Shockproof structure of double-sided polishing equipment

Abstract

The utility model discloses a shockproof structure of double-sided polishing equipment, which comprises a lower disc bearing seat, a shaft sleeve, a transmission pin and a bearing seat base, a rotating shaft penetrates through the shaft sleeve, the upper end face of the rotating shaft is fixedly connected with a transmission gland, the lower disc bearing seat is positioned at the upper part of the transmission gland, and the transmission pin penetrates through the lower disc bearing seat and the transmission gland. A shockproof gasket is arranged between the transmission pin and the lower disc bearing seat, the shaft sleeve penetrates through the middle of the bearing seat base, the bearing seat base is fixedly connected with the shaft sleeve, the bearing seat base is located below the lower disc bearing seat, multiple circles of grooves are formed in the upper surface of the bearing seat base, multiple circles of protruding walls are arranged on the lower surface of the lower disc bearing seat, and each protruding wall is embedded in the corresponding groove opposite to the protruding wall. A sliding ring is fixedly connected to one circle of convex wall, an oil groove is formed in the sliding ring, oil is contained in the groove of the bearing base, and the oil makes contact with the convex wall and the side portion and the bottom of the sliding ring. According to the utility model, the lower disc bearing seat is flexibly connected with the transmission mechanism through the arranged oil and anti-collision gasket, so that the lower disc base is prevented from being influenced by vibration of the rotating shaft.

Description

Technical Field

[0001] The utility model relates to the semiconductor / optical plane thinning and polishing industry, in particular to a shockproof structure of double-sided polishing equipment. Background Art

[0002] Surface grinding machines are mainly used for double-sided grinding of crystals or other mechanical parts with two parallel surfaces, especially for the processing of thin and brittle materials, such as LED sapphire substrates, optical glass wafers, quartz wafers, silicon wafers, various wafers, molds, light guide plates, optical probe joints and other materials.

[0003] Surface grinders are categorized as single-side and double-side grinders. The double-side grinder operates on the principle that the upper and lower polishing plates rotate in opposite directions, causing the workpiece to undergo a planetary motion within the carrier, both orbiting and rotating. The double-side grinder's mechanism includes two polishing plates, a planetary wheel, four motors, a sun gear, and a trimming mechanism. While its construction is more complex than single-side grinding, a double-side grinder can achieve double-sided grinding efficiency. The development of this type of grinder has significantly improved production efficiency across many industries, with the optical glass industry using silicon wafers, sapphire substrates, and epitaxial wafers, among other applications.

[0004] The lower polishing plate of the existing double-sided grinder rotates through a hard connection of screws / pins or keys. Vibration in the transmission part will be transmitted to the lower polishing plate through these hard connections. In addition, the rotation of the lower polishing plate of conventional equipment uses mechanical bearings, which will also transmit vibration. The processed products are thin and brittle. The vibration of the lower polishing plate will cause damage to the processed products, resulting in a significant increase in the defective rate and affecting the performance of the equipment. Utility Model Content

[0005] The utility model aims to provide a shockproof structure for double-sided polishing equipment, which has the advantage of preventing the vibration of the transmission part from being transmitted to the lower polishing plate through the connection.

[0006] The above technical objectives of the present invention are achieved through the following technical solutions:

[0007] The utility model provides a double -sided polishing equipment shock -proof structure, including lower disc bearing, transmission gland, shaft sleeve and pivot, the inner part of shaft sleeve is respectively embedded with bearing near the opening of both ends, pivot passes through the inner ring of shaft sleeve and two bearings, transmission gland fixedly connected on the upper end surface of pivot, lower disc bearing is located transmission gland upper portion, the surface of lower disc bearing and the surface of transmission gland are set up a circle pin hole respectively, and the pin hole of lower disc bearing and the pin hole of transmission gland are one -to -one each other alignment, drive pin is worn in the pin hole of mutual alignment of lower disc bearing and transmission gland, the pin hole of lower disc bearing is embedded with shock pad, drive pin passes through shock pad, still include bearing base, the middle part of bearing base is set up round hole, shaft sleeve passes through the round hole of bearing base, bearing base is fixedly connected with shaft sleeve, bearing base is located lower disc bearing below, the side of bearing base towards lower disc bearing is set up a plurality of recesses, the lower surface of lower disc bearing is set up a plurality of with the recess of bearing base opposite convex wall, every convex wall is embedded in the recess of bearing base opposite with it respectively, one of the circle convex wall is fixedly connected with sliding ring, and sliding ring is embedded in the recess opposite with the convex wall of being located, and sliding ring is set up oil groove, the recess of bearing base contains lubricating oil, and lubricating oil is contacted with the convex wall in recess and the side portion and bottom of sliding ring.

