Novel planar motor

Abstract

The utility model relates to the technical field of planar motors, and provides a novel planar motor which comprises a rotor and a stator, the rotor is provided with a permanent magnet, the stator is provided with an electromagnetic coil, the rotor is supported above the stator in a magnetic suspension mode, and a conductive non-magnetic plate is arranged on one side, close to the rotor, of the stator. After the conductive non-magnetic plate is arranged on the side, close to the rotor, of the stator, the displacement fluctuation degree and frequency of the rotor in the movement process driven by the stator are obviously reduced, and therefore vibration of the rotor in the movement process can be effectively reduced through the arrangement of the conductive non-magnetic plate, and the stability of the rotor in the movement process is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to plane motor technical field, especially a kind of novel plane motor. BACKGROUND

[0002] Currently, plane motor is a kind of motor that can directly convert electromagnetic energy into plane motion. Plane motor converts electrical energy into two-dimensional plane electromagnetic thrust, and its system realizes no mechanical contact in motion stroke, which makes motor system realize no friction in work to generate power loss, also effectively reduces the equipment aging and loss generated by power in traditional mechanical transmission, and is more and more widely applied at present, especially in ultra-precision positioning, semiconductor and other industries. Plane motor mainly converts electrical energy into kinetic energy of plane motor mover by the action of current of coil array and magnetic field of magnet array. Due to uneven magnetic field distribution, the running stability of mover is affected, and unstable phenomena such as vibration of mover in movement process occur.

[0003] The utility model discloses a novel plane motor to solve the above technical problem. UTILITY MODEL CONTENTS

[0004] The utility model provides a novel plane motor, to solve the problem of poor running stability of plane motor.

[0005] To achieve the above object, the utility model provides the following technical scheme: a novel plane motor, including mover and stator, the mover is equipped with permanent magnet, the stator is equipped with electromagnetic coil, the mover is supported in the upper of stator by magnetic suspension, the side of stator close to mover is equipped with electrically conductive non-magnetic plate.

[0006] On the basis of the above technical scheme, the area of the electrically conductive non-magnetic plate is greater than or equal to the area of the electromagnetic coil.

[0007] On the basis of the above technical scheme, the electrically conductive non-magnetic plate includes a first electrically conductive non-magnetic layer and a second electrically conductive non-magnetic layer, and the first electrically conductive non-magnetic layer and the second electrically conductive non-magnetic layer are sequentially arranged along the direction close to the mover.

[0008] On the basis of the above technical scheme, the number of the first electrically conductive non-magnetic layer and the second electrically conductive non-magnetic layer is multiple, and the multiple first electrically conductive non-magnetic layers and the multiple second electrically conductive non-magnetic layers are sequentially interpenetrated.

[0009] On the basis of the above technical scheme, the electrically conductive non-magnetic plate is provided with a cavity structure.

[0010] On the basis of the above technical scheme, the cavity structure is filled with an electrically conductive non-magnetic material different from the electrically conductive non-magnetic plate.

[0011] On the basis of the above technical solution, the conductive non-magnetic plate is provided with a hollow structure, and the hollow structure is provided through the conductive non-magnetic plate in the thickness direction.

[0012] Based on the above technical solution, the conductive non-magnetic plate includes a first sub-conductive non-magnetic block and a second sub-conductive non-magnetic block. The number of the first sub-conductive non-magnetic block and the second sub-conductive non-magnetic block is multiple, and the multiple first sub-conductive non-magnetic blocks and the second sub-conductive non-magnetic blocks are interspersed and spliced ​​along the length or width direction of the stator.

[0013] Based on the above technical solution, the stator includes a shell, and a connecting structure is provided between the conductive non-magnetic plate and the shell, one side of the connecting structure is connected to the shell, and the other side of the connecting structure is connected to the conductive non-magnetic plate.

[0014] Based on the above technical solution, the connection structure is a connection adhesive layer, one side of the connection adhesive layer is bonded to the outer shell surface of the stator close to the mover, and the other side is bonded to the conductive non-magnetic plate.

