Fixed-beam eutectic machine

Abstract

The utility model relates to the technical field of eutectic equipment, in particular to a fixed beam eutectic machine which comprises a bearing platform, a first sliding rail assembly, a second sliding rail assembly and a third sliding rail assembly which are arranged at intervals are arranged on the bearing platform, a fixed beam is arranged on the bearing platform, the first sliding rail assembly is arranged on the fixed beam, and the second sliding rail assembly is arranged on the third sliding rail assembly. The first sliding rail assembly is provided with a slidable first mechanical arm module, and the first mechanical arm module is provided with a binding head assembly and a first visual module. According to the fixed-beam eutectic machine provided by the utility model, the high-precision eutectic work of the eutectic machine is realized by improving the consistency between the visual module and the manipulator module.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of eutectic device, especially relates to a fixed beam eutectic machine.

BACKGROUND

[0002] In modern microelectronic manufacturing and semiconductor packaging industry, eutectic welding technology is widely used in the production and manufacturing of various high-performance electronic devices. Eutectic machine is one of the important equipment to realize this technology, which is mainly used for fixing chips and other components to the substrate with high precision. The design of the current fixed beam eutectic machine is mainly to improve the production efficiency, which leads to poor precision.

UTILITY MODEL CONTENTS

[0003] In order to solve the technical problem of poor precision of the existing fixed beam eutectic machine, the utility model provides a fixed beam eutectic machine.

[0004] The utility model solves technical problem's scheme provides a fixed beam eutectic machine, including bearing platform, the first slide rail assembly, second slide rail assembly and third slide rail assembly that are set up mutually and are set up on bearing platform, be equipped with fixed beam on bearing platform, the first slide rail assembly is located fixed beam, be equipped with the first mechanical hand module of slidable on the first slide rail assembly, be equipped with binding head assembly and first vision module on the first mechanical hand module.

[0005] Preferably, the first mechanical hand module includes a first movable frame and a first liftable binding head assembly, the first movable frame is slidably arranged on the first slide rail assembly, the first liftable binding head assembly is arranged on the first movable frame, and the first vision module is arranged on the side of the first liftable binding head assembly.

[0006] Preferably, the second mechanical hand module is slidably arranged on the second slide rail assembly, the second mechanical hand module includes a second movable frame and a second liftable binding head assembly and a second vision module arranged on the second movable frame, respectively, the second movable frame is slidably arranged on the second slide rail assembly, the second liftable binding head assembly includes at least one chip loading suction nozzle, and the chip loading suction nozzle is located on the same side of the second vision module, when the number of chip loading suction nozzles on the second liftable binding head assembly is greater than or equal to two, the chip loading suction nozzles are arrayed on the second movable frame.

[0007] Preferably, the axis of the chip loading suction nozzle and the second vision module is located on the same plane.

[0008] Preferably, a third mechanical arm module is further included and slidably arranged on the third slide rail assembly, the third mechanical arm module including a third movable frame and a third liftable binding head assembly and a third vision module respectively arranged on the third movable frame; the third liftable binding head assembly including a substrate loading suction head and a substrate unloading suction head; the substrate loading suction heads and the substrate unloading suction heads are arrayed on the third movable frame, and the corresponding substrate loading suction heads and the substrate unloading suction heads are located on the same side of the third vision module.

[0009] Preferably, the axes of the substrate loading suction heads, the substrate unloading suction heads and the third vision module are located on the same plane.

[0010] Preferably, the horizontal height of the first slide rail assembly is higher than the horizontal heights of the second slide rail assembly and the third slide rail assembly; the first mechanical arm module is located between the second mechanical arm module and the third mechanical arm module.

[0011] Preferably, the carrier platform further includes a eutectic platform, a transfer platform, a chip loading platform and a substrate loading platform.

[0012] The substrate loading platform and the eutectic platform are arranged along the sliding path defined by the third slide rail assembly, and the third mechanical arm module is used to transfer external substrate materials between the substrate loading platform and the eutectic platform.

[0013] The chip loading platform and the transfer platform are arranged along the sliding path defined by the second slide rail assembly, and the second mechanical arm module is used to transfer external chip materials between the chip loading platform and the transfer platform.

[0014] The transfer platform and the eutectic platform are arranged along the sliding path defined by the first slide rail assembly, and the first mechanical arm module is used to transfer external chip materials between the transfer platform and the eutectic platform.

[0015] Preferably, the carrier platform further includes a substrate unloading platform, and the substrate unloading platform, the substrate loading platform and the eutectic platform are arranged along the sliding path defined by the third slide rail assembly.

[0016] The third mechanical arm module is provided with a substrate loading suction head and a substrate unloading suction head, the substrate loading suction head is used to transfer external substrate materials between the substrate loading platform and the eutectic platform, and the substrate unloading suction head is used to transfer external substrate materials between the eutectic platform and the substrate unloading platform.

