Circuit board monitoring circuit of exposure machine

Abstract

An exposure machine circuit board monitoring circuit comprises an exposure machine, a touch screen which is arranged on one side of the exposure machine and is used for displaying the variation trend of working voltage in a chart form, and a voltage monitoring module which is composed of a plurality of high-precision voltage sensors and is arranged on a plurality of detection nodes of an exposure machine circuit board at intervals, the voltage monitoring module is used for collecting working voltage data of a circuit board of the exposure machine in real time, the sound-light alarm unit is fixedly installed at the top of the exposure machine and used for sending out an alarm signal when the working voltage exceeds a normal range, and the signal input end of the data processing module is in signal connection with the output end of the voltage monitoring module. And the signal output end is connected with the signal input ends of the touch screen, the data storage module and the sound-light alarm unit. Through the voltage monitoring module and the data processing module, the data processing module can analyze the real-time monitoring data of the high-precision voltage sensor, and the change trend of the real-time working voltage is generated on the touch screen in a chart form, so that the on-site maintenance personnel can judge the fault reason conveniently.

Description

TECHNICAL FIELD

[0001] The utility model relates to monitoring circuit technical field, especially relate to a exposure machine circuit board monitoring circuit. BACKGROUND

[0002] In modern electronic manufacturing industry, exposure machine is one of the key production equipment, and the working voltage stability of its circuit board plays a vital role in the normal operation of equipment and product quality. However, the existing voltage detection technology often has deficiencies in precision, real-time performance and reliability, which is difficult to meet the demand of exposure machine circuit board for accurate monitoring of working voltage.

[0003] At present, the mainstream photolithography machine (NIKON \ CANON) in panel display industry adopts single-chip microcomputer structure, and control, communication and the like adopt circuit board, and the working and output of the circuit board will involve many DC power switches (DC power), and after the equipment is used for a certain period of time, the DC power output will appear attenuation, which will lead to unstable output, affect the normal work of the circuit, error alarm appears, and it is very difficult for the on-site maintenance personnel to judge the fault reason and problem. The device stops, and the factory production capacity is affected. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing an exposure machine circuit board monitoring circuit to solve the problems in the prior art.

[0005] The above technical purpose of the utility model is realized by the following technical scheme:

[0006] An exposure machine circuit board monitoring circuit, comprising an exposure machine, a touch screen, a voltage monitoring module, an audio-visual alarm unit and a data processing module, wherein the touch screen is arranged on one side of the exposure machine and used to display the change trend of working voltage in the form of a chart; the voltage monitoring module is composed of multiple high-precision voltage sensors and arranged at multiple detection nodes on the circuit board of the exposure machine at intervals, and used to collect working voltage data of the circuit board of the exposure machine in real time; the audio-visual alarm unit is fixedly installed on the top of the exposure machine and used to send an alarm signal when the working voltage exceeds the normal range; and the data processing module is connected with the output signal of the voltage monitoring module at the signal input end, and connected with the signal input end of the touch screen, the data storage module and the audio-visual alarm unit at the signal output end.

[0007]

[0008]

[0009] The data processing module is connected with the output signal of the voltage monitoring module at the signal input end, and connected with the signal input end of the touch screen, the data storage module and the audio-visual alarm unit at the signal output end.

[0010] ​​By adopting the technical scheme, the touch screen arranged on the exposure machine is mainly used for displaying the change trend of the working voltage, and can also control the screen to switch to the working voltage of different time periods or check the error information, the plurality of high-precision voltage sensors included in the voltage monitoring module are arranged at the key nodes of the exposure machine circuit board, can accurately perceive the change of the voltage, and the audible and visual alarm unit can timely notify the on-site staff of the error information, so that the on-site staff can master the voltage fault reason of the exposure machine at the first time, and then corresponding maintenance is carried out, thereby effectively avoiding the situation that the machine is stopped for a long time to affect the production task.

[0011] In further embodiments, the high-precision voltage sensor includes a sampling circuit, a voltage reduction circuit, and a communication circuit, the sampling circuit is connected with the voltage reduction circuit, the voltage reduction circuit is connected with the communication circuit, and the communication circuit is used to connect with the data processing module.

[0012] By adopting the technical scheme, the sampling circuit is mainly responsible for collecting the voltage on the exposure machine circuit board, and the voltage reduction circuit is responsible for reducing the voltage to a certain range and then outputting to the digital-analog conversion module, and then transmitting to the data processing module through the communication circuit for next processing.

[0013] In further embodiments, the sampling circuit includes an input pin GPIO, a first resistor, a second resistor, a third resistor, an operational amplifier, a first capacitor, and a second capacitor.

