Gas cylinder cabinet for conveying special gas

Abstract

The utility model relates to the technical field of special gas delivery, in particular to a gas cylinder cabinet for special gas delivery, which comprises a cabinet body, an electric control box body, a gas delivery unit, a purging and discharging unit, a touch screen and an alarm unit, adopts a PLC (programmable logic controller) control system and a human-computer interface technology of the touch screen, and automatically controls the flow direction of process gas. The PLC control system is matched with the gas conveying unit and the purging and discharging unit to complete raw material gas input, gas supply, pipeline purging and pipeline discharging, so that equipment damage and personal harm caused by manual misoperation are avoided, an operator does not need to directly operate valves of all the units through the arrangement of a touch screen, and the operation efficiency is improved. And through the arrangement of the alarm unit, when the equipment has unpredictable leakage and a fire disaster occurs, the pneumatic valve can be closed and the gas source can be cut off through the PLC control system, so that the harm is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to special gas conveying technical field especially relates to a gas cylinder cabinet for special gas conveying. BACKGROUND

[0002] Many special gases are needed in the process commonly used in semiconductor, photovoltaic related industry, and the special gas conveying equipment is required to be higher.

[0003] But the structure of the prior art special gas conveying equipment is relatively simple, when conveying some toxic, corrosive, flammable and high-risk gas, once the valve of the gas supply system is damaged and liquid leakage occurs, it will threaten the safety of personnel, equipment loss and production interruption, and there is a great risk. SUMMARY

[0004] The utility model discloses a gas cylinder cabinet for special gas conveying, which solves the problem of the simple structure of the prior art special gas conveying equipment, and the risk of personnel safety, equipment loss and production interruption caused by liquid leakage due to valve damage of the gas supply system when conveying some toxic, corrosive and flammable gas with high risk.

[0005] To achieve the above-mentioned purpose, the utility model provides a gas cylinder cabinet for special gas conveying, which comprises a cabinet body, an electric control box, a gas conveying unit, a purge and discharge unit, a touch screen and an alarm unit.

[0006] The top end of the cabinet body is provided with the electric control box, the inside of the electric control box is provided with a PLC control system, the end face of the electric control box is provided with an electric control box door, the cabinet body is provided with a cabinet door, the cabinet door is provided with the touch screen and an emergency stop button, and the cabinet body is also provided with the alarm unit.

[0007] The gas delivery unit comprises a cylinder outlet pressure sensor PT-1L, a cylinder outlet gasket filter CFG-L, a cylinder outlet pneumatic isolation valve AV-2L, a pressure regulating valve REG-L, a gas over-flow flow switch EFS-L, a low pressure end pressure sensor PT-2L, a pneumatic isolation valve AV-3L, a filter GF-L, a manual isolation valve MV-8L, an outlet pneumatic valve AV-21 and an outlet manual valve MV-21. The first steel cylinder is installed in the cabinet. The front end of the cylinder outlet pressure sensor PT-1L is connected to the interface of the first steel cylinder through a pipeline. The rear end of the cylinder outlet pressure sensor PT-1L is connected to the cylinder outlet gasket filter CFG-L. The front end of the cylinder outlet pneumatic isolation valve AV-2L is connected to the cylinder outlet gasket filter CFG-L. The rear end of the cylinder outlet pneumatic isolation valve AV-2L is connected to the pressure regulating valve REG-L. The front end of the gas over-flow flow switch EFS-L is connected to the pressure regulating valve REG-L. The rear end of the gas over-flow flow switch EFS-L is connected to the pneumatic isolation valve AV-3L through a pipeline. The low pressure end pressure sensor PT-2L is arranged between the gas over-flow flow switch EFS-L and the pipeline of the pneumatic isolation valve AV-3L. The rear end of the pneumatic isolation valve AV-3L is connected to the filter GF-L. The front end of the manual isolation valve MV-8L is connected to the filter GF-L. The rear end of the manual isolation valve MV-8L is connected to the outlet pneumatic valve AV-21 through a pipeline. The rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-21. The rear end of the outlet manual valve MV-21 is connected to a gas outlet.

