obliquely arranged on the side of the placing table; the sponge is arranged at the tail end of a movement mechanism of the mechanical arm; at least one moving seat for placing a beaker is arranged on the inclined plate, and the moving seat is longitudinally connected to the inclined plate in a sliding manner; a water receiving plate is obliquely arranged between the beaker and the water collecting tank, and the lower end of the water receiving plate obliquely enters the beaker. And the mechanical arm simulates manual scrubbing, so that the scrubbing effect and the working efficiency can be improved. In the scrubbing process, high-purity water is continuously sprayed to the front face and the back face of the mask plate, and the scrubbing effect can be improved. And the water receiving plate can effectively reduce waste of the cleaning liquid. And the beaker moves downwards and outwards and does not approach / interfere with the movement path of the water receiving plate and the mechanical arm, so that the safety of operators is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of automated instruments, and in particular relates to a mask plate cleaning device. Background Art

[0002] In the field of mask plate cold processing, the polished mask plate needs to be cleaned. Due to the application of mask plates in the semiconductor field, the surface quality of the product needs to reach ultra-high standards. Scratches, dirt, pits and other minor impacts will have a greater impact on the quality of the product. It is necessary to design and develop a set of advanced mask plate cleaning processes to achieve mass production of mask plates.

[0003] Chinese patent document publication number CN105652588A discloses a mask plate cleaning system, including: a clamp and a film protection device, the clamp is used to clamp the mask plate horizontally in mid-air; the film protection device is arranged below the clamp, used to shield the film set on the lower surface of the mask plate, and connected to the lower surface of the mask plate around the film to prevent the rinsing liquid used to rinse the mask plate from contaminating the film, reducing the dependence of the mask plate cleaning process on workers, improving the yield rate of mask plate production, and providing guarantees for the mechanization and scale of the mask plate cleaning process.

[0004] In the aforementioned patent solution, to avoid scratches on the mask caused by uneven manual scrubbing, the mask is cleaned by flushing. However, this cleaning effect is not guaranteed. Stubborn residues may remain on the mask that cannot be removed by flushing. In addition, fine impurities may remain, and the impact force of the water flow cannot move these fine impurities and therefore cannot remove them. Therefore, the aforementioned patent solution cannot meet actual usage requirements to a certain extent. Utility Model Content

[0005] In order to overcome the existing technical problems of manual scrubbing of the mask plate, which may cause scratches or pits due to uneven force, and the cleaning effect cannot be guaranteed due to human factors, and the use of rinsing cannot remove stubborn stains and fine impurities, one object of the utility model is to provide a mask plate scrubbing device that uses a robotic arm to simulate manual scrubbing, so that a sponge is dipped in cleaning liquid in a beaker to clean the mask plate, and a water receiving plate is provided above the beaker to prevent spillage of the cleaning liquid. At the same time, a movable base for longitudinally moving the beaker is provided to prevent interference with the movement path of the robotic arm during beaker replacement or liquid replenishment.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a mask plate scrubbing device, comprising an inclined plate, which is inclinedly arranged on a frame; a water collecting trough, which is arranged on the side of the inclined plate with a lower height; a robotic arm, which is arranged on the side of the inclined plate with a higher height; a placing table, which is arranged at the bottom of the water collecting trough, and the mask plate is inclinedly arranged on the side of the placing table facing the robotic arm; a sponge, which is arranged at the end of the moving mechanism of the robotic arm; wherein, at least one movable seat for placing a beaker is provided on the inclined plate, the beaker contains cleaning liquid, and the movable seat is longitudinally slidably connected to the inclined plate; a water receiving plate is inclinedly arranged between the beaker and the water collecting trough, and the lower end of the water receiving plate is inclined to enter the beaker.

