Cantilever lifting mechanism suitable for groove type wet process

Abstract

The utility model belongs to the technical field of silicon wafer groove type wet process, and particularly relates to a cantilever lifting mechanism suitable for the groove type wet process. The cantilever lifting mechanism comprises a tank body for accommodating working liquid, and is characterized by further comprising a power device, a carrier and a lifting device, the lifting device comprises a lifting frame and a plurality of sets of cantilevers arranged at intervals, the carrier is connected to the tail ends of the cantilevers, and the cantilevers are connected with the power device through the lifting frame; the guide shaft is provided with an extending direction conforming to the lifting motion direction of the cantilever lifting mechanism, and a limiting structure for the lifting motion range of the cantilever lifting mechanism is formed; and the guide shaft is arranged in an area formed between the two spaced cantilevers. According to the lifting device, stations are saved, the space utilization rate is increased, structural stress can be reasonably dispersed, and therefore the durability and stability of the lifting device are enhanced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of silicon wafer tank type wet process, specifically relates to a cantilever lifting mechanism suitable for tank type wet process. BACKGROUND

[0002] Tank type wet process is one of the mainstream technical routes of silicon wafer production. In the production process, the silicon wafer needs to be immersed in the tank body filled with working liquid for processing, and then taken out after processing. The taking and placing action of the silicon wafer is realized through the corresponding lifting mechanism. The lifting mechanism and the tank body are usually embedded in a large tank type device together with other process devices, so when designing the mechanism, on the one hand, it should save space and avoid occupying too many workstations, and on the other hand, it should have durability and stability to reduce the number of disassembly and maintenance.

[0003] Chinese patent CN216637734 U proposes a cylinder cantilever lifting conveying device, wherein the lifting unit includes a cylinder, a connecting arm, a support seat and a synchronous belt. The synchronous belt is located on both sides of the connecting arm, the guide wheels are located at both ends of the connecting arm, and the synchronous belt is connected with the guide wheels. The guide wheels cooperate with the guide grooves fixed on the frame to realize the movement guidance and auxiliary support of the connecting arm, preventing the end of the connecting arm from shaking. The guiding mechanism of the patent is directly connected with the load-bearing mechanism, which is easy to cause fatigue and aging of the load-bearing mechanism. The device also sets a frame on the outer edge of the device to fix the guiding device and stabilize the overall shape, and the space utilization rate is low. UTILITY MODEL CONTENTS

[0004] Therefore, the utility model aims to provide a lifting mechanism with a simple structure. The device not only meets the demand of space saving, but also reasonably disperses the stress of the lifting mechanism, thereby enhancing the durability and stability of the load-bearing component.

[0005] The utility model realizes the following technical scheme:

[0006] A cantilever lifting mechanism suitable for tank type wet process, comprising a tank body containing working liquid, characterized in that the cantilever lifting mechanism further comprises:

[0007] A power device provides power for the lifting movement of the cantilever lifting mechanism;

[0008] A carrier, the carrier at least includes a platform loaded with silicon wafers;

[0009] A lifting device, comprising a lifting frame and multiple groups of spaced cantilevers, the carrier is connected to the end of the cantilever, and the cantilever and the power device are connected through the lifting frame;

[0010] A guide shaft, which has an extension direction conforming to the lifting motion direction of the cantilever lifting mechanism and forms a limiting structure for the lifting motion range of the cantilever lifting mechanism;

[0011] The guide shaft is arranged in the region formed between the two spaced cantilevers.

[0012] Preferably, the cantilever lifting mechanism further comprises sliding bearings, which are slidingly connected to the guide shaft and fixedly connected to the lifting frame.

[0013] Preferably, the connection position of the sliding bearings and the lifting frame is arranged between the two spaced cantilevers.

[0014] Preferably, the guide shaft is symmetrically arranged in the two side end regions of the lifting frame in the length direction.

[0015] Preferably, the lifting frame is connected to the single guide shaft through at least two sliding bearings, and the two sliding bearings are respectively located in the two side regions of the lifting frame in the lifting motion direction.

[0016] Preferably, the bottom of the groove body is provided with a support frame.

[0017] Preferably, a plurality of correction blocks are arranged on the side surface of the carrier.

