Rotating cathode for magnetron sputtering

Abstract

The utility model discloses a rotating cathode for magnetron sputtering, which comprises an end head body, a rotating shaft, a rotating shaft and a rotating shaft, the target tube assembly is rotationally connected with the accommodating groove through a first shaft sleeve; the driving assembly is in driving connection with the first shaft sleeve through the transmission assembly and used for driving the target tube assembly to rotate around the axial direction; the transmission assembly comprises a carrying bearing, a first synchronous belt wheel, a bearing check ring and a bearing pressing ring. The carrying bearing is arranged in the accommodating groove, and the first shaft sleeve is arranged in the carrying bearing in a penetrating manner; a shaft shoulder is arranged on the first shaft sleeve around the peripheral side; the first synchronous pulley coaxially sleeves the first shaft sleeve and is in driving connection with the driving assembly; the first shaft sleeve is sleeved with the bearing check ring and the bearing pressing ring, and the bearing check ring and the bearing pressing ring are clamped between the shaft shoulder and the first synchronous belt wheel. The bearing compression ring is clamped between the shaft shoulder and the bearing retainer ring; the annular groove in the bearing pressing ring and the bearing check ring are enclosed to form a clamping groove which is clamped with the inner ring of the bearing in a matched mode. The technical problems that an existing rotating cathode is complex in structure and occupies space are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering coating technology field, concretely relates to a kind of rotary cathode for magnetron sputtering. BACKGROUND

[0002] Magnetron sputtering is a commonly used method of physical vapor deposition (PVD). The general sputtering method can be used to make metal, semiconductor, insulator and other materials, which introduces magnetic field on the surface of target cathode, uses the constraint of magnetic field to charged particles to improve plasma density to increase sputtering rate. The electron moves to the substrate through the electric field, collides with Ar atoms in the process, so that Ar atoms are ionized to produce Ar positive ions and new electrons, and the argon ions produced by electron bombardment of argon gas are hit to the target surface under the action of electric field to sputter the target material.

[0003] In related technology, a rotating cathode is usually used as a target cathode. The rotating cathode generally includes a shell, a drive assembly and a target tube assembly. The target tube assembly is rotatably connected in the accommodating cavity of the shell through a connecting shaft and is driven to rotate by the drive assembly. However, the transmission assembly structure is complex, occupies the internal space of the shell, and has poor space utilization. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of rotary cathode for magnetron sputtering, solve the technical problem that the transmission assembly structure of existing rotary cathode is complex, occupies the internal space of shell, and has poor space utilization.

[0005] Therefore, the utility model provides a kind of rotary cathode for magnetron sputtering, comprising:

[0006] The end body has a receiving groove inside;

[0007] The target tube assembly is rotatably connected to the receiving groove through a first shaft sleeve;

[0008] The drive assembly is drivingly connected to the first shaft sleeve through a transmission assembly, for driving the target tube assembly to rotate around its axial direction;

[0009] The transmission assembly includes a bearing, a first synchronous pulley, a bearing retainer and a bearing press ring. The bearing is arranged in the receiving groove, and the first shaft sleeve is arranged in the bearing. The first shaft sleeve is provided with a shaft shoulder around its lateral side. The first synchronous pulley is coaxially arranged on the first shaft sleeve, and is drivingly connected to the output end of the drive assembly.

[0010] The bearing retainer and the bearing pressing ring are coaxially sleeved on the first shaft sleeve and clamped between the shaft shoulder and the first synchronous pulley; the bearing pressing ring is clamped between the shaft shoulder and the bearing retainer; an outer periphery of the bearing pressing ring is provided with an annular groove, and the annular groove and the bearing retainer enclose a clamping groove which is adapted to be clamped with an inner ring of the bearing.

[0011] Optionally, the bearing pressing ring and the shaft shoulder are both screw-connected with the bearing retainer.

[0012] Optionally, the bearing includes two angular contact ball bearings, and the two angular contact ball bearings are arranged back to back.

[0013] Optionally, the target tube assembly includes a target tube, a clamping member and a connecting flange; one end of the connecting flange is sealingly connected with the target tube through the clamping member, and the other end is coaxially and sealingly connected with the first shaft sleeve.

[0014] Optionally, the driving assembly includes a support plate, a driving motor and a synchronous belt; the support plate is connected with the end body; the driving motor is arranged on the support plate, and an output shaft of the driving motor is coaxially provided with a second synchronous pulley; the second synchronous pulley is drivingly connected with the first synchronous pulley through the synchronous belt.

[0015] Optionally, the driving assembly further includes:

[0016] Optionally, the driving assembly further includes:

[0017] Optionally, the adjustment assembly includes an idler, a mounting plate and a rotating shaft; the mounting plate is movably arranged on the support plate along a first direction which is perpendicular to a common plane in which axes of the first synchronous pulley and the second synchronous pulley are located; the idler is rotatably arranged on the mounting plate through the rotating shaft; the axes of the idler, the first synchronous pulley and the second synchronous pulley are parallel to each other; the idler is located on an inner side of the synchronous belt and engaged with the synchronous belt.

