Phosphorus cracking source

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a phosphorus cracking source which comprises at least one white phosphorus pool, a cracking device, a communicating pipeline, at least one white phosphorus control valve and at least one angle valve. The at least one white phosphorus pool is used for generating white phosphorus steam. The cracking device is communicated with at least one white phosphorus pool and used for receiving white phosphorus steam generated by the white phosphorus pool for cracking. The communicating pipeline is used for connecting at least one white phosphorus pool and the cracking device. And the white phosphorus control valve is arranged on the communicating pipeline and is used for controlling the flow of the white phosphorus steam. And the at least one angle valve is arranged on the communicating pipeline and is positioned between the at least one white phosphorus pool and the at least one white phosphorus control valve.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of vacuum equipment, in particular to a phosphorus cracking source. BACKGROUND

[0002] There are two allotropes of solid phosphorus, red phosphorus and white phosphorus. The sublimation coefficient of red phosphorus is low, and the vapor pressure is small. It is difficult to obtain a stable and sustainable beam in a molecular beam epitaxy (MBE) system by directly using red phosphorus sublimation and cracking into phosphorus molecules (P2). At the same temperature, the vapor pressure of white phosphorus is much higher than that of red phosphorus. A stable phosphorus source can be supplied to the cracking source at a lower temperature by using white phosphorus, and the phosphorus molecules are cracked to make the quality of the grown material better. However, white phosphorus is highly reactive and can easily self-ignite at room temperature in the air, so it cannot be safely loaded into the phosphorus cracking source from the atmosphere. By dividing the phosphorus cracking source into a red phosphorus area, a white phosphorus area, and a cracking area, the red phosphorus area is continuously heated, the red phosphorus vapor is formed after evaporation, and the white phosphorus is condensed after being introduced into the white phosphorus area, and then introduced into the cracking area, so that a safe and stable phosphorus beam can be realized. However, white phosphorus is prone to condensation on the flow control valve during operation. In order to prevent white phosphorus from condensing on the flow control valve, the prior art needs to introduce a device for heating the flow control valve. However, long-term thermal expansion and contraction can cause gaps in the flow control valve, which in turn reduces the beam repeatability and shortens the service life. SUMMARY

[0003] The present disclosure provides a phosphorus cracking source, characterized in that it comprises:

[0004] at least one white phosphorus pool for generating white phosphorus vapor;

[0005] a cracking device in communication with the at least one white phosphorus pool for receiving the white phosphorus vapor generated by the at least one white phosphorus pool for cracking;

[0006] a communication pipeline for connecting the at least one white phosphorus pool and the cracking device;

[0007] at least one white phosphorus control valve disposed on the communication pipeline for controlling the flow of white phosphorus vapor; and

[0008] at least one angle valve disposed on the communication pipeline and located between the at least one white phosphorus pool and the at least one white phosphorus control valve.

[0009] In some embodiments of the present disclosure, the at least one white phosphorus pool includes a single white phosphorus pool, the communication pipeline includes a single pipeline, the at least one white phosphorus control valve includes a single white phosphorus control valve disposed on the single pipeline, and the at least one angle valve includes a single angle valve respectively located on the single pipeline, between the single white phosphorus pool and the single white phosphorus control valve.

[0010] In some embodiments of the present disclosure, the at least one white phosphorus pool comprises a plurality of white phosphorus pools, the communication pipeline comprises a plurality of parallel pipelines, the plurality of parallel pipelines respectively connect the plurality of white phosphorus pools and the cracking device, the at least one white phosphorus control valve comprises a plurality of white phosphorus control valves respectively arranged on the plurality of parallel pipelines, and the at least one angle valve comprises a plurality of angle valves respectively located between the plurality of parallel pipelines, the plurality of white phosphorus pools and the plurality of white phosphorus control valves.

[0011] In some embodiments of the present disclosure, the at least one white phosphorus pool comprises a plurality of white phosphorus pools, the communication pipeline comprises a plurality of parallel pipelines and a converging pipeline, the plurality of parallel pipelines respectively connect the plurality of white phosphorus pools and the converging pipeline, the converging pipeline is connected with the cracking device, the at least one white phosphorus control valve comprises a single white phosphorus control valve arranged on the converging pipeline, and the at least one angle valve comprises a plurality of angle valves respectively located between the plurality of parallel pipelines, the plurality of white phosphorus pools and the single white phosphorus control valve.

