Self-adaptive optical fiber transmitter for etching machine end point detection system

Abstract

The utility model provides a self-adaptive optical fiber transmitter for an etching machine end point detection system, which relates to the field of etching machines and comprises an optical fiber body and two spacing adjusting assemblies. The two spacing adjusting assemblies are arranged at the two ends of the optical fiber body; the distance adjusting assembly comprises a fixing piece, a limiting piece and an elastic piece. The fixing piece is slidably fixed on the optical fiber body; the limiting piece is fixed at the end part of the optical fiber body; the fixing piece is located on the inner side of the limiting piece. The elastic piece is located between the fixing piece and the limiting piece. When the fixing piece and the terminal point detection system are fixed, the fixing piece extrudes the elastic piece, and the elastic piece pushes the limiting piece to move towards the light-transmitting medium window. According to the utility model, the problem that in the prior art, when an optical fiber is used for transmitting a light source between a light-transmitting medium window and a light source detection module, if a gap exists between the optical fiber and the light-transmitting medium window, the light source transmitted by the optical fiber cannot be accurately detected and focused, and the etching effect is finally influenced can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of etching machine especially relates to etching machine end point detection system uses the adaptive optical fiber transmission. BACKGROUND

[0002] The etching process adopted by the etching machine is divided into dry etching and wet etching, wherein the dry etching needs to adopt end point detection to monitor the etching process to reduce the over-etching of the underlying material due to the lack of good selection ratio of the underlying material.

[0003] The end point detection is realized by setting the light transmission medium window to detect and focus the light source generated in the etching cavity, and the light transmission medium window and the light source detection module transmit the light source through the optical fiber, for example, the patent with the patent application number 202223181804.5 discloses an etching end point detection system, which connects the light transmission medium window and the light source detection module through the optical fiber.

[0004] However, in the above-mentioned patent, when the optical fiber is used to transmit the light source between the light transmission medium window and the light source detection module, if there is a gap between the optical fiber and the light transmission medium window, the light source transmitted by the optical fiber cannot be accurately detected and focused, which ultimately affects the etching effect. UTILITY MODEL CONTENT

[0005] In view of the above-mentioned problems, the utility model provides an adaptive optical fiber transmission device for etching machine end point detection system, which can solve the problem that when the optical fiber is used to transmit the light source between the light transmission medium window and the light source detection module, if there is a gap between the optical fiber and the light transmission medium window, the light source transmitted by the optical fiber cannot be accurately detected and focused, which ultimately affects the etching effect, and realizes the accuracy of light source detection and focusing.

[0006] To achieve the above-mentioned purpose, the utility model adopts the technical scheme that:

[0007] The utility model provides an adaptive optical fiber transmission device for etching machine end point detection system, which comprises an optical fiber body and two interval adjusting components, and the two interval adjusting components are respectively arranged at both ends of the optical fiber body.

[0008] The distance adjusting assembly comprises a fixing member for fixing the optical fiber body with the end point detection system, a limiting member and an elastic member; if one end of the optical fiber body is fixed with the end point detection system and the other end of the optical fiber body is fixed with the light source detection module, one side of the optical fiber body fixed with the end point detection system or the light source detection module is regarded as an outer side, and the other side of the optical fiber body away from the end point detection system or the light source detection module is regarded as an inner side; the fixing member is slidably fixed on the optical fiber body; the limiting member is fixed on the end of the optical fiber body; the fixing member is located on the inner side of the limiting member; and the elastic member is located between the fixing member and the limiting member.

[0009] When the fixing member is fixed with the end point detection system, the fixing member extrudes the elastic member, and the elastic member pushes the limiting member to move towards the light-transmitting medium window.

[0010] The self-adaptive optical fiber transmitter for the end point detection system of the etching machine has the advantages that the fixing member is in the form of a cylinder; the first through hole is formed in the fixing member from the top to the bottom; the optical fiber body is sleeved in the fixing member through the first through hole; the thread is formed in the side wall of the fixing member; and the thread is located on the outer side of the fixing member.