[0018] Optionally, the adjustment assembly further includes an adjustment screw; a plurality of waist holes are arranged on the mounting plate, and lengths of the waist holes are arranged along the first direction; the adjustment screw is adapted to pass through the waist holes and is screw-connected with the support plate.

[0019] Optionally, the adjustment assembly further includes a tensioning plate and a tensioning screw; the tensioning plate is arranged on the mounting plate; the tensioning screw penetrates through the tensioning plate along the first direction and abuts against the mounting plate, and the tensioning screw is screw-connected with the tensioning plate.

[0020] And / or, the adjusting assembly further comprises a baffle and a photoelectric sensor; the baffle is arranged on the idler, and the baffle is provided with a gap; the photoelectric sensor is arranged on the mounting plate and corresponds to the position of the gap, and is used for detecting the rotating speed of the idler.

[0021] Optionally, a sealing assembly is further included, and the sealing assembly comprises two skeleton oil seals; the two skeleton oil seals are arranged in the accommodating groove and are adapted to be sleeved on the first shaft sleeve; the two skeleton oil seals are respectively located on two sides of the transmission assembly.

[0022] Optionally, the sealing assembly further comprises a sealing ring; a first bottom plate is detachably connected in the end body, and the first bottom plate forms a groove bottom of the accommodating groove; the sealing ring is arranged between the first bottom plate and the end body and is used for sealing the accommodating groove.

[0023] Optionally, a cathode assembly and a cooling assembly are further included, and the cathode assembly and the cooling assembly are arranged inside the target tube assembly, and the cooling assembly is connected with the end body through a second shaft sleeve; the cathode assembly is arranged on the cooling assembly.

[0024] Optionally, the cathode assembly comprises a second bottom plate, a magnetic rod sleeve, a magnetic steel wedge-shaped block, a magnetic shoe plate and a plurality of magnets; the second bottom plate is arranged on the cooling assembly along the length direction of the target tube assembly; the magnetic shoe plate is arranged on the side of the second bottom plate away from the cooling assembly; the magnetic shoe plate is provided with a groove; a plurality of magnets are arranged in the groove along the width direction of the groove; and one magnetic steel wedge-shaped block is arranged between every two adjacent magnets; the magnetic rod sleeve is sealingly connected with the second bottom plate and covers the magnetic steel wedge-shaped block, the magnetic shoe plate and the plurality of magnets.

[0025] And / or, the cooling assembly comprises a cooling pipe and a hollow pipe; the hollow pipe is flange-connected with the cooling pipe and communicates with the inside of the cooling pipe; one end of the hollow pipe away from the cooling pipe is provided with a key groove; one side wall of one end of the second shaft sleeve is provided with a connecting key matched with the key groove, and the other end is connected with the groove bottom of the accommodating groove; the end of the second shaft sleeve provided with the connecting key is adapted to be inserted into the hollow pipe;

[0026] And / or, the bottom of the second shaft sleeve is provided with an annular flange, at least one slot hole is arranged on the annular flange, a fixing groove corresponding to the slot hole is arranged on the groove bottom of the accommodating groove, and the fixing groove and the slot hole form a fixing cavity for placing a pin; a pressing block is arranged on the sliding sleeve of the second shaft sleeve, and the pressing block is arranged on the side of the annular flange away from the fixing groove; the pressing block is detachably connected with the groove bottom of the accommodating groove, and the pressing block covers the slot hole, so as to limit the pin.

[0027] The technical scheme of the utility model has the following advantages:

[0028] The utility model discloses, target pipe assembly is rotated and is connected in accommodating groove through first shaft sleeve, and rotates through the drive assembly of driving first synchronous pulley, first shaft sleeve passes through bearing pressing ring and bearing baffle cooperation and the inner ring fixed of bearing load, can realize the axial load of two directions, application scene is wide, when the target pipe assembly is installed positively, the shaft shoulder is located above bearing pressing ring and presses down bearing pressing ring, improves the carrying capacity, and bearing pressing ring and bearing baffle are clamped in the shaft shoulder and first synchronous pulley, simple structure, reduce the friction between parts and the space that the end head body is occupied, more favorably carry out heat dissipation, realize overall light weight, and when the part is damaged, the number of parts required to be replaced is reduced and is convenient for dismounting, improve the service life. ACCURATE DRAWINGS

[0029] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiment or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0030] Figure 1 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering;

[0031] Figure 2 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering; Figure 1 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering;

[0032] Figure 3 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering;

[0033] Figure 4 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering; Figure 1 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering;

[0034] Figure 5 The utility model provides a partial structure schematic view of the rotating cathode for magnetron sputtering;

[0035] Figure 6 A structure schematic view of the target tube assembly and the end head body connection provided by the utility model is provided.

[0036] Figure 7 An explosion view of the target tube assembly provided by the utility model is provided.

[0037] Figure 8 A structure schematic view of the driving assembly at the first visual angle is provided.