[0015] Based on the above technical solution, the connection structure includes a snap-in piece and a snap-fitting piece. One of the shell and the conductive non-magnetic plate is provided with a snap-in piece, and the other is provided with a snap-fitting piece. The snap-in piece cooperates with the snap-fitting piece to fix the conductive non-magnetic plate to the shell.

[0016] Based on the above technical solution, the material of the conductive non-magnetic plate can be a metallic conductive non-magnetic material or a non-metallic conductive non-magnetic material. The metallic conductive non-magnetic material can be copper, aluminum, silver, copper alloy, aluminum alloy or stainless steel. The non-metallic conductive non-magnetic material can be graphite, carbon nanotubes, graphene or conductive plastic, conductive rubber or conductive glass with added conductive fillers.

[0017] Compared with the related art, the beneficial effects of the present invention are as follows:

[0018] After a conductive non-magnetic plate is set on the side of the stator close to the mover, the displacement fluctuation degree and frequency of the mover during movement driven by the stator are significantly reduced. Therefore, the setting of the conductive non-magnetic plate can effectively reduce the oscillation of the mover during movement and greatly improve the stability of the mover during movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present invention. For those skilled in the art, other implementation drawings can be derived from the provided drawings without inventive effort.

[0020] Figure 1 This is a schematic structural diagram of a novel planar motor according to Example 1 of the present utility model;

[0021] Figure 2 The utility model provides Figure 1 AA-direction cross-sectional structural diagram shown in FIG;

[0022] Figure 3 This is a schematic structural diagram of a novel planar motor according to Example 2 of the present utility model;

[0023] Figure 4 This is a schematic structural diagram of a novel planar motor according to Example 3 of the present utility model;

[0024] Figure 5 This is a schematic structural diagram of a novel planar motor according to Example 4 of the present utility model;

[0025] Figure 6 This is a schematic structural diagram of a novel planar motor according to Example 5 of the present utility model;

[0026] Figure 7 This is a schematic structural diagram of a novel planar motor according to Example 6 of the present utility model;

[0027] Figure 8 Schematic diagram of the displacement-time curve of the mover without the conductive non-magnetic plate during movement;

[0028] Figure 9 The utility model provides a schematic diagram of the displacement-time curve of the mover of the novel planar motor provided with a conductive non-magnetic plate during the movement process.

[0029] In the figure: 1. mover; 2. stator; 21. electromagnetic coil; 22. housing; 3. conductive non-magnetic plate; 31. first conductive non-magnetic layer; 32. second conductive non-magnetic layer; 33. cavity structure; 34. hollow structure; 35. first sub-conductive non-magnetic block; 36. second sub-conductive non-magnetic block. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings and examples:

[0031] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0032] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0033] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] Example 1

[0035] Combine Figure 1-2 As shown, an embodiment of the present disclosure provides a new type of planar motor, including a mover 1 and a stator 2, wherein the mover 1 is provided with a permanent magnet, and the stator 2 is provided with an electromagnetic coil 21. The mover 1 is supported above the stator 2 by magnetic suspension, and a conductive non-magnetic plate 3 is provided on the side of the stator 2 close to the mover 1.

[0036] In this embodiment, the area of ​​the conductive non-magnetic plate 3 is greater than or equal to the area of ​​the electromagnetic coil 21 .

[0037] In this embodiment, the conductive non-magnetic plate 3 is made of copper. Of course, in other embodiments, the conductive non-magnetic plate 3 may also be made of a metallic conductive non-magnetic material such as aluminum, silver, copper alloy, or aluminum alloy, or a non-metallic conductive non-magnetic material such as graphite, carbon nanotubes, graphene, or conductive plastic, conductive rubber, or conductive glass with conductive fillers.

