Evaporation source cylinder with target line connecting mechanism and target line connecting mechanism
By introducing a target wire connection mechanism into the vacuum coating equipment, and utilizing the design of the base plate and conductive parts abutting against the cylinder shaft, the problem of reduced target wire life caused by rotation is solved, achieving stable signal transmission and extended target wire life.
Patent Information
- Application Number
- CN202422684601.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-05
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-11-05
AI Technical Summary
The problem of reduced lifespan of the target line due to rotation during the targeting action in vacuum coating equipment.
The target wire connection mechanism includes a base plate, a conductive component, and an elastic component. The conductive component abuts against the cylinder shaft to prevent rotation and ensure that the target wire and the conductive component connector remain stationary. The elastic component maintains contact, ensuring that signal transmission is not affected.
This improves the lifespan of the target line, avoids twisting and signal interruption caused by rotation, and ensures stable signal transmission.
Smart Images
Figure CN223445616U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to vacuum coating technical field, concretely relates to a kind of evaporation source air cylinder and target line connecting mechanism with target line connecting mechanism. BACKGROUND
[0002] The evaporation source of vacuum coating equipment needs to be rotated by cylinder to drive arc ignition needle to rotate to carry out target point action when working.
[0003] In the related art, arc ignition needle is arranged on arc ignition needle mounting block, arc ignition needle mounting block is connected with cylinder shaft through coupling, and target line is usually directly connected with coupling, so that target line will rotate with coupling, and such rotation will affect target line life.
[0004] Therefore, how to avoid target line life reduction caused by target line rotation in target point action is a technical problem to be solved by the person skilled in the art.
[0005] It should be noted that the above information disclosed in the background section of the present application is only used to understand the background technology of the present application, and therefore, the above description is not considered as information of prior art. INVENTION CONTENTS
[0006] The present application provides at least an evaporation source air cylinder with target line connecting mechanism and target line connecting mechanism.
[0007] In the first aspect, the present application provides an evaporation source air cylinder with target line connecting mechanism, which comprises: a cylinder, the cylinder shaft of which is connected with an arc ignition needle mounting block; a target line connecting mechanism, which comprises: a bottom plate, arranged on the cylinder, and having a through hole in the middle for passing through the cylinder shaft; a conductive part, passing through the bottom plate along the radial direction of the bottom plate; and an elastic part, sleeved on the conductive part, suitable for pushing the conductive part against the cylinder shaft; wherein the outer end of the conductive part is a connector for connecting the target line.
[0008] In an optional embodiment, the bottom plate is provided with a mounting hole along the radial direction for mounting the conductive part; one end of the mounting hole is communicated with the through hole, and the other end extends to the side wall of the bottom plate.
[0009] In an optional embodiment, the conductive part is arranged in the mounting hole, and the side wall is provided with an annular boss; the elastic part is suitable for being sleeved on the conductive part and abutting against the annular boss.
[0010] In an optional embodiment, the outer side of the mounting hole is provided with a pressing plate; the pressing plate is connected with the side wall of the bottom plate to block the mounting hole; wherein the pressing plate is suitable for pressing the elastic part to push the conductive part against the cylinder shaft.
[0011] In an alternative implementation, the pressing plate is provided with a clearance hole, and the joint of the conductive member is adapted to pass through the clearance hole to connect with the target wire.
[0012] In an alternative implementation, the end side wall of the cylinder shaft is provided with a key groove.
[0013] In the second aspect, the disclosure also provides a target wire connecting mechanism for an evaporation source cylinder, which comprises a base plate adapted to be mounted on the cylinder and provided with a through hole in the middle for passing the cylinder shaft, and a conductive member passing through the base plate in the radial direction of the base plate, and an elastic member sleeved on the conductive member and adapted to push the conductive member against the cylinder shaft, wherein the outer end of the conductive member is a joint adapted to connect with the target wire.
[0014] In an alternative implementation, the base plate is provided with a mounting hole in the radial direction for mounting the conductive member, and one end of the mounting hole is communicated with the through hole and the other end extends to the side wall of the base plate.
[0015] In an alternative implementation, the conductive member is arranged in the mounting hole, and the side wall is provided with an annular boss, the elastic member is adapted to be sleeved on the conductive member and abut against the annular boss, and the outer side of the mounting hole is provided with a pressing plate, the pressing plate is connected with the side wall of the base plate to block the mounting hole, and the pressing plate is adapted to press the elastic member to push the conductive member against the cylinder shaft.