[0012] In some embodiments of the present disclosure, the phosphorus cracking source further comprises:

[0013] At least one red phosphorus pool in communication with the at least one white phosphorus pool for generating red phosphorus vapor, and the at least one white phosphorus pool is further used for storing white phosphorus generated by the red phosphorus pool when the red phosphorus vapor is cooled.

[0014] In some embodiments of the present disclosure, the phosphorus cracking source further comprises:

[0015] At least one red phosphorus isolation valve arranged on the communication pipeline between the at least one white phosphorus pool and the at least one red phosphorus pool for vacuum isolation of the red phosphorus pool and the white phosphorus pool.

[0016] In some embodiments of the present disclosure, the red phosphorus pool comprises a red phosphorus pool valve connected with a vacuum pump or a phosphorus recovery device.

[0017] In some embodiments of the present disclosure, the phosphorus cracking source further comprises a phosphorus recovery device, comprising:

[0018] A phosphorus cracking zone in communication with the red phosphorus pool for cracking the recovered phosphorus into phosphorus molecules; and

[0019] A phosphorus collection zone in communication with the phosphorus cracking zone for cooling the received phosphorus molecules from the phosphorus cracking zone.

[0020] In some embodiments of the present disclosure, the phosphorus cracking zone comprises a heater; and / or

[0021] The phosphorus collection zone comprises a cooler; and / or

[0022] The phosphorus recovery device further comprises a recovery pump in communication with the phosphorus collection zone for providing power for phosphorus recovery.

[0023] In some embodiments of the present disclosure, the phosphorus recovery device further comprises a cooling zone valve arranged on a communication pipeline of the phosphorus collection zone and the recovery pump.

[0024] The phosphorus cracking source according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the phosphorus cracking source according to some embodiments of the present disclosure, by arranging the isolation angle valve between the at least one white phosphorus pool and the at least one white phosphorus control valve, through the reliable sealing and fast response of the angle valve, can protect the white phosphorus control valve from condensation of white phosphorus thereon, avoid or reduce the condensation of white phosphorus on the white phosphorus control valve, so that the white phosphorus control valve does not need to be heated or the like to deal with the condensed white phosphorus, prolong the service life of the white phosphorus control valve and improve the repeated control accuracy thereof. For another example, the phosphorus cracking source according to some embodiments of the present disclosure, by using the structure of multiple white phosphorus pools in parallel, can realize continuous and uninterrupted production of phosphorus molecules, and provide a stable and continuous phosphorus beam for the cracking device. For another example, the phosphorus cracking source according to some embodiments of the present disclosure, the gas released in the degassing process of the red phosphorus, the gas released in the degassing process of the white phosphorus, and the removal of the remaining white phosphorus can all be realized by the phosphorus recovery device connected with the red phosphorus pool, without passing through the vacuum processing cavity (for example, a molecular beam epitaxy (MBE) growth cavity), thereby reducing the pollution and accumulation of useless phosphorus materials in the vacuum processing cavity, and reducing the maintenance requirements of the system. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only one embodiment of the present disclosure, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0026] Figure 1 Fig. 1 shows a structural schematic diagram of a phosphorus cracking source according to some embodiments of the present disclosure;

[0027] Figure 2 Fig. 2 shows a structural schematic diagram of a phosphorus cracking source according to some other embodiments of the present disclosure;

[0028] Figure 3 Fig. 3 shows a structural schematic diagram of a phosphorus cracking source according to some other embodiments of the present disclosure;

[0029] Figure 4 Fig. 4 shows a structural schematic diagram of a phosphorus recovery device according to some embodiments of the present disclosure;

[0030] In the above drawings, the respective reference signs represent:

[0031] 100, 200, 300 - phosphorus cracking source

[0032] 110, 210a, 210b, 310a, 310b - white phosphorus pool

[0033] 111 - heating / cooling device

[0034] 120, 220, 320 - cleaving device

[0035] 121, 221, 321 - cleaving device heater

[0036] 130, 230, 330 - communication line

[0037] 131 - single line

[0038] 231a, 231b, 331a, 331b - parallel lines

[0039] 332 - converging line

[0040] 140, 240a, 240b, 340 - white phosphorus control valve

[0041] 150, 250a, 250b, 350a, 350b - angle valve

[0042] 160, 260, 360 - red phosphorus cell

[0043] 161, 261, 361 - red phosphorus cell valve

[0044] 162 - red phosphorus cell heater

[0045] 170, 270a, 270b, 370a, 370b - red phosphorus isolation valve

[0046] 180 - phosphorus recovery device

[0047] 181 - phosphorus cleaving zone

[0048] 1811 - heater

[0049] 1812 - recovery valve

[0050] 1813 - collection valve

[0051] 182 - phosphorus collection zone

[0052] 1821 - cooler

[0053] 183 - recovery pump

[0054] 184 - cooling zone valve DETAILED DESCRIPTION

[0055] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It is obvious that the described embodiments are only exemplary embodiments of the present disclosure, not all embodiments.

[0056] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom", "horizontal", "longitudinal" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or distal side refers to the end or side that extends into a vacuum environment (e.g., a vacuum chamber), and the proximal end or proximal side refers to the end or side opposite to the distal end or distal side (e.g., the end or side away from the vacuum chamber, or the end or side within the vacuum chamber close to the vacuum chamber wall, etc.). Alternatively, the end or side close to the driving device is the proximal end or proximal side, and the end or side away from the driving device is the distal end or distal side. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0057] Figure 1 A schematic structural diagram of a phosphorus cracking source 100 according to some embodiments of the present disclosure is shown.

[0058] like Figure 1 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 100 may include at least one white phosphorus pool (e.g., white phosphorus pool 110), a cracking device 120, a connecting pipe 130, at least one white phosphorus control valve (e.g., white phosphorus control valve 140) and at least one angle valve (e.g., angle valve 150). At least one white phosphorus pool (e.g., white phosphorus pool 110) is used to generate white phosphorus vapor. The cracking device 120 is connected to the at least one white phosphorus pool (e.g., white phosphorus pool 110) and is used to receive the white phosphorus vapor generated by the white phosphorus pool 110 for cracking. The connecting pipe 130 is used to connect the at least one white phosphorus pool (e.g., white phosphorus pool 110) and the cracking device 120. At least one white phosphorus control valve (e.g., white phosphorus control valve 140) can be provided on the connecting pipe 130 to control the flow rate of the white phosphorus vapor. At least one angle valve (eg, angle valve 150 ) may be disposed on the communication line 130 and located between at least one white phosphorus tank (eg, white phosphorus tank 110 ) and at least one white phosphorus control valve (eg, white phosphorus control valve 140 ).

[0059] In some embodiments of the present disclosure, the white phosphorus control valve (eg, white phosphorus control valve 140 ) may include a flow control valve that can be used to adjust the flow of phosphorus vapor from the white phosphorus pool 110 to the cracking unit 120 .

[0060] In some embodiments of the present disclosure, an isolation angle valve (e.g., angle valve 150) is provided between at least one white phosphorus pool (e.g., white phosphorus pool 110) and at least one white phosphorus control valve (e.g., white phosphorus control valve 140). The angle valve's reliable sealing and rapid response protect the white phosphorus control valve (e.g., white phosphorus control valve 140), preventing or reducing condensation of white phosphorus on the valve. The white phosphorus control valve (e.g., white phosphorus control valve 140) does not need to be heated or otherwise treated to condensed white phosphorus, thereby extending the valve's service life and improving its repeatable control accuracy. Furthermore, the angle valve (e.g., angle valve 150) can be completely closed through simple and rapid operation, isolating the white phosphorus pool 110 from the cracking unit 120 and avoiding material waste during standby operation.

[0061] like Figure 1 As shown, in some embodiments of the present disclosure, at least one white phosphorus pool may include a single white phosphorus pool 110. The connecting pipeline 130 may include a single pipeline 131. The at least one white phosphorus control valve may include a single white phosphorus control valve 140 disposed on the single pipeline 131. The at least one angle valve may include a single angle valve 150 located on the single pipeline 131 and between the single white phosphorus pool 110 and the single white phosphorus control valve 140.