[0038] The novel planar motor provided by the embodiment of the present disclosure is provided with a conductive non-magnetic plate 3 on the side of the stator 2 close to the mover 1, thereby effectively reducing the vibration and instability of the mover 1 during movement. Figure 8 and Figure 9 As shown, Figure 8 is a displacement detection data curve of the mover 1 without the conductive non-magnetic plate 3 during the movement driven by the stator 2. Figure 9 The displacement detection data of the mover 1 provided with the conductive non-magnetic plate 3 in the embodiment of the present disclosure during the movement process is shown in FIG. Figure 9 The fluctuation degree and frequency of the middle curve are significantly smaller than Figure 8The curve fluctuation degree and frequency in the curve are reduced, and thus the stability of the mover 1 during movement can be effectively improved after the electrically conductive non-magnetic plate 3 is arranged on the stator 2.

[0039] Embodiment 2

[0040] In combination Figure 3 As shown in the figure, the embodiment of the present disclosure provides a new type of planar motor, which comprises a mover 1 and a stator 2. The mover 1 is provided with a permanent magnet, and the stator 2 is provided with an electromagnetic coil 21. The mover 1 is supported above the stator 2 in a magnetic suspension manner. The side of the stator 2 close to the mover 1 is provided with an electrically conductive non-magnetic plate 3.

[0041] In the embodiment, the electrically conductive non-magnetic plate 3 comprises a first electrically conductive non-magnetic layer 31 and a second electrically conductive non-magnetic layer 32. The first electrically conductive non-magnetic layer 31 and the second electrically conductive non-magnetic layer 32 are sequentially arranged along the direction close to the mover 1.

[0042] Specifically, the first electrically conductive non-magnetic layer 31 can be a copper layer, and the second electrically conductive non-magnetic layer 32 can be a silver layer. The copper layer cooperates with the silver layer, which can further reduce the jitter of the mover 1 during movement and further improve the stability of the movement of the mover 1. The thickness of the first electrically conductive non-magnetic layer 31 and the second electrically conductive non-magnetic layer 32 can be the same or different, which can be selected according to actual working requirements.

[0043] In the embodiment, the stator 2 comprises a shell 22. A connecting structure is arranged between the electrically conductive non-magnetic plate 3 and the shell 22. One side of the connecting structure is connected with the shell 22, and the other side of the connecting structure is connected with the electrically conductive non-magnetic plate 3. In this way, the connecting structure can stably fix the electrically conductive non-magnetic plate 3 on the stator 2, and stably play a role during the movement of the mover 1, so as to ensure the smoothness of the mover 1 during movement.

[0044] Embodiment 3

[0045] In combination Figure 4 As shown in the figure, the embodiment of the present disclosure provides a new type of planar motor, which comprises a mover 1 and a stator 2. The mover 1 is provided with a permanent magnet, and the stator 2 is provided with an electromagnetic coil 21. The mover 1 is supported above the stator 2 in a magnetic suspension manner. The side of the stator 2 close to the mover 1 is provided with an electrically conductive non-magnetic plate 3.

[0046] In the embodiment, the electrically conductive non-magnetic plate 3 comprises a first electrically conductive non-magnetic layer 31 and a second electrically conductive non-magnetic layer 32. The first electrically conductive non-magnetic layer 31 and the second electrically conductive non-magnetic layer 32 are sequentially arranged along the direction close to the mover 1. The number of the first electrically conductive non-magnetic layer 31 and the second electrically conductive non-magnetic layer 32 is multiple. The multiple first electrically conductive non-magnetic layers 31 and the multiple second electrically conductive non-magnetic layers 32 are sequentially inserted.

[0047] In this embodiment, the stator 2 includes a shell 22 , and a connecting structure is provided between the conductive non-magnetic plate 3 and the shell 22 . One side of the connecting structure is connected to the shell 22 , and the other side of the connecting structure is connected to the conductive non-magnetic plate 3 .

