Automatic hanging device of single crystal furnace

Abstract

The utility model discloses an automatic material hanging device of a single crystal furnace, which comprises a first upper connecting piece, a second upper connecting piece arranged at the left side of the first upper connecting piece, a connecting rod arranged above the first upper connecting piece and the second upper connecting piece, and a rotating shaft arranged at the top of the connecting rod, self-locking structures are arranged at the bottoms of the first upper connecting piece and the second upper connecting piece, a lower connecting piece is arranged below the first upper connecting piece and the second upper connecting piece, a sliding rod is arranged in the middle of the lower connecting piece, a guiding head is arranged at the top of the sliding rod, clamping grooves are formed in the bottom of the guiding head, and the number of the clamping grooves is two. The clamping groove corresponds to the hook claw, the hook claw is arranged above the self-locking structure, the guide inclined plane is arranged at the bottom of the self-locking structure, the unhooking sliding block is arranged in the middle of the sliding rod, the charging barrel and the graphite chuck are connected through the self-locking hook structure, the reliability of a connecting piece is improved, the labor intensity and the labor cost are reduced, and automatic connection is achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to single crystal furnace related technical field, concretely relates to a single crystal furnace automatic material hanging device. BACKGROUND

[0002] The single crystal furnace automatic material hanging device is a device used in the single crystal growth process, and its main function is to suspend the crystal seeds or block crystal materials in the single crystal furnace into the melt in the furnace, and control the growth speed and direction of the crystal, so as to realize the single crystal growth process. This device usually includes a mechanical arm system and an automatic control system, which can automatically control the position, angle and speed of the crystal, ensure the stability and quality of the single crystal growth, and realize efficient single crystal growth process through the single crystal furnace automatic material hanging device, improve the production efficiency and product quality.

[0003] However, in the current production of Czochralski silicon process, the existing secondary feeding process uses threaded connection for the material hanging cylinder component, which has the risk of thread loosening and material cylinder falling, the material hanging personnel has to go up and down the three-step ladder frequently, which consumes a lot of physical strength, has low efficiency, high labor cost, and high safety risk of falling from high altitude. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a single crystal furnace automatic material hanging device to solve the problems of the existing production of Czochralski silicon process, the existing secondary feeding process, the threaded connection of the material hanging cylinder component, the risk of thread loosening and material cylinder falling, the high frequency of the material hanging personnel going up and down the three-step ladder, the large physical strength consumption, the low efficiency, the high labor cost, and the safety risk of falling from high altitude.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a single crystal furnace automatic material hanging device, comprising a first upper connecting piece;

[0006] The second upper connecting piece is arranged at the left side of the first upper connecting piece, and the connecting rod is arranged above the first upper connecting piece and the second upper connecting piece;

[0007] The connecting rod is arranged at the top of the connecting rod, the self-locking structure is arranged at the bottom of the first upper connecting piece and the second upper connecting piece, and the lower connecting piece is arranged below the first upper connecting piece and the second upper connecting piece.

[0008] Preferably, the slide rod is arranged at the middle position of the lower connecting piece, the guide head is arranged at the top of the slide rod, and the base is arranged at the bottom of the slide rod.

[0009] Preferably, the guide head is arranged at the left and right sides of the bottom of the guide head, and the guide head is arranged at the left and right sides of the bottom of the guide head.

[0010] Preferably, a hook claw is provided at an upper position of the self-locking structure, and a guiding inclined plane is provided at a bottom position of the self-locking structure.

[0011] Preferably, a decoupling slider is provided at the middle position of the slide rod, and a limiting member is provided at a position above the base.

[0012] Preferably, the bottom and top of the unhooking slider are arc-shaped structures, the top of the hook claw is configured as an arc-shaped structure, and the first upper connecting member and the second upper connecting member are rotationally connected via a top rotating shaft.

[0013] Preferably, the rotating shaft is a zirconium oxide high temperature resistant ceramic bearing, the first upper connecting member and the second upper connecting member are made of tungsten alloy, and the guiding inclined surface structure of the first upper connecting member and the second upper connecting member ensures that the positioning deviation is within 30 mm.

[0014] Compared with the prior art, the present invention provides an automatic loading device for a single crystal furnace, which has the following beneficial effects:

[0015] Through the setting of the rotating shaft, lower connecting part, sliding rod, guide head, slot, hook claw, guide slope, unhooking slider and limit, a self-locking hook structure is adopted to realize the connection between the barrel and the graphite chuck, which improves the reliability of the connecting parts, reduces labor intensity and labor costs, and realizes automatic connection. The connector adopts a guiding structure to reduce the concentricity level of the barrel and the chuck during connection, improves efficiency and feasibility of the process, avoids the risk of loosening and falling bolts in the current bolt connection solution, and adopts a self-unhooking slider to realize automatic separation of the barrel and the graphite chuck, providing a feasible solution for AGV automatic hanging. The upper connector adopts a sliding rod of reasonable length to reserve space for the barrel to handle abnormalities such as material jamming in the furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural diagram of the present utility model.