[0011] The limiting member has a circular cross section; the second through hole is formed in the limiting member from the top to the bottom; the optical fiber body is sleeved in the limiting member through the second through hole; the top of the limiting member faces the outer side, and the bottom of the limiting member faces the inner side.

[0012] The elastic member is a spring; the optical fiber body is sleeved in the spring; the cross-sectional diameter of the spring is smaller than the diameter of the bottom of the limiting member; and the cross-sectional diameter of the spring is smaller than the diameter of the fixing member.

[0013] The self-adaptive optical fiber transmitter for the end point detection system of the etching machine has the advantage that the top plane of the limiting member is flush with the end surface of the optical fiber body.

[0014] The above technical solution has the following advantages or beneficial effects:

[0015] The utility model provides an adaptive optical fiber transmitter for an endpoint detection system of an etching machine, comprising an optical fiber body and two spacing adjustment components; spacing adjustment components are provided at both ends of the optical fiber body for adjusting the distance between the optical fiber body and the endpoint detection system or the light source detection module; further, the spacing adjustment component comprises a fixing part, a limiting part and an elastic part. When the optical fiber body is connected to the endpoint detection system, one end of the optical fiber body is kept against the light-transmitting medium window, and the fixing part is fixed to the endpoint detection system. Since the fixing part moves outward when it is fixed to the endpoint detection system, the fixing part will squeeze the elastic part between the fixing part and the limiting part, causing the elastic part to produce elastic deformation. When the fixing part is fixed to the endpoint detection system, the elastic part produces elastic deformation due to the fixing part remaining stationary. The force acts in the direction of the limiter, pushing the limiter toward the light-transmitting medium window. Due to the elastic force of the elastic member, the limiter has a thrust from the elastic member, and the limiter is fixed to the optical fiber body, so that the optical fiber body is subjected to the elastic force and is in close contact with the light-transmitting medium window; in the prior art, the optical fiber is only connected to the end point detection system or the light source detection module. If there is a gap when the optical fiber and the end point detection system are fixed, the light source transmitted by the optical fiber cannot be accurately detected and focused, which ultimately affects the etching effect. The above-mentioned spacing adjustment component can automatically adjust the distance between the optical fiber body and the light-transmitting medium window through the elastic member, so that the optical fiber body continues to press against the light-transmitting medium window, so that the optical fiber body is close to the light-transmitting medium window, and then the light source transmitted by the optical fiber body can be accurately detected and focused, thereby improving the etching effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention and its features, features, configurations, and advantages will become more apparent upon reading the detailed description of the following non-limiting embodiments with reference to the accompanying drawings. Like reference numerals indicate like parts throughout the drawings. The drawings are not drawn to scale, with emphasis placed on illustrating the subject matter of the present invention.

[0017] Figure 1 This is a structural diagram of an adaptive optical fiber transmitter for an etching machine endpoint detection system provided in Example 1 of the present utility model.

[0018] Figure 2 This is a schematic diagram of the connection between the optical fiber body and the endpoint detection system provided in Example 1 of the present utility model. DETAILED DESCRIPTION

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0020] Example 1:

[0021] like Figure 1As shown, the adaptive optical fiber transmitter for an end point detection system of an etching machine provided by Example 1 of the present invention includes an optical fiber body 1 and two spacing adjustment components 2; the two spacing adjustment components 2 are respectively arranged at both ends of the optical fiber body 1;

[0022] The spacing adjustment assembly 2 includes a fixing member 21, a limiting member 22, and an elastic member 23 for fixing the optical fiber body 1 to the endpoint detection system 3. If one end of the optical fiber body 1 is fixed to the endpoint detection system 3 and the other end of the optical fiber body 1 is fixed to the light source detection module, the side of the optical fiber body 1 fixed with the endpoint detection system 3 or the light source detection module is regarded as the outer side, and the side of the optical fiber body 1 away from the endpoint detection system 3 or the light source detection module is regarded as the inner side. The fixing member 21 is slidably fixed to the optical fiber body 1; the limiting member 22 is fixed to the end of the optical fiber body 1; the fixing member 21 is located on the inner side of the limiting member 22; and the elastic member 23 is located between the fixing member 21 and the limiting member 22.