[0048] Specifically, the connection structure includes a snap-fit ​​member and a snap-fit ​​member. One of the housing 22 and the conductive non-magnetic plate 3 is provided with a snap-fit ​​member, and the other is provided with a snap-fit ​​member. The snap-fit ​​member cooperates with the snap-fit ​​member to secure the conductive non-magnetic plate 3 to the housing 22. The snap-fit ​​member and the snap-fit ​​member may be a snap-fit ​​or a fixed pin-fit. This embodiment does not limit the form of cooperation between the snap-fit ​​member and the snap-fit ​​member.

[0049] Example 4

[0050] Combine Figure 5 As shown, an embodiment of the present disclosure provides a new type of planar motor, including a mover 1 and a stator 2, wherein the mover 1 is provided with a permanent magnet, and the stator 2 is provided with an electromagnetic coil 21. The mover 1 is supported above the stator 2 by magnetic suspension, and a conductive non-magnetic plate 3 is provided on the side of the stator 2 close to the mover 1.

[0051] In this embodiment, a cavity structure 33 is provided in the conductive non-magnetic plate 3. Specifically, the cavity structure 33 may be filled with air, or may be filled with a conductive non-magnetic material different from the conductive non-magnetic plate.

[0052] In this embodiment, the stator 2 includes a housing 22. A connecting structure is provided between the conductive non-magnetic plate 3 and the housing 22. One side of the connecting structure is connected to the housing 22, and the other side is connected to the conductive non-magnetic plate 3. The connecting structure is a connecting adhesive layer. One side of the connecting adhesive layer is bonded to the surface of the housing 22 of the stator 2 near the mover 1, and the other side is bonded to the conductive non-magnetic plate 3. This connecting adhesive layer provides a more convenient and cost-effective way to secure the conductive non-magnetic plate 3.

[0053] By adopting the new planar motor provided by the embodiment of the present disclosure, after a conductive non-magnetic plate 3 is set on the side of the stator 2 close to the mover 1, the displacement fluctuation degree and frequency of the mover 1 during the movement driven by the stator 2 are significantly reduced. Therefore, the setting of the conductive non-magnetic plate 3 can effectively reduce the oscillation of the mover 1 during the movement process and greatly improve the stability of the mover 1 during the movement process.

[0054] Example 5

[0055] Combine Figure 6As shown, the embodiment of the present disclosure provides a new type of planar motor, comprising a mover 1 and a stator 2, the mover 1 is provided with a permanent magnet, the stator 2 is provided with an electromagnetic coil 21, the mover 1 is supported above the stator 2 in a magnetic suspension manner, and the stator 2 is provided with a conductive non-magnetic plate 3 on the side close to the mover 1.

[0056] In the embodiment, the conductive non-magnetic plate is provided with a hollow structure 34, and the hollow structure 34 is arranged through the thickness direction of the conductive non-magnetic plate. The hollow structure 34 can be circular, square or triangular, and the embodiment does not limit the shape of the hollow structure. The hollow structure 34 can also be multiple, and the multiple hollow structures 34 are uniformly distributed on the conductive non-magnetic plate or distributed on the conductive non-magnetic plate according to a certain rule. The distribution of the multiple hollow structures 34 can be selected according to actual needs.

[0057] Embodiment 6

[0058] In combination Figure 7 As shown, the embodiment of the present disclosure provides a new type of planar motor, comprising a mover 1 and a stator 2, the mover 1 is provided with a permanent magnet, the stator 2 is provided with an electromagnetic coil 21, the mover 1 is supported above the stator 2 in a magnetic suspension manner, and the stator 2 is provided with a conductive non-magnetic plate 3 on the side close to the mover 1.

[0059] In the embodiment, the conductive non-magnetic plate 3 comprises a first conductive non-magnetic block 35 and a second conductive non-magnetic block 36, and the number of the first conductive non-magnetic block 35 and the second conductive non-magnetic block 36 is multiple. The multiple first conductive non-magnetic blocks 35 and the second conductive non-magnetic blocks 36 are arranged in a staggered manner along the length or width direction of the stator 2.

