Automatic alignment system and laser equipment
By automatically adjusting the coaxiality of the laser beam and the beam aperture through the automatic alignment system, the complexity and error caused by manual intervention in the existing technology are solved, and high precision and high efficiency of laser processing are achieved.
Patent Information
- Application Number
- CN202422705578.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-11-06
AI Technical Summary
In existing laser processing technologies, the alignment process between the laser beam and the mask requires manual intervention, which leads to complex operation, susceptibility to human error, and time-consuming and labor-intensive adjustments to the size and shape of the laser spot, affecting processing accuracy and quality.
An automatic alignment system is adopted to achieve automatic alignment of the laser beam with the beam aperture through a position adjustment unit and a detection component. The system includes a rotating component, a driving component, a detection component, and a beam analyzer, which automatically adjusts the coaxiality of the main axis of the laser beam with the beam aperture.
It improves the alignment accuracy between the laser beam and the processing target, simplifies the operation process, reduces human error, and improves processing precision and quality.
Smart Images

Figure CN223441331U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of laser testing, and particularly relates to an automatic alignment system and a laser device. BACKGROUND
[0002] Laser processing technology is a technology that uses high-energy laser beams to process materials and is widely used in manufacturing, medical treatment, electronics and other fields. In the laser processing process, the parameters of the laser beam, such as spot size and shape, need to be accurately controlled to ensure the precision and quality of the processing. Precise alignment system is a key part of laser processing technology, which is used to ensure the precise alignment between the laser beam and the processing target. Optical measurement technology is used to measure and analyze the parameters in the optical system, such as spot size and shape, to ensure the accuracy and stability of the system.
[0003] Mask is a jig with a certain shape of light aperture, which is placed between the laser beam and the processing target. By controlling the position and angle of the Mask, the size and shape of the laser spot can be adjusted. In order to align the axes in space between the laser beam and the Mask, the step of manually adjusting the mechanical components is usually used to adjust the spatial position of the Mask to adjust the alignment between the laser beam main axis and the center of the light transmission area. Although the existing technical solutions can achieve the concentric alignment between the laser beam main axis and the Mask to a certain extent, there are still some problems and limitations. First, the existing technical solutions need manual intervention, which not only increases the complexity of the operation, but also easily leads to human error, affecting the precision and quality of the processing. Secondly, the existing technical solutions need to frequently replace the Mask and re-adjust when adjusting the size and shape of the laser spot, which not only wastes time and effort, but also increases the complexity and cost of the operation. Finally, if the alignment process is not timely calibrated and adjusted, the existing technical solutions may cause the deformation of the processing pattern, affecting the precision and quality of the processing. CONTENT OF THE INVENTION
[0004] The purpose of the present application is to provide an automatic alignment system and a laser device to improve the accuracy of the alignment between the laser beam and the processing target.
[0005] In a first aspect, the present application provides an automatic alignment system, comprising:
[0006] a laser emitter for emitting a laser beam;
[0007] The position adjusting unit comprises a first adjusting part and a second adjusting part, the first adjusting part comprises a rotating member and a driving member, the rotating member is provided with a plurality of alignment parts, the alignment parts have beam through holes, the driving member is used for driving the rotating member to rotate along a first preset path, and the second adjusting part is used for moving the first adjusting part along a second preset path, so that the main shaft of the laser beam emitted by the laser emitter is coaxial with the beam through hole.
[0008] The detection member is used for detecting whether the main shaft of the laser beam emitted by the laser emitter is coaxial with the beam through hole.
[0009] The automatic alignment system as described above, preferably, the rotating member comprises a rotating disc, the alignment parts are distributed along the circumference of the rotating disc, the first preset path is a path of rotating the rotating disc in a first direction, and the first direction is a direction of rotating around the axis of the rotating disc as a center line.
[0010] The automatic alignment system as described above, preferably, the driving member comprises a first motor, and an output end of the first motor is connected with the rotating disc.
[0011] The automatic alignment system as described above, preferably, the second preset path is a path of reciprocatingly moving the first adjusting part in a second direction, and the second direction is perpendicular to the axis direction of the rotating disc.