[0017] Preferably, the bearing platform is further provided with a fourth slide rail assembly, a fifth slide rail assembly, a sixth slide rail assembly and a seventh slide rail assembly; the sliding directions of the fourth slide rail assembly, the fifth slide rail assembly, the sixth slide rail assembly and the seventh slide rail assembly are all perpendicular to the first slide rail assembly; the eutectic platform is slidably arranged on the fourth slide rail assembly, the transfer platform is slidably arranged on the fifth slide rail assembly, the chip loading platform is slidably arranged on the sixth slide rail assembly, and the substrate loading platform is slidably arranged on the seventh slide rail assembly.

[0018] Compared with the prior art, the fixed beam eutectic machine has the following advantages:

[0019] 1. The fixed beam eutectic machine provided by the embodiment of the utility model can realize high-precision eutectic work; specifically, the fixed beam provides a stable mounting base for the first slide rail assembly; the structural stability of the first slide rail assembly is improved, thereby ensuring the stability and operation precision of the first mechanical hand module during sliding; the binding head assembly is used for grabbing and placing materials, and the first vision module is used for identifying the position and state of the materials; through cooperation of the binding head assembly and the first vision module, the first mechanical hand module can more flexibly complete accurate grabbing and placing of the materials, and the flexibility and adaptability of the eutectic machine are improved; at the same time, by arranging the vision module on the mechanical hand module, that is, the vision module and the mechanical hand module will slide on the first slide rail assembly synchronously, this design can ensure consistency between the vision module and the mechanical hand module, thereby further enhancing the operation precision of the mechanical hand module.

[0020] 2. In the embodiment of the utility model, the first movable frame can slide on the first slide rail assembly, and the first liftable binding head assembly can be lifted on the first movable frame, thereby greatly improving the operation flexibility of the mechanical hand module; the first vision module is arranged on the side of the first liftable binding head assembly, so as to detect the position and state of the materials in real time; through real-time position feedback provided by the vision module, the accuracy of the binding head assembly during operation is ensured, and the operation precision of the eutectic machine is improved.

[0021] 3. In the embodiment of the utility model, a plurality of chip loading suction nozzles can process a plurality of chips at the same time; through the arrayed chip loading suction nozzles, the efficiency of chip loading is improved, and the production speed of the eutectic machine is accelerated.

[0022] 4. In the embodiment of the utility model, the axes of the chip loading suction nozzle and the second vision module are located on the same plane; this design enables the second vision module to more accurately detect the position information of the chip, so that the control system can more conveniently synchronously control the chip loading suction nozzle and the second vision module, thereby enabling the chip loading suction nozzle to more quickly and accurately complete grabbing and placing of the chip.

[0023] 5. The embodiment of the utility model discloses, through the array setting substrate feeding suction nozzle and substrate unloading suction nozzle, improve the efficiency of substrate feeding and unloading, speed up the production speed of eutectic machine.

[0024] 6. The embodiment of the utility model discloses, substrate feeding suction nozzle, substrate unloading suction nozzle and the axis of third vision module are located on the same plane, this design makes third vision module can more accurately detect the position information of substrate, so that control system can more conveniently synchronous control substrate feeding suction nozzle, substrate unloading suction nozzle and third vision module, so that control system can more conveniently coordinate the movement of substrate feeding suction nozzle, substrate unloading suction nozzle and the detection of third vision module, improved the reliability of control system and the convenience of maintenance.

[0025] 7. The embodiment of the utility model discloses, this height difference reduces the interference of first mechanical hand module with second slide rail assembly and third slide rail assembly in horizontal movement process, improves the operation safety and stability of equipment, ensures the smooth operation, this positional relationship makes first mechanical hand module can carry out the coordinated operation between second mechanical hand module and third mechanical hand module, improves the coordination of internal operation of eutectic machine.

[0026] 8. The embodiment of the utility model discloses, through setting eutectic platform, transfer platform, chip feeding platform and substrate feeding platform on the bearing platform, and for each platform configuration corresponding mechanical hand module and slide rail assembly, ensure the efficient transfer of material between various platforms, simultaneously, let each platform along the design of corresponding sliding path arrangement not only optimizes the space layout of eutectic machine, improves the efficiency of material circulation, still reduces the interference between each other through the independent operation of various mechanical hand modules, further improves the precision and production efficiency of eutectic machine.

[0027] 9. The embodiment of the utility model discloses, through setting substrate unloading platform on the bearing platform, and setting substrate feeding suction nozzle and substrate unloading suction nozzle on third mechanical hand module, so that third mechanical hand module can complete unloading and feeding in single back and forth movement, ensure the efficient transfer of substrate material before and after eutectic, this design not only optimizes the space layout of eutectic machine, improves the efficiency of material circulation.

[0028] 10. The embodiment of the utility model discloses, through set up multiple slide rail assembly, make each platform can slide in the direction perpendicular to first slide rail assembly, each platform when sliding does not interfere with each other, independent sliding, reduced the mutual interference between each platform, ensured the independent operation of each platform, improved the accuracy and fluency of operation, also improved the moving flexibility of each platform, make the cooperation progress between each platform and each mechanical hand module higher, through the slide rail assembly layout in the vertical direction, make each platform more compact in space, each slide rail assembly controls the platform of corresponding respectively, simplified the control logic of each platform, make the control system can be more conveniently coordinated the sliding of each platform, reduced the complexity of control system, improved the reliability and the convenience of maintenance of control system. ILLUSTRATIONS

[0029] Figure 1 It is the structure schematic of the die bonder provided by the embodiment of the application Figure 1 .