[0038] Figure 9 A structure schematic view of the driving assembly at the second visual angle is provided.

[0039] Figure 10 A structure schematic view of the cathode assembly is provided.

[0040] Figure 11 A structure schematic view of the cathode assembly and the cooling assembly connection provided by the utility model is provided.

[0041] Figure 12 A sectional view of the rotary cathode for magnetron sputtering provided by the utility model is provided.

[0042] Explanation of reference signs:

[0043] 1, end head body; 2, second synchronous pulley; 3, target tube assembly; 301, target tube; 302, clamping piece; 303, connection flange; 4, first shaft sleeve; 5, bearing; 6, first synchronous pulley; 7, bearing baffle; 8, bearing pressing ring; 9, shaft shoulder; 10, support plate; 11, driving motor; 12, synchronous belt; 13, idler; 14, mounting plate; 15, rotating shaft; 16, adjusting screw; 17, waist hole; 18, tensioning plate; 19, tensioning screw; 20, baffle; 21, photoelectric sensor; 22, notch; 23, skeleton oil seal; 24, first bottom plate; 25, sealing ring; 26, cathode assembly; 2601, second bottom plate; 2602, magnetic rod sleeve; 2603, magnetic steel wedge block; 2604, magnetic shoe plate; 2605, magnet; 27, cooling assembly; 2701, cooling pipe; 2702, hollow pipe; 2703, key groove; 28, second shaft sleeve; 29, connecting key; 30, annular flange; 31, slot hole; 32, pin; 33, pressing block. DETAILED DESCRIPTION

[0044] The technical solutions of the utility model will be described clearly and completely in combination with the drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.

[0045] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element indicated must have a particular orientation, construct and operate in a particular orientation, therefore, it cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0046] In the description of the utility model, it needs to explain, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific situation.

[0047] In addition, the technical features involved in different embodiments of the utility model described below can be combined with each other as long as there is no conflict between them.

[0048] Example 1

[0049] Please refer to Figures 1 to 12 The embodiment provides a rotating cathode for magnetron sputtering, which comprises: a head body 1, which has a containing groove inside; a target pipe assembly 3, which is rotationally connected with the containing groove through a first shaft sleeve 4; a driving assembly, which is drivingly connected with the first shaft sleeve 4 through a transmission assembly, and is used for driving the target pipe assembly 3 to rotate around the axial direction thereof; the transmission assembly comprises a bearing 5, a first synchronous pulley 6, a bearing blocking ring 7 and a bearing pressing ring 8; the bearing 5 is arranged in the containing groove, and the first shaft sleeve 4 is arranged in the bearing 5; an axial shoulder 9 is arranged on the first shaft sleeve 4 around the circumferential side thereof; the first synchronous pulley 6 is coaxially arranged on the first shaft sleeve 4, and is drivingly connected with the output end of the driving assembly; the bearing blocking ring 7 and the bearing pressing ring 8 are coaxially arranged on the first shaft sleeve 4, and are clamped between the axial shoulder 9 and the first synchronous pulley 6; the bearing pressing ring 8 is clamped between the axial shoulder 9 and the bearing blocking ring 7; an annular groove is arranged on the outer periphery of the bearing pressing ring 8, and the annular groove and the bearing blocking ring 7 form a clamping groove, and the clamping groove is adaptively clamped with the inner ring of the bearing 5.

[0050] In the embodiment, the target tube assembly 3 is rotatably connected in the accommodating groove through the first shaft sleeve 4, so that the target tube assembly 3 is driven to rotate for coating by driving the first synchronous pulley 6 through the driving assembly. The first shaft sleeve 4 is adaptively clamped with the inner ring of the bearing 5 through the clamping groove formed by the bearing retainer 7 and the bearing pressing ring 8, and is fixed with the inner ring of the bearing 5 to provide bearing force support for rotation. The bearing retainer 7 and the bearing pressing ring 8 abut on both sides of the bearing 5, respectively, so that the target tube assembly 3 can be installed in a forward direction in the vertical direction and installed in a reverse direction vertically downward after being turned over by 180 degrees, that is, axial loads in two directions of up and down can be realized, and the applicable scenarios are improved. When the target tube assembly 3 is installed in the forward direction, the shaft shoulder 9 is located above the bearing pressing ring 8 and presses the bearing pressing ring 8 downward, thereby improving the bearing capacity. The bearing pressing ring 8 and the bearing retainer 7 are clamped between the shaft shoulder 9 and the first synchronous pulley 6, the structure is simple, the friction between parts is reduced, the space occupied in the end body 1 is reduced, heat dissipation is more favorable, the overall weight is reduced, and when parts are damaged, the number of parts to be replaced is reduced and disassembly is facilitated, thereby improving the service life.

[0051] Embodiment 2

[0052] As a further improvement of the embodiment, the bearing pressing ring 8 and the shaft shoulder 9 are both screw-connected with the bearing retainer 7.