[0008] Adopt above technical scheme, lubricating oil flows into the recess of bearing base where it is located through the oil groove of sliding ring, when the recess is full of oil, the oil will overflow and flow into other recesses, so that every recess contains oil, and then the convex wall of the bottom of lower disc bearing is contacted with lubricating oil instead of bearing base directly, when the pivot rotates relative to shaft sleeve, the bearing between pivot and shaft sleeve reduces the friction when pivot rotates, the rotating pivot drives drive pin to rotate, and drive pin produces force to the inner wall of pin hole of lower disc bearing, so as to drive lower disc bearing to rotate, and lower disc bearing drives the convex wall at the bottom to rotate in the recess of bearing base, because the recess contains lubricating oil, so the friction when convex wall rotates is small, that is, the friction when lower disc bearing rotates is small, bearing base supports lower disc bearing through the sliding ring contacted with its surface, so that lower disc bearing rotates more stably, and the recess where sliding ring is located contains lubricating oil, so the friction between the bottom of sliding ring and the surface of lower disc bearing is small, so that the resistance when lower disc bearing rotates is small, when shaft sleeve is shocked by external force, shaft sleeve drives bearing base to vibrate, and simultaneously shaft sleeve drives pivot to vibrate through bearing, and because there is lubricating oil between bearing base and lower disc bearing, so that bearing base and lower disc bearing form soft connection, which prevents bearing base from driving lower disc base to vibrate, and pivot drives drive pin to vibrate, and the shock -proof rubber pad between drive pin and lower disc bearing buffers the vibration of drive pin, which also prevents drive pin from driving lower disc base to vibrate.

[0009] Preferably, the bottom of sliding ring is fixedly connected with wear -resistant sheet, and the wear -resistant sheet is contacted with the bottom of recess.

[0010] The above technical solution is adopted to prevent the friction between the sliding ring and the bearing base from causing damage to both.

[0011] Preferably, the shaft sleeve includes a main shaft support and a lower plate shaft seat, the upper and lower end surfaces of the lower plate shaft seat are respectively provided with steps, the end of the main shaft support is located on the step of one end surface of the lower plate shaft seat, the main shaft support and the bottom surface of the step where it is located are respectively provided with threaded holes, the threaded holes of the main shaft support and the threaded holes on the bottom surface of the step are aligned with each other one by one, the threaded holes of the main shaft support and the threaded holes of the step aligned with it are threadedly connected with bolts, the lower plate shaft seat and the main shaft support are fixed together by the threaded bolts, and the two bearings are respectively embedded in the lower plate shaft seat and the end openings of the main shaft support.

[0012] By adopting the above technical solution, the lower plate bearing and the main shaft support are fixed together by bolts.

[0013] Preferably, a step is provided at the bottom of the bearing base near the circular hole thereof, the step of the bearing base contacts the step of the upper end face of the lower plate shaft seat, and a bolt passes through the contact step of the bearing base and the lower plate shaft seat to fix the two together.

[0014] By adopting the above technical solution, the bolts can be unscrewed, the two can be separated, and both can be inspected.

[0015] Preferably, the contact surface between the transmission gland and the rotating shaft is penetrated by a bolt, and the bolt is threadedly connected to the two.

[0016] By adopting the above technical solution, the lower plate support is connected to the rotating shaft through the transmission pressure cover, thereby increasing the stability of the installation of the lower plate support.

[0017] Preferably, the sliding ring is fixed to the bottom of the lower plate support by bolts.

[0018] By adopting the above technical solution, the bolts can be unscrewed, the sliding ring and the lower plate bearing can be separated, and both can be inspected and repaired.

