Rapid analysis and detection device for ultrapure gas

Abstract

The utility model discloses a rapid analysis and detection device for ultrapure gas, which comprises a sampling end, a plurality of sampling points, a plurality of sample conveying pipes and an analysis chamber, and the output ends of the plurality of unit sampling points are respectively connected with unit sample conveying pipes; the tail end of the unit sample conveying pipe is correspondingly connected to a unit sample input end at the front end of a linkage mistake-proofing mechanism in the analysis chamber, an air interchanger is arranged in the middle of the linkage mistake-proofing mechanism, and a sample output end is arranged at the rear end of the linkage mistake-proofing mechanism; and the sample output ends are respectively connected to a plurality of unit analysis input ends corresponding to the sampling points through a sample conveying header pipe. The device disclosed by the utility model has the functions that the device can avoid the situation of difficulty in replacement due to overlong public conveying pipeline during sample gas switching in the prior art, and avoids the cross contamination phenomenon caused by human errors; and a pipeline ventilation device is arranged in the middle of the interlocking mistake-proofing mechanism, so that the pipeline replacement efficiency is improved.

Description

Technical Field

[0001] This utility model patent belongs to the technical field of ultrapure gas analysis and detection equipment, and specifically relates to an ultrapure gas rapid analysis and detection device. Background Art

[0002] like Figure 1 As shown, conventional ultrapure gas is collected in a sampling room through a plurality of sampling points and fed into a sample delivery main pipe, which is then delivered to a plurality of analyzers in an analysis room for analysis. Since the sampling end and the sample delivery pipeline are too long, the previous sampling has a great influence on the next sample analysis, and the replacement time of the analysis pipeline is long, which affects the analysis rate and accuracy. In addition, there is no interlocking error prevention mechanism at the analysis end, which easily causes misoperation and cross contamination of the sample gas, greatly reducing the filling and production efficiency of ultrapure gas and causing great interference to the analysis of the analyst.

[0003] Therefore, this paper proposes a rapid analysis and detection device for ultrapure gas. Utility Model Content

[0004] In order to solve the above technical problems, the utility model is implemented through the following technical solutions: a rapid analysis and detection device for ultrapure gas, including a sampling end, a sampling point, a sample delivery pipe, and an analysis chamber. A number of unit sampling points are arranged in the sampling end, and the unit sampling points are connected to the analysis chamber through a sample delivery pipe. The output ends of the several unit sampling points are respectively connected to the unit sample delivery pipes, and the ends of the unit sample delivery pipes are correspondingly connected to the unit sample input ends at the front end of the interlocking error prevention mechanism in the analysis chamber. A ventilation device is provided in the middle of the interlocking error prevention mechanism, and a sample output end is provided at the rear end of the interlocking error prevention mechanism. The sample output ends are respectively connected to several unit analysis input ends corresponding to the sampling points through the sample delivery main pipe.

[0005] Preferably, a diaphragm valve A, a pressure reducing valve A, and a pressure gauge A are installed on the output end of the unit sampling point in sequence from front to back.

[0006] Preferably, the unit sample input end is sequentially installed with a diaphragm valve B, a pressure gauge B, a one-way valve A, a pneumatic diaphragm valve, and a diaphragm valve C from front to back.

[0007] Preferably, the ventilation device also includes an exhaust pipe, a venting structure, and a vacuuming structure. The front end of the exhaust pipe is connected to the middle pipe of the interlocking error prevention mechanism, and the rear end pipe of the exhaust pipe is respectively equipped with a venting structure and a vacuuming structure.

[0008] Preferably, a diaphragm valve D and a one-way valve B are installed on the venting structure in sequence from front to back.

[0009] Preferably, a diaphragm valve E and a one-way valve C are sequentially installed on the vacuum structure from front to back.

[0010] Preferably, the sample output end is sequentially installed with a filter, a pressure reducing valve C, and a pressure gauge C from front to back; this structure can perform two-stage pressure reduction on the sample gas.

[0011] Preferably, a diaphragm valve F, a pressure reducing valve D, and a pressure gauge D are installed on the analysis input end of the unit in sequence from front to back.

[0012] The beneficial effects of the utility model are:

[0013] This device can avoid the situation in the prior art where sample gas switching is difficult due to the long common delivery pipeline; after the sample gases in the analysis room are merged, only one sample gas is allowed to enter the sample output end at a time, and then discharged into the corresponding unit analyzer, eliminating cross contamination caused by human error; among them, a common pipeline ventilation device for the sample gases in the analysis room is provided in the middle of the interlocking error prevention mechanism, which improves the efficiency of pipeline replacement; and the sample gas in the device enters the analyzer after three-stage pressure reduction, the sample gas pressure is stable, and the interference with the analysis is smaller. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Those skilled in the art can also derive other drawings based on these drawings without inventive work:

[0015] Figure 1 It is a structural diagram of an ultrapure gas analysis and detection device in the prior art;

[0016] Figure 2 It is a structural diagram of the utility model;

[0017] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0018] 1. Unit sampling point; 2. Output end of unit sampling point; 3. Unit sample delivery pipe; 4. Unit sample input end; 5. Sample output end; 6. Sample delivery main pipe; 7. Unit analysis input end; 8. Unit analyzer; 9. Diaphragm valve A; 10. Pressure reducing valve A; 11. Pressure gauge A; 12. Diaphragm valve B; 13. Pressure gauge B; 14. Check valve A; 15. Pneumatic diaphragm valve; 16. Diaphragm valve C; 17. Exhaust pipe; 18. Diaphragm valve D; 19. Check valve B; 20. Diaphragm valve E; 21. Check valve C; 22. Filter; 23. Pressure reducing valve C; 24. Pressure gauge C; 25. Diaphragm valve F; 26. Pressure reducing valve D; 27. Pressure gauge D. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0020] like Figures 1 to 2 As shown, the prior art in this embodiment has the following problems: The inventors discovered that conventional ultrapure gas is transported to multiple analyzers in the analysis room for analysis by using multiple sampling points in the sampling room to be fed into a sample delivery main pipe. Due to the excessive length of the sampling end and the sample delivery pipeline, the previous sampling has a significant impact on the next sample analysis, and the replacement time of the analysis pipeline is long, which affects the analysis rate and accuracy. In addition, the lack of a chain error prevention mechanism at the analysis end easily leads to misoperation and cross contamination of the sample gas, which greatly reduces the filling and production efficiency of ultrapure gas and greatly interferes with the analysis of analysts.

[0021] Therefore, the inventor provides an ultra-pure gas rapid analysis and detection device, including a sampling end, a sampling point, a sample delivery tube, and an analysis chamber. Several unit sampling points 1 are arranged in the sampling end, and the unit sampling point 1 is connected to the analysis chamber through a sample delivery tube. The output ends 2 of the several unit sampling points 1 are respectively connected to the unit sample delivery tube 3, and the ends of the unit sample delivery tubes 3 are correspondingly connected to the unit sample input end 4 at the front end of the interlocking error prevention mechanism in the analysis chamber. A ventilation device is provided in the middle of the interlocking error prevention mechanism, and a sample output end 5 is provided at the rear end of the interlocking error prevention mechanism. The sample output end 5 is respectively connected to several unit analysis input ends 7 corresponding to the sampling points through a sample delivery main pipe 6.

[0022] The effect is: the device can transport samples from each on-site sampling point to the analysis room through the unit sample delivery pipe 3, avoiding the situation in the prior art where the common delivery pipe is too long and replacement is difficult when switching sample gases; a chain error prevention mechanism with an automatic control point is set at the end of the unit sample delivery pipe 3 before the sample gases in the analysis room are merged, and the diaphragm valve B12, pressure gauge B13, one-way valve A14, and diaphragm valve C16 on the unit sample input end 4 in the chain error prevention mechanism are interlocked with each other, allowing only one path of sample gas to enter the sample output end 5 at a time, and then be discharged into the corresponding unit analyzer 8, eliminating the cross contamination caused by human error; wherein, a common pipeline ventilation device for the sample gas in the analysis room is set in the middle of the chain error prevention mechanism, which improves the pipeline replacement efficiency; and the sample gas in the device enters the analyzer after three-stage pressure reduction, the sample gas pressure is stable, and the interference with the analysis is smaller.

[0023] Furthermore, a diaphragm valve A9, a pressure reducing valve A10, and a pressure gauge A11 are installed on the output end 2 of the unit sampling point 1 in sequence from front to back; this structure can perform a first-stage pressure reduction on the sample gas.

[0024] Furthermore, a diaphragm valve B12, a pressure gauge B13, a one-way valve A14, a pneumatic diaphragm valve 15, and a diaphragm valve C16 are installed on the unit sample input end 4 in sequence from front to back; this structure can perform interlocking error prevention on multiple groups of sample gases, and cooperate with the ventilation device and the sample output end 5 to control the pipeline to allow only one path of sample gas to enter the sample output end 5 at a time, and then be discharged into the corresponding unit analyzer 8, thereby eliminating cross contamination caused by human errors.

[0025] Furthermore, the ventilation device also includes an exhaust pipe 17, a venting structure, and a vacuuming structure. The front end of the exhaust pipe 17 is connected to the middle pipe of the interlocking error prevention mechanism, and the rear end pipe of the exhaust pipe 17 is respectively installed with a venting structure and a vacuuming structure; this structure speeds up the switching of sample gas and the purification and disposal efficiency of the analysis pipeline, and improves the operability of the analyst.

[0026] Furthermore, a diaphragm valve D18 and a one-way valve B19 are installed on the venting structure in sequence from front to back; this structure can quickly vent the gas in the middle pipeline of the interlocking error-proofing mechanism.