[0062] Those skilled in the art will understand that although Figure 1 A single white phosphorus tank 110 is shown, but this is only exemplary, and the phosphorus cracking source 100 may also include multiple white phosphorus tanks, such as Figure 2 and Figure 3 The two white phosphorus pools shown in parallel, or three or more white phosphorus pools, are in communication with a cracking device (eg, cracking device 120).

[0063] like Figure 1 As shown, in some embodiments of the present disclosure, the white phosphorus pool 110 may include a heating / cooling device 111. The heating / cooling device 111 may be used to condense red phosphorus vapor into white phosphorus, and to evaporate white phosphorus into white phosphorus vapor.

[0064] In some embodiments of the present disclosure, the heating / cooling device 111 may include an integrated device that integrates both heating and cooling functions, such as a heat exchanger that achieves temperature regulation through media of different temperatures. The heating / cooling device 111 may also include a separate cooling device and a separate heating device, for example, a cooling device such as air cooling or water cooling and a heating device such as a heater.

[0065] like Figure 1 As shown, in some embodiments of the present disclosure, the cracker 120 may include a cracker heater 121 for cracking white phosphorus vapor into phosphorus molecules.

[0066] like Figure 1 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 100 may further include at least one red phosphorus tank (e.g., red phosphorus tank 160). The at least one red phosphorus tank (e.g., red phosphorus tank 160) is connected to at least one white phosphorus tank (e.g., white phosphorus tank 110) to generate red phosphorus vapor. The at least one white phosphorus tank (e.g., white phosphorus tank 110) is also used to store white phosphorus generated by cooling the red phosphorus vapor generated by the red phosphorus tank (e.g., red phosphorus tank 160).

[0067] Those skilled in the art will understand that although Figure 1 A single red phosphorus pool 160 is shown, but this is merely exemplary. The phosphorus cracking source 100 may also include multiple red phosphorus pools, such as two or three or more red phosphorus pools connected in parallel, etc., connected to at least one white phosphorus pool (e.g., white phosphorus pool 110).

[0068] like Figure 1 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 100 may further include at least one red phosphorus isolation valve (e.g., red phosphorus isolation valve 170), which is respectively arranged on the connecting pipelines of at least one white phosphorus pool (e.g., white phosphorus pool 110) and at least one red phosphorus pool (e.g., red phosphorus pool 160) for vacuum isolation of the red phosphorus pool 160 from the white phosphorus pool 110.

[0069] In some embodiments of the present disclosure, after the red phosphorus in the red phosphorus pool 160 is completely converted into white phosphorus, the red phosphorus isolation valve 170 between the red phosphorus pool 160 and the white phosphorus pool 110 may be closed.

[0070] like Figure 1 As shown, in some embodiments of the present disclosure, the red phosphorus pool 160 may include a red phosphorus pool valve 161. The red phosphorus pool valve 161 may be used to connect a vacuum pump or a phosphorus recovery device (e.g., Figure 4 Phosphorus recovery device 180 is shown).

[0071] like Figure 1 As shown, in some embodiments of the present disclosure, the red phosphorus pool 160 may further include a red phosphorus pool heater 162. The red phosphorus pool heater 162 is used to heat the red phosphorus in the red phosphorus pool 160 to form red phosphorus vapor.

[0072] Figure 2 Schematic diagrams of the structure of a phosphorus cracking source 200 according to other embodiments of the present disclosure are shown.

[0073] like Figure 2As shown, in some embodiments of the present disclosure, the at least one white phosphorus pool can include a plurality of white phosphorus pools, such as white phosphorus pool 210a and white phosphorus pool 210b. The communication pipeline 230 can include a plurality of parallel pipelines, such as parallel pipeline 231a and parallel pipeline 231b. The plurality of parallel pipelines respectively connect the plurality of white phosphorus pools (e.g., white phosphorus pool 210a and white phosphorus pool 210b) with the cracking device 220. Specifically, the parallel pipeline 231a connects the white phosphorus pool 210a with the cracking device 220, and the parallel pipeline 231b connects the white phosphorus pool 210b with the cracking device 220. The at least one white phosphorus control valve can include a white phosphorus control valve 240a disposed on the parallel pipeline 231a and a white phosphorus control valve 240b disposed on the parallel pipeline 231b. The at least one angle valve can include an angle valve 250a located on the parallel pipeline 231a between the white phosphorus pool 210a and the white phosphorus control valve 240a, and an angle valve 250b located on the parallel pipeline 231b between the white phosphorus pool 210b and the white phosphorus control valve 240b.