[0018] Preferably, a plurality of rail rollers are arranged on the side surface of the carrier, which are in contact with the roller track and cooperate with the roller track; a plurality of non-rail rollers are also arranged on the side surface of the carrier, which are in contact with the inner surface of the groove body; the two ends of the wheel shaft of the rail roller and the two ends of the wheel shaft of the non-rail roller are arranged on the adjacent two correction blocks.

[0019] Preferably, the roller track is arranged on the inner side surface of the groove body, and the extension direction of the roller track conforms to the lifting motion direction of the cantilever lifting mechanism.

[0020] Preferably, the lifting frame is perpendicular to the lifting motion direction of the cantilever lifting mechanism.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the prior art, many cylinder cantilever mechanisms directly connect the guide mechanism with the cantilever, and the cantilever part not only bears the working load but also is subject to the correction traction of the guide mechanism, so the structure is easy to fatigue or age. The guide mechanism of the utility model is indirectly connected with the cantilever through the lifting frame, the lifting track of the lifting frame is corrected through the sliding bearing arranged on the lifting frame, better motion control and buffering can be provided, and damage caused by vibration inside the power device is avoided; the cantilever part only bears the supporting force of the lifting frame and the weight of the carrier, the stress structure is simple, the stress and wear of the cantilever are reduced, the service life is prolonged, and the durability of the utility model is increased.

[0023] 2. The guide mechanism and the cantilever structure are usually arranged in pairs and symmetrically distributed on both sides of the cylinder cantilever mechanism, in the prior art, in order to strengthen the guiding effect, the position of the guide mechanism is generally arranged at the outer edge of the device, and the cantilever structure is arranged at the inner side of the guide mechanism. In order to adapt to larger diameter carriers and make full use of space, the utility model first arranges the lifting frame in the vertical direction of the lifting motion direction to increase the stress point, then arranges the connection position of the cantilever and the lifting frame at the two end portions of the lifting frame, and the installation position of the guide shaft is inserted between the cantilevers, the connection position of the sliding bearing and the lifting frame is also arranged between the connection position of the cantilever and the lifting frame, so that the effect of saving the space of the working position is realized.

[0024] 3. When the cantilever is installed at the end portion of the lifting frame, although the bearing capacity is enhanced, the deformation risk of the lifting frame is also increased; therefore, the utility model makes full use of the space between the devices, corrects the position state of the cantilever lifting mechanism in the lifting process through multiple structures on the basis of saving the working position, avoids the stress disturbance, and maintains the stability of the device.

[0025] 3.1. Correction of the lifting frame

[0026] The guiding effect of the guide shaft on the lifting frame is not a simple linear guiding relationship, but a cross-shaped cross-fixing. In the horizontal direction, the two ends of the lifting frame are symmetrically connected with multiple guide shafts; in the vertical direction, the two sides of the lifting frame are respectively connected with at least one sliding bearing and a single fixed shaft. Through cross support and correction, the deformation risk of the lifting frame is reduced.

[0027] 3.2. Correction of the carrier

[0028] A. The cantilever has a tendency to tilt towards the load end when under load, and the carrier may tilt towards the inner wall of the groove as a result; due to the need for clearance between the groove and the carrier, the position of the carrier cannot be corrected through the fitting relationship. The utility model discloses a correction block arranged at the lower end of the side surface of the carrier, and the correction block abuts against the inner surface of the groove, so that the static load of the cantilever can be shared through static friction, and the tendency of the carrier to shake in the horizontal direction can be blocked, thereby achieving the effects of correcting the posture of the carrier and enhancing the durability of the cantilever.

[0029] B. Furthermore, the utility model upgrades the support blocks into rail rollers and trackless rollers with the wheel shafts located between the support blocks, so that the functions of blocking the shaking and dispersing the load of the correction block are retained, and the dynamic friction during the lifting process is minimized.

[0030] C. On the basis of the beneficial effect B, the inner surface of the groove is provided with a roller track matched with the rail roller, which is used for correcting the rolling route of the rail roller and correcting the lifting track of the carrier part of the device. The guide shaft and the roller track constitute double insurance for vertical position correction, and the stability of the operation of the device is improved.