[0019] Preferably, a reinforcing bar is integrally formed on the bottom surface of the support base.

[0020] The above technical solution is used to increase the force effect of the bearing base.

[0021] Preferably, a sealing cover is fixedly connected to the opening at the bottom end of the main shaft support by bolts.

[0022] By adopting the above technical solution, the sealing performance of the shaft sleeve is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is an overall schematic diagram of an embodiment;

[0024] Figure 2Front view of the embodiment;

[0025] Figure 3 Top view of the embodiment;

[0026] Figure 4 Schematic view of the bottom of the embodiment;

[0027] Figure 5 Schematic view of the explosion of the embodiment;

[0028] Figure 6 Schematic view of the section along A-A direction;

[0029] Figure 7 Schematic view of the connection between the lower disc seat and the rotating shaft;

[0030] Figure 8 Schematic view of the connection between the lower disc seat and the seat base;

[0031] Figure 9 Bottom view of the lower disc seat;

[0032] Figure 10 Schematic view of the whole sliding ring;

[0033] Figure 11 Enlarged view of A.

[0034] Reference signs: 1, lower disc seat; 2, transmission cover; 3, main shaft support; 4, lower disc shaft seat; 5, rotating shaft; 6, bearing; 7, transmission pin; 8, shockproof washer; 9, seat base; 10, recess; 11, convex wall; 12, sliding ring; 13, oil groove; 14, wear-resistant piece; 15, reinforcing rod; 16, sealing cover. DETAILED DESCRIPTION

[0035] The following description is only the preferred embodiment of the present application, and the protection scope is not limited to the embodiment only, and any technical solution falling within the idea of the present application should fall within the protection scope of the present application. It should be noted that, for ordinary skilled in the art, some improvements and refinements without departing from the principle of the present application should also be considered as the protection scope of the present application.

[0036] See Figures 1 to 7 , Figure 11, a double-sided polishing equipment shockproof structure, including a lower plate bearing 1, a transmission pressure cover 2, a bearing base 9, a sleeve and a rotating shaft 5, the sleeve includes a spindle support 3 and a lower plate shaft seat 4, the upper and lower end surfaces of the lower plate shaft seat 4 are respectively provided with steps, the end of the spindle support 3 is located on the step of the lower end surface of the lower plate shaft seat 4, the spindle support 3 and the bottom surface of the step where it is located are respectively provided with threaded holes, the threaded holes of the spindle support 3 and the threaded holes on the bottom surface of the step are aligned with each other one by one, the threaded holes of the spindle support 3 and the threaded holes of the steps aligned with them are threadedly connected with bolts, and the lower plate shaft seat 4 and the spindle support 3 are fixed together by the threaded bolts, and the end openings of the lower plate shaft seat 4 and the spindle support 3 are respectively embedded with bearings 6, and the bearings 6 are fitted with the sleeve by interference Fixed, the bottom opening of the main shaft support 3 is fixedly connected with a sealing cover 16 by bolts, the rotating shaft 5 passes through the sleeve and the inner rings of the two bearings 6, and the rotating shaft 5 is connected to the bearing 6 by an interference fit, and the transmission pressure cover 2 is located on the upper end surface of the rotating shaft 5. By opening threaded holes on the transmission pressure cover 2 and the rotating shaft 5, the transmission pressure cover 2 and the rotating shaft 5 are fixed together by screwing bolts into the threaded holes. The lower plate bearing 1 is located on the upper part of the transmission pressure cover 2, and the surface of the lower plate bearing 1 and the surface of the transmission pressure cover 2 are respectively provided with a circle of pin holes, and the pin holes of the lower plate bearing 1 and the pin holes of the transmission pressure cover 2 are aligned with each other one by one, and the pin holes of the lower plate bearing 1 and the transmission pressure cover 2 that are aligned with each other are penetrated by a transmission pin 7, and the pin hole of the lower plate bearing 1 is embedded with a shock-proof washer 8, and the transmission pin 7 passes through the shock-proof washer 8.