[0074] In some embodiments of the present disclosure, the white phosphorus pool 210a and the white phosphorus pool 210b can include a heating / cooling device (not shown in the figure). Figure 2 The heating / cooling device can be used to condense the red phosphorus vapor into white phosphorus, and to evaporate the white phosphorus into white phosphorus vapor.

[0075] In some embodiments of the present disclosure, the cracking device 220 can include a cracking device heater 221 for cracking the white phosphorus vapor into phosphorus molecules.

[0076] Those skilled in the art can understand that, Figure 2 The phosphorus cracking source 200 shown including two parallel white phosphorus pools 210a and 210b is only exemplary, and the phosphorus cracking source 200 can also include other appropriate number of parallel white phosphorus pools, such as three or four or more parallel white phosphorus pools, and respectively connected with the cracking device 220 through parallel pipelines provided with angle valves and white phosphorus control valves.

[0077] In some embodiments of the present disclosure, using the structure of parallel connection of multiple white phosphorus pools, continuous and uninterrupted production of phosphorus molecules can be realized, and a stable and continuous phosphorus beam can be provided for the cracking device.

[0078] As Figure 2 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 200 can also include a red phosphorus pool 260. The red phosphorus pool 260 is in communication with the white phosphorus pool 210a and the white phosphorus pool 210b, and is used to generate red phosphorus vapor. The white phosphorus pool 210a and the white phosphorus pool 210b are also used to store white phosphorus generated by the red phosphorus vapor generated by the red phosphorus pool 260 when cooled.

[0079] Those skilled in the art can understand that, Figure 2The phosphorus cracking source 200 shown includes a single red phosphorus pool 260 for exemplary purposes only. The phosphorus cracking source 200 may also include other suitable numbers of red phosphorus pools, for example, the same number of red phosphorus pools as the number of white phosphorus pools, each red phosphorus pool being connected to a white phosphorus pool, or the number of red phosphorus pools being greater than the number of white phosphorus pools, with at least one red phosphorus pool being connected to a white phosphorus pool.

[0080] like Figure 2 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 200 may further include a red phosphorus isolation valve 270a and a red phosphorus isolation valve 270b. The red phosphorus isolation valve 270a is disposed on the connecting pipe between the white phosphorus tank 210a and the red phosphorus tank 260, and is used to vacuum isolate the red phosphorus tank 260 from the white phosphorus tank 210a. The red phosphorus isolation valve 270b is disposed on the connecting pipe between the white phosphorus tank 210b and the red phosphorus tank 260, and is used to vacuum isolate the red phosphorus tank 260 from the white phosphorus tank 210b.

[0081] like Figure 2 As shown, in some embodiments of the present disclosure, when white phosphorus pool 210a is used to normally produce phosphorus molecules, white phosphorus pool 210a can be isolated from red phosphorus pool 260 by red phosphorus isolation valve 270a, and white phosphorus pool 210a is connected to cracking pool 220. White phosphorus pool 210b is isolated from cracking pool 220 by angle valve 250b and is connected to red phosphorus pool 260. Conversely, when white phosphorus pool 210b is used to normally produce phosphorus molecules, white phosphorus pool 210b can be isolated from red phosphorus pool 260 by red phosphorus isolation valve 270b, and white phosphorus pool 210b is connected to cracking pool 220. White phosphorus pool 210a is isolated from cracking pool 220 by angle valve 250a and is connected to red phosphorus pool 260.

[0082] like Figure 2 As shown, in some embodiments of the present disclosure, the red phosphorus pool 260 may include a red phosphorus pool valve 261. The red phosphorus pool valve 261 may be connected to a vacuum pump or to a phosphorus recovery device (e.g., Figure 4 Phosphorus recovery device 180 is shown).

[0083] In some embodiments of the present disclosure, the red phosphorus pool 260 may further include a red phosphorus pool heater ( Figure 2 The red phosphorus pool heater is used to heat the red phosphorus in the red phosphorus pool 260 to form red phosphorus vapor.