[0016] In an alternative implementation, the pressing plate is provided with a clearance hole, and the joint of the conductive member is adapted to pass through the clearance hole to connect with the target wire.
[0017] The evaporation source cylinder with the target wire connecting mechanism can control the cylinder to rotate the cylinder shaft by a corresponding angle to make the arc striking needle mounting block drive the arc striking needle to rotate by a corresponding angle to a target striking position when target striking is needed, and the conductive member does not rotate and always abuts against the cylinder shaft in the rotating process of the cylinder shaft, so that the signal transmission of the target wire is not affected, and at the same time, the relative static state between the target wire and the joint of the conductive member is achieved due to the non-rotation of the conductive member, and the target wire is not twisted, so that the service life of the target wire is improved.
[0018] Other features and advantages of the present application will be set forth in the following description of the application, and in part will become apparent to those skilled in the art upon examination of the following or can be learned from practice of the application. The objects and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
[0019] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS
[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the description of the embodiments or the prior art. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0021] Figure 1 A structure schematic diagram of a vapor source cylinder with a target wire connecting mechanism provided by the embodiment of the present application is shown in the figure.
[0022] Figure 2 A partial cross-sectional structure schematic diagram of a vapor source cylinder with a target wire connecting mechanism provided by the embodiment of the present application is shown in the figure.
[0023] Figure 3 A structure schematic diagram of a vapor source cylinder with a target wire connecting mechanism provided by the embodiment of the present application is shown in the figure. Figure 2 An enlarged view of A in the figure.
[0024] In the figure:
[0025] Cylinder 1, cylinder shaft 11, key groove 12;
[0026] Target wire connecting mechanism 2, bottom plate 21, through hole 211, mounting hole 212, conductive part 22, joint position 221, annular boss 222, elastic part 23, pressing plate 24, avoiding hole 241;
[0027] Target wire 3;
[0028] Arcing needle mounting block 4. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the present application will be described clearly and completely below in combination with the drawings. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.
[0030] It should be noted that: similar labels and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, in the drawings, in order to effectively describe the technical content, the thickness of the components can be exaggerated or reduced.
[0031] Some embodiments of the present application will be described in detail below in combination with the drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.
[0032] AsFigures 1 to 3 As shown, at least one embodiment provides an evaporation source cylinder with a target wire connecting mechanism, which comprises: a cylinder 1, a cylinder shaft 11 of which is connected with an arc striking needle mounting block 4; and the target wire connecting mechanism 2, which comprises: a base plate 21, arranged on the cylinder 1 and having a through hole 211 in the middle for passing the cylinder shaft 11; a conductive piece 22, radially passing through the base plate 21; and an elastic piece 23, sleeved on the conductive piece 22 and adapted to push the conductive piece 22 against the cylinder shaft 11; wherein the outer end of the conductive piece 22 is a joint position 221 for connecting the target wire 3.
[0033] Specifically, the target wire 3 is connected to the conductive piece 22, the conductive piece 22 abuts against the cylinder shaft 11, and the cylinder shaft 11 is connected with the arc striking needle mounting block 4; wherein the conductive piece 22, the cylinder shaft 11 and the arc striking needle mounting block 4 all play a conductive role, i.e. transmitting the type of the target wire 3 to the arc striking needle.
[0034] In this embodiment, when the target needs to be pointed, the control module controls the cylinder 1 to rotate the cylinder shaft 11 by a corresponding angle, so that the arc striking needle mounting block 4 drives the arc striking needle to rotate by a corresponding angle to a target pointing position; during the rotation of the cylinder shaft 11, the conductive piece 22 does not rotate and always abuts against the cylinder shaft 11, so as not to affect the signal transmission of the target wire 3; at the same time, since the conductive piece 22 does not rotate, the joint position 221 between the target wire 3 and the conductive piece 22 is relatively static and does not twist, thereby improving the service life of the target wire 3.
[0035] In some embodiments, the conductive piece 22 can be but is not limited to a copper brush; and the elastic piece 23 can be but is not limited to a spring.
[0036] As shown, Figure 3 In some embodiments, the base plate 21 is radially provided with a mounting hole 212 for mounting the conductive piece 22; one end of the mounting hole 212 is in communication with the through hole 211, and the other end extends to the side wall of the base plate 21.
[0037] In some embodiments, the conductive piece 22 is arranged in the mounting hole 212, and the side wall is provided with an annular boss 222; and the elastic piece 23 is adapted to be sleeved on the conductive piece 22 and abut against the annular boss 222.