[0014] The input pin GPIO is connected with the first end of the first resistor, the second end of the first resistor is connected with the first end of the second resistor, the second end of the second resistor is connected with a first power ground, the first end of the second resistor is connected with the first end of the first capacitor, the second end of the first capacitor is connected with a second power ground, the first end of the first capacitor is connected with a 3.3V power supply, the first end of the first capacitor is connected with the non-inverting input end of the operational amplifier, the inverting input end of the operational amplifier is connected with the output end of the operational amplifier, the first power port of the operational amplifier is connected with the 3.3V power supply, the second power port of the operational amplifier is connected with a third power ground, the output end of the operational amplifier is connected with the first end of the third resistor, the second end of the third resistor is connected with the first end of the second capacitor, the second end of the second capacitor is connected with a fourth power ground, and the second end of the third resistor is connected with the voltage reduction circuit.

[0015] By adopting the technical scheme, the first resistor R1 is 620KΩ, the second resistor R2 is 100KΩ, the third resistor R3 is 100Ω, the first capacitor C1 is 330pF, and the second capacitor C2 is 10nF. The original voltage on the exposure machine circuit board enters the sampling circuit through the input pin GPIO. The original voltage is divided into a smaller voltage to be detected through the first resistor R1 and the second resistor R2. Since the subsequent filter circuit needs to be connected, a voltage follower composed of an operational amplifier needs to be connected between the first resistor and the second resistor. The very small voltage to be detected is amplified through the non-inverting amplifier circuit, and then passes through the subsequent filter circuit. The capacitor in the circuit can make the circuit more smooth due to its effect of storing electric energy.

[0016] In a further embodiment, the voltage reduction circuit comprises a fourth resistor, a fifth resistor, a sixth resistor, a third capacitor and an ADC, a first end of the fourth resistor is connected with a second end of the third resistor, a second end of the fourth resistor is connected with a first end of the fifth resistor, a second end of the fifth resistor is connected with a power ground, the second end of the fourth resistor is connected with a first end of the third capacitor, a second end of the fifth resistor is connected with a second end of the third capacitor, the first end of the third capacitor is connected with a first end of the sixth resistor, and a second end of the sixth resistor is connected with the ADC.

[0017] By adopting the technical scheme, the fourth resistor is 100KΩ, the fifth resistor is 10KΩ, the sixth resistor is 680Ω, and the third capacitor is 104pF. After the voltage value is measured by the low-voltage detection circuit, the fourth resistor, the fifth resistor and the sixth resistor complete the filtering, and finally the communication circuit is transmitted to the data processing unit. The shell is collected by the single-chip microcomputer ADC, and the actual voltage is calculated.

[0018] In a further embodiment, the exposure machine is detachably mounted with a data storage module inside, the data storage module is composed of a non-volatile memory and a power-off protection device, and the non-volatile memory is used to store the working voltage data of the exposure machine circuit board collected by the voltage monitoring module.

[0019] By adopting the technical scheme, the non-volatile memory is used to save the previously collected data in the case of power failure, and the power-off protection device further protects the memory from data loss and damage due to the surge effect of lightning strike or power failure.

[0020] In a further embodiment, the first resistor and the second resistor are both 0.1% high-precision resistors.

[0021] By adopting the technical scheme, the high-precision resistor can make the voltage follower better, so that a more intuitive and effective voltage curve is generated, and this is helpful for field maintenance personnel to find the fault cause as soon as possible.

[0022] In conclusion, the utility model has the following beneficial effects:

[0023] 1. By the setting of the sampling circuit, the original to-be-detected voltage on the circuit board can be proportionally divided into smaller to-be-detected voltage by means of the first resistor R1 and the second resistor R2, and since the subsequent filter circuit needs to be connected, a voltage follower composed of an operational amplifier needs to be connected between the first resistor and the second resistor, and the very small to-be-detected voltage is amplified by the non-inverting amplifier circuit, and the subsequent circuit is also anti-interference in this process, and then the subsequent filter circuit, and the capacitor in the circuit can make the circuit more smooth due to the effect of storing electric energy;

[0024] 2. By the setting of the voltage reduction circuit, the subsequent filtering can be completed by the fourth resistor, the fifth resistor and the sixth resistor, and finally transmitted to the data processing unit through the communication circuit, so as to realize the effect of collecting and calculating the actual voltage by the single-chip microcomputer ADC;

[0025] 3. By the setting of the data storage module, the characteristics of the non-volatile memory can be used to save the previously collected data in the case of power failure, and the power failure protection device can further protect the memory from data loss and damage due to the surge effect of lightning strike or power failure. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a schematic diagram of the utility model circuit board monitoring circuit of an exposure machine;

[0027] Figure 2 is a circuit schematic diagram for embodying the sampling circuit and the voltage reduction circuit in the utility model circuit board monitoring circuit of an exposure machine.