[0084] like Figure 2 As shown, in some embodiments of the present disclosure, when one white phosphorus pool, for example, white phosphorus pool 210a, is in use to normally produce phosphorus molecules, another white phosphorus pool 210b can collect excess white phosphorus through a red phosphorus pool valve 261 reserved in red phosphorus pool 260. The production of phosphorus molecules and the collection of excess white phosphorus can proceed simultaneously without interfering with each other, thereby achieving continuous and uninterrupted production of phosphorus molecules.

[0085] Figure 3Schematic diagrams of the structure of a phosphorus cracking source 300 according to other embodiments of the present disclosure are shown.

[0086] like Figure 3 As shown, in some embodiments of the present disclosure, at least one white phosphorus tank may include multiple white phosphorus tanks, such as white phosphorus tank 310a and white phosphorus tank 310b. The connecting pipeline 330 may include multiple parallel pipelines (e.g., parallel pipeline 331a and parallel pipeline 331b) and a converging pipeline 332. The multiple parallel pipelines respectively connect the multiple white phosphorus tanks to the converging pipeline. For example, parallel pipeline 331a connects white phosphorus tank 310a to converging pipeline 332, and parallel pipeline 331b connects white phosphorus tank 310b to converging pipeline 332. Converging pipeline 332 is connected to the cracking device 320. The at least one white phosphorus control valve may include a single white phosphorus control valve 340 disposed on the converging pipeline. At least one angle valve may include multiple angle valves located on multiple parallel pipelines, between multiple white phosphorus pools and a single white phosphorus control valve, for example, angle valve 350a located on parallel pipeline 331a, between white phosphorus pool 310a and white phosphorus control valve 340, and angle valve 350b located on parallel pipeline 331b, between white phosphorus pool 310b and white phosphorus control valve 340.

[0087] In some embodiments of the present disclosure, the white phosphorus pool 310a and the white phosphorus pool 310b may include a heating / cooling device ( Figure 3 (not shown). The heating / cooling device can be used to condense the red phosphorus vapor into white phosphorus and to evaporate the white phosphorus into white phosphorus vapor.

[0088] like Figure 3 As shown, in some embodiments of the present disclosure, the cracking device 320 may include a cracking device heater 321 for cracking white phosphorus vapor into phosphorus molecules.

[0089] Those skilled in the art will understand that Figure 3 The phosphorus cracking source 300 shown includes two parallel white phosphorus pools for exemplary purposes only. The phosphorus cracking source 300 may also include other suitable numbers of parallel white phosphorus pools, for example, three or four or more parallel white phosphorus pools, which are respectively connected by parallel pipelines provided with angle valves and converging pipelines provided with white phosphorus control valves.

[0090] In some embodiments of the present disclosure, a structure in which multiple white phosphorus pools are connected in parallel can achieve continuous and uninterrupted production of phosphorus molecules, providing a stable and continuous phosphorus beam flow for the cracking device.

[0091] like Figure 3As shown, in some embodiments of the present disclosure, phosphorus cracking source 300 may further include a red phosphorus pool 360. Red phosphorus pool 360 is connected to white phosphorus pool 310a and white phosphorus pool 310b to generate red phosphorus vapor. White phosphorus pool 310a and white phosphorus pool 310b are also used to store white phosphorus generated by cooling the red phosphorus vapor generated by red phosphorus pool 360.

[0092] Those skilled in the art will understand that Figure 3 The phosphorus cracking source 300 shown includes a single red phosphorus pool 360 for exemplary purposes only. The phosphorus cracking source 300 may also include other suitable numbers of red phosphorus pools, for example, the same number of red phosphorus pools as the number of white phosphorus pools, each red phosphorus pool being connected to a white phosphorus pool, or the number of red phosphorus pools being greater than the number of white phosphorus pools, with at least one red phosphorus pool being connected to a white phosphorus pool.

[0093] like Figure 3 As shown, in some embodiments of the present disclosure, the phosphorus cracking source 300 may further include a red phosphorus isolation valve 370a and a red phosphorus isolation valve 370b. The red phosphorus isolation valve 370a is disposed on the connecting pipe between the white phosphorus tank 310a and the red phosphorus tank 360, and is used to vacuum isolate the red phosphorus tank 360 from the white phosphorus tank 210a. The red phosphorus isolation valve 370b is disposed on the connecting pipe between the white phosphorus tank 310b and the red phosphorus tank 360, and is used to vacuum isolate the red phosphorus tank 360 from the white phosphorus tank 310b.