[0053] In the embodiment, the bearing pressing ring 8 and the shaft shoulder 9 are both screw-connected with the bearing retainer 7, which facilitates installation and disassembly so that the bearing pressing ring 8 and the bearing retainer 7 rotate with the first shaft sleeve 4. The torque is transmitted through the first screw, the friction between the relative parts is reduced, the bearing retainer 7 is fixed with the shaft shoulder 9, and the number of positioning parts required by the bearing 5 is reduced.

[0054] Specifically, as shown in Figure 2 and Figure 4 , the end of the shaft shoulder 9 towards the bearing retainer 7 is provided with an annular groove on the side, and the bearing pressing ring 8 is sleeved in the annular groove, so as to reserve space on the inside of the shaft shoulder 9 for screwing the bearing retainer 7 with the shaft shoulder 9.

[0055] Specifically, the bearing retainer 7 is connected with the shaft shoulder 9 through a plurality of first screws, the plurality of first screws pass through the first synchronous pulley 6 and the bearing retainer 7 in sequence and are screw-connected with the shaft shoulder 9, the first synchronous pulley 6 and the bearing retainer 7 are fixed through the first screw, the number of parts and the friction between the relative parts are reduced, disassembly is facilitated, and the first synchronous pulley 6 is key-connected with the first shaft sleeve 4, so as to drive the first shaft sleeve 4 to rotate together.

[0056] Specifically, the bearing retainer 7 is connected with the bearing press ring 8 through a plurality of second screws, so as to cooperate to clamp the inner ring of the bearing 5, ensure rotation together, facilitate installation and disassembly, transmit torque through the second screws, and further reduce the relative friction between the bearing retainer 7 and the bearing press ring 8.

[0057] On the basis of the above-mentioned embodiments, in a preferred embodiment, as shown in Figure 5 The bearing 5 comprises two angular contact ball bearings arranged back to back.

[0058] In this embodiment, the two angular contact ball bearings are installed in the accommodating groove in a back-to-back manner, and the contact angle lines of the two angular contact ball bearings spread along the rotation axis, thereby effectively dispersing the axial loads in the upward and downward directions, providing excellent deformation resistance, and improving the overall rigidity and the ability to resist overturning moment.

[0059] On the basis of the above-mentioned embodiments, in a preferred embodiment, as shown in Figure 2 and Figure 7 The target pipe assembly 3 comprises a target pipe 301, a clamping piece 302, and a connecting flange 303; one end of the connecting flange 303 is sealingly connected with the target pipe 301 through the clamping piece 302, and the other end is coaxially and sealingly connected with the first shaft sleeve 4.

[0060] In this embodiment, the connecting flange is connected with the first shaft sleeve 4, improving the connection strength and sealing performance, and the clamping piece 302 is connected with the target pipe 301 and the connecting flange 303 respectively, facilitating installation and disassembly.

[0061] On the basis of the above-mentioned embodiments, in a preferred embodiment, as shown in Figures 1 to 3 , Figure 8 and Figure 9 The driving assembly comprises a support plate 10, a driving motor 11, and a synchronous belt 12; the support plate 10 is connected with the end body 1, the driving motor 11 is arranged on the support plate 10, and the output shaft of the driving motor 11 is coaxially provided with a second synchronous pulley 2, and the second synchronous pulley 2 is drivingly connected with the first synchronous pulley 6 through the synchronous belt 12.

[0062] It should be noted that the first synchronous pulley 6 and the second synchronous pulley 2 are located on the same horizontal line.

[0063] In this embodiment, the driving motor 11 drives the second synchronous belt 12 to rotate, and then the first synchronous pulley 6 is driven by the synchronous belt 12 to drive the first shaft sleeve 4 to rotate, thereby improving the transmission efficiency.

[0064] On the basis of the above-mentioned embodiments, in a preferred embodiment, as shown in Figure 8 and Figure 9As shown, the adjusting assembly is arranged on the support plate 10 between the first synchronous pulley 6 and the second synchronous pulley 2, and the adjusting end of the adjusting assembly abuts against the synchronous belt 12 to adjust the tension of the synchronous belt 12.

[0065] In this embodiment, the adjusting assembly is arranged between the first synchronous pulley 6 and the second synchronous pulley 2, and the adjusting end of the adjusting assembly abuts against the synchronous belt 12 to adjust the tension of the synchronous belt 12, thereby improving the transmission effect.

[0066] Based on the above embodiment, in a preferred embodiment, as shown in Figure 8 and Figure 9 The adjusting assembly comprises a idler pulley 13, a mounting plate 14, and a rotating shaft 15. The mounting plate 14 is movably arranged on the support plate 10 along a first direction perpendicular to a common plane in which the axes of the first synchronous pulley 6 and the second synchronous pulley 2 lie. The idler pulley 13 is rotatably arranged on the mounting plate 14 through the rotating shaft 15. The axes of the idler pulley 13, the first synchronous pulley 6, and the second synchronous pulley 2 are parallel, and the idler pulley 13 is located on the inner side of the synchronous belt 12 and engages with the synchronous belt 12.