[0012] The automatic alignment system as described above, preferably, the second adjusting part comprises a second motor, a driving screw rod, a screw rod nut, a first guide rail and a first sliding block, wherein:
[0013] An output shaft of the second motor is in transmission connection with one end of the driving screw rod, the other end of the driving screw rod is in screw thread cooperation with the screw rod nut, and the screw rod nut is connected with the first adjusting part.
[0014] The extension direction of the first guide rail is parallel to the second direction, the first sliding block is arranged on the first adjusting part, and the first guide rail and the first sliding block form a guide cooperation.
[0015] The automatic alignment system as described above, preferably, the detection member comprises a first reflecting part and an analyzing part, the first reflecting part is used for reflecting the laser beam passing through the beam through hole to the analyzing part, and the analyzing part is used for analyzing whether the main shaft of the laser beam reflected by the first reflecting part is coaxial with the beam through hole.
[0016] The automatic alignment system as claimed in any one of the preceding claims, wherein preferably the first reflecting part comprises a reflecting element and an adjusting member for adjusting the position of the reflecting element in the third direction so that the reflecting element can reflect the laser beam passing through the beam through hole.
[0017] The automatic alignment system as claimed in any one of the preceding claims, wherein preferably the analyzing part comprises a spot analyzer for receiving the laser beam reflected by the first reflecting part after passing through the beam through hole and deriving a diffraction image of the laser beam.
[0018] The automatic alignment system as claimed in any one of the preceding claims, wherein preferably the detecting member further comprises a second reflecting part for reflecting the laser beam passing through the beam through hole to the first reflecting part.
[0019] In a second aspect, the present application provides a laser device comprising the automatic alignment system as described above.
[0020] Compared with the prior art, the present application adjusts the positions of the alignment parts through the first adjusting part and the second adjusting part so that the laser beam can pass through the beam through hole on the alignment part, and then detects whether the main shaft of the laser beam is coaxial with the beam through hole through the detecting member, which is simple to operate, does not need manual intervention, and is conducive to improving the accuracy of alignment between the laser beam and the alignment part. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 is a perspective view of the automatic alignment system provided by an embodiment of the present application;
[0022] Figure 2 is Figure 1 is an enlarged view of the local part A in
[0023] Figure 3 is a front view of the position adjusting unit provided by an embodiment of the present application;
[0024] Figure 4 is a perspective view of the adjusting member provided by an embodiment of the present application;
[0025] Figure 5 is a front view of the detecting member provided by an embodiment of the present application;
[0026] Figure 6 is a diffraction image of the laser beam passing through the beam through hole of different alignment parts provided by an embodiment of the present application.
[0027] REFERENCE SIGNS:
[0028] 10 - laser emitter;
[0029] 20 - Position adjustment unit, 21 - First adjustment portion, 211 - Rotating member, 2111 - Rotating disk, 212 - Driving member, 2121 - First motor, 22 - Second adjustment portion, 221 - Second motor, 222 - Driving screw, 223 - Screw nut, 224 - First guide rail, 225 - First slider, 23 - Alignment portion, 231 - Light beam aperture;
[0030] 30 - detection part, 31 - first reflecting part, 311 - reflecting part, 312 - adjusting part, 3121 - driving cylinder, 32 - analyzing part, 321 - spot analyzer, 33 - second reflecting part;
[0031] D1-first direction, D2-second direction, D3-third direction. DETAILED DESCRIPTION
[0032] The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as limiting the present application.