[0094] like Figure 3 As shown, in some embodiments of the present disclosure, when white phosphorus pool 310a is used to normally produce phosphorus molecules, white phosphorus pool 310a can be isolated from red phosphorus pool 360 by red phosphorus isolation valve 370a, and white phosphorus pool 310a is connected to cracking pool 320. White phosphorus pool 310b is isolated from cracking pool 320 by angle valve 350b and connected to red phosphorus pool 360. Conversely, when white phosphorus pool 310b is used to normally produce phosphorus molecules, white phosphorus pool 310b can be isolated from red phosphorus pool 360 by red phosphorus isolation valve 370b, and white phosphorus pool 310b is connected to cracking pool 320. Another white phosphorus pool 310a is isolated from cracking pool 320 by angle valve 350a and connected to red phosphorus pool 360.

[0095] like Figure 4 As shown, in some embodiments of the present disclosure, the red phosphorus pool 360 may include a red phosphorus pool valve 361. The red phosphorus pool valve 361 may be connected to a vacuum pump or to a phosphorus recovery device (e.g., Figure 3 Phosphorus recovery device 180 is shown).

[0096] In some embodiments of the present disclosure, the red phosphorus pool 360 may further include a red phosphorus pool heater ( Figure 3 The red phosphorus pool heater is used to heat the red phosphorus in the red phosphorus pool 360 to form red phosphorus vapor.

[0097] like Figure 4As shown, in some embodiments of the present disclosure, when one white phosphorus pool, for example, white phosphorus pool 310a, is in use to normally produce phosphorus molecules, another white phosphorus pool 310b can collect excess white phosphorus through a reserved red phosphorus pool valve 361 in red phosphorus pool 360. The production of phosphorus molecules and the collection of excess white phosphorus can proceed simultaneously without interfering with each other, thereby achieving continuous and uninterrupted production of phosphorus molecules.

[0098] Figure 4 A schematic structural diagram of a phosphorus recovery device 180 according to some embodiments of the present disclosure is shown.

[0099] like Figure 4 As shown, in some embodiments of the present disclosure, a phosphorus cracking source (e.g., phosphorus cracking source 100, phosphorus cracking source 200, and phosphorus cracking source 300) may further include a phosphorus recovery device 180. Phosphorus recovery device 180 may include a phosphorus cracking zone 181 and a phosphorus collection zone 182. Phosphorus cracking zone 181 is connected to a red phosphorus pool (e.g., red phosphorus pool 160, red phosphorus pool 260, and red phosphorus pool 360) to crack recovered phosphorus into phosphorus molecules. Phosphorus collection zone 182 is connected to phosphorus cracking zone 181 to cool the phosphorus molecules received from the phosphorus cracking zone.

[0100] In some embodiments of the present disclosure, the removal of gases released during the degassing process of the red phosphorus pool (e.g., red phosphorus pools 160, 260, 360), gases released during the degassing process of the white phosphorus pool (e.g., white phosphorus pools 110, 210a, 210b, 310a, 310b), and residual white phosphorus can all be achieved through a phosphorus recovery device 180 connected to the red phosphorus pool (e.g., red phosphorus pools 160, 260, 360), without passing through a vacuum processing chamber (e.g., an MBE growth chamber), thereby reducing contamination of the vacuum processing chamber and accumulation of useless phosphorus materials, and lowering the maintenance requirements of the system.

[0101] like Figure 4 As shown, in some embodiments of the present disclosure, the phosphorus cracking zone 181 may include a heater 1811. The heater 1811 may be used to crack the recovered phosphorus into phosphorus molecules.

[0102] like Figure 4 As shown, in some embodiments of the present disclosure, the phosphorus collection area 182 may include a cooler 1821. The cooler 1821 may condense incoming phosphorus molecules into red phosphorus.

[0103] like Figure 4 As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 may further include a recovery pump 183. The recovery pump 183 is in communication with the phosphorus collection area 182 and is used to provide power for phosphorus recovery.