[0007] The robotic arm simulates manual scrubbing of the mask. When the sponge dips into the cleaning liquid in the beaker, the liquid's tension causes a significant amount of liquid to flow out as the sponge leaves the beaker. Waiting for the cleaning liquid to initially drain out before the robotic arm continues scrubbing reduces efficiency. If the cleaning liquid doesn't drain out completely, it will escape onto the inclined plate, resulting in significant waste and failing to meet workshop hygiene standards.

[0008] The water receiving plate is positioned between the beaker and the placement table along the way. It can catch the cleaning liquid that flows out during the movement of the sponge and direct it back into the beaker, improving work efficiency and reducing cleaning liquid waste. At the same time, when replenishing cleaning liquid to the beaker or replacing the beaker, the beaker moves downward to perform the corresponding operation, avoiding interference with the robotic arm above and ensuring the continuous scrubbing process.

[0009] The lower end of the water receiving plate extends into the beaker, ensuring the water receiving effect. When the beaker moves upward for replacement, the water receiving plate does not need to be moved.

[0010] Specifically, at least one four-bar linkage is provided between the movable seat and the inclined plate; the four-bar linkage includes two parallel support rods, the two ends of which are rotatably connected to the movable seat and the inclined plate respectively; the upper end surface of the movable seat is always parallel to the upper end surface of the inclined plate; the upper end of the inclined plate is longitudinally slidably connected to a stop column, and the stop column can selectively limit the rotation of the support rod.

[0011] Specifically, a protrusion is provided on the outer wall of one end of the support rod close to the inclined plate; an arc surface is provided on one end of the protrusion facing the stop column, and the arc surface can selectively drive the stop column to slide upward.

[0012] The movable base swings downward and outward, away from the robotic arm when replacing or refilling beakers, improving operator safety while also ensuring the scrubbing process does not damage the mask. When the movable base returns to its original position, the stopper slides downward under gravity, preventing the protrusion from rotating. This simple structure facilitates manual operation.

[0013] Furthermore, a front nozzle is provided on the water collection tank, and the front nozzle sprays ultrapure water toward the side of the mask plate facing the robotic arm; a back nozzle is provided on the water collection tank, and the back nozzle sprays ultrapure water toward the side of the mask plate away from the robotic arm.

[0014] Specifically, a tee is provided at the upper end of the water collection tank; one end of the tee is connected to the front nozzle, one end is connected to the back nozzle, and one end is connected to the water inlet pipe; the water spraying pressure of the front nozzle is greater than the water spraying pressure of the back nozzle.

[0015] During the scrubbing process, continuously spraying ultrapure water on the front of the mask plate helps to improve the scrubbing effect; continuously spraying ultrapure water on the back can prevent the wastewater scrubbed from the front from flowing to the back, while also moisturizing the mask plate and improving the scrubbing effect.

[0016] Furthermore, a long arm is provided at the end of the motion mechanism of the robotic arm; a cannula is provided at the end of the long arm along the length direction; a column is detachably connected to the inside of the cannula; and the sponge is provided at the end of the column.

[0017] Specifically, a fixed pressure plate is provided at the end of the plug post; a movable pressure plate is detachably connected to the fixed pressure plate; and two opposite sides of the sponge are simultaneously fixed between the fixed pressure plate and the movable pressure plate.

[0018] Specifically, a water-blocking cap is provided between the end of the motion mechanism of the robotic arm and the long arm; the water-blocking cap is conical, with the tip of the cone facing toward the long arm.

[0019] The long arm facilitates the sponge to extend into the bottom of the beaker; the cannula and the plug column are easy to disassemble for replacing the sponge; the water retaining cap prevents ultrapure water from entering the motion joint connection of the robotic arm, thereby increasing the service life.

[0020] Furthermore, a plurality of limiting columns are evenly arranged on the side of the placement platform facing the robotic arm; the limiting columns enclose a U-shaped placement area with an open upper end; the edge of the placement area is provided with a chamfer; the edge of the mask plate is pressed against the chamfer.