[0008] The purging exhaust unit is provided with a cylinder outlet pressure sensor PT-1R, a cylinder outlet gasket filter CFG-R, a cylinder outlet pneumatic isolation valve AV-2R, a pressure regulating valve REG-R, a gas over-flow switch EFS-R, a low pressure end pressure sensor PT-2R, a pneumatic isolation valve AV-3R, a filter GF-R, a manual isolation valve MV-8R, an outlet pneumatic valve AV-22, an outlet pneumatic valve AV-23, an outlet manual valve MV-22 and an outlet manual valve MV-23, and a second steel cylinder is installed in the interior of the cabinet body, the front end of the cylinder outlet pressure sensor PT-1R is connected to the interface of the second steel cylinder through a pipeline, the rear end of the cylinder outlet pressure sensor PT-1R is connected to the cylinder outlet gasket filter CFG-R, the front end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the cylinder outlet gasket filter CFG-R, the rear end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the pressure regulating valve REG-R, the front end of the gas over-flow switch EFS-R is connected to the pressure regulating valve REG-R, the rear end of the gas over-flow switch EFS-R is connected to the pneumatic isolation valve AV-3R through a pipeline, the low pressure end pressure sensor PT-2R is arranged between the gas over-flow switch EFS-R and the pipeline of the pneumatic isolation valve AV-3R, the rear end of the pneumatic isolation valve AV-3R is connected to the filter GF-R, the front end of the manual isolation valve MV-8R is connected to the filter GF-R, the rear end of the manual isolation valve MV-8R is connected to the outlet pneumatic valve AV-23 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-23, the rear end of the outlet manual valve MV-23 is connected to a gas outlet, the rear ends of the manual isolation valve MV-8L and the manual isolation valve MV-8R are connected to the outlet pneumatic valve AV-22 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-22, and the rear end of the outlet manual valve MV-22 is connected to a gas outlet.

[0009] The purge exhaust unit comprises a low-pressure nitrogen inlet manual isolation valve MV-3N, a high-pressure nitrogen inlet pneumatic isolation valve AV-1H, a low-pressure nitrogen inlet check valve CV-1N, a high-pressure nitrogen inlet check valve CV-1H, a high-pressure nitrogen pneumatic isolation valve AV-1N, a pneumatic valve AV-2NL, a pneumatic valve AV-2NR, an exhaust pneumatic valve AV-9L, an exhaust pneumatic valve AV-9R, a purge gas pressure sensor PT-3L, and a purge gas pressure sensor PT-3R. The front end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to a low-pressure nitrogen pipeline, and the rear end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to the low-pressure nitrogen inlet check valve CV-1N. The front end of the high-pressure nitrogen pneumatic isolation valve AV-1N is connected to the low-pressure nitrogen inlet check valve CV-1N, and the rear end of the high-pressure nitrogen pneumatic isolation valve AV-1N is connected to the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines, respectively. The front end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to a high-pressure nitrogen pipeline, and the rear end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to the high-pressure nitrogen inlet check valve CV-1H. The rear end of the high-pressure nitrogen inlet check valve CV-1H is connected to the front end pipelines of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines, respectively. The rear ends of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR are connected to the front ends of the exhaust pneumatic valve AV-9L and the exhaust pneumatic valve AV-9R through pipelines, respectively, and the purge gas pressure sensor PT-3L and the purge gas pressure sensor PT-3R are arranged in the pipelines, respectively.