[0030] Figure 2 It is the structure schematic of the die bonder provided by the embodiment of the application Figure 2 .

[0031] Figure 3 It is the arrangement schematic drawing of three slide rail assemblies under the front view angle of the die bonder provided by the embodiment of the application.

[0032] Figure 4 It is the structure schematic of the die bonder provided by the embodiment of the application Figure 3 .

[0033] Figure 5 It is the side schematic drawing (omits partial structure) of the die bonder provided by the embodiment of the application.

[0034] Figure 6 It is the structure schematic drawing of the first mechanical hand module of the die bonder provided by the embodiment of the application.

[0035] Figure 7 It is the structure schematic drawing of the second mechanical hand module of the die bonder provided by the embodiment of the application.

[0036] Figure 8 It is the structure schematic drawing of the third mechanical hand module of the die bonder provided by the embodiment of the application.

[0037] Figure 9 It is the structure schematic of the die bonder provided by the embodiment of the application (omits partial structure). Figure 4

[0038] Figure 10 It is the working path schematic drawing of each mechanical hand module in the die bonder provided by the embodiment of the application.

[0039] ​Figure 11 is a top view of a transfer platform of a die bonder provided by an embodiment of the present application.

[0040] Brief Description of the Drawings:

[0041] 100, die bonder;

[0042] 1, bearing platform; 11, fixed beam; 111, stand; 112, support part; 113, avoiding space; 1131, gap; 12, die platform; 13, transfer platform; 14, chip loading platform; 15, substrate loading platform; 16, substrate unloading platform; 17, substrate loading warehouse platform; 171, loading layer; 18, substrate unloading warehouse platform; 181, unloading layer;

[0043] 2, first slide rail assembly; 21, line drag chain; 3, second slide rail assembly; 31, first support frame; 4, third slide rail assembly; 41, second support frame; 5, first mechanical hand module; 51, first movable frame; 52, first liftable binding head assembly; 6, second mechanical hand module; 61, second movable frame; 62, second liftable binding head assembly; 621, chip loading suction nozzle; 7, third mechanical hand module; 71, third movable frame; 72, third liftable binding head assembly; 721, substrate loading suction nozzle; 722, substrate unloading suction nozzle; 8, vision module. DETAILED DESCRIPTION

[0044] In order to make the purpose of the utility model, technical scheme and advantage more clear and explicit, the following will be combined with the drawings and the embodiment, and the utility model will be further described in detail. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model.

[0045] It should be noted that the terms "first" and "second" and the like in the specification and claims of the utility model are used to distinguish different objects, and are not used to describe a specific order.

[0046] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on the other element or there can be a middle element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0047] In the utility model, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "transverse", "longitudinal" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used for better describing the utility model and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0048] In addition to indicating the orientation or positional relationship, the above-mentioned terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the utility model can be understood according to the specific circumstances.

[0049] In addition, the terms "mounting", "setting", "providing", "connecting", "connecting" should be understood broadly. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0050] Please refer to Figure 1 The first embodiment of the present application provides a eutectic machine 100 for realizing high-precision eutectic welding between chips and substrates or other carriers; the eutectic machine 100 comprises a bearing platform 1, the bearing platform 1 is provided with a first slide rail assembly 2, a second slide rail assembly 3 and a third slide rail assembly 4 which are arranged at intervals; a first mechanical hand module 5 is slidably arranged on the first slide rail assembly 2, a second mechanical hand module 6 is slidably arranged on the second slide rail assembly 3, and a third mechanical hand module 7 is slidably arranged on the third slide rail assembly 4.

[0051] It can be understood that the eutectic machine 100 provided by the embodiment of the present application is arranged at intervals through the three slide rail assemblies, avoids direct contact of the slide rails, reduces the mutual interference between the assemblies, and thus improves the working precision of the mechanical hand module.

[0052] As a feasible implementation manner, the first slide rail assembly 2, the second slide rail assembly 3 and the third slide rail assembly 4 are arranged in parallel,

[0053] It can be understood that the eutectic machine 100 provided by the embodiment of the present application is arranged in parallel and spaced apart among the three slide rail assemblies, which not only optimizes the operation process of the mechanical hand assembly, improves the efficiency and precision of the eutectic machine 100, but also further enhances the stability and reliability of the equipment by reducing the mutual interference among the assemblies. Specifically, the three slide rail assemblies are arranged in parallel to optimize the operation process of the mechanical hand module during the eutectic process, ensure the efficiency, and occupy a small space. At the same time, the three slide rails are arranged in a spaced apart manner to avoid direct contact between the slide rails, thereby reducing the interference of the mechanical hand module operation process on other mechanical hands, thereby greatly improving the operation precision of the mechanical hand module.