[0021] Specifically, the placement area is arranged through the placement table; and a plurality of longitudinally penetrating water guide grooves are provided on the inner bottom of the placement area.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] 1. Use a robotic arm to simulate manual scrubbing, and use the torque control of the robotic arm to adjust the pressure on the mask surface in real time, which helps to improve the scrubbing effect and work efficiency.

[0024] 2. During the scrubbing process, high-purity water is continuously sprayed onto the front and back of the mask plate, which can moisturize the mask plate and wash away the stains, helping to improve the scrubbing effect.

[0025] 3. A water receiving plate is set between the beaker and the water collection tank to collect the cleaning liquid dripping from the sponge, which can effectively reduce the waste of cleaning liquid and ensure continuous and efficient scrubbing operations.

[0026] 4. When replacing or refilling the beaker, the beaker moves downward and outward without approaching or interfering with the movement path of the water receiving plate and the robotic arm, thereby improving the safety of the operator. The stop column automatically locks the position of the moving seat by gravity, with a simple structure and easy operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural diagram of the utility model;

[0028] Figure 2 This is a schematic diagram of the structure of the scrubbing process of the present invention;

[0029] Figure 3 This is a structural diagram of the placement table of the utility model;

[0030] Figure 4 This is a schematic structural diagram of the long arm and sponge of the utility model;

[0031] Figure 5 、 Figure 6 It is a structural schematic diagram of the beaker replacement or liquid replenishment process of the utility model.

[0032] In the figure: 11, frame; 12, Forma wheel; 13, inclined plate; 131, longitudinal slide; 14, water collecting trough; 2, mask plate; 31, front nozzle; 32, back nozzle; 33, tee pipe; 34, water inlet pipe; 41, placement table; 42, limiting column; 43, water guide trough; 44, placement area; 441, chamfer; 51, robotic arm; 52, long arm; 521, intubation; 53, water retaining cap; 54, plug column; 541, fixed pressure plate; 55, movable pressure plate; 56, sponge; 61, movable seat; 611, limiting ring; 612, rotating seat; 62, beaker; 63, water collecting plate; 64, support rod; 641, bump; 642, arc surface; 65, stop column; 651, cross bar. DETAILED DESCRIPTION

[0033] Below, the present invention is further described in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0034] In the description of the present invention, it should be noted that, for directional words, such as the terms "center", "horizontal", "longitudinal", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and so on, indicating directions and positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and cannot be understood as limiting the specific scope of protection of the present invention.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Therefore, the terms "first" and "second" may explicitly or implicitly refer to one or more of these features. In the description of this utility model, "several" means two or more, unless otherwise specifically defined.

[0036] In this utility model, unless otherwise specified or limited, terms such as "disposed" and "installed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection; direct connection, connection through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on specific circumstances.

[0037] See also Figures 1-6 A mask plate scrubbing equipment includes a frame 11, an inclined plate 13 obliquely arranged in the middle of the frame 11, a water collection tank 14 arranged at the lower end of the inclined plate 13, a robotic arm 51 arranged at the upper end of the inclined plate 13, and a placement table 41 arranged at the bottom of the water collection tank 14; the robotic arm 51 is a six-axis robotic arm; four Forma wheels 12 are arranged near the four corners at the lower end of the frame 11.

[0038] A hollowed-out placement area 44 is provided on the side of the placement platform 41 facing the robotic arm 51. Seven limiting posts 42 are provided on the placement platform 41, three of which are located at the bottom of the placement area 44, two on the left side of the placement area 44, and two on the right side of the placement area 44. The edges of the placement area 44 are provided with chamfers 441, against which the edges of the mask plate 2 abut. Four longitudinal water guide grooves 43 are provided on the inner bottom of the placement area 44.

[0039] The end of the motion mechanism of the robotic arm 51 is provided with a water-blocking cap 53, a long arm 52, a column 54, a movable pressure plate 55, and a sponge 56 in sequence; the long arm 52 is provided with a tube 521 along the length direction toward a point of the column 54; the column 54 is detachably slidably connected in the tube 521; two butterfly screws are provided on the long arm 52; the butterfly screws pass through the long arm 52 and the column 54.