[0031] D. The bottom of the groove is provided with a support frame, and when the carrier is located at the lowest position, it naturally falls on the support frame, and at this time, the support frame can effectively share the stress of the cantilever. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is a schematic diagram of the back of the lifting device;

[0033] Figure 2 It is a schematic diagram of the front of the lifting device;

[0034] Figure 3 It is a side view schematic diagram of the utility model in the cleaning station;

[0035] Figure 4 It is a three-dimensional schematic diagram of the utility model in the cleaning station.

[0036] LEGEND:

[0037] 1, power device; 10, fixed seat;

[0038] 2, lifting frame;

[0039] 3, cantilever;

[0040] 4, carrier; 4.1, support block; 4.2, fixed rail roller; 4.3, support roller;

[0041] 5, sliding bearing;

[0042] 6, guide shaft; 60, guide shaft base;

[0043] 7, tank body; 7.1, support frame; 7.2, roller track. DETAILED DESCRIPTION

[0044] The utility model will be described further below in combination with the drawings and specific embodiments. Those skilled in the art will be able to realize the utility model based on these descriptions. In addition, the embodiments of the utility model involved in the following description are generally only a part of the embodiments of the utility model, not all embodiments. Therefore, based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the utility model.

[0045] Please refer to Figure 1 and Figure 2 The basic function of the utility model is realized by the power device, lifting device and carrier 4. The power device is connected to the mechanical frame of the large tank type equipment through the fixing seat, and provides power for the lifting movement of the cantilever 3 lifting mechanism. The power device in this embodiment is a pneumatic cylinder, and the start-stop and lifting of the pneumatic cylinder are controlled by the electromagnetic reversing valve of the middle sealing structure to realize the start-stop at any position on the lifting route. The pneumatic cylinder is placed vertically, and the top is connected with the lifting frame 2; the lifting frame 2 is perpendicular to the lifting direction of the cantilever 3 lifting mechanism, and the two ends of the horizontal direction are symmetrically connected with two cantilevers 3; the cantilever 3 is also placed horizontally, but perpendicular to the lifting frame 2. The lifting frame 2 and the multiple cantilevers 3 constitute the lifting device together. The end of the cantilever 3 is connected with the carrier 4, and the carrier 4 is provided with a platform to load the silicon wafer to be cleaned. The device separates the lifting device and the guiding function, and the cantilever part of the lifting device only bears the supporting force of the lifting frame and the weight of the carrier, the stress structure is simple, the stress and wear of the cantilever are reduced, the service life is prolonged, and the durability of the utility model is increased.

[0046] Please refer to Figure 1 and Figure 2The utility model discloses a track correction and attitude control of the lifting movement of the guide shaft 6. The guide shaft 6 is fixed on the mechanical frame of the large tank type equipment through an independent guide shaft 6 base. The extension direction of the guide shaft 6 conforms to the lifting movement direction of the cantilever 3 lifting mechanism, and the extension length determines the lifting movement range of the lifting device. The guide shaft 6 is symmetrically arranged, and the symmetry axis is the lifting route of the lifting device. The lifting frame 2 and the single guide shaft 6 are connected through at least two sliding bearings 5, and the two bearings are located in the two side regions of the lifting frame 2 in the lifting movement direction respectively. The cross guide structure is formed between the lifting frame 2 and the guide shaft 6, and the deformation risk of the lifting frame 2 is reduced. On the work station layout, the guide shaft 6 is inserted between the cantilevers 3 at both ends, and the connection position of the sliding bearing 5 and the lifting frame 2 is also located between the connection positions of the cantilever 3 and the lifting frame 2, so that the space is fully utilized to realize the effect of saving the work station. The sliding bearing 5 only bears the interaction force from the lifting frame 2 and the guide rail 6, can provide better motion control and buffering, and avoids the interference damage of the power device caused by the vibration of the lifting device. When the sliding bearing 5 is located at the top of the guide shaft 6, the state is called a taking and placing work station; when the sliding bearing 5 is located at the bottom of the guide shaft 6, the state is called a cleaning work station.