[0033] First, refer to Figures 1 to 5 As shown, the present application provides an automatic alignment system, including a laser emitter 10, a position adjustment unit 20 and a detection member 30, wherein:
[0034] The position adjustment unit 20 includes a first adjustment part 21 and a second adjustment part 22. The first adjustment part 21 includes a rotating part 211 and a driving part 212. The rotating part 211 is provided with a plurality of alignment parts 23. The alignment part 23 has a light beam through hole 231. The driving part 212 is connected to the rotating part 211 and is used to drive the rotating part 211 to rotate along a first preset path, so that the alignment part 23 can rotate along the first preset path synchronously with the rotation of the rotating part 211. The second adjustment part 22 is used to make the first adjustment part 21 move along the second preset path. In the embodiment provided in the present application, under the joint action of the first adjustment part 21 and the second adjustment part 22, the position of the alignment part 23 is adjusted so that the laser beam emitted by the laser emitter 10 can pass through the beam through hole 231 on the alignment part 23, and then the detection part 30 is used to detect whether the main axis of the laser beam is coaxial with the beam through hole 231, and then determine whether the laser beam and the alignment part 23 are aligned. If the laser beam and the alignment part 23 are not aligned, the position of the alignment part 23 can be adjusted again by the first adjustment part 21 and the second adjustment part 22 to make the main axis of the laser beam coaxial with the beam through hole 231.
[0035] In a feasible embodiment, referring to Figure 2 as well as Figure 3As shown, the rotating member 211 comprises a rotating disc 2111, the alignment part 23 comprises a plurality of alignment parts 23, the plurality of alignment parts 23 are distributed along the circumference of the rotating disc 2111, and the plurality of alignment parts 23 have light beam through holes 231 of different sizes. The first preset path is a path of the rotating disc 2111 rotating in a first direction D1, the first direction D1 is a direction of rotation with the axis of the rotating disc 2111 as the center line, and the plurality of alignment parts 23 can rotate in the first direction D1 along with the rotation of the rotating disc 2111. In this way, the alignment part 23 can be replaced according to the requirements of laser processing, so as to realize automatic replacement and alignment of the alignment part 23, avoid the complexity of manual replacement and the generation of human errors, and be beneficial to improving the precision and quality of processing.
[0036] Preferably, the driving member 212 comprises a first motor 2121, and an output end of the first motor 2121 is connected with the rotating disc 2111. Under the driving action of the first motor 2121, the rotating disc 2111 rotates in the first direction D1. In other embodiments, other structures or components can be used to drive the rotating disc 2111 to rotate in the first direction D1, which is not limited here.
[0037] In the embodiments provided in the present application, the second preset path is a path of the first adjusting part 21 reciprocating in a second direction D2, and the second direction D2 is perpendicular to the axis direction of the rotating disc 2111. Referring to Figure 3 As shown, the second direction D2 is a horizontal left-right direction. When one of the alignment parts 23 on the rotating disc 2111 rotates to a position opposite to the laser beam, the position of the alignment part 23 in the second direction D2 is fine-adjusted through the adjustment of the second adjusting part 22, so that the laser beam can pass through the corresponding light beam through hole 231. If the laser beam is not aligned with the light beam through hole 231, the positions of the rotating disc 2111 and the corresponding alignment part 23 can be adjusted according to the detection result of the detection member 30, so that the main shaft of the laser beam is coaxial with the light beam through hole 231.
[0038] In a feasible embodiment, referring to Figure 2As shown, the second adjusting part 22 comprises a second motor 221, a driving screw rod 222, a screw rod nut 223, a first guide rail 224 and a first sliding block 225, wherein: the output shaft of the second motor 221 is in transmission connection with one end of the driving screw rod 222, the other end of the driving screw rod 222 is in threaded cooperation with the screw rod nut 223, the screw rod nut 223 is connected with the first adjusting part 21, the second motor 221 drives the driving screw rod 222 to rotate when starting, under the cooperation of the driving screw rod 222 and the screw rod nut 223, the screw rod nut 223 can move along the axial direction of the driving screw rod 222, the axial direction of the driving screw rod 222 is parallel to the second direction D2, the first sliding block 225 is arranged on the first adjusting part 21, the extension direction of the first guide rail 224 is parallel to the second direction D2, under the guiding cooperation of the first guide rail 224 and the first sliding block 225, the movement of the first adjusting part 21 along the second direction D2 is realized.
[0039] In other embodiments, other structures or components can be used to realize the movement of the first adjusting part 21 along the second direction D2, which is not limited here.