[0023] When the fixing member 21 is fixed to the endpoint detection system 3 , the fixing member 21 presses the elastic member 23 , and the elastic member 23 pushes the limiting member 22 to move toward the light-transmitting medium window 31 .

[0024] When using the adaptive optical fiber transmitter for the end point detection system of the etching machine provided in Example 1 of the present invention, the two ends of the optical fiber body 1 are respectively connected to the end point detection system 3 and the light source detection module, such as the connection method disclosed in the patent of Chinese patent application No. 202223181804.5; when the optical fiber body 1 is connected to the end point detection system 3, as shown in FIG. Figure 2 As shown, the end face of the optical fiber body 1 is against the light-transmitting medium window 31, so that the optical fiber body 1 is in close contact with the light-transmitting medium window 31; further, the fixing members 21 at both ends of the optical fiber body 1 are respectively fixed to the interfaces of the end point detection system 3 and the light source detection module. When the fixing member 21 is fixed, the elastic member 23 is compressed, and the elastic member 23 generates elastic force to push the limiting member 22. The limiting member 22 drives the two ends of the optical fiber body 1 to move toward the end point detection system 3 and the light source detection module respectively, so that the two ends of the optical fiber body 1 are in close contact with the end point detection system 3 and the light source detection module respectively, so that the optical fiber body 1 can transmit light between the end point detection system 3 and the light source detection module.

[0025] The adaptive optical fiber transmitter for the endpoint detection system of the etching machine provided in Example 1 of the present invention includes an optical fiber body 1 and two spacing adjustment components 2; the spacing adjustment components 2 are provided at both ends of the optical fiber body 1, which are used to adjust the distance between the optical fiber body 1 and the endpoint detection system 3 or the light source detection module; further, the spacing adjustment component 2 includes a fixing part 21, a limiting part 22 and an elastic part 23. When the optical fiber body 1 is connected to the endpoint detection system 3, one end of the optical fiber body 1 is kept against the light-transmitting medium window 31, and the fixing part 21 is fixed to the endpoint detection system 3. Since the fixing part 21 will move outward when it is fixed to the endpoint detection system 3, the fixing part 21 will squeeze the elastic part 23 between the fixing part 21 and the limiting part 22, causing the elastic part 23 to produce elastic deformation. When the fixing part 21 is fixed to the endpoint detection system 3, since the fixing part 21 remains stationary, the elastic part The elastic force generated by 23 acts in the direction of the limiter 22, pushing the limiter 22 toward the light-transmitting medium window 31. Due to the elastic force of the elastic member 23, the limiter 22 has a thrust from the elastic member 23, and the limiter 22 is fixed to the optical fiber body 1, so that the optical fiber body 1 is subjected to the elastic force and is in close contact with the light-transmitting medium window 31; in the prior art, the optical fiber is only connected to the end point detection system 3 or the light source detection module. If there is a gap when the optical fiber and the end point detection system 3 are fixed, the light source transmitted by the optical fiber cannot be accurately detected and focused, which ultimately affects the etching effect. The above-mentioned spacing adjustment component 2 can automatically adjust the distance between the optical fiber body 1 and the light-transmitting medium window 31 through the elastic member 23, so that the optical fiber body 1 continues to press against the light-transmitting medium window 31, so that the optical fiber body 1 is close to the light-transmitting medium window 31, and then the light source transmitted by the optical fiber body 1 can be accurately detected and focused, thereby improving the etching effect.