[0037] See Figure 4 — Figure 10 , also includes a bearing base 9, a circular hole is opened in the middle of the bearing base 9, a step is set near the bottom of the bearing base 9 near the circular hole, and a reinforcing bar 15 is integrally formed on the bottom surface of the bearing base 9. The shaft sleeve passes through the circular hole of the bearing base 9, and the step of the bearing base 9 contacts the step on the upper surface of the lower plate shaft seat 4. The bolt passes through the step where the bearing base 9 and the lower plate shaft seat 4 contact the two together. The bearing base 9 is located below the lower plate bearing 1, and the bearing base 9 is provided with a plurality of grooves 10 on the side facing the lower plate bearing 1. The lower plate bearing 1 The lower surface is provided with multiple circles of convex walls 11 opposite to the groove 10 of the bearing base 9, and each convex wall 11 is respectively embedded in the groove 10 of the bearing base 9 opposite thereto. A sliding ring 12 is fixedly connected to one circle of convex walls 11 by bolts, and the sliding ring 12 is embedded in the groove 10 opposite to the convex wall 11 where it is located. The sliding ring 12 is provided with an oil groove 13, and the wear-resistant sheet 14 is in contact with the bottom of the groove 10. The groove 10 of the bearing base 9 is filled with lubricating oil, and the lubricating oil is in contact with the convex wall 11 in the groove 10 and the side and bottom of the sliding ring 12.

[0038] Working principle: The lower polishing plate is fixed on the lower plate support 1, and a carrier is placed on the lower polishing plate, and the product is placed in the carrier. The lubricating oil flows into the groove 10 of the support base 9 where it is located through the oil groove 13 of the sliding ring 12. When the oil in the groove 10 is full, the oil will overflow and flow into other grooves 10, so that each groove 10 is filled with oil, thereby separating the lower plate support 1 from the support base 9. The convex wall 11 at the bottom of the lower plate support 1 is in contact with the lubricating oil but not in direct contact with the support base 9; then the motor or other drive The driving mechanism drives the rotating shaft 5 to rotate relative to the shaft sleeve. The bearing 6 between the rotating shaft 5 and the shaft sleeve reduces the friction suffered by the rotating shaft 5 when rotating. The rotating rotating shaft 5 drives the transmission pin 7 to rotate. The transmission pin 7 generates a force on the inner wall of the pin hole of the lower plate bearing 1, thereby driving the lower plate bearing 1 to rotate. The lower plate bearing 1 drives the convex wall 11 at its bottom to rotate in the groove 10 of the bearing base 9. Since the groove 10 is filled with lubricating oil, the convex wall 11 is less subject to friction when rotating, and the resistance suffered by the lower plate bearing 1 when rotating is small. The bearing base 9 supports the lower plate bearing 1 through the sliding ring 12 in contact with its surface, making the bearing base 9 rotation more stable. The groove 10 where the sliding ring 12 is located is filled with lubricating oil. The friction between the bottom surface of the sliding ring 12 and the surface of the lower plate bearing 1 is small, thereby reducing the resistance suffered by the lower plate bearing 1 when rotating.

[0039] When the shaft sleeve is vibrated by external force, the shaft sleeve will drive the bearing base 9 to vibrate, and at the same time, it will drive the rotating shaft 5 to vibrate through the bearing 6. There is lubricating oil between the bearing base 9 and the lower plate bearing 1, so that a soft connection is formed between the bearing base 9 and the lower plate bearing 1, preventing the bearing base 9 from driving the lower plate base to vibrate; the rotating shaft 5 will drive the transmission pin 7 to vibrate, and the shock-proof rubber pad between the transmission pin 7 and the lower plate bearing 1 will buffer the vibration of the transmission pin 7 and also prevent the transmission pin 7 from driving the lower plate bearing 1 to vibrate. Therefore, the lower plate bearing 1 will not cause the lower polishing plate fixed thereto to vibrate, thereby avoiding damage to the product being ground due to the vibration of the lower polishing plate, increasing the defective rate of the product, and affecting the subsequent use of the product.