[0054] Specifically, the bearing platform 1 is the basic component of the eutectic machine 100, and the top surface of the bearing platform 1 provides a stable support surface, which is the installation basis of the mechanical hand assembly and other working platforms. The stable bearing platform 1 helps to improve the precision and service life of the entire eutectic machine 100.

[0055] Specifically, the first slide rail assembly 2, the second slide rail assembly 3 and the third slide rail assembly 4 are respectively installed on the bearing platform 1, and are used to realize accurate guidance when the first mechanical hand assembly slides, which is beneficial to ensure the accuracy of corresponding material transfer.

[0056] It should be noted that the materials that need to be transferred in the die bonding machine generally include substrates and chips. In some processes, it also includes welding materials.

[0057] Please continue to refer to Figure 1 As a feasible implementation manner, the first mechanical hand module 5, the second mechanical hand module 6 and the third mechanical hand module 7 are respectively provided with a vision module 8.

[0058] It can be understood that the embodiment of the present application sets the vision module 8 on the mechanical hand module, so that the vision module 8 and the mechanical hand module move synchronously on the slide rail assembly, which can ensure the consistency between the vision module 8 and the mechanical hand module, thereby further enhancing the operation precision of the mechanical hand module.

[0059] It can be understood that the present scheme also includes a control module, and the first mechanical hand module 5, the second mechanical hand module 6 and the third mechanical hand module 7 are electrically connected with the control module to realize precise control of each mechanical hand module.

[0060] The visual module 8 on each mechanical hand module is also electrically connected with the control module; it can be understood that the control module monitors and controls the movement of the mechanical hand module in real time through electrical connection, and the mechanical hand module can perform accurate material transfer operation according to the predetermined path and speed by sending instructions through the control module; the control module can adjust the action of the corresponding mechanical hand module in real time according to the information fed back by the visual module 8, and through real-time monitoring and correction, the dynamic response capability and precision of the eutectic machine 100 in the operation process are improved.

[0061] In summary, the eutectic machine 100 provided by the embodiment of the present application realizes high precision and high efficiency of the mechanical hand module in the eutectic process by arranging the first slide rail assembly 2, the second slide rail assembly 3 and the third slide rail assembly 4 on the bearing platform 1 in parallel and at intervals, and configuring the mechanical hand module with the visual module 8 on each slide rail assembly.

[0062] Please continue to refer to Figure 1 As a feasible implementation manner, the bearing platform 1 is provided with a fixed beam 11, and the first slide rail assembly 2 is arranged on the fixed beam 11; it can be understood that in the embodiment of the present application, the fixed beam 11 structure is adopted for the fixed crystal machine, that is, the fixed beam 11 for mounting the slide rail does not move itself, compared with the existing gantry type eutectic machine 100, the fixed beam type fixed crystal machine can further reduce vibration and improve the precision of the equipment; the fixed beam 11 provides a stable mounting basis for the first slide rail assembly 2; the structural stability of the first slide rail assembly 2 is improved, and then the stability and operation precision of the first mechanical hand module 5 in the sliding process are ensured.

[0063] As a feasible implementation manner, the second slide rail assembly 3 and the third slide rail assembly 4 are arranged close to the fixed beam 11 and spaced apart from the fixed beam 11.

[0064] It can be understood that by arranging the second slide rail assembly 3 and the third slide rail assembly 4 close to the fixed beam 11, the space layout of the whole equipment can be optimized, so that the equipment is more compact and saves space, and such compact design helps to improve the integration of the equipment and facilitate efficient operation in limited space; although the second slide rail assembly 3 and the third slide rail assembly 4 are kept at a distance from the fixed beam 11, their arrangement close to the fixed beam 11 helps to realize the coordinated work between the mechanical hand modules.

[0065] Please combine Figure 1 and Figure 2As a feasible implementation manner, the fixed beam 11 comprises a column 111 and a side support part 112, the column 111 is arranged on the bearing platform 1, the side support part 112 is arranged at an end of the column 111 away from the bearing platform 1, and the side support part 112 is convex outward relative to a circumferential outer surface of the column 111; a space-avoiding space 113 is arranged between the side support part 112 and the bearing platform 1, and the second slide rail assembly 3 and the third slide rail assembly 4 are located in the space-avoiding space 113.

[0066] Understandably, in the embodiment of the present application, the structural strength of the eutectic machine 100 is strengthened by the design of the fixed beam 11, and the mutual interference between the slide rail assemblies is reduced by the design of the space-avoiding space 113, thereby improving the precision and stability of the eutectic machine 100.

[0067] As a feasible implementation manner, the fixed beam 11 is an integral structure formed integrally; it can be understood that the integral structure improves the rigidity and stability of the fixed beam 11, can further ensure the working precision and stability of the first mechanical hand module 5, and effectively reduces the wear and loosening problems of the fixed beam 11 in long-term use; at the same time, the integral structure can ensure the accuracy of the size in the manufacturing process, and reduce the vibration and noise caused by the connection problems between parts, so as to provide more stable support when installing the slide rail assembly, and further improve the overall precision of the eutectic machine 100.