[0010] The purge exhaust unit further comprises an orifice plate OF-3L, an orifice plate OF-3R, a purge pneumatic valve AV-7L, a purge pneumatic valve AV-7R, a test port manual valve MV-10L, a test port manual valve MV-10R, an exhaust gas isolation pneumatic valve AV-5L, an exhaust gas isolation pneumatic valve AV-5R, an exhaust one-way valve CV-2L, an exhaust one-way valve CV-2R, an exhaust pipeline orifice plate OF-1L, an exhaust pipeline orifice plate OF-1R, and a vacuum generator VG, the orifice plate OF-3L and the orifice plate OF-3R are respectively arranged at the rear end connection of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR, the exhaust pipeline orifice plate OF-1L and the exhaust pipeline orifice plate OF-1R are respectively arranged at the front end connection of the exhaust pneumatic valve AV-9L and the exhaust pneumatic valve AV-9R, the front ends of the purge pneumatic valve AV-7L and the purge pneumatic valve AV-7R are respectively connected to the front end pipeline of the cylinder outlet pneumatic isolation valve AV-2L and the cylinder outlet pneumatic isolation valve AV-2R, the rear ends of the purge pneumatic valve AV-7L and the purge pneumatic valve AV-7R are respectively connected to a purge pipeline, the front ends of the test port manual valve MV-10L and the test port manual valve MV-10R are respectively connected to a purge pipeline, the front ends of the exhaust gas isolation pneumatic valve AV-5L and the exhaust gas isolation pneumatic valve AV-5R are respectively connected to the front end pipeline of the pneumatic isolation valve AV-3L and the pneumatic isolation valve AV-3R, the rear ends of the exhaust gas isolation pneumatic valve AV-5L and the exhaust gas isolation pneumatic valve AV-5R are respectively connected to the exhaust one-way valve CV-2L and the exhaust one-way valve CV-2R, the rear ends of the exhaust one-way valve CV-2L and the exhaust one-way valve CV-2R are respectively connected to a purge pipeline, the rear end pipelines of the exhaust pneumatic valve AV-9L and the exhaust pneumatic valve AV-9R are combinedly connected to the vacuum generator VG, the front end of the vacuum generator VG is connected to a Venturi nitrogen pipeline, and the rear end of the vacuum generator VG is connected to an exhaust pipeline.

[0011] The alarm unit comprises a flame detector, a differential pressure switch, and an audible and visual alarm, the flame detector is arranged in the interior of the cabinet body, the differential pressure switch is arranged in the interior of the electric control box body, the audible and visual alarm is installed on the electric control box door, and the flame detector, the differential pressure switch, and the audible and visual alarm are electrically connected with the PLC control system.

[0012] The differential pressure gauge is further arranged on the electric control box door, and the observation window is further arranged on the cabinet door.

[0013] The utility model discloses a gas cylinder cabinet for special gas delivery, including cabinet, electric control box, gas delivery unit, purging and discharging unit, touch screen and alarm unit, adopt the man -machine interface technology of PLC control system and touch screen, through the flow of process gas of automation control craft, utilize the cooperation of PLC control system with gas delivery unit and purging and discharging unit, complete raw material gas input, gas supply, pipeline purging, pipeline discharge to avoid the equipment damage and personal harm caused by artificial misoperation, through the setting of touch screen, the operator does not need to operate the valve of each unit directly to reduce the harm of toxic and harmful gas to personnel as far as possible, through the setting of alarm unit when the equipment has unpredictable leakage, fire can be through the PLC control system and shut off the pneumatic valve, cut off the gas source to reduce the harm. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, below will be to the embodiment or prior art description needed to use the drawing briefly introduced, obviously, the drawing in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, still can obtain other drawings according to these drawings.

[0015] Figure 1 It is the external structure schematic diagram of the gas cylinder cabinet for special gas delivery provided by the utility model.

[0016] Figure 2 It is the internal disc surface schematic diagram of the gas cylinder cabinet for special gas delivery provided by the utility model.

[0017] Figure 3 It is the control logic schematic diagram of the gas cylinder cabinet for special gas delivery provided by the utility model.

[0018] 101-cabinet, 102-electric control box, 103-touch screen, 104-PLC control system, 105-electric control box door, 106-cabinet door, 107-emergency stop button, 108-first steel gas cylinder, 109-second steel gas cylinder, 110-flame detector, 111-differential pressure switch, 112-sound and light alarm, 113-pressure difference table, 114-observation window. DETAILED DESCRIPTION

[0019] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are intended to explain the utility model, and cannot be understood as the limitation of the utility model.