[0040] A fixed pressure plate 541 is provided at one end of the plug post 54 facing the sponge 56 ; the fixed pressure plate 541 is detachably connected to the movable pressure plate 55 by screws; and the two opposite sides of the sponge 56 are simultaneously fixed between the fixed pressure plate 541 and the movable pressure plate 55 .

[0041] The water retaining cap 53 is conical, with the tip of the cone facing the long arm 52 .

[0042] Two cleaning liquid assemblies are disposed between the robotic arm 51 and the water collection tank 14. These assemblies include a movable base 61 disposed on the inclined plate 13 and two four-bar linkages symmetrically disposed on either side of the movable base 61. A limit ring 611 is disposed at the center of the upper end of the movable base 61. A beaker 62 is disposed within the limit ring 611. The beaker 62 contains cleaning liquid. A water receiving plate 63 is disposed obliquely between the beaker 62 and the water collection tank 14. The lower end of the water receiving plate 63 extends obliquely into the beaker 62.

[0043] The four-bar linkage includes two parallel support rods 64, the two ends of which are rotatably connected to the moving seat 61 and the inclined plate 13 respectively; the upper end surface of the moving seat 61 is always parallel to the upper end surface 13 of the inclined plate; a protrusion 641 is provided on the outer wall of one end of the support rod 64 close to the inclined plate 13; the upper end of the inclined plate 13 is longitudinally slidably connected to a stop column 65 for limiting the movement of the protrusion 641; the lower end of the stop column 65 is horizontally provided with a cross bar 651 for blocking the movement of the protrusion 641; a longitudinal sliding groove 131 is longitudinally provided on the inclined plate 13 and is slidably connected to the cross bar 651; the protrusion 641 is provided with an arc surface 642 at one end facing the cross bar 651, and the arc surface 642 can selectively drive the cross bar 651 to slide upward.

[0044] Two rotating seats 612 of different heights are provided at the lower end of the movable seat 61; the rotating seats 612 are rotatably connected to the support rods 64; the rotating seats 612 enable the two support rods 64 to be at different heights and staggered with each other.

[0045] Two front nozzles 31 are provided on the water collection tank 14, and the front nozzles 31 spray ultrapure water toward the side of the mask plate 2 facing the robotic arm 51, and the front nozzles 31 are 6-point 3-4 flat head nozzles; a back nozzle 32 is provided on the water collection tank 14, and the back nozzle 32 sprays ultrapure water toward the side of the mask plate 2 away from the robotic arm 51, and the back nozzle 32 is 2-point 1-4 flat head nozzle.

[0046] A plurality of mounting seats are provided on the side of the upper end of the water collecting tank 14 away from the robotic arm 51; a three-way pipe 33 is provided on the mounting seat; one end of the three-way pipe 33 is connected to the front nozzle 31, one end is connected to the back nozzle 32, and one end is connected to the water inlet pipe 34; the water spraying pressure of the front nozzle 31 is greater than the water spraying pressure of the back nozzle 32; a drain outlet is provided at the lowest point in the water collecting tank 14.

[0047] The robotic arm 51 simulates a manual scrubbing process using an automated program. After dipping a sponge 56 into the cleaning solution in the beaker 62, it scrubs the mask 2. Simultaneously, the front nozzle 31 and the back nozzle 32 spray water onto the mask 2. During this process, when the sponge 56 leaves the beaker, excess cleaning solution flows onto the water receiving plate 63 during its movement and is directed back into the beaker 62.

[0048] In order to avoid interference with the movement path of the robotic arm 51 during the replacement or rehydration of the beaker 62, and also to avoid interference with the water receiving plate 63 extending into the beaker 62, pull up the stop post 65 so that the cross bar 651 no longer contacts the protrusion 641, rotate the movable seat 61 downward and outward, away from the robotic arm 51, release the stop post 65, and rehydrate or replace the beaker 62. Then rotate the movable seat 61 back to its original position, and the arc surface 642 drives the cross bar 651 to move upward. When the movable seat 61 is flush with the upper end of the inclined plate 13, the arc surface 642 does not contact the cross bar 651. The cross bar 651 slides downward under the action of gravity until it contacts the protrusion 641, preventing the movable seat 61 from rotating downward.