[0068] As a feasible implementation manner, the side support part 112 is arranged perpendicularly to the column 111. An installation end face is arranged at an end of the side support part 112 away from the column 111, the first slide rail assembly 2 is arranged on the installation end face, and the installation end face is perpendicular to the top surface of the bearing platform 1. It can be understood that the perpendicularly arranged installation end face ensures that the installation basis of the first slide rail assembly 2 is more stable, reduces the shaking and deviation of the slide rail assembly in the running process, and improves the stability of the slide rail assembly.

[0069] As a feasible implementation manner, the column 111 is arranged close to the edge of the bearing platform 1, and the side support part 112 is convex towards the middle area of the bearing platform 1. It can be understood that the edge arrangement of the column 111 optimizes the spatial layout of the column 111 and the side support part 112, and further improves the space utilization and compactness of the structure of the fixed beam eutectic machine 100.

[0070] Please refer to Figure 2 The bearing platform 1 is further provided with a first support frame 31 and a second support frame 41 arranged at intervals, the second slide rail assembly 3 is arranged on the first support frame 31, and the third slide rail assembly 4 is arranged on the second support frame 41.

[0071] It can be understood that by setting the first support frame 31 and the second support frame 41, independent and stable support is provided for the second slide rail assembly 3 and the third slide rail assembly 4. The deformation or shaking problem caused by the slide rail assembly being too long or too heavy is reduced, thereby improving the structural stability of the entire eutectic machine 100.

[0072] As a feasible implementation manner, the second slide rail assembly 3 is arranged on the top surface of the first support frame 31, and the third slide rail assembly 4 is arranged on the top surface of the second support frame 41.

[0073] It can be understood that by arranging the slide rail assembly on the top surface of the support frame, the spatial layout of the slide rail assembly is optimized.

[0074] Please continue to refer to Figure 1 As a feasible implementation manner, the second slide rail assembly 3 and the third slide rail assembly 4 are arranged side by side along the sliding direction thereof.

[0075] It can be understood that in the embodiment of the present application, by arranging the second slide rail assembly 3 and the third slide rail assembly 4 side by side along the sliding direction thereof, the spatial layout of the eutectic machine 100 is optimized, the operation between the slide rail assemblies is more coordinated, and the possibility of mutual interference is reduced.

[0076] Specifically, such side-by-side arrangement optimizes the spatial layout of the eutectic machine 100, so that the device occupies less space in the transverse direction, improving the space utilization efficiency; the side-by-side arrangement reduces the interference between the two slide rail assemblies during sliding, so that the mechanical hand assembly slides more smoothly on the slide rail, improving the running efficiency and precision of the slide rail assembly; at the same time, the side-by-side arrangement makes the coordination between the slide rail assemblies easier to achieve, reducing the complexity of the control system.

[0077] It should be noted that the side-by-side arrangement of the second slide rail assembly 3 and the third slide rail assembly 4 along the sliding direction thereof can also be understood as the second slide rail assembly 3 and the third slide rail assembly 4 being arranged on the same axis. Due to the possible differences between the second slide rail assembly 3 and the third slide rail assembly 4, the deviation caused by this reason should not be considered as being out of alignment, and still belongs to the scope of the present solution.

[0078] Please refer to Figure 3 As a feasible implementation manner, the first slide rail assembly 2 is arranged side by side with the second slide rail assembly 3 in part, and the first slide rail assembly 2 is arranged side by side with the third slide rail assembly 4 in part.

[0079] Understandably, in the embodiment of the present application, by juxtaposing the partial area of the first slide rail assembly 2 with the partial area of the second slide rail assembly 3 and the third slide rail assembly 4, the first robot module 5 and the second robot module 6 can work more closely in the partial area, reducing the interference between each other and improving the coordination of operation, while optimizing the spatial layout of the eutectic machine 100 and improving the space utilization.

[0080] Specifically, the juxtaposition allows the first slide rail assembly 2 and the second slide rail assembly 3 to share space in the partial area, reducing spatial interference; the juxtaposition allows the first slide rail assembly 2 and the third slide rail assembly 4 to share space in the partial area, reducing spatial interference.

[0081] When performing motion control, the robots can be controlled to move in the same direction at the same time to achieve avoidance, and based on the parallel arrangement of the three slide rail assemblies, this motion control method is very simple to implement.

[0082] Please continue to refer to Figure 3 As a feasible implementation manner, the horizontal height of the first slide rail assembly 2 is higher than the horizontal height of the second slide rail assembly 3 and the third slide rail assembly 4; the first robot module 5 is located between the second robot module 6 and the third robot module 7.

[0083] Understandably, this height difference reduces the interference between the first robot module 5 and the second slide rail assembly 3 and the third slide rail assembly 4 during horizontal movement, improves the operation safety and stability of the equipment, and ensures the smooth operation; this positional relationship allows the first robot module 5 to perform coordinated operation between the second robot module 6 and the third robot module 7; improves the coordination of internal operation of the eutectic machine 100.

[0084] Please refer to Figure 4 As a feasible implementation manner, the eutectic machine 100 is also provided with a line drag chain 21 for cooperating with the first slide rail assembly 2, and the line drag chain 21 is arranged on the top surface of the fixed beam 11.