[0020] Please refer to Figure 1 and Figure 2 The utility model provides a gas cylinder cabinet for special gas delivery, the gas cylinder cabinet for special gas delivery includes cabinet body 101, electric control box 102, gas delivery unit, purging and discharging unit, touch screen 103 and alarm unit, the inside of cabinet body 101 is provided with gas delivery unit and purging and discharging unit,

[0021] The top of cabinet body 101 is installed electric control box 102, the inside of electric control box 102 is provided with PLC control system 104, and the end surface of electric control box 102 is provided with electric control box door 105, the cabinet door 106 is arranged on the cabinet body 101, the touch screen 103 and emergency stop button 107 are arranged on the cabinet door 106, and the alarm unit is also arranged on the cabinet body 101, the alarm unit, the touch screen 103, the emergency stop button 107, the gas delivery unit and the purging and discharging unit are connected with the PLC control system 104.

[0022] In the embodiment, the man-machine interface technology of PLC control system 104 and touch screen 103 is adopted, the flow direction of process gas is controlled automatically, the PLC control system 104 is matched with the gas delivery unit and purging and discharging unit, the raw material gas input, gas supply, pipeline purging and pipeline discharge are completed, so that the equipment damage and personal harm caused by human error operation are avoided, the personnel do not need to directly operate the valve of each unit through the setting of touch screen 103, so that the harm of toxic and harmful gas to personnel is reduced as much as possible, when the equipment has unpredictable leakage and fire, the alarm unit is set, the pneumatic valve is closed and the gas source is cut off through the PLC control system 104, so that the harm is reduced.

[0023] The gas delivery unit includes a cylinder outlet pressure sensor PT-1L, a cylinder outlet pressure sensor PT-1R, a cylinder outlet gasket filter CFG-L, a cylinder outlet gasket filter CFG-R, a cylinder outlet pneumatic isolation valve AV-2L, a cylinder outlet pneumatic isolation valve AV-2R, a pressure regulating valve REG-L, a pressure regulating valve REG-R, a gas over-flow flow switch EFS-L, a gas over-flow flow switch EFS-R, a low pressure end pressure sensor PT-2L, a low pressure end pressure sensor PT-2R, a pneumatic isolation valve AV-3L, a pneumatic isolation valve AV-3R, a filter GF-L, a filter GF-R, a manual isolation valve MV-8L, a manual isolation valve MV-8R, an outlet pneumatic valve AV-21, an outlet pneumatic valve AV-22, an outlet pneumatic valve AV-23, an outlet manual valve MV-21, an outlet manual valve MV-22, and an outlet manual valve MV-23. The first steel cylinder 108 and the second steel cylinder 109 are installed in the cabinet 101. The front end of the cylinder outlet pressure sensor PT-1L is connected to the interface of the first steel cylinder 108 through a pipeline. The rear end of the cylinder outlet pressure sensor PT-1L is connected to the cylinder outlet gasket filter CFG-L. The front end of the cylinder outlet pneumatic isolation valve AV-2L is connected to the cylinder outlet gasket filter CFG-L. The rear end of the cylinder outlet pneumatic isolation valve AV-2L is connected to the pressure regulating valve REG-L. The front end of the gas over-flow flow switch EFS-L is connected to the pressure regulating valve REG-L. The rear end of the gas over-flow flow switch EFS-L is connected to the pneumatic isolation valve AV-3L through a pipeline. The low pressure end pressure sensor PT-2L is arranged between the gas over-flow flow switch EFS-L and the pipeline of the pneumatic isolation valve AV-3L. The rear end of the pneumatic isolation valve AV-3L is connected to the filter GF-L. The front end of the manual isolation valve MV-8L is connected to the filter GF-L. The rear end of the manual isolation valve MV-8L is connected to the outlet pneumatic valve AV-21 through a pipeline. The rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-21. The rear end of the outlet manual valve MV-21 is connected to a gas outlet. The front end of the cylinder outlet pressure sensor PT-1R is connected to the interface of the second steel cylinder 109 through a pipeline. The rear end of the cylinder outlet pressure sensor PT-1R is connected to the cylinder outlet gasket filter CFG-R. The front end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the cylinder outlet gasket filter CFG-R. The rear end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the pressure regulating valve REG-R. The front end of the gas over-flow flow switch EFS-R is connected to the pressure regulating valve REG-R. The rear end of the gas over-flow flow switch EFS-R is connected to the pneumatic isolation valve AV-3R through a pipeline.The low pressure end pressure sensor PT-2R is arranged between the gas excess flow switch EFS-R and the pipeline of the pneumatic isolation valve AV-3R, the rear end of the pneumatic isolation valve AV-3R is connected to the filter GF-R, the front end of the manual isolation valve MV-8R is connected to the filter GF-R, the rear end of the manual isolation valve MV-8R is connected to the outlet pneumatic valve AV-23 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-23, the rear end of the outlet manual valve MV-23 is connected to a gas outlet, the rear ends of the manual isolation valve MV-8L and the manual isolation valve MV-8R are both connected to the outlet pneumatic valve AV-22 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-22, and the rear end of the outlet manual valve MV-22 is connected to a gas outlet.