[0028] In the figure, 1, voltage monitoring module; 2, audible and visual alarm unit; 3, data processing module; 4, data storage module. DETAILED DESCRIPTION

[0029] The utility model will be further described in detail below in combination with the drawings.

[0030] Wherein, the same parts are indicated by the same reference numerals. It should be noted that the words "front", "back", "left", "right", "up" and "down" used in the following description refer to the drawings Figure 1In the description, the terms "bottom" and "top," "inner" and "outer" refer to directions toward or away from a particular component geometry, respectively. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout this specification, "plurality" means two or more, unless otherwise specifically defined in terms of the center's direction.

[0031] Example 1:

[0032] like Figure 1 As shown, an exposure machine circuit board monitoring circuit includes an exposure machine, a touch screen, which is arranged on one side of the exposure machine and is used to display the changing trend of the working voltage in the form of a chart, a voltage monitoring module 1, which is composed of multiple high-precision voltage sensors, which are arranged at intervals on multiple detection nodes of the exposure machine circuit board and are used to collect the working voltage data of the exposure machine circuit board in real time, an sound and light alarm unit 2, which is fixedly installed on the top of the exposure machine and is used to send an alarm signal when the working voltage exceeds the normal range, a data processing module 3, whose signal input end is connected to the output end signal of the voltage monitoring module 1, and the signal output end is connected to the touch screen, the data storage module 4 and the signal input end of the sound and light alarm unit 2, and the data storage module 4 is detachably installed inside the exposure machine, and the data storage module 4 is composed of a non-volatile memory and a power-off protection device, and the non-volatile memory is used to store the working voltage data of the exposure machine circuit board collected by the voltage monitoring module 1, and the high-precision voltage sensor The device includes a sampling circuit, a step-down circuit and a communication circuit. The sampling circuit is connected to the step-down circuit, the step-down circuit is connected to the communication circuit, and the communication circuit is used to connect to the data processing module 3 through the voltage monitoring module 1 and the data processing module 3. The voltage monitoring module 1 includes multiple high-precision voltage sensors. These high-precision voltage sensors are set on various detection nodes of the exposure machine circuit board to monitor the working status of the circuit board in real time, and are processed by the single-chip microcomputer ADC in the data processing module 3. The collected data is used to analyze whether the working voltage is in a normal state. If not, the data processing unit will issue an alarm through the sound and light alarm device to notify the on-site staff to perform corresponding processing as soon as possible. At the same time, the non-volatile memory in the data storage module 4 will store the voltage changes in real time and generate corresponding curves, which are displayed through the touch screen, so that on-site maintenance personnel can quickly determine the fault of the exposure machine based on the changes in the working voltage.

[0033] like Figure 2As shown, the sampling circuit includes an input pin GPIO, a first resistor R1, a second resistor R2, a third resistor R3, an operational amplifier, a first capacitor C1 and a second capacitor C2, the first resistor R1 and the second resistor R2 are both 0.1% high-precision resistors, the input pin GPIO is connected with a first end of the first resistor R1, a second end of the first resistor R1 is connected with a first end of the second resistor R2, a second end of the second resistor R2 is connected with a first power ground, a first end of the second resistor R2 is connected with a first end of the first capacitor C1, a second end of the first capacitor C1 is connected with a second power ground, the first end of the first capacitor C1 is connected with a non-inverting input terminal of the operational amplifier, an inverting input terminal of the operational amplifier is connected with an output terminal of the operational amplifier, a first power port of the operational amplifier is connected with a 3.3V power supply, a second power port of the operational amplifier is connected with a third power ground, the output terminal of the operational amplifier is connected with a first end of the third resistor R3, a second end of the third resistor R3 is connected with a first end of the second capacitor C2, a second end of the second capacitor C2 is connected with a fourth power ground, and the second end of the third resistor R3 is connected with a voltage reduction circuit, the voltage reduction circuit includes a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a third capacitor C3 and an ADC, a first end of the fourth resistor R4 is connected with the second end of the third resistor R3, a second end of the fourth resistor R4 is connected with a first end of the fifth resistor R5, a second end of the fifth resistor R5 is connected with a power ground, the second end of the fourth resistor R4 is connected with a first end of the third capacitor C3, the second end of the fifth resistor R5 is connected with a second end of the third capacitor C3, the first end of the third capacitor C3 is connected with a first end of the sixth resistor R6, and a second end of the sixth resistor R6 is connected with the ADC, by using the ADC sampling function of the single-chip microcomputer, the IO port input voltage range of the single-chip microcomputer is 0-3.3V when collecting the voltage signal, therefore, in order to ensure safety, it is necessary to keep the measured voltage within this range, through the first resistor R1 and the second resistor R2, the voltage can be rapidly reduced to a very small safe range, at this time, the voltage is amplified through the non-inverting amplifier circuit with the operational amplifier as the core, but still kept within 0-3.3V, this process can improve the anti-interference ability of the subsequent circuit, so as to facilitate the subsequent filtering effect, finally, the data sampled through the communication circuit is uploaded to the single-chip microcomputer ADC for calculation according to the corresponding algorithm, and the actual value of the working voltage can be safely measured, so as to facilitate the generation of a circuit curve which is more consistent with the actual voltage change.