[0085] Understandably, the line drag chain 21 can effectively protect the cables on the first slide rail assembly 2 and prevent the cables from being damaged when the robot module slides; the line drag chain 21 is arranged on the top surface of the fixed beam 11, avoiding the cables hanging around the slide rail assembly and reducing the interference of the cables when the robot module slides.

[0086] Please combine Figures 3 to 5As a feasible implementation, the second slide rail assembly 3 and the third slide rail assembly 4 are arranged side by side along the sliding direction thereof; the gap 1131 is provided between the column 111 and the second slide rail assembly 3 and the third slide rail assembly 4; and the line drag chain 21 is arranged on the second slide rail assembly 3 and the third slide rail assembly 4 respectively and is arranged in the gap 1131.

[0087] It can be understood that the side-by-side arrangement of the second slide rail assembly 3 and the third slide rail assembly 4 solves the mutual interference problem of the robot modules on the slide rail assembly during operation; the gap 1131 provides installation space for the line drag chain 21; the independence of the slide rail assembly and the rationality of the layout of the line drag chain 21 are improved; the interference is reduced; and the precision and stability of the eutectic machine 100 are improved.

[0088] Referring to Figure 6 As a feasible implementation, the first robot module 5 includes a first movable frame 51 and a first liftable binding head assembly 52; the first movable frame 51 is slidably arranged on the first slide rail assembly 2; the first liftable binding head assembly 52 is arranged on the first movable frame 51; and the first vision module 8 is arranged on the side of the first liftable binding head assembly 52. It can be understood that the first movable frame 51 can slide on the first slide rail assembly 2; the first liftable binding head assembly 52 can be lifted on the first movable frame 51; the operation flexibility of the robot module is greatly improved; the first vision module 8 is arranged on the side of the first liftable binding head assembly 52 so as to detect the position and state of the material in real time; the real-time position feedback provided by the vision module 8 ensures the accuracy of the binding head assembly during operation; and the operation precision of the eutectic machine 100 is improved.

[0089] Referring to Figure 7 As a feasible implementation, the second robot module 6 includes a second movable frame 61 and a second liftable binding head assembly 62 and a second vision module 8 arranged on the second movable frame 61 respectively; the second movable frame 61 is slidably arranged on the second slide rail assembly 3; the second liftable binding head assembly 62 includes at least one chip feeding suction nozzle 621, and the chip feeding suction nozzle 621 is located on the same side of the second vision module 8; when the number of the chip feeding suction nozzles 621 on the second liftable binding head assembly 62 is greater than or equal to two, the chip feeding suction nozzles 621 are arranged in an array on the second movable frame 61.

[0090] It can be understood that the plurality of chip feeding suction nozzles 621 can process a plurality of chips at the same time; through the array arrangement of the chip feeding suction nozzles 621, the efficiency of chip feeding is improved; and the production speed of the eutectic machine 100 is accelerated.

[0091] As a feasible implementation, the axis of the chip feeding suction nozzle 621 and the second vision module 8 is located on the same plane.

[0092] It can be understood that the axes of the chip loading suction nozzle 621 and the second vision module 8 are located in the same plane. This design enables the second vision module 8 to more accurately detect the position information of the chip, so that the control system can more conveniently synchronize the control of the chip loading suction nozzle 621 and the second vision module 8, so that the chip loading suction nozzle 621 can more quickly and accurately complete the grabbing and placing of the chip.

[0093] Please refer to Figure 8 , as a feasible implementation manner, the third mechanical hand module 7 includes a third movable frame 71 and a third liftable binding head assembly 72 and a third vision module 8 respectively arranged on the third movable frame 71; the third liftable binding head assembly 72 includes a substrate loading suction nozzle 721 and a substrate unloading suction nozzle 722; the substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 are arrayed on the third movable frame 71, and the corresponding substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 are located on the same side of the third vision module 8.

[0094] It can be understood that the arrayed substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 improve the efficiency of substrate loading and unloading, and accelerate the production speed of the eutectic machine 100.

[0095] As a feasible implementation manner, the axes of the substrate loading suction nozzle 721, the substrate unloading suction nozzle 722 and the third vision module 8 are located in the same plane (as shown by the dashed line in Figure 8 ).

[0096] It can be understood that the axes of the substrate loading suction nozzle 721, the substrate unloading suction nozzle 722 and the third vision module 8 are located in the same plane; this design enables the third vision module 8 to more accurately detect the position information of the substrate, so that the control system can more conveniently synchronize the control of the substrate loading suction nozzle 721, the substrate unloading suction nozzle 722 and the third vision module 8, so that the control system can more conveniently coordinate the movement of the substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 and the detection of the third vision module 8, improve the reliability of the control system and the convenience of maintenance.