[0040] Referring to Figure 2 and Figure 3 As shown, in the embodiments provided in the present application, the detection member 30 comprises a first reflecting part 31 and an analysis part 32, the first reflecting part 31 reflects the laser beam passing through the beam through hole 231 to the analysis part 32 after the laser beam passes through the beam through hole 231 of the alignment part 23, and after the action of the analysis part 32, whether the main shaft of the laser beam is coaxial with the beam through hole 231 can be known.
[0041] In a possible embodiment, referring to Figure 1 and Figure 2 As shown, the first reflecting part 31 comprises a reflecting member 311 and an adjusting member 312, the adjusting member 312 is used to adjust the position of the reflecting member 311 in the third direction D3, the third direction D3 is the direction of gravity, on the one hand, the reflecting member 311 can adapt to the positions of different alignment parts 23, on the other hand, the reflecting member 311 can be adjusted to fall down when detection and analysis are not needed, so that the system can work normally.
[0042] Preferably, referring to Figure 4 As shown, the adjusting member 312 comprises a driving air cylinder 3121, the reflecting member 311 is arranged at the end of the piston rod of the driving air cylinder 3121, the reflecting member 311 adopts a mirror, and the driving air cylinder 3121 realizes the lifting of the mirror through the extension and retraction of the piston rod when starting.
[0043] In other embodiments, structures or components capable of driving the reflecting member 311 to move along the third direction D3 can be used, which is not limited here.
[0044] Further, referring to Figure 2 andFigure 5 As shown, the analysis unit 32 comprises a spot analyzer 321. After the laser beam passes through the beam through hole 231 of the alignment unit 23, the laser beam is reflected to the surface array of the spot analyzer 321 via the first reflecting unit 31, and the diffraction image of the laser beam is obtained by the spot analyzer 321. According to the diffraction image of the laser beam, it is determined whether the laser beam is aligned with the beam through hole 231. In a close distance, when the laser beam passes through the beam through hole 231 with a large size, a large spot is corresponded, and when the laser beam passes through the beam through hole 231 with a small size, a small spot is corresponded. The spot analyzer 321 can read the data such as the roundness, diameter and spatial distribution of the spot. Through the data, it can be known whether the laser beam is aligned with the alignment unit 23.
[0045] When the main axis of the laser beam is coaxial with the beam through hole 231 of the alignment unit 23, a symmetrical spot distribution can be observed in the spot analyzer 321. When the main axis of the laser beam is not coaxial with the beam through hole 231 of the alignment unit 23, the observed diffraction pattern will present an asymmetric shape such as an ellipse or a polygon.
[0046] Referring to Figure 6 As shown, the diffraction image of the large spot and the diffraction image of the small spot when the laser beam is aligned with the alignment unit 23 are shown in the diagrams (a) and (b) respectively. The spot images obtained after the laser beam passes through the beam through hole 231 with a size of 1 mm are shown in the diagrams (c) and (d). The spot diameter corresponding to the beam through hole 231 with a size of 1 mm should be 1.1 mm. In the diagram (c), the diameter of the spot in the second direction D2 is smaller, which indicates that the position of the alignment unit 23 in the second direction D2 is deviated. Therefore, the corresponding alignment unit 23 is adjusted by the second adjusting unit 22 to move in the second direction D2 until the diameter of the spot in the second direction D2 reaches 1.1 mm. In the diagram (d), the diameter of the spot in the third direction D3 is smaller, which indicates that the position of the alignment unit 23 in the vertical direction is deviated. At this time, the corresponding alignment unit 23 is rotated by the first adjusting unit 21 until the diameter of the spot in the third direction D3 reaches 1.1 mm.
[0047] In order to meet the requirements of laser processing, the laser beam passing through the beam through hole 231 may not be directly reflected to the analysis unit 32 by the first reflecting unit 31. In the embodiments provided in the present application, referring to Figure 1 and Figure 2 As shown, the detection member 30 further comprises a second reflecting unit 33. The second reflecting unit 33 is used for reflecting the laser beam passing through the beam through hole 231 to the first reflecting unit 31. The second reflecting unit 33 can be provided in plurality. The number of the second reflecting unit 33 can be set according to the distribution of the laser emitter 10 and the position adjusting unit 20. After the laser beam passes through the beam through hole 231, the laser beam is reflected to the first reflecting unit 31 through multiple reflections of the plurality of second reflecting units 33, and finally reflected to the analysis unit 32 by the first reflecting unit 31.