[0017] Figure 2 It is a structural schematic diagram of the upper connecting piece in the utility model.

[0018] Figure 3 It is a structural diagram of the hook in the utility model.

[0019] Figure 4 It is a structural schematic diagram of the decoupling in the utility model.

[0020] In the figure: 1. First upper connector; 2. Rotating shaft; 3. Second upper connector; 4. Self-locking structure; 5. Lower connector; 6. Base; 7. Unhooking slider; 8. Slot; 9. Connecting rod; 10. Guide head; 11. Sliding rod; 12. Hook; 13. Guide slope; 14. Limiting piece. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] The utility model provides a single crystal furnace automatic material hanging device as Figures 1-4 The utility model discloses a single crystal furnace automatic material hanging device, including first upper connecting piece 1,

[0023] The second upper connecting piece 3 is arranged at the left side of the first upper connecting piece 1, and the connecting rod 9 is arranged above the first upper connecting piece 1 and the second upper connecting piece 3.

[0024] The connecting rod 9 is arranged at the top of the first upper connecting piece 1 and the second upper connecting piece 3, the self-locking structure 4 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3, and the lower connecting piece 5 is arranged below the first upper connecting piece 1 and the second upper connecting piece 3.

[0025] The lower connecting piece 5 is arranged at the middle position of the first upper connecting piece 1 and the second upper connecting piece 3, the connecting rod 9 is arranged at the top of the first upper connecting piece 1 and the second upper connecting piece 3, and the self-locking structure 4 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0026] The lower connecting piece 5 is arranged at the middle position of the first upper connecting piece 1 and the second upper connecting piece 3, the connecting rod 9 is arranged at the top of the first upper connecting piece 1 and the second upper connecting piece 3, and the self-locking structure 4 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0027] The self-locking structure 4 is arranged above the first upper connecting piece 1 and the second upper connecting piece 3, and the guide slope 13 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0028] The self-locking structure 4 is arranged above the first upper connecting piece 1 and the second upper connecting piece 3, and the guide slope 13 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0029] The self-locking structure 4 is arranged above the first upper connecting piece 1 and the second upper connecting piece 3, and the guide slope 13 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0030] The self-locking structure 4 is arranged above the first upper connecting piece 1 and the second upper connecting piece 3, and the guide slope 13 is arranged at the bottom of the first upper connecting piece 1 and the second upper connecting piece 3.

[0031] In this embodiment, the specific implementation steps of the automatic material hanging device of the single crystal furnace, the material cylinder can be automatically transported to the lower part of the auxiliary chamber by using the AGV car, and automatic positioning is performed. After the furnace table receives the alignment signal sent by the AGV car, the upper connector starts to descend. The guide slope 13 structure of the upper connector ensures that the upper and lower connectors are reliably connected within a positioning deviation of 30mm. The upper connector gradually descends and contacts the guide head 10 of the lower connector 5. The hook claws 12 gradually separate, and after descending to the specified height, the hook claws 12 close. The upper connector is pulled into the self-locking slot 8 to realize self-locking connection. After the system confirms the position sensing signal again, the material cylinder is lifted, and at the same time the AGV material cylinder clamping arm is opened. After lifting is completed, the system executes the inherent re-throw process. After re-throwing is completed, the material cylinder is lifted and landed on the AGV car. After the clamping arm clamps the material cylinder, the upper connector continues to descend below the unhooking slider 7, and then it is pulled upward to contact the slot. The hook claws 12 continue to rise, and under the action of the guide surface below the unhooking slider 7, the hook claws 12 gradually open, realizing automatic unhooking and separation from the lower connector. The AGV transports the empty cylinder back to perform the charging operation.

[0032] As shown in Figures 1-4 The top position of the connecting rod 9 is provided with a rotating shaft 2. The bottom position of the first upper connecting piece 1 and the second upper connecting piece 3 is provided with a self-locking structure 4. The lower position of the first upper connecting piece 1 and the second upper connecting piece 3 is provided with a lower connecting piece 5. The middle position of the lower connecting piece 5 is provided with a sliding rod 11. The top position of the sliding rod 11 is provided with a guide head 10. The bottom position of the sliding rod 11 is provided with a base 6. The left and right sides of the bottom position of the guide head 10 are respectively provided with a slot 8. The slot 8 is arranged in an array of two. The slot 8 corresponds to the hook claw 12. The upper position of the self-locking structure 4 is provided with a hook claw 12. The bottom position of the self-locking structure 4 is provided with a guide slope 13. The middle position of the sliding rod 11 is provided with an unhooking slider 7. The upper position of the base 6 is provided with a limiting piece 14. The bottom and top positions of the unhooking slider 7 are arc-shaped structures. The top of the hook claw 12 is arc-shaped. The first upper connecting piece 1 and the second upper connecting piece 3 are rotatably connected through the top rotating shaft 2.