[0097] Please continue to refer to Figure 4As a feasible implementation, the carrying platform 1 is further provided with a eutectic platform 12, a transfer platform 13, a chip loading platform 14 and a substrate loading platform 15; the substrate loading platform 15 and the eutectic platform 12 are arranged along a sliding path defined by the third slide rail assembly 4, and the third mechanical hand module 7 is used to transfer external substrate materials between the substrate loading platform 15 and the eutectic platform 12; the chip loading platform 14 and the transfer platform 13 are arranged along a sliding path defined by the second slide rail assembly 3, and the second mechanical hand module 6 is used to transfer external chip materials between the chip loading platform 14 and the transfer platform 13; the transfer platform 13 and the eutectic platform 12 are arranged along a sliding path defined by the first slide rail assembly 2, and the first mechanical hand module 5 is used to transfer external chip materials between the transfer platform 13 and the eutectic platform 12.

[0098] It can be understood that, in the embodiment of the present application, by providing the eutectic platform 12, the transfer platform 13, the chip loading platform 14 and the substrate loading platform 15 on the carrying platform 1, and configuring corresponding mechanical hand modules and slide rail assemblies for each platform, efficient transfer of materials between the platforms is ensured; at the same time, the design of arranging each platform along the corresponding sliding path not only optimizes the spatial layout of the eutectic machine 100 and improves the efficiency of material flow, but also reduces the interference between each mechanical hand module, thereby further improving the precision and production efficiency of the eutectic machine 100.

[0099] Specifically, the eutectic platform 12 is an important component of the carrying platform 1 and is the main place for eutectic operation, providing the environment and conditions required for eutectic operation; the eutectic platform 12 defines a eutectic area thereon, and a fixed suction hole is arranged in the eutectic area for completing the adsorption and fixation of materials; the eutectic platform 12 is further provided with a ventilation device for introducing protective gas into the eutectic area of the eutectic platform 12; and the eutectic platform 12 is further provided with a heating assembly corresponding to the eutectic area.

[0100] The transfer platform 13 is used for temporarily storing or transferring materials, so that the materials can be transferred between different processes; the chip loading platform 14 provides an initial loading position for chip materials; and the substrate loading platform 15 provides an initial loading position for substrate materials.

[0101] Please refer to Figure 5 As a feasible implementation, the carrying platform 1 is further provided with a substrate unloading platform 16, and the substrate unloading platform 16, the substrate loading platform 15 and the eutectic platform 12 are arranged along a sliding path defined by the third slide rail assembly 4; the third mechanical hand module 7 is provided with a substrate loading suction nozzle 721 and a substrate unloading suction nozzle 722, the substrate loading suction nozzle 721 is used to transfer external substrate materials between the substrate loading platform 15 and the eutectic platform 12; and the substrate unloading suction nozzle 722 is used to transfer external substrate materials between the eutectic platform 12 and the substrate unloading platform 16.

[0102] It can be understood that, in the embodiment of the present application, by arranging the substrate unloading platform 16 on the carrying platform 1, and arranging the substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 on the third mechanical hand module 7, the third mechanical hand module 7 can complete the unloading and loading in a single round trip, ensuring the efficient transfer of the substrate material before and after the eutectic process. This design not only optimizes the spatial layout of the eutectic machine 100, but also improves the efficiency of the material flow.

[0103] Specifically, the substrate loading platform 15 provides an initial loading position for the substrate material; the substrate unloading platform 16 is used to receive the substrate material that has completed the eutectic process.

[0104] Please continue to refer to Figure 9 As a feasible implementation manner, the carrying platform 1 is further provided with a substrate loading warehouse platform 17 and a substrate unloading warehouse platform 18, the substrate loading warehouse platform 17 is arranged corresponding to the substrate loading platform 15; the substrate loading warehouse platform 17 is provided with a first lifting mechanism and a plurality of stacked loading layers 171, the first lifting mechanism is used to drive the loading layer 171 to lift, the substrate loading platform 15 is provided with a first conveying structure, the first conveying structure is used to convey the external material located on the loading layer 171 at a corresponding height to the substrate loading platform 15; the substrate unloading warehouse platform 18 is provided with a second lifting mechanism and a plurality of stacked unloading layers 181, the second lifting mechanism is used to drive the loading layer 171 to lift, the substrate unloading platform 16 is provided with a second conveying structure, the second conveying structure is used to convey the external material on the substrate unloading platform 16 to the unloading layer 181 at a corresponding height.

[0105] Please participate Figure 10 , Figure 10 In the dashed line A and dashed line B represent the working route of the second mechanical hand module 6, which first absorbs the substrate that has not been eutectic through the substrate loading suction nozzle 721 on the substrate loading platform 15; moves from the substrate loading platform 15 to the position of the eutectic platform 12 along the path shown by the dashed line A; absorbs the substrate that has completed the eutectic on the eutectic platform 12 through the substrate unloading suction nozzle 722 (if there is no substrate on the eutectic platform 12, this step is omitted); places the substrate absorbed by the substrate loading suction nozzle 721 on the eutectic platform 12, and then returns to the substrate unloading platform 16 along the path shown by the dashed line D, and places the substrate that has completed the eutectic on the substrate unloading platform 16.

[0106] The dashed line B represents the working route of the third mechanical hand module 7, which first absorbs the chip from the chip loading platform 14 through the chip loading suction nozzle 621, moves to the transfer platform 13 along the path shown by the dashed line B, and places the chip on the transfer platform 13, and then returns empty.