[0026] The adaptive optical fiber transmitter for the endpoint detection system of the etching machine provided in Example 1 of the present invention is preferably configured such that, in order to realize that the elastic member 23 automatically adjusts the distance between the optical fiber body 1 and the light-transmitting medium window 31, specifically, the fixing member 21 is cylindrical, and a first through-hole is provided on the fixing member 21 from the top to the bottom, and the optical fiber body 1 is sleeved in the fixing member 21 through the first through-hole; further, a thread 211 is provided on the side wall of the fixing member 21, and a threaded interface 32 is provided on the endpoint detection system 3 and the light source detection module, and the axis of the threaded interface 32 is aligned with the light-transmitting medium window 31. The axes of the optical fiber body 1 and the optical fiber body 1 coincide with each other, so that the optical fiber body 1 mounted in the fixing member 21 can contact the light-transmitting medium window 31. When the fixing member 21 is connected to the endpoint detection system 3 or the light source detection module through threads, the optical fiber body 1 can directly abut the light-transmitting medium window 31 to transmit light. Furthermore, the thread 211 is located on the outside of the fixing member 21, and the threaded interface 32 of the endpoint detection system 3 and the light source detection module is arranged opposite to the thread 211 of the fixing member 21, so that the fixing members 21 at both ends of the optical fiber body 1 can be fixed to the endpoint detection system 3 or the light source detection module.

[0027] Similarly, in order to fix the stopper 22 to the two ends of the optical fiber body 1, the cross-section of the stopper 22 is circular, and a second through-hole is opened from the top to the bottom of the stopper 22. The optical fiber body 1 is sleeved in the stopper 22 through the second through-hole. The cross-section of the stopper 22 is smaller than the cross-section of the threaded interface 32, so that the stopper 22 can enter the threaded interface 32 easily.

[0028] More specifically, the elastic member 23 is a spring, and the optical fiber body 1 is sleeved inside the spring. In order to allow the spring to be clamped and compressed by the limiting member 22 and the fixing member 21, the top of the limiting member 22 faces outward and the bottom of the limiting member 22 faces inward, so that the cross-sectional diameter of the spring is smaller than the diameter of the bottom of the limiting member 22, and the cross-sectional diameter of the spring is smaller than the diameter of the fixing member 21, so that the spring can be confined between the limiting member 22 and the fixing member 21, so that the spring can be compressed or generate thrust on the fixing member 21.

[0029] The adaptive optical fiber transmitter for the endpoint detection system of the etcher provided in Example 1 of the present invention is preferably, when the fixing members 21 at both ends of the optical fiber body 1 are respectively fixed to the interfaces of the endpoint detection system 3 and the light source detection module, the end face of the optical fiber body 1 is against the light-transmitting medium window 31, thereby ensuring that the light source transmitted by the optical fiber body 1 can be accurately detected and focused. However, if the end face of the optical fiber body 1 bends when contacting the light-transmitting medium window 31, it will affect the transmission of the light source, thereby affecting the etching effect of the etcher; therefore, the top plane of the limit member 22 is flush with the end face of the optical fiber body 1, and when the end face of the optical fiber body 1 is in contact with the light-transmitting medium window 31, the end face of the optical fiber body 1 is in contact with the light-transmitting medium window 31. When the optical fiber body 1 is in contact with the light-transmitting medium window 31, the end of the optical fiber body 1 is sleeved in the limiter 22, and the bottom plane of the limiter 22 is in contact with the spring. After elastic deformation, the spring will provide elastic force in the direction of the light-transmitting medium window 31. The limiter 22 is affected by the elastic force of the spring and always keeps the end of the optical fiber body 1 in a straight line. For this reason, the end face of the optical fiber body 1 will not bend due to force. Furthermore, when the end face of the optical fiber body 1 is in contact with the light-transmitting medium window 31, the top plane of the limiter 22 is also in contact with the light-transmitting medium window 31, so that the end face of the optical fiber body 1 can be in stable contact with the light-transmitting medium window 31, ensuring that the light source transmitted by the optical fiber body 1 can be accurately detected and focused.