[0104] like Figure 4As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0105] As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183. Figure 1 As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183. Figure 2 As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183. Figure 2 As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183. Figure 4 As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0106] As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183. ​ As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0107] As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0108] As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0109] As shown, in some embodiments of the present disclosure, the phosphorus recovery device 180 can further include a cooling zone valve 184. The cooling zone valve 184 is arranged on the communication line between the phosphorus collection zone 182 and the recovery pump 183. The cooling zone valve 184 is used to separate the phosphorus collection zone 182 from the recovery pump 183.

[0110] It should be noted that the above is only an exemplary embodiment of the present disclosure, and is not intended to limit the present disclosure. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.

Claims

1. A phosphorus cracking source, characterized in that: include: at least one white phosphorus tank for generating white phosphorus vapor; a cracking device, in communication with the at least one white phosphorus pool, for receiving the white phosphorus vapor generated by the white phosphorus pool for cracking; a connecting pipeline for connecting the at least one white phosphorus tank and the cracking device; at least one white phosphorus control valve, disposed on the connecting pipeline, for controlling the flow of white phosphorus vapor; as well as At least one angle valve is provided on the communication pipeline and is located between the at least one white phosphorus pool and the at least one white phosphorus control valve.

2. The phosphorus cracking source according to claim 1, characterized in that The at least one white phosphorus pool includes a single white phosphorus pool, the connecting pipeline includes a single pipeline, the at least one white phosphorus control valve includes a single white phosphorus control valve arranged on the single pipeline, and the at least one angle valve includes a single angle valve respectively located on the single pipeline and between the single white phosphorus pool and the single white phosphorus control valve.

3. The phosphorus cracking source according to claim 1, characterized in that The at least one white phosphorus pool includes multiple white phosphorus pools, the connecting pipeline includes multiple parallel pipelines, and the multiple parallel pipelines respectively connect the multiple white phosphorus pools with the cracking device. The at least one white phosphorus control valve includes multiple white phosphorus control valves respectively arranged on the multiple parallel pipelines, and the at least one angle valve includes multiple angle valves respectively located on the multiple parallel pipelines and between the multiple white phosphorus pools and the multiple white phosphorus control valves.

4. The phosphorus cracking source according to claim 1, characterized in that The at least one white phosphorus pool includes multiple white phosphorus pools, the connecting pipeline includes multiple parallel pipelines and a converging pipeline, the multiple parallel pipelines respectively connect the multiple white phosphorus pools with the converging pipeline, the converging pipeline is connected to the cracking device, the at least one white phosphorus control valve includes a single white phosphorus control valve arranged on the converging pipeline, and the at least one angle valve includes multiple angle valves respectively located on the multiple parallel pipelines and between the multiple white phosphorus pools and the single white phosphorus control valve.

5. The phosphorus cracking source according to claim 1, characterized in that Also includes: At least one red phosphorus pool is connected to the at least one white phosphorus pool and is used to generate red phosphorus vapor. The at least one white phosphorus pool is also used to store white phosphorus generated by cooling the red phosphorus vapor generated by the red phosphorus pool.

6. The phosphorus cracking source according to claim 5, characterized in that Also includes: At least one red phosphorus isolation valve is respectively arranged on the connecting pipeline between the at least one white phosphorus pool and the at least one red phosphorus pool, and is used for vacuum isolation between the red phosphorus pool and the white phosphorus pool.

7. The phosphorus cracking source according to claim 5, characterized in that The red phosphorus pool includes a red phosphorus pool valve, and the red phosphorus pool valve is connected to a vacuum pump or a phosphorus recovery device.

8. The phosphorus cracking source according to claim 7, characterized in that Also included is a phosphorus recovery unit, including: a phosphorus cracking zone, connected to the red phosphorus pool, for cracking the recovered phosphorus into phosphorus molecules; and The phosphorus collecting zone is in communication with the phosphorus cracking zone and is used for cooling the phosphorus molecules received from the phosphorus cracking zone.

9. The phosphorus cracking source according to claim 8, characterized in that The phosphorus cracking zone includes a heater; and / or The phosphorus collection zone includes a cooler; and / or The phosphorus recovery device further includes a recovery pump, which is connected to the phosphorus collection area and is used to provide power for phosphorus recovery.

10. The phosphorus cracking source according to claim 9, characterized in that The phosphorus recovery device further includes a cooling zone valve, which is arranged on a pipeline connecting the phosphorus collection zone and the recovery pump.

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