Claims

1. A double-sided polishing equipment shockproof structure, comprising a lower plate support (1), a transmission pressure cover (2), a sleeve and a rotating shaft (5), wherein the sleeve is respectively embedded with bearings (6) in the interior near the openings at both ends thereof, the rotating shaft (5) passes through the sleeve and the inner rings of the two bearings (6), the transmission pressure cover (2) is fixedly connected to the upper end surface of the rotating shaft (5), the lower plate support (1) is located on the upper part of the transmission pressure cover (2), the surface of the lower plate support (1) and the surface of the transmission pressure cover (2) are respectively provided with a circle of pin holes, and the pin holes of the lower plate support (1) and the pin holes of the transmission pressure cover (2) are aligned with each other one by one, and a transmission pin (7) is passed through the mutually aligned pin holes of the lower plate support (1) and the transmission pressure cover (2), characterized in that The pin hole of the lower plate bearing (1) is embedded with a shock-proof washer (8), and the transmission pin (7) passes through the shock-proof washer (8). The lower plate bearing (1) also includes a bearing base (9), a circular hole is opened in the middle of the bearing base (9), and the shaft sleeve passes through the circular hole of the bearing base (9). The bearing base (9) is fixedly connected to the shaft sleeve. The bearing base (9) is located below the lower plate bearing (1). The bearing base (9) is provided with multiple circles of grooves (10) on the side facing the lower plate bearing (1). The lower surface of the lower plate bearing (1) is provided with multiple circles of grooves (10) that are aligned with the grooves (10) of the bearing base (9). The invention relates to a pair of convex walls (11), each of which is respectively embedded in a groove (10) of a bearing base (9) opposite thereto, a sliding ring (12) is fixedly connected to one circle of the convex walls (11), the sliding ring (12) is embedded in the groove (10) opposite to the convex wall (11) where it is located, and an oil groove (13) is provided in the sliding ring (12). The groove (10) of the bearing base (9) is filled with lubricating oil, and the lubricating oil contacts the convex wall (11) in the groove (10) and the side and bottom of the sliding ring (12).

2. The anti-vibration structure of double-sided polishing equipment according to claim 1, characterized in that: The bottom surface of the sliding ring (12) is fixedly connected with a wear-resistant sheet (14), and the wear-resistant sheet (14) is in contact with the bottom of the groove (10).

3. The anti-vibration structure of a double-sided polishing equipment according to claim 1, characterized in that: The shaft sleeve comprises a main shaft support (3) and a lower plate shaft seat (4), the upper and lower end surfaces of the lower plate shaft seat (4) are respectively provided with steps, the end of the main shaft support (3) is located on the step of one end surface of the lower plate shaft seat (4), the main shaft support (3) and the bottom surface of the step where it is located are respectively provided with threaded holes, the threaded holes of the main shaft support (3) and the threaded holes on the bottom surface of the step are aligned with each other one by one, the threaded holes of the main shaft support (3) and the threaded holes of the step aligned with it are threadedly connected with bolts, and the lower plate shaft seat (4) and the main shaft support (3) are fixed together by the threaded bolts, and the two bearings (6) are respectively embedded in the end openings of the lower plate shaft seat (4) and the main shaft support (3).

4. A double-sided polishing equipment shockproof structure according to claim 1 or 3, characterized in that: The bottom of the bearing base (9) is provided with a step near its circular hole, and the step of the bearing base (9) contacts the step of the upper end face of the lower plate shaft seat (4). Bolts pass through the contacting step of the bearing base (9) and the lower plate shaft seat (4) to fix the two together.

5. The anti-vibration structure of double-sided polishing equipment according to claim 1, characterized in that: The contact surfaces of the transmission pressure cover (2) and the rotating shaft (5) are penetrated by bolts, and the bolts are threadedly connected to the two.

6. The anti-vibration structure of double-sided polishing equipment according to claim 1, characterized in that: The sliding ring (12) is fixed to the bottom of the lower plate support (1) by means of bolts.

7. The anti-vibration structure of double-sided polishing equipment according to claim 1, characterized in that: A reinforcing bar (15) is integrally formed on the bottom surface of the support base (9).

8. The anti-vibration structure of double-sided polishing equipment according to claim 3, characterized in that: A sealing cover (16) is fixedly connected to the bottom opening of the main shaft support (3) via bolts.

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