[0067] In this embodiment, the mounting plate 14 is movably arranged on the support plate 10, and the idler pulley 13 is rotatably mounted through the rotating shaft 15, and the idler pulley 13 engages with the synchronous belt 12. When the synchronous belt 12 rotates, the idler pulley 13 rotates together to avoid affecting the transmission efficiency of the synchronous belt 12. When the tension of the synchronous belt 12 needs to be adjusted, the position of the idler pulley 13 is changed by moving the mounting plate 14 along the first direction, and then the idler pulley 13 abuts against the synchronous belt 12 to stretch or loosen the synchronous belt 12, thereby adjusting the tension of the synchronous belt 12. The idler pulley 13 is arranged on the inner side of the synchronous belt 12, which to some extent reduces the wear of the synchronous belt 12 compared to being arranged on the outer side.

[0068] Specifically, as shown in Figure 8 and Figure 9 The mounting plate 14 is horizontally arranged on the top of the support plate 10, and the support plate 10 is provided with an opening corresponding to the position of the mounting plate 14. One end of the rotating shaft 15 is connected with the mounting plate 14, and the other end extends downward along the vertical direction through the opening. The idler pulley 13 is coaxially rotatably arranged on the rotating shaft 15. By providing the opening, the rotating shaft 15 can move in the opening when adjusting the mounting plate 14.

[0069] Based on the above embodiment, in a preferred embodiment, as shown in Figure 8 and Figure 9 The adjusting assembly further comprises an adjusting screw 16. The mounting plate 14 is provided with a plurality of waist holes 17, and the length direction of the waist hole 17 is arranged along the first direction. The adjusting screw 16 is adapted to pass through the waist hole 17 and is threadedly connected with the support plate 10.

[0070] It should be noted that each waist hole 17 is provided with an adjusting screw 16.

[0071] In this embodiment, when the mounting plate 14 needs to be adjusted, loosen the adjusting screw 16, and then the waist hole 17 on the mounting plate 14 cooperates with the adjusting screw 16 to adjust in the first direction. After adjustment, tighten the adjusting screw 16 again to fix the mounting plate 14, which is simple and convenient.

[0072] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 8 and Figure 9 The adjusting assembly further comprises a tensioning plate 18 and a tensioning screw 19; the tensioning plate 18 is arranged on the mounting plate 14; the tensioning screw 19 penetrates the tensioning plate 18 along the first direction and abuts against the mounting plate 14, and the tensioning screw 19 is threadedly connected with the tensioning plate 18.

[0073] In this embodiment, the tensioning screw 19 is arranged on the support plate 10 and cooperates with the tensioning plate 18 to adjust. When the adjusting screw 16 is loosened, the tensioning screw 19 can be rotated to abut against the mounting plate 14 to move in the first direction. After adjustment, the adjusting screw 16 is tightened to fix, which cooperates with each other to improve the adjusting effect.

[0074] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 9 The adjusting assembly further comprises a baffle 20 and a photoelectric sensor 21; the baffle 20 is arranged on the idler 13, and the baffle 20 is provided with a notch 22; the photoelectric sensor 21 is arranged on the mounting plate 14 and corresponds to the position of the notch 22, and is used for detecting the rotating speed of the idler 13.

[0075] In this embodiment, the baffle 20 is arranged on the idler 13 and rotates with the idler 13. Each time the notch 22 rotates to correspond to the position of the photoelectric sensor 21, the photoelectric sensor 21 will sense and calculate the rotating speed of the idler 13, thereby analyzing the rotating speed of the first synchronous pulley 6, and further obtaining the rotating speed of the driving target tube assembly 3, thereby improving the detection accuracy to facilitate accurate control.

[0076] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 2 Further comprising a sealing assembly, the sealing assembly comprises two skeleton oil seals 23; the two skeleton oil seals 23 are arranged in the accommodating groove and are adapted to be arranged on the first shaft sleeve 4; the two skeleton oil seals 23 are respectively located on both sides of the transmission assembly.

[0077] In the embodiment, the skeleton oil seal 23 is arranged on both sides of the transmission assembly, and an oil film with fluid lubrication characteristics controlled by the oil seal edge is formed between the skeleton oil seal 23 and the first shaft sleeve 4, so as to ensure the sealing performance of the first shaft sleeve 4 during rotation, avoid gas leakage in the target tube assembly 3, and ensure the coating quality.

[0078] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 2 The sealing assembly further comprises a sealing ring 25; the first bottom plate 24 is detachably connected in the end body 1, and the first bottom plate 24 forms a groove bottom of the accommodating groove; and the sealing ring 25 is arranged between the first bottom plate 24 and the end body 1, and is used for sealing the accommodating groove.

[0079] It should be noted that the sealing ring 25 surrounds the outer periphery of the accommodating groove.

[0080] In the embodiment, the groove bottom of the accommodating groove is formed by the first bottom plate 24, the first bottom plate 24 is detachably connected with the end body 1, which facilitates disassembly and adjustment or installation of the interior, and the sealing effect is improved by the sealing ring 25.