[0027] Furthermore, a diaphragm valve E20 and a one-way valve C21 are installed on the vacuum structure from front to back; this structure can cooperate with the venting structure to vacuum the middle pipeline of the interlocking error prevention mechanism to form a negative pressure, thereby accelerating the switching of sample gas and the purification and disposal efficiency of the analysis pipeline.

[0028] Furthermore, a filter 22, a pressure reducing valve C23, and a pressure gauge C24 are sequentially installed on the sample output end 5 from front to back; this structure can perform two-stage pressure reduction on the sample gas.

[0029] Furthermore, a diaphragm valve F25, a pressure reducing valve D26, and a pressure gauge D27 are sequentially installed on the unit analysis input terminal 7 from front to back; this structure can perform three-stage pressure reduction on the sample gas.

[0030] The working principle of the present utility model is as follows: the device can transport samples from each on-site sampling point to the analysis chamber through the unit sample delivery pipe 3. A chain error prevention mechanism with an automatic control point is set at the end of the unit sample delivery pipe 3 before the sample gases in the analysis chamber merge. The diaphragm valve B12, pressure gauge B13, one-way valve A14, and diaphragm valve C16 on the unit sample input end 4 in the chain error prevention mechanism are interlocked with each other, allowing only one path of sample gas to enter the sample output end 5 at a time, and then be discharged into the corresponding unit analyzer 8.

[0031] Based on the above embodiments, the inventors have found through experimental research that after using the device, the analysis rate is increased from once every 90 minutes to once every 40 minutes, which greatly improves the efficiency of ultrapure gas production and filling.

[0032] It is apparent for a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, the scope of the present application being defined by the claims appended hereto rather than by the above description, and all the changes which fall within the meaning and the scope of the equivalent elements of the claims are intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims to the figures in which the reference signs are used.

[0033] Furthermore, it should be understood that although the present specification is described in terms of embodiments, not every embodiment according to the present specification needs to exhibit each and every characteristic specified in the present specification. The specification can also be described in terms of a single independent technical solution, but this does not mean that each embodiment only contains one independent technical solution. The specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by a person skilled in the art.

Claims

1. An ultrapure gas rapid analysis and detection device, comprising a sampling end, a sampling point, a sample delivery tube, and an analysis chamber, wherein a plurality of unit sampling points (1) are provided in the sampling end, and the unit sampling points (1) are connected to the analysis chamber via the sample delivery tube, and characterized in that: The output ends (2) of the plurality of unit sampling points (1) are respectively connected to unit sample delivery pipes (3), and the ends of the unit sample delivery pipes (3) are correspondingly connected to the unit sample input end (4) at the front end of the interlocking error prevention mechanism in the analysis room. A ventilation device is provided in the middle of the interlocking error prevention mechanism, and a sample output end (5) is provided at the rear end of the interlocking error prevention mechanism. The sample output end (5) is respectively connected to the plurality of unit analysis input ends (7) corresponding to the sampling points through a sample delivery main pipe (6).

2. The ultrapure gas rapid analysis and detection device according to claim 1, characterized in that: The output end (2) of the unit sampling point (1) is provided with a diaphragm valve A (9), a pressure reducing valve A (10), and a pressure gauge A (11) in sequence from front to back.

3. The ultrapure gas rapid analysis and detection device according to claim 1, characterized in that: The unit sample input end (4) is sequentially installed with a diaphragm valve B (12), a pressure gauge B (13), a one-way valve A (14), a pneumatic diaphragm valve (15), and a diaphragm valve C (16) from front to back.

4. The ultrapure gas rapid analysis and detection device according to claim 1, characterized in that: The ventilation device further comprises an exhaust pipe (17), a venting structure, and a vacuuming structure. The front end of the exhaust pipe (17) is connected to the middle pipe of the interlocking error prevention mechanism, and the rear end of the exhaust pipe (17) is respectively equipped with the venting structure and the vacuuming structure.

5. The ultrapure gas rapid analysis and detection device according to claim 4, characterized in that: The venting structure is provided with a diaphragm valve D (18) and a one-way valve B (19) in sequence from front to back.

6. The ultrapure gas rapid analysis and detection device according to claim 4, characterized in that: The vacuum pumping structure is provided with a diaphragm valve E (20) and a one-way valve C (21) in sequence from front to back.

7. The ultrapure gas rapid analysis and detection device according to claim 1, characterized in that: The sample output end (5) is sequentially installed with a filter (22), a pressure reducing valve C (23), and a pressure gauge C (24) from front to back.

8. The ultrapure gas rapid analysis and detection device according to claim 1, characterized in that: The unit analysis input end (7) is sequentially installed with a diaphragm valve F (25), a pressure reducing valve D (26), and a pressure gauge D (27) from front to back.

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