[0060] After the conductive non-magnetic plate 3 is arranged on the side of the stator 2 close to the mover 1 in the new type of planar motor provided by the embodiment of the present disclosure, the displacement fluctuation degree and frequency of the mover 1 during the movement process under the driving of the stator 2 are obviously reduced. Therefore, the arrangement of the conductive non-magnetic plate 3 can effectively reduce the vibration of the mover 1 during the movement process, and greatly improve the stability of the mover 1 during the movement process.

[0061] The utility model has been described above by way of example, but the utility model is not limited to the above-mentioned specific embodiments, and any modification or modification based on the utility model belongs to the scope of protection required by the utility model.

Claims

1. A new type of planar motor, characterized in that: The invention comprises a mover and a stator, wherein the mover is provided with a permanent magnet, the stator is provided with an electromagnetic coil, the mover is supported above the stator by magnetic suspension, and a conductive non-magnetic plate is provided on the side of the stator close to the mover.

2. The novel planar motor according to claim 1, characterized in that: The area of ​​the conductive non-magnetic plate is greater than or equal to the area of ​​the electromagnetic coil.

3. The novel planar motor according to claim 1, characterized in that: The conductive non-magnetic plate includes a first conductive non-magnetic layer and a second conductive non-magnetic layer, and the first conductive non-magnetic layer and the second conductive non-magnetic layer are sequentially arranged in a direction approaching the mover.

4. The novel planar motor according to claim 3, characterized in that: The number of the first conductive non-magnetic layer and the number of the second conductive non-magnetic layer are both multiple, and the multiple first conductive non-magnetic layers and the multiple second conductive non-magnetic layers are sequentially interspersed.

5. The novel planar motor according to claim 1, characterized in that: A cavity structure is provided in the conductive non-magnetic plate.

6. The novel planar motor according to claim 5, characterized in that: The cavity structure is filled with a conductive non-magnetic material different from the conductive non-magnetic plate.

7. The novel planar motor according to any one of claims 1 to 6, characterized in that: The conductive non-magnetic plate is provided with a hollow structure, and the hollow structure is arranged through the conductive non-magnetic plate along the thickness direction.

8. The novel planar motor according to any one of claims 1 to 6, characterized in that: The conductive non-magnetic plate includes a first sub-conductive non-magnetic block and a second sub-conductive non-magnetic block. There are multiple first sub-conductive non-magnetic blocks and second sub-conductive non-magnetic blocks. The multiple first sub-conductive non-magnetic blocks and second sub-conductive non-magnetic blocks are interspersed and spliced ​​along the length or width direction of the stator.

9. The novel planar motor according to any one of claims 1 to 6, characterized in that: The stator includes a shell, and a connecting structure is provided between the conductive non-magnetic plate and the shell. One side of the connecting structure is connected to the shell, and the other side of the connecting structure is connected to the conductive non-magnetic plate.

10. The novel planar motor according to claim 9, characterized in that: The connection structure is a connection adhesive layer, one side of the connection adhesive layer is bonded to the outer shell surface of the stator close to the mover, and the other side is bonded to the conductive non-magnetic plate.

11. The novel planar motor according to claim 9, characterized in that: The connection structure includes a snap-fit ​​piece and a snap-fit ​​piece. One of the shell and the conductive non-magnetic plate is provided with a snap-fit ​​piece, and the other is provided with a snap-fit ​​piece. The snap-fit ​​piece cooperates with the snap-fit ​​piece to fix the conductive non-magnetic plate to the shell.

12. The novel planar motor according to any one of claims 1 to 6, characterized in that: The material of the conductive non-magnetic plate can be a metallic conductive non-magnetic material or a non-metallic conductive non-magnetic material. The metallic conductive non-magnetic material can be copper, aluminum, silver, copper alloy, aluminum alloy or stainless steel. The non-metallic conductive non-magnetic material can be graphite, carbon nanotubes, graphene or conductive plastic, conductive rubber or conductive glass with added conductive fillers.

Images