[0038] In this embodiment, the conductive piece 22 in the mounting hole 212 is pushed by the elastic piece 23, and the action point of the elastic piece 23 is on the annular boss 222 of the conductive piece 22, so that the conductive piece 22 always maintains the state of abutting against the cylinder shaft 11.
[0039] As shown, Figure 3As shown, in some embodiments, the outer side of the mounting hole 212 is provided with a pressing plate 24; the pressing plate 24 is connected with the side wall of the bottom plate 21 to block the mounting hole 212; wherein the pressing plate 24 is adapted to press the elastic member 23 to push the conductive member 22 against the cylinder shaft 11.
[0040] In the present embodiment, the pressing plate 24 is connected with the side wall of the bottom plate 21 through a connecting member, which can be but is not limited to a bolt.
[0041] In some embodiments, the pressing plate 24 is provided with a relief hole 241; the joint position 221 of the conductive member 22 is adapted to pass through the relief hole 241 and connect with the target wire 3.
[0042] In the present embodiment, the joint position 221 of the conductive member 22, which is used to connect the target wire 3, passes through the relief hole 241 of the pressing plate 24; optionally, a compression ring can be arranged at the joint position 221 to increase the connection area, the compression ring is connected with the joint position 221 of the conductive member 22, the target wire 3 is connected with the compression ring, and the compression ring is limited on the conductive member 22.
[0043] In some embodiments, the end side wall of the cylinder shaft 11 is provided with a key groove 12.
[0044] At least one embodiment further provides a target wire connecting mechanism for a cylinder of an evaporation source, which comprises: a bottom plate 21, used for being mounted on a cylinder 1, and provided with a through hole 211 in the middle for passing a cylinder shaft 11; and a conductive member 22, passing through the bottom plate 21 in the radial direction of the bottom plate 21; and an elastic member 23, sleeved on the conductive member 22, adapted to push the conductive member 22 against the cylinder shaft 11; wherein the outer end of the conductive member 22 is provided with a joint 221 for connecting a target wire 3.
[0045] In some embodiments, the bottom plate 21 is provided with a mounting hole 212 in the radial direction for mounting the conductive member 22; one end of the mounting hole 212 is in communication with the through hole 211, and the other end extends to the side wall of the bottom plate 21.
[0046] In some embodiments, the conductive member 22 is arranged in the mounting hole 212, and the side wall is provided with an annular boss 222; the elastic member 23 is adapted to be sleeved on the conductive member 22 and abut against the annular boss 222; the outer side of the mounting hole 212 is provided with a pressing plate 24; the pressing plate 24 is connected with the side wall of the bottom plate 21 to block the mounting hole 212; wherein the pressing plate 24 is adapted to press the elastic member 23 to push the conductive member 22 against the cylinder shaft 11.
[0047] In some embodiments, the joint 221 passes through the pressing plate 24 and extends into the mounting hole 212 to connect with the conductive member 22.
[0048] In summary, the evaporation source cylinder with the target wire connecting mechanism, when needing to point the target, the control module controls the cylinder 1 to rotate the cylinder shaft 11 by a corresponding angle, so that the arc striking needle mounting block 4 drives the arc striking needle to rotate by a corresponding angle to the target position; in the rotation process of the cylinder shaft 11, the conductive part 22 does not rotate, and is always in abutment with the cylinder shaft 11, so as not to affect the signal transmission of the target wire 3; at the same time, due to the non-rotation of the conductive part 22, the joint position 221 between the target wire 3 and the conductive part 22 is relatively stationary, and does not twist, thereby improving the service life of the target wire 3.
[0049] In this document, when an element or layer is referred to as being "on", "engaged to", "connected to", "attached to" or "coupled to" another element or layer, it can be directly on, engaged, connected, attached or coupled to the other element or layer, or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on", "directly engaged to", "directly connected to", "directly attached to" or "directly coupled to" another element or layer, there are no intervening elements or layers present. Other words used to describe the relationship between elements should be interpreted in a like fashion (e.g., "between" versus "directly between", "adjacent" versus "directly adjacent", etc.).
[0050] The terms "comprises", "comprising", "includes", "including" and "has" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.
[0051] As used herein, the phrases "in an embodiment", "according to an embodiment", "in some embodiments", and the like generally mean the particular feature, structure, or characteristic following the phrase is included in at least one embodiment of the present disclosure. Thus, appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment. As used herein, the term "or" as used herein, without equivalent
[0052] In the description of the embodiments of the utility model, unless otherwise expressly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, can also be detachable connection, or integrally connected, can be mechanical connection, can also be electrical connection, can be directly connected, can also be indirectly connected through intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.