[0033] Preferably, the upper connector gradually descends to contact the lower connector 5 guide head 10, the hook claw 12 gradually separates, and after descending to a specified height, the hook claw 12 closes, the upper connector is pulled up and clamped into the self-locking slot 8 to achieve self-locking connection, and the upper connector continues to descend below the unhooking slider 7, and then is pulled up to push it upward to contact the slot, the hook claw 12 continues to rise, and under the action of the guide surface below the unhooking slider 7, the hook claw 12 gradually opens to achieve automatic unhooking and separation from the lower connector. Through the design of the self-locking structure 4 and the hook claw 12, it can be ensured that the connecting piece is stable and does not loosen during work, and the overall stability and safety are improved. The setting of the top rotating shaft 2 enables the first upper connecting piece 1 and the second upper connecting piece 3 to be connected through rotation, and the angle and position can be flexibly adjusted. The guide head 10 at the top of the slide rod 11 and the base 6 at the bottom can ensure accurate guidance of the connecting piece during movement, avoiding deviation from the track or shaking. The arc-shaped hook claw 12 and the unhooking slider 7 can reduce damage or scratches caused by sharp edges, protect the service life of equipment and parts, improve work efficiency, reduce the labor intensity of operators, and improve production efficiency.

[0034] As shown in Figures 1-4 The rotating shaft 2 is a zirconia high-temperature-resistant ceramic bearing, the first upper connecting piece 1 and the second upper connecting piece 3 are made of tungsten alloy, and the guide slope 13 structure of the first upper connecting piece 1 and the second upper connecting piece 3 ensures positioning deviation within 30 mm.

[0035] Optionally, the rotating shaft 2 adopts a zirconia high-temperature-resistant ceramic bearing, which has excellent high-temperature resistance and is suitable for stable work in a high-temperature environment for a long time. The first upper connecting piece 1 and the second upper connecting piece 3 are made of tungsten alloy, which has good wear resistance and can reduce wear of parts caused by long-term use. The structure of the guide slope 13 can ensure positioning deviation within 30 mm, ensure accurate positioning of the connecting piece during movement, avoid deviation from the track or inaccurate position, control the positioning deviation within 30 mm, effectively improve the stability and accuracy of the connecting piece, ensure the stability and reliability of the work effect, ensure stable operation of equipment and parts for a long time, prolong the service life, and reduce maintenance costs.

[0036] Finally, it should be noted that: the above only describes preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent replacements of some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An automatic material loading device for a single crystal furnace, comprising a first upper connecting member (1); A second upper connecting member (3) is provided at the left side of the first upper connecting member (1), and a connecting rod (9) is provided above the first upper connecting member (1) and the second upper connecting member (3); Its characteristics are: A rotating shaft (2) is provided at the top of the connecting rod (9), a self-locking structure (4) is provided at the bottom of the first upper connecting member (1) and the second upper connecting member (3), and a lower connecting member (5) is provided below the first upper connecting member (1) and the second upper connecting member (3).

2. The automatic loading device for a single crystal furnace according to claim 1, characterized in that: A slide rod (11) is provided at the middle position of the lower connecting member (5), a guide head (10) is provided at the top position of the slide rod (11), and a base (6) is provided at the bottom position of the slide rod (11).

3. The automatic loading device for a single crystal furnace according to claim 2, characterized in that: The guide head (10) is provided with card slots (8) at the left and right sides of the bottom, respectively. There are two card slots (8) in the array, and the card slots (8) correspond to the hook claws (12).

4. The automatic loading device for a single crystal furnace according to claim 3, characterized in that: A hook claw (12) is provided at the upper position of the self-locking structure (4), and a guide inclined surface (13) is provided at the bottom position of the self-locking structure (4).

5. The automatic loading device for a single crystal furnace according to claim 4, characterized in that: A decoupling slider (7) is provided at the middle position of the slide rod (11), and a limiting member (14) is provided at the upper position of the base (6).

6. The automatic loading device for a single crystal furnace according to claim 5, characterized in that: The bottom and top of the unhooking slider (7) are arc-shaped structures, the top of the hook claw (12) is configured as an arc-shaped structure, and the first upper connecting member (1) and the second upper connecting member (3) are rotationally connected via a top rotating shaft (2).

7. The automatic loading device for a single crystal furnace according to claim 1, characterized in that: The rotating shaft (2) is a zirconium oxide high-temperature resistant ceramic bearing, the first upper connecting piece (1) and the second upper connecting piece (3) are made of tungsten alloy, and the guide inclined surface (13) structure of the first upper connecting piece (1) and the second upper connecting piece (3) ensures that the positioning deviation is within 30 mm.

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