[0024] The purge discharge unit comprises a low-pressure nitrogen inlet manual isolation valve MV-3N, a high-pressure nitrogen inlet pneumatic isolation valve AV-1H, a low-pressure nitrogen inlet check valve CV-1N, a high-pressure nitrogen inlet check valve CV-1H, a high-pressure nitrogen pneumatic isolation valve AV-1N, a pneumatic valve AV-2NL, a pneumatic valve AV-2NR, a flow limiting orifice plate OF-3L, a flow limiting orifice plate OF-3R, a purge pneumatic valve AV-7L, a purge pneumatic valve AV-7R, a test port manual valve MV-10L, a test port manual valve MV-10R, a purge gas pressure sensor PT-3L, a purge gas pressure sensor PT-3R, a discharge gas isolation dynamic valve AV-5L, a discharge gas isolation dynamic valve AV-5R, a discharge check valve CV-2L, a discharge check valve CV-2R, a discharge pipeline flow limiting orifice plate OF-1L, a discharge pipeline flow limiting orifice plate OF-1R, a discharge pneumatic valve AV-9L, a discharge pneumatic valve AV-9R, and a vacuum generator VG. The front end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to a low-pressure nitrogen pipeline, and the rear end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to the low-pressure nitrogen inlet check valve CV-1N. The front end of the high-pressure nitrogen pneumatic isolation valve AV-1N is connected to the low-pressure nitrogen inlet check valve CV-1N, and the rear end of the high-pressure nitrogen pneumatic isolation valve AV-1N is connected to the front end pipelines of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines. The front end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to a high-pressure nitrogen pipeline, and the rear end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to the high-pressure nitrogen inlet check valve CV-1H. The rear end of the high-pressure nitrogen inlet check valve CV-1H is connected to the front end pipelines of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines. The rear ends of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR are connected to the front ends of the discharge pneumatic valve AV-9L and the discharge pneumatic valve AV-9R through pipelines, and the pipelines are respectively provided with the purge gas pressure sensor PT-3L and the purge gas pressure sensor PT-3R. The flow limiting orifice plate OF-3L and the flow limiting orifice plate OF-3R are respectively arranged at the rear end connection positions of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR. The discharge pipeline flow limiting orifice plate OF-1L and the discharge pipeline flow limiting orifice plate OF-1R are respectively arranged at the front end connection positions of the discharge pneumatic valve AV-9L and the discharge pneumatic valve AV-9R. The front ends of the purge pneumatic valve AV-7L and the purge pneumatic valve AV-7R are respectively connected to the front end pipelines of the cylinder outlet pneumatic isolation valve AV-2L and the cylinder outlet pneumatic isolation valve AV-2R. The rear ends of the purge pneumatic valve AV-7L and the purge pneumatic valve AV-7R are respectively connected to a purge pipeline. The front ends of the test port manual valve MV-10L and the test port manual valve MV-10R are respectively connected to the purge pipeline.The front ends of the exhaust gas isolation active valves AV-5L and AV-5R are connected to the front end pipelines of the pneumatic isolation valves AV-3L and AV-3R respectively, the rear ends of the exhaust gas isolation active valves AV-5L and AV-5R are connected to the exhaust one-way valves CV-2L and CV-2R respectively, the rear ends of the exhaust one-way valves CV-2L and CV-2R are connected to the purge pipelines respectively, the rear end pipelines of the exhaust gas active valves AV-9L and AV-9R are connected to the vacuum generator VG, the front end of the vacuum generator VG is connected to a Venturi nitrogen pipeline, and the rear end of the vacuum generator VG is connected to an exhaust pipeline.