[0047] Please refer to Figure 3 and Figure 4 When the utility model is in the cleaning work station, the platform loaded with silicon wafers on the carrier 4 is located in the tank body. The carrier 4 naturally falls on the support frame at the bottom of the tank body, and shares the stress of the cantilever 3 through the support frame. The side surface of the carrier 4 is a side plate, and a plurality of correction blocks 4.1 are arranged at the lower part of the side plate. In the basic embodiment, the correction block 4.1 directly abuts the inner wall of the tank body, which can not only share the stress of the cantilever 3 through static friction, but also block the shaking tendency of the carrier 4 in the horizontal direction, so as to correct the attitude of the carrier 4 and strengthen the durability of the lifting device. The disadvantage is that the dynamic friction between the correction block 4.1 and the inner wall of the tank body may wear the contact surface between the tank body and the correction block 4.1. In the improved embodiment, the adjacent correction blocks 4.1 are used to fix the wheel shafts of the rollers, and the rollers contact the inner wall of the tank body, which not only retains the functions of blocking shaking and dispersing stress of the correction block 4.1 in the basic embodiment, but also maximally reduces the dynamic friction. The rollers are further divided into trackless rollers 4.3 and tracked rollers 4.2; the trackless rollers 4.3 directly contact the inner wall of the tank body; the tracked rollers 4.2 cooperate with the roller tracks on the inner surface of the tank body, and the extension direction of the roller tracks conforms to the lifting movement direction of the cantilever 3 lifting mechanism, so as to correct the lifting track of the carrier 4.

Claims

1. A cantilever lifting mechanism suitable for a tank-type wet process, comprising a tank body (7) for accommodating a working fluid, characterized in that: The cantilever lifting mechanism also includes: A power device (1) provides power for the lifting and lowering movement of the cantilever lifting mechanism; A carrier (4), the carrier (4) comprising at least a platform for loading silicon wafers; A lifting device comprises a lifting frame (2) and a plurality of spaced cantilevers (3), wherein the carrier (4) is connected to the ends of the plurality of cantilevers (3), and the cantilevers (3) and the power device (1) are connected via the lifting frame (2); A guide shaft (6), the guide shaft (6) having an extension direction that conforms to the lifting movement direction of the cantilever lifting mechanism and forming a structure that limits the lifting movement range of the cantilever lifting mechanism; The guide shaft (6) is arranged in a region formed between the two spaced cantilevers (3).

2. The cantilever lifting mechanism according to claim 1, characterized in that: It also includes a sliding bearing (5), wherein the sliding bearing (5) is slidably connected to the guide shaft (6) and fixedly connected to the lifting frame (2).

3. The cantilever lifting mechanism according to claim 2, characterized in that: The connection position between the sliding bearing (5) and the lifting frame (2) is located between the two spaced cantilevers (3).

4. The cantilever lifting mechanism according to claim 2, characterized in that: The guide shafts (6) are symmetrically arranged in the end regions on both sides of the lifting frame (2) in the length direction.

5. The cantilever lifting mechanism according to claim 2, characterized in that: The lifting frame (2) and the single guide shaft (6) are connected via at least two sliding bearings (5), and the two sliding bearings (5) are respectively located in the two side areas of the lifting frame (2) in the lifting movement direction.

6. The cantilever lifting mechanism according to claim 1, characterized in that: A support frame (7.1) is provided at the bottom of the trough body (7).

7. The cantilever lifting mechanism according to claim 1, characterized in that: Multiple groups of correction blocks (4.1) are provided on the side surface of the carrier (4).

8. The cantilever lifting mechanism according to claim 7, characterized in that: A plurality of groups of rail rollers (4.2) are provided on the side surface of the carrier (4), and the rail rollers (4.2) are in contact with and roll in conjunction with the roller tracks (7.2); A plurality of groups of trackless rollers (4.3) are further provided on the side surface of the carrier (4), and the trackless rollers (4.3) are in contact with the inner surface of the trough body (7); Both ends of the wheel axle of the tracked roller (4.2) and both ends of the wheel axle of the trackless roller (4.3) are arranged on two adjacent correction blocks (4.1).

9. The cantilever lifting mechanism according to claim 8, characterized in that: The roller track (7.2) is arranged on the inner surface of the trough body (7), and the extension direction of the roller track (7.2) conforms to the lifting and lowering movement direction of the cantilever lifting mechanism.

10. The cantilever lifting mechanism according to claim 1, characterized in that: The lifting frame (2) is perpendicular to the lifting movement direction of the cantilever lifting mechanism.

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