[0030] The adaptive optical fiber transmitter for the endpoint detection system of the etching machine provided in Example 1 of the present invention preferably has a plurality of vertical lines 212 on the side wall of the fixing part 21, and the vertical lines 212 are located on the inner side of the fixing part 21. The vertical lines 212 are arranged along the extension direction of the fixing part 21, and the vertical lines 212 are staggered with the threads 211; when the fixing part 21 is screwed to connect the threads 211 on the outside of the fixing part 21 with the threaded interface 32 on the endpoint detection system 3 or the light source detection module, the vertical lines 212 and the fingers can generate a large friction force, thereby easily tightening and fixing the fixing part 21 to the endpoint detection system 3 or the light source detection module.

[0031] To sum up, the adaptive optical fiber transmitter for the endpoint detection system of the etching machine provided by the utility model can solve the problem in the prior art that when using optical fiber to transmit light between the light-transmitting medium window and the light source detection module, if there is a gap between the optical fiber and the light-transmitting medium window, the light source transmitted by the optical fiber cannot be accurately detected and focused, which ultimately affects the etching effect, thereby improving the accuracy of light source detection and focusing.

[0032] Those skilled in the art should understand that they can implement the above-mentioned variations by combining the existing technology and the above-mentioned embodiments, which will not be described in detail here. Such variations do not affect the essence of the present invention and will not be described in detail here.

[0033] The above describes the preferred embodiments of the present invention. It should be understood that the present invention is not limited to the specific embodiments described above, and the devices and structures that are not described in detail should be understood to be implemented in a common manner in the art; any technician familiar with the art can make many possible changes and modifications without departing from the technical solution of the present invention, or modify them into equivalent embodiments with equivalent changes, which does not affect the essence of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention that do not depart from the content of the technical solution of the present invention are still within the scope of protection of the technical solution of the present invention.

Claims

1. An adaptive optical fiber transmitter for an end point detection system of an etching machine, characterized in that: It includes an optical fiber body and two spacing adjustment components; the two spacing adjustment components are respectively arranged at two ends of the optical fiber body; The spacing adjustment assembly includes a fixing member, a limiting member and an elastic member for fixing the optical fiber body to the endpoint detection system; if one end of the optical fiber body is fixed to the endpoint detection system, and the other end of the optical fiber body is fixed to the light source detection module, the side of the optical fiber body fixed with the endpoint detection system or the light source detection module is regarded as the outer side, and the side of the optical fiber body away from the endpoint detection system or the light source detection module is regarded as the inner side; the fixing member is slidably fixed to the optical fiber body; the limiting member is fixed to the end of the optical fiber body; the fixing member is located on the inner side of the limiting member; the elastic member is located between the fixing member and the limiting member; When the fixing member is fixed to the endpoint detection system, the fixing member presses the elastic member, and the elastic member pushes the limiting member to move toward the light-transmitting medium window.

2. The adaptive optical fiber transmitter for an end point detection system of an etching machine according to claim 1, characterized in that: The fixing member is cylindrical; a first through-hole is formed on the fixing member from top to bottom; the optical fiber body is sleeved in the fixing member through the first through-hole; a thread is formed on the side wall of the fixing member; the thread is located on the outside of the fixing member; The cross section of the limiting member is circular; the limiting member is provided with a second through-hole from top to bottom; the optical fiber body is sleeved in the limiting member through the second through-hole; the top of the limiting member faces outward, and the bottom of the limiting member faces inward; The elastic member is a spring; the optical fiber body is sleeved in the spring; the cross-sectional diameter of the spring is smaller than the diameter of the bottom of the limiting member; and the cross-sectional diameter of the spring is smaller than the diameter of the fixing member.

3. The adaptive optical fiber transmitter for an end point detection system of an etching machine according to claim 2, wherein: The top plane of the limiting member is flush with the end surface of the optical fiber body.

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