[0025] Further, the alarm unit comprises a flame detector 110, a differential pressure switch 111 and an audible and visual alarm 112, the flame detector 110 is arranged in the interior of the cabinet body 101, the differential pressure switch 111 is arranged in the interior of the electric control box body 102, and the audible and visual alarm 112 is installed on the electric control box door 105, and the flame detector 110, the differential pressure switch 111 and the audible and visual alarm 112 are electrically connected with the PLC control system 104.

[0026] In the embodiment, the flame detector 110, the differential pressure switch 111 and the audible and visual alarm 112 cooperate to realize the alarm when unexpected leakage or fire occurs.

[0027] Further, the electric control box door 105 is further provided with a differential pressure gauge 113, and the cabinet door 106 is further provided with an observation window 114.

[0028] In the embodiment, the observation window 114 can be used to observe the running state of the equipment.

[0029] Please refer to Figure 3 The utility model also provides a kind of schematic diagram of control logic of gas cylinder cabinet for special gas delivery.

[0030] Wherein, external power supply 1 is used to power switch power supply 1 and switch power supply 1, improve the reliability and stability of power supply system by redundancy module, power supply to the touch screen 103 and the PLC control system 104, the PLC control system 104 is connected with code scanning gun, instrument gas, the differential pressure switch, the flame detector 110, the gas detection, relay, the audible and visual alarm 112, pneumatic electromagnetic valve group, PT pressure sensor and forced gas supply signal feedback.

[0031] In the embodiment, the reliability and stability of the power supply system are improved by using the redundancy module, and the touch screen 103 and the PLC control system 104 are powered, and the PLC control system 104 is used to control the code scanning gun, instrument gas, the differential pressure switch, the flame detector 110, the gas detection, the relay, the audible and visual alarm 112, the pneumatic electromagnetic valve group, the PT pressure sensor and the forced air supply signal feedback connected.

[0032] The above only discloses a preferred embodiment of the utility model, of course, cannot with this to limit the utility model right range, the person skilled in the art can understand that all or part of the processes of the above-mentioned embodiments are implemented, and the equivalent changes made according to the utility model claims still belong to the range covered by the utility model.

Claims

1. A gas cylinder cabinet for special gas delivery, characterized in that: It includes a cabinet, an electric control box, a gas delivery unit, a purge and exhaust unit, a touch screen and an alarm unit. The gas delivery unit and the purge and exhaust unit are arranged inside the cabinet; The electric control box is installed on the top of the cabinet, a PLC control system is arranged inside the electric control box, an electric control box door is arranged on the end face of the electric control box, a cabinet door is arranged on the cabinet, the cabinet door is provided with the touch screen and the emergency stop button, the cabinet is also provided with the alarm unit, the alarm unit, the touch screen, the emergency stop button, the gas delivery unit and the purge and exhaust unit are all connected to the PLC control system; The gas delivery unit includes a cylinder outlet pressure sensor PT-1L, a cylinder outlet gasket filter CFG-L, a cylinder outlet pneumatic isolation valve AV-2L, a pressure regulating valve REG-L, a gas overflow switch EFS-L, a low-pressure end pressure sensor PT-2L, a pneumatic isolation valve AV-3L, a filter GF-L, a manual isolation valve MV-8L, an outlet pneumatic valve AV-21 and an outlet manual valve MV-21. A first steel gas cylinder is installed inside the cabinet. The front end of the cylinder outlet pressure sensor PT-1L is connected to the interface of the first steel gas cylinder through a pipeline, and the rear end of the cylinder outlet pressure sensor PT-1L is connected to the cylinder outlet gasket filter CFG-L. The front end of the cylinder outlet pneumatic isolation valve AV-2L is connected to the cylinder outlet gasket filter CFG-L. The cylinder outlet The rear end of the pneumatic isolation valve AV-2L is connected to the pressure regulating valve REG-L, the front end of the gas overflow switch EFS-L is connected to the pressure regulating valve REG-L, the rear end of the gas overflow switch EFS-L is connected to the pneumatic isolation valve AV-3L through a pipeline, and the low-pressure end pressure sensor PT-2L is arranged between the pipeline of the gas overflow switch EFS-L and the pneumatic isolation valve AV-3L. The rear end of the pneumatic isolation valve AV-3L is connected to the filter GF-L, the front end of the manual isolation valve MV-8L is connected to the filter GF-L, the rear end of the manual isolation valve MV-8L is connected to the outlet pneumatic valve AV-21 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-21, and the rear end of the outlet manual valve MV-21 is connected to the gas outlet.