[0053] In the description of the utility model, it needs to be explained that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and is not indicative or suggestive of the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the utility model. Spatially relative terms, such as "inner", "outer", "below", "under", "lower", "above", "upper", and the like, can be used herein for ease of describing one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms can be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "under" other elements or features would then be oriented "above" the other elements or features. Thus, the example term "below" can encompass both an orientation of above and below. The device can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
[0054] In the above discussion, unless otherwise specified, when used to describe numerical values, the terms "about", "approximately", "substantially" and the like mean a + / -10% variation of the value.
[0055] With the above ideal embodiments according to the utility model as inspiration, through the above description, relevant staff can definitely make various changes and modifications without deviating from the technical idea of the utility model. The technical scope of the utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of claims.
Claims
1. An evaporation source cylinder with a target line connection mechanism, characterized in that: include: A cylinder (1), wherein the cylinder shaft (11) is connected to the arc-starting needle mounting block (4); The target line connection mechanism (2) comprises: A bottom plate (21) is arranged on the cylinder (1) and has a through hole (211) in the middle for passing the cylinder shaft (11); A conductive member (22) is provided on the bottom plate (21) along the radial direction of the bottom plate (21); and an elastic member (23) sleeved on the conductive member (22) and adapted to push the conductive member (22) against the cylinder shaft (11); The outer end of the conductive member (22) is a connector (221) for connecting to a target wire (3).
2. The evaporation source cylinder with a target line connection mechanism according to claim 1, characterized in that: The bottom plate (21) is provided with a mounting hole (212) in the radial direction for mounting the conductive member (22); One end of the mounting hole (212) is communicated with the through hole (211), and the other end extends to the side wall of the bottom plate (21).
3. The evaporation source cylinder with a target line connection mechanism according to claim 2, characterized in that: The conductive member (22) is arranged in the mounting hole (212), and the side wall is provided with an annular boss (222); The elastic member (23) is suitable for being sleeved on the conductive member (22) and abutting against the annular boss (222).
4. The evaporation source cylinder with a target line connection mechanism according to claim 3, characterized in that: A pressure plate (24) is provided on the outside of the mounting hole (212); The pressing plate (24) is connected to the side wall of the bottom plate (21) to block the mounting hole (212); wherein The pressing plate (24) is suitable for pressing the elastic member (23) to push the conductive member (22) against the cylinder shaft (11).
5. The evaporation source cylinder with a target line connection mechanism according to claim 4, characterized in that: The pressure plate (24) is provided with an avoidance hole (241); The joint position (221) of the conductive member (22) is suitable for passing through the avoidance hole (241) and the target line (3).
6. The evaporation source cylinder with a target line connection mechanism according to claim 5, characterized in that: A key groove (12) is provided on the end side wall of the cylinder shaft (11).
7. A target wire connection mechanism for an evaporation source cylinder, characterized in that: include: A bottom plate (21) is used for being mounted on the cylinder (1), and a through hole (211) is provided in the middle thereof for passing the cylinder shaft (11); and A conductive member (22) is provided on the bottom plate (21) along the radial direction of the bottom plate (21); and an elastic member (23) sleeved on the conductive member (22) and adapted to push the conductive member (22) against the cylinder shaft (11); The outer end of the conductive member (22) is a connector (221) for connecting to a target wire (3).
8. The target wire connection mechanism for the evaporation source cylinder according to claim 7, wherein: The bottom plate (21) is provided with a mounting hole (212) in the radial direction for mounting the conductive member (22); One end of the mounting hole (212) is communicated with the through hole (211), and the other end extends to the side wall of the bottom plate (21).
9. The target wire connection mechanism for the evaporation source cylinder according to claim 8, wherein: The conductive member (22) is arranged in the mounting hole (212), and the side wall is provided with an annular boss (222); The elastic member (23) is suitable for being sleeved on the conductive member (22) and abutting against the annular boss (222); A pressure plate (24) is provided on the outside of the mounting hole (212); The pressing plate (24) is connected to the side wall of the bottom plate (21) to block the mounting hole (212); wherein The pressing plate (24) is suitable for pressing the elastic member (23) to push the conductive member (22) against the cylinder shaft (11).
10. The target wire connection mechanism for the evaporation source cylinder according to claim 9, wherein: The pressure plate (24) is provided with an avoidance hole (241); The joint position (221) of the conductive member (22) is suitable for passing through the avoidance hole (241) and the target line (3).