[0081] Specifically, the first shaft sleeve 4 is pre-set at a distance from the groove bottom of the accommodating groove, so as to facilitate rotation of the first shaft sleeve 4.

[0082] Specifically, the sealing ring 25 is an O-shaped sealing ring.

[0083] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 11 The cathode assembly 26 and the cooling assembly 27 are further included, the cathode assembly 26 and the cooling assembly 27 are arranged in the interior of the target tube assembly 3, the cooling assembly 27 is connected with the end body 1 through the second shaft sleeve 28, and the cathode assembly 26 is arranged on the cooling assembly 27.

[0084] It should be noted that the second shaft sleeve 28 is connected with the end body 1 by penetrating the first shaft sleeve 4, and the second shaft sleeve 28 is in clearance fit with the first shaft sleeve 4, so as to avoid affecting the rotation of the first shaft sleeve 4.

[0085] In the embodiment, the magnetic field is provided by the cathode assembly 26 for coating, and the cooling assembly 27 is arranged for heat dissipation, so as to ensure stable operation of the whole.

[0086] On the basis of the above-mentioned embodiment, in a preferred embodiment, as shown in Figure 10As shown, the cathode assembly 26 includes a second bottom plate 2601, a magnetic rod sleeve 2602, a magnetic steel wedge 2603, a magnetic shoe plate 2604, and a plurality of magnets 2605. The second bottom plate 2601 is arranged on the cooling assembly 27 along the length direction of the target tube assembly 3. The magnetic shoe plate 2604 is arranged on the side of the second bottom plate 2601 away from the cooling assembly 27. The magnetic shoe plate 2604 is provided with a groove. The plurality of magnets 2605 are arranged in the groove along the width direction of the groove. One magnetic steel wedge 2603 is arranged between each adjacent two magnets 2605. The magnetic rod sleeve 2602 is sealingly connected with the second bottom plate 2601 and covers the magnetic steel wedge 2603, the magnetic shoe plate 2604, and the plurality of magnets 2605.

[0087] In this embodiment, the groove is arranged on the magnetic shoe plate 2604. The two adjacent magnets 2605 are spaced apart by the magnetic steel wedge 2603, so as to ensure the stability of the arrangement of the magnets 2605. The magnetic rod sleeve 2602 covers the magnetic steel wedge 2603, the magnetic shoe plate 2604, and the plurality of magnets 2605, so as to play a protection role.

[0088] Based on the above-mentioned embodiments, in a preferred embodiment, as shown in Figure 11 and Figure 12 As shown, the cooling assembly 27 includes a cooling pipe 2701 and a hollow pipe 2702. The hollow pipe 2702 is flange-connected with the cooling pipe 2701 and communicates with the inside of the cooling pipe 2701. The end of the hollow pipe 2702 away from the cooling pipe 2701 is provided with a key groove 2703. The outer side wall of one end of the second shaft sleeve 28 is provided with a connecting key 29 matched with the key groove 2703. The other end is connected with the groove bottom of the accommodating groove. The end of the second shaft sleeve 28 provided with the connecting key 29 is matched and inserted into the hollow pipe 2702.

[0089] In this embodiment, the cooling pipe 2701 is matched with the second shaft sleeve 28 through the hollow pipe 2702. When installing, the key groove 2703 on the hollow pipe 2702 is aligned with the connecting key 29 on the second shaft sleeve 28, so that the second shaft sleeve 28 is inserted into the hollow pipe 2702, facilitating installation and disassembly. The connecting key 29 is limited in position by matching with the key groove 2703. The connecting key 29 and the key groove 2703 also play a positioning role. After connection, the magnets 2605 of the cathode assembly 26 are ensured to be directed to the side close to the workpiece to be coated, improving the installation precision.

[0090] Specifically, the connecting key 29 and the second shaft sleeve 28 are connected by a third screw. The third screw does not extend into the inside of the second shaft sleeve 28, avoiding occupying the internal space of the second shaft sleeve 28, improving the utilization rate of the cooling space, and improving the heat dissipation effect.

[0091] Based on the above-mentioned embodiments, in a preferred embodiment, as shown in Figure 11 and Figure 12As shown, the circumferential bottom of the second shaft sleeve 28 is provided with an annular flange 30, and at least one slot hole 31 is arranged on the annular flange 30, and the slot bottom of the accommodating slot is provided with a fixing slot corresponding to the slot hole 31, and the fixing slot and the slot hole 31 form a fixing cavity for placing the pin 32; the sliding sleeve on the second shaft sleeve 28 is provided with a pressing block 33, and the pressing block 33 is arranged on the side of the annular flange 30 away from the fixing slot; the pressing block 33 is detachably connected with the slot bottom of the accommodating slot, and the pressing block 33 covers the slot hole 31, and is used for limiting the pin 32.