[0048] The second reflecting part 33 can be a mirror, or other structures or components capable of reflecting the laser beam, which are not limited herein.
[0049] In the second aspect, the application provides a laser device comprising the automatic alignment system. During the operation of the laser device, the alignment precision between the laser beam and the machining target can be accurately controlled under the action of the automatic alignment system. In addition, the alignment part 23 with the beam through hole 231 of different aperture can be flexibly replaced according to the machining requirement, without manual operation, thereby improving the machining precision and working efficiency of the laser device.
[0050] The above detailed description of the embodiments shown in the drawings explains the structure, features and effects of the application. The above description is only the preferred embodiments of the application, but the application is not limited by the drawings. Any changes or modifications made in accordance with the concept of the application, or equivalent embodiments with equivalent changes, are still within the scope of the application.
Claims
1. An automatic alignment system, characterized in that: include: A laser transmitter, for emitting a laser beam; a position adjustment unit comprising a first adjustment portion and a second adjustment portion, wherein the first adjustment portion comprises a rotating member and a driving member, the rotating member being provided with a plurality of alignment portions, the alignment portions having beam through holes, the driving member being configured to drive the rotating member to rotate along a first preset path, and the second adjustment portion being configured to move the first adjustment portion along a second preset path so that a main axis of the laser beam emitted by the laser emitter is coaxial with the beam through holes; The detection component is used to detect whether the main axis of the laser beam emitted by the laser emitter is coaxial with the beam through hole.
2. The automatic alignment system according to claim 1, wherein: The rotating member includes a rotating disk, the alignment portions are spaced apart along the circumference of the rotating disk, the first preset path is the path of the rotating disk rotating along a first direction, and the first direction is the direction of rotation with the axis of the rotating disk as the center line.
3. The automatic alignment system according to claim 2, characterized in that The driving member includes a first motor, and an output end of the first motor is connected to the rotating disk.
4. The automatic alignment system according to claim 2, wherein: The second preset path is a path along which the first adjusting portion reciprocates along a second direction, and the second direction is perpendicular to the axis direction of the rotating disk.
5. The automatic alignment system according to claim 4, characterized in that The second adjusting part includes a second motor, a driving screw, a screw nut, a first guide rail and a first slider, wherein: The output shaft of the second motor is in transmission connection with one end of the driving screw, the other end of the driving screw is threadedly engaged with the screw nut, and the screw nut is connected to the first adjusting part; The extending direction of the first guide rail is parallel to the second direction. The first sliding block is provided on the first adjusting portion. The first guide rail and the first sliding block form a guiding fit.
6. The automatic alignment system according to claim 1, wherein: The detection part includes a first reflecting part and an analyzing part, wherein the first reflecting part is used to reflect the laser beam passing through the beam through hole to the analyzing part, and the analyzing part is used to analyze whether the main axis of the laser beam reflected by the first reflecting part is coaxial with the beam through hole.
7. The automatic alignment system according to claim 6, characterized in that The first reflecting portion includes a reflecting member and an adjusting member, wherein the adjusting member is used to adjust the position of the reflecting member in the third direction so that the reflecting member can reflect the laser beam passing through the beam through hole.
8. The automatic alignment system according to claim 6, characterized in that The analysis unit includes a light spot analyzer, which is used to receive the laser beam reflected by the first reflection unit after passing through the light beam through hole, and obtain a diffraction image of the laser beam.
9. The automatic alignment system according to claim 6, wherein: The detection member further includes a second reflecting portion, which is used to reflect the laser beam passing through the beam through hole to the first reflecting portion.
10. A laser device, characterized in that: An automatic alignment system comprising the steps of claim 1 .