2. The gas cylinder cabinet for special gas delivery according to claim 1, characterized in that: The purge and discharge unit also includes a cylinder outlet pressure sensor PT-1R, a cylinder outlet gasket filter CFG-R, a cylinder outlet pneumatic isolation valve AV-2R, a pressure regulating valve REG-R, a gas overflow switch EFS-R, a low-pressure end pressure sensor PT-2R, a pneumatic isolation valve AV-3R, a filter GF-R, a manual isolation valve MV-8R, an outlet pneumatic valve AV-22, an outlet pneumatic valve AV-23, an outlet manual valve MV-22 and an outlet manual valve MV-23. A second steel gas cylinder is also installed inside the cabinet. The front end of the cylinder outlet pressure sensor PT-1R is connected to the interface of the second steel gas cylinder through a pipeline, and the rear end of the cylinder outlet pressure sensor PT-1R is connected to the cylinder outlet gasket filter CFG-R, the front end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the cylinder outlet gasket filter CFG-R, the rear end of the cylinder outlet pneumatic isolation valve AV-2R is connected to the pressure regulating valve REG-R, and the gas overflow switch The front end of EFS-R is connected to the pressure regulating valve REG-R, the rear end of the gas overflow switch EFS-R is connected to the pneumatic isolation valve AV-3R through a pipeline, the low-pressure end pressure sensor PT-2R is arranged between the pipeline of the gas overflow switch EFS-R and the pneumatic isolation valve AV-3R, the rear end of the pneumatic isolation valve AV-3R is connected to the filter GF-R, the front end of the manual isolation valve MV-8R is connected to the filter GF-R, the rear end of the manual isolation valve MV-8R is connected to the outlet pneumatic valve AV-23 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-23, the rear end of the outlet manual valve MV-23 is connected to the gas outlet, the rear ends of the manual isolation valve MV-8L and the manual isolation valve MV-8R are both connected to the outlet pneumatic valve AV-22 through a pipeline, the rear end of the outlet pneumatic valve is connected to the outlet manual valve MV-22, and the rear end of the outlet manual valve MV-22 is connected to the gas outlet.