[0092] In the embodiment, by aligning the slot hole 31 on the second shaft sleeve 28 with the fixing slot and placing the pin 32 for limiting, the rotation of the second shaft sleeve 28 along the axial direction is avoided, and at the same time, the sliding pressing block 33 is used to cover the slot hole 31, so that the pin 32 is prevented from being separated, and the stability is improved.

[0093] The specific working principle of the rotating cathode for magnetron sputtering provided in the embodiment is as follows: the target tube assembly 3 is rotatably connected in the accommodating slot through the first shaft sleeve 4, the first shaft sleeve 4 is fixed with the inner ring of the bearing 5 through the bearing pressing ring 8 and the bearing retainer 7, so as to provide bearing force support for rotation, the bearing retainer 7 and the bearing pressing ring 8 abut on both sides of the bearing 5 respectively, the axial load in the upward and downward directions can be realized, the application scenarios are wide, the second synchronous pulley 2 can be driven to rotate by the driving motor 11, the first synchronous pulley 6 is driven to rotate by the synchronous belt 12 in turn, and then the target tube 301 is driven to rotate by the first shaft sleeve 4 for work, in this process, the rotation speed of the first synchronous pulley 6 can be detected in real time by the photoelectric sensor 21, and the tension of the synchronous belt 12 can be adjusted by adjusting the position of the idler pulley 13 in the first direction, so as to ensure the transmission efficiency; the rotating cathode for magnetron sputtering provided in the embodiment is provided with the shaft shoulder 9, and the bearing pressing ring 8 and the shaft shoulder 9 are connected with the bearing retainer 7 in a screw connection mode, the bearing capacity is improved, the structure is simple, the friction between parts is reduced, the space occupied in the internal body 1 is reduced, heat dissipation is more favorable, the overall weight is reduced, when the parts are damaged, the number of parts to be replaced is reduced, and the parts are easy to disassemble, the service life is improved; in addition, the hollow pipe 2702 is positioned and connected by cooperating with the connecting key 29 of the second shaft sleeve 28, so that the magnet 2605 is close to the workpiece to be coated after connection, and the installation precision is improved. The technical problem of the prior art that the transmission assembly structure of the rotating cathode is complex, occupies the internal space of the shell, and has poor space utilization is solved.

[0094] Obviously, the above embodiments are only examples for clearly illustrating the present application and are not intended to limit the present application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments are not required to be enumerated. The changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A rotating cathode for magnetron sputtering, characterized in that, include: The end body (1) has a receiving groove therein; A target tube assembly (3) is rotatably connected to the receiving groove via a first shaft sleeve (4); a driving assembly, connected to the first shaft sleeve (4) via a transmission assembly, and configured to drive the target tube assembly (3) to rotate about its axial direction; The transmission assembly comprises a load-bearing bearing (5), a first synchronous pulley (6), a bearing retaining ring (7) and a bearing pressure ring (8); the load-bearing bearing (5) is arranged in the accommodating groove, and the first shaft sleeve (4) is inserted into the load-bearing bearing (5); a shaft shoulder (9) is provided around the circumference of the first shaft sleeve (4); the first synchronous pulley (6) is coaxially sleeved on the first shaft sleeve (4) and is drivingly connected to the output end of the drive assembly; The bearing retaining ring (7) and the bearing pressure ring (8) are both coaxially sleeved on the first shaft sleeve (4) and clamped between the shaft shoulder (9) and the first synchronous pulley (6); the bearing pressure ring (8) is clamped between the shaft shoulder (9) and the bearing retaining ring (7); an annular groove is provided on the outer periphery of the bearing pressure ring (8), and the annular groove and the bearing retaining ring (7) are combined to form a clamping groove, and the clamping groove is adapted to be clamped with the inner ring of the load-bearing bearing (5).

2. The rotating cathode for magnetron sputtering according to claim 1, characterized in that The bearing pressure ring (8) and the shaft shoulder (9) are both screw-connected to the bearing retaining ring (7); And / or, the load-bearing bearing (5) comprises two angular contact ball bearings, and the two angular contact ball bearings are arranged back to back; And / or, the target tube assembly (3) comprises a target tube (301), a clamping piece (302), and a connecting flange (303); one end of the connecting flange (303) is sealedly connected to the target tube (301) via the clamping piece (302), and the other end is coaxially sealedly connected to the first shaft sleeve (4).

3. The rotating cathode for magnetron sputtering according to claim 1, characterized in that The driving assembly comprises a support plate (10), a driving motor (11) and a synchronous belt (12); the support plate (10) is connected to the end head body (1); the driving motor (11) is arranged on the support plate (10); and the output shaft of the driving motor (11) is coaxially provided with a second synchronous pulley (2); the second synchronous pulley (2) is drivingly connected to the first synchronous pulley (6) through the synchronous belt (12).

4. The rotating cathode for magnetron sputtering according to claim 3, characterized in that Also includes: An adjusting component is provided on the support plate (10) and is located between the first synchronous pulley (6) and the second synchronous pulley (2); an adjusting end of the adjusting component abuts against the synchronous belt (12) and is used to adjust the tension of the synchronous belt (12).