[0034] In the embodiments disclosed by the utility model, the terms "mounting", "connection", "connecting", "fixing" and the like should be understood in a broad sense, for example, "connecting" can be fixed connection, or detachable connection, or integrally connected; "connection" can be direct connection, or indirect connection through an intermediate medium.

[0035] The specific embodiments are merely illustrative of the utility model, and are not intended to limit the utility model, and those skilled in the art can make modifications to the embodiments without creative contribution according to the needs after reading the specification, as long as the modifications are within the scope of the claims of the utility model, and are protected by the patent law.

Claims

1. An exposure machine circuit board monitoring circuit, comprising an exposure machine, characterized in that: A touch screen is provided on one side of the exposure machine and is used to display the changing trend of the working voltage in the form of a graph; A voltage monitoring module (1) is composed of a plurality of high-precision voltage sensors, which are arranged at intervals on a plurality of detection nodes of the exposure machine circuit board and are used to collect working voltage data of the exposure machine circuit board in real time; An audible and visual alarm unit (2) is fixedly mounted on the top of the exposure machine and is used to send out an alarm signal when the operating voltage exceeds a normal range; The data processing module (3) has a signal input end connected to the output end signal of the voltage monitoring module (1), and a signal output end connected to the touch screen, the data storage module (4) and the signal input end of the sound and light alarm unit (2).

2. The exposure machine circuit board monitoring circuit according to claim 1, characterized in that: The high-precision voltage sensor comprises a sampling circuit, a step-down circuit and a communication circuit. The sampling circuit is connected to the step-down circuit, the step-down circuit is connected to the communication circuit, and the communication circuit is used to connect to a data processing module (3).

3. The exposure machine circuit board monitoring circuit according to claim 2, characterized in that: The sampling circuit includes an input pin GPIO, a first resistor R1, a second resistor R2, a third resistor R3, an operational amplifier, a first capacitor C1 and a second capacitor C2; The input pin GPIO is connected to a first end of a first resistor R1, a second end of the first resistor R1 is connected to a first end of a second resistor R2, a second end of the second resistor R2 is connected to a first power ground, a first end of the second resistor R2 is connected to a first end of a first capacitor C1, a second end of the first capacitor C1 is connected to a second power ground, a first end of the first capacitor C1 is connected to a 3.3V power supply, a first end of the first capacitor C1 is connected to a non-inverting input of an operational amplifier, an inverting input of the operational amplifier is connected to an output of the operational amplifier, a first power port of the operational amplifier is connected to a 3.3V power supply, a second power port of the operational amplifier is connected to a third power ground, an output of the operational amplifier is connected to a first end of a third resistor R3, a second end of the third resistor R3 is connected to a first end of the second capacitor C2, a second end of the second capacitor C2 is connected to a fourth power ground, and a second end of the third resistor R3 is connected to a step-down circuit.

4. The exposure machine circuit board monitoring circuit according to claim 3, characterized in that: The step-down circuit includes a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, a third capacitor C3 and an ADC. The first end of the fourth resistor R4 is connected to the second end of the third resistor R3, the second end of the fourth resistor R4 is connected to the first end of the fifth resistor R5, the second end of the fifth resistor R5 is connected to the power ground, the second end of the fourth resistor R4 is connected to the first end of the third capacitor C3, the second end of the fifth resistor R5 is connected to the second end of the third capacitor C3, the first end of the third capacitor C3 is connected to the first end of the sixth resistor R6, and the second end of the sixth resistor R6 is connected to the ADC.

5. The exposure machine circuit board monitoring circuit according to claim 1, characterized in that: A data storage module (4) is detachably installed inside the exposure machine. The data storage module (4) is composed of a non-volatile memory and a power-off protection device. The non-volatile memory is used to store the operating voltage data of the exposure machine circuit board collected by the voltage monitoring module (1).

6. The exposure machine circuit board monitoring circuit according to claim 3, characterized in that: The first resistor R1 and the second resistor R2 are both 0.1% high-precision resistors.

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