3. The gas cylinder cabinet for special gas delivery according to claim 2, characterized in that: The purge and discharge unit includes a low-pressure nitrogen inlet manual isolation valve MV-3N, a high-pressure nitrogen inlet pneumatic isolation valve AV-1H, a low-pressure nitrogen inlet one-way valve CV-1N, a high-pressure nitrogen inlet one-way valve CV-1H, a high-pressure nitrogen pneumatic isolation valve AV-1N, a pneumatic valve AV-2NL, a pneumatic valve AV-2NR, a discharge pneumatic valve AV-9L, a discharge pneumatic valve AV-9R, a purge gas pressure sensor PT-3L and a purge gas pressure sensor PT-3R. The front end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to the low-pressure nitrogen pipeline, the rear end of the low-pressure nitrogen inlet manual isolation valve MV-3N is connected to the low-pressure nitrogen inlet one-way valve CV-1N, the front end of the high-pressure nitrogen pneumatic isolation valve AV-1N is connected to the low-pressure nitrogen inlet one-way valve CV-1N, and the high-pressure nitrogen gas The rear end of the pneumatic isolation valve AV-1N is connected to the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines, the front end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to the high-pressure nitrogen pipeline, the rear end of the high-pressure nitrogen inlet pneumatic isolation valve AV-1H is connected to the high-pressure nitrogen inlet one-way valve CV-1H, the rear end of the high-pressure nitrogen inlet one-way valve CV-1H is connected to the front end pipelines of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR through pipelines, the rear ends of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR are connected to the front ends of the exhaust pneumatic valve AV-9L and the exhaust pneumatic valve AV-9R through pipelines, and the purge gas pressure sensor PT-3L and the purge gas pressure sensor PT-3R are respectively arranged in the pipelines.

4. The gas cylinder cabinet for special gas delivery according to claim 3, characterized in that: The purge and discharge unit also includes a flow limiting orifice OF-3L, a flow limiting orifice OF-3R, a purge pneumatic valve AV-7L, a purge pneumatic valve AV-7R, a test port manual valve MV-10L, a test port manual valve MV-10R, an exhaust gas isolation valve AV-5L, an exhaust gas isolation valve AV-5R, a discharge check valve CV-2L, a discharge check valve CV-2R, a discharge pipeline flow limiting orifice OF-1L, a discharge pipeline flow limiting orifice OF-1R and a vacuum generator VG, the flow limiting orifice OF-3L The flow limiting orifice OF-3R is respectively arranged at the rear end connection of the pneumatic valve AV-2NL and the pneumatic valve AV-2NR, the discharge pipeline flow limiting orifice OF-1L and the discharge pipeline flow limiting orifice OF-1R are respectively arranged at the front end connection of the discharge pneumatic valve AV-9L and the discharge pneumatic valve AV-9R, and the front ends of the purge pneumatic valve AV-7L and the purge pneumatic valve AV-7R are respectively connected to the cylinder outlet pneumatic isolation valve AV-2L and the cylinder outlet pneumatic isolation valve AV-2R. The front end pipeline of the purge valve AV-2R is connected to the front end pipeline of the purge pneumatic valve AV-7L and the rear end of the purge pneumatic valve AV-7R are respectively connected to the purge pipeline, the front ends of the test port manual valve MV-10L and the test port manual valve MV-10R are respectively connected to the purge pipeline, the front ends of the exhaust gas isolation valve AV-5L and the exhaust gas isolation valve AV-5R are respectively connected to the front end pipelines of the pneumatic isolation valve AV-3L and the pneumatic isolation valve AV-3R, and the exhaust gas isolation valve AV-5 L and the rear end of the exhaust gas isolation valve AV-5R are respectively connected to the exhaust check valve CV-2L and the exhaust check valve CV-2R, and the rear ends of the exhaust check valve CV-2L and the exhaust check valve CV-2R are respectively connected to the purge pipeline, and the rear end pipelines of the exhaust pneumatic valve AV-9L and the exhaust pneumatic valve AV-9R are merged and connected to the vacuum generator VG, the front end of the vacuum generator VG is connected to the Venturi nitrogen pipeline, and the rear end of the vacuum generator VG is connected to the exhaust pipeline.

5. The gas cylinder cabinet for special gas delivery according to claim 4, characterized in that: The alarm unit includes a flame detector, a differential pressure switch and an audible and visual alarm. The flame detector is arranged inside the cabinet, the differential pressure switch is arranged inside the electric control box, and the audible and visual alarm is installed on the electric control box door. The flame detector, the differential pressure switch and the audible and visual alarm are all electrically connected to the PLC control system.

6. The gas cylinder cabinet for special gas delivery according to claim 5, characterized in that: The electric control box door is also provided with a pressure differential gauge, and the cabinet door is also provided with an observation window.

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