5. The rotating cathode for magnetron sputtering according to claim 4, characterized in that The adjustment assembly comprises an idler wheel (13), a mounting plate (14) and a rotating shaft (15); the mounting plate (14) is movably arranged on the support plate (10) along a first direction, and the first direction is perpendicular to a common plane where the axes of the first synchronous pulley (6) and the second synchronous pulley (2) are located; the idler wheel (13) is rotatably arranged on the mounting plate (14) via the rotating shaft (15); the axes of the idler wheel (13), the first synchronous pulley (6) and the second synchronous pulley (2) are all parallel, and the idler wheel (13) is located on the inner side of the synchronous belt (12) and is meshed with the synchronous belt (12).

6. The rotating cathode for magnetron sputtering according to claim 5, characterized in that The adjustment assembly further comprises an adjustment screw (16); a plurality of waist holes (17) are provided on the mounting plate (14); the length direction of the waist holes (17) is arranged along the first direction; the adjustment screw (16) is adapted to pass through the waist holes (17) and is threadedly connected to the support plate (10); And / or, the adjustment assembly further comprises a tensioning plate (18) and a tensioning screw (19); the tensioning plate (18) is arranged on the mounting plate (14); the tensioning screw (19) passes through the tensioning plate (18) along the first direction and abuts against the mounting plate (14), and the tensioning screw (19) is threadedly connected to the tensioning plate (18); And / or, the adjustment assembly further comprises a baffle (20) and a photoelectric sensor (21); the baffle (20) is arranged on the idler wheel (13), and a notch (22) is provided on the baffle (20); the photoelectric sensor (21) is arranged on the mounting plate (14) and corresponds to the position of the notch (22), and is used to detect the rotation speed of the idler wheel (13).

7. The rotating cathode for magnetron sputtering according to claim 1, characterized in that It also includes a sealing assembly, which includes two skeleton oil seals (23); the two skeleton oil seals (23) are arranged in the accommodating groove and are adapted to be arranged on the first shaft sleeve (4); the two skeleton oil seals (23) are respectively located on both sides of the transmission assembly.

8. The rotating cathode for magnetron sputtering according to claim 7, characterized in that: The sealing assembly further comprises a sealing ring (25); a first bottom plate (24) is detachably connected to the inside of the end head body (1), and the first bottom plate (24) forms the bottom of the receiving groove; the sealing ring (25) is arranged between the first bottom plate (24) and the end head body (1) and is used to seal the receiving groove.

9. The rotating cathode for magnetron sputtering according to any one of claims 1 to 8, characterized in that: It also includes a cathode assembly (26) and a cooling assembly (27), wherein the cathode assembly (26) and the cooling assembly (27) are both arranged inside the target tube assembly (3), and the cooling assembly (27) is connected to the end body (1) through a second shaft sleeve (28); the cathode assembly (26) is arranged on the cooling assembly (27).

10. The rotating cathode for magnetron sputtering according to claim 9, characterized in that: The cathode assembly (26) comprises a second bottom plate (2601), a magnetic rod sleeve (2602), a magnetic steel wedge block (2603), a magnetic shoe plate (2604) and a plurality of magnets (2605); the second bottom plate (2601) is arranged on the cooling assembly (27) along the length direction of the target tube assembly (3); the magnetic shoe plate (2604) is arranged on a side of the second bottom plate (2601) away from the cooling assembly (27); a groove is provided on the magnetic shoe plate (2604); a plurality of magnets (2605) are arranged in the groove at intervals along the width direction of the groove, and a magnetic steel wedge block (2603) is arranged between every two adjacent magnets (2605); the magnetic rod sleeve (2602) is sealed and connected to the second bottom plate (2601), and covers the magnetic steel wedge block (2603), the magnetic shoe plate (2604) and the plurality of magnets (2605); And / or, the cooling assembly (27) includes a cooling pipe (2701) and a hollow pipe (2702); the hollow pipe (2702) is flange-connected to the cooling pipe (2701) and communicates with the interior of the cooling pipe (2701); a keyway (2703) is provided at one end of the hollow pipe (2702) away from the cooling pipe (2701); a connecting key (29) adapted to the keyway (2703) is provided on the outer wall of one end of the second shaft sleeve (28), and the other end is connected to the bottom of the accommodating groove; the end of the second shaft sleeve (28) provided with the connecting key (29) is adapted to be inserted into the hollow pipe (2702); And / or, the bottom of the peripheral side of the second sleeve (28) is provided with an annular flange (30), the annular flange (30) is provided with at least one slot (31), the bottom of the accommodating groove is provided with a fixing groove corresponding to the slot (31), and the fixing groove and the slot (31) form a fixed cavity for placing the pin (32); the sliding sleeve on the second sleeve (28) is provided with a pressure block (33), and the pressure block (33) is arranged on the side of the annular flange (30) away from the fixing groove; the pressure block (33) is detachably connected to the bottom of the accommodating groove, and the pressure block (33) covers the slot (31) and is used to limit the pin (32).

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