[0049] The above description is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any changes or modifications made by any technician in this field within the scope of the present invention are included in the patent scope of the present invention.

Claims

1. A mask plate scrubbing device, characterized in that: Including An inclined plate, the inclined plate being obliquely arranged on the frame; A water collecting trough, the water collecting trough being arranged on a side of the inclined plate with a lower height; A mechanical arm, the mechanical arm being arranged on a side of the inclined plate with a higher height; A placement table, the placement table is arranged at the bottom of the water collection tank, and the mask plate is arranged obliquely on the side of the placement table facing the mechanical arm; a sponge, the sponge being arranged at the end of the motion mechanism of the robotic arm; Among them, at least one movable seat for placing a beaker is provided on the inclined plate, the beaker contains cleaning liquid, and the movable seat is longitudinally slidably connected to the inclined plate; a water receiving plate is obliquely provided between the beaker and the water collecting trough, and the lower end of the water receiving plate is inclined to enter the beaker.

2. The scrubbing device according to claim 1, wherein: At least one four-bar linkage is provided between the movable seat and the inclined plate; the four-bar linkage includes two parallel support rods, the two ends of which are rotatably connected to the movable seat and the inclined plate respectively; the upper end surface of the movable seat is always parallel to the upper end surface of the inclined plate; a stop column is longitudinally slidably connected to the upper end of the inclined plate, and the stop column can selectively limit the rotation of the support rod.

3. The scrubbing device according to claim 2, wherein: A protrusion is provided on the outer wall of one end of the support rod close to the inclined plate; an arc surface is provided on one end of the protrusion facing the stop column, and the arc surface can selectively drive the stop column to slide upward.

4. The scrubbing device according to any one of claims 1 to 3, characterized in that: The water collection tank is provided with a front nozzle, and the front nozzle sprays ultrapure water toward the side of the mask plate facing the robotic arm; the water collection tank is provided with a back nozzle, and the back nozzle sprays ultrapure water toward the side of the mask plate away from the robotic arm.

5. The scrubbing device according to claim 4, wherein: A tee is provided at the upper end of the water collecting tank; one end of the tee is connected to the front nozzle, one end is connected to the back nozzle, and one end is connected to the water inlet pipe; the water spraying pressure of the front nozzle is greater than the water spraying pressure of the back nozzle.

6. The scrubbing device according to any one of claims 1 to 3, characterized in that: A long arm is provided at the end of the motion mechanism of the robotic arm; a cannula is provided at the end of the long arm along the length direction; a column is detachably connected to the inside of the cannula; and the sponge is provided at the end of the column.

7. The scrubbing device according to claim 6, wherein: A fixed pressing plate is provided at the end of the plug post; a movable pressing plate is detachably connected to the fixed pressing plate; and two opposite sides of the sponge are simultaneously fixed between the fixed pressing plate and the movable pressing plate.

8. The scrubbing device according to claim 6, wherein: A water-blocking cap is provided between the end of the motion mechanism of the robotic arm and the long arm; the water-blocking cap is conical, with the tip of the cone facing toward the long arm.

9. The scrubbing device according to any one of claims 1 to 3, characterized in that: A plurality of limiting columns are evenly arranged on the side of the placement platform facing the robotic arm; the limiting columns enclose a U-shaped placement area with an open upper end; the edge of the placement area is provided with a chamfer; the edge of the mask plate is pressed against the chamfer.

10. The scrubbing device according to claim 9, wherein: The placement area is arranged through the placement table; and a plurality of longitudinally penetrating water guide grooves are arranged on the inner bottom of the placement area.

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