[0107] The dotted line C represents the working route of the first mechanical hand module 5, which is calibrated and sucks the chip from the transfer platform 13 through the first liftable binding head assembly 52 and the vision module 8, then moves to the eutectic platform 12 along the dotted line C, places the chip on the corresponding position of the substrate in the eutectic platform 12, and then returns empty.

[0108] It should be noted that the running time of the four action routes can be adjusted according to the distance, eutectic time and working process, so as to achieve the effect of not interfering with each other.

[0109] It can be understood that, in the embodiment of the present application, the substrate loading warehouse platform 17 and the substrate unloading warehouse platform 18 are arranged on the bearing platform 1, and the first lifting mechanism and the second lifting mechanism, as well as the first conveying structure and the second conveying structure are arranged on these platforms, which ensures the high efficiency and automation of the substrate material in the loading and unloading process. This design not only improves the continuity and efficiency of the material supply and collection of the eutectic machine 100, but also reduces manual intervention through automation equipment, further improving the production efficiency of the eutectic machine 100.

[0110] Please refer to Figure 4 and Figure 11 As a feasible implementation manner, the first mechanical hand module 5 and / or the second mechanical hand module 6 and / or the third mechanical hand module 7 are provided with a binding head assembly and a suction nozzle detachably connected with the binding head assembly; the bearing platform 1 is further provided with a suction nozzle rack, and the suction nozzle rack is provided with suction nozzle placing positions of at least two types.

[0111] It can be understood that, in the embodiment of the present application, the binding head assembly and the detachable suction nozzle are arranged on the mechanical hand module, and the suction nozzle rack is arranged on the bearing platform 1, which ensures the quick replacement of the suction nozzle. This design not only improves the flexibility and adaptability of the eutectic machine 100, but also reduces the time required for replacing the suction nozzle through reasonable setting of the position of the suction nozzle rack, further improving the production efficiency of the eutectic machine 100.

[0112] As a feasible implementation manner, the suction nozzle rack is arranged close to the transfer platform 13 or the chip loading platform 14; or, the suction nozzle rack is arranged on the circumferential outer side of the transfer platform 13. Figure 11

[0113] It can be understood that, in the embodiment of the present application, the suction nozzle rack is arranged close to the transfer platform 13 or the chip loading platform 14, or arranged on the circumferential outer side of the transfer platform 13, so that the replacement of the suction nozzle becomes more convenient. This design not only improves the flexibility and adaptability of the eutectic machine 100, but also reduces the time required for replacing the suction nozzle through reasonable setting of the position of the suction nozzle rack, further improving the production efficiency of the eutectic machine 100.

[0114] ​The above merely describes preferred embodiments of the present application and is not intended to limit the present application, and any modification, equivalent replacement, and improvement within the principles of the present application shall be included in the protection scope of the present application.

Claims

1. A fixed beam eutectic machine, characterized by: It includes a carrying platform, on which a first slide rail assembly, a second slide rail assembly and a third slide rail assembly are arranged at intervals from each other, a fixed beam is provided on the carrying platform, the first slide rail assembly is provided on the fixed beam, a first slidable manipulator module is provided on the first slide rail assembly, and a head binding assembly and a first visual module are provided on the first manipulator module.

2. The fixed beam eutectic machine according to claim 1, characterized in that: The first manipulator module includes a first movable frame and a first liftable head binding assembly. The first movable frame can be slidably set on the first slide rail assembly. The first liftable head binding assembly is set on the first movable frame. The first visual module is set on the side of the first liftable head binding assembly.

3. The fixed beam eutectic machine according to claim 1, characterized in that: It also includes a second manipulator module slidably arranged on the second slide rail assembly, the second manipulator module includes a second movable frame and a second liftable binding head assembly and a second vision module respectively arranged on the second movable frame; the second movable frame is slidably arranged on the second slide rail assembly; the second liftable binding head assembly includes at least one chip loading nozzle, and the chip loading nozzle is located on the same side of the second vision module; when the number of chip loading nozzles on the second liftable binding head assembly is greater than or equal to two, the chip loading nozzles are arranged in an array on the second movable frame.

4. The fixed beam eutectic machine according to claim 3, characterized in that: The axes of the chip loading nozzle and the second vision module are located on the same plane.

5. The fixed beam eutectic machine according to claim 3, characterized in that: It also includes a third manipulator module slidably arranged on a third slide rail assembly, the third manipulator module includes a third movable frame and a third liftable binding head assembly and a third vision module respectively arranged on the third movable frame; the third liftable binding head assembly includes a substrate loading nozzle and a substrate unloading nozzle; the substrate loading nozzle and the substrate unloading nozzle are arranged in an array on the third movable frame, and the corresponding substrate loading nozzles and the substrate unloading nozzles are located on the same side of the third vision module.

6. The fixed beam eutectic machine according to claim 5, characterized in that: The axes of the substrate loading nozzle, the substrate unloading nozzle and the third vision module are located on the same plane.

7. The fixed beam eutectic machine according to claim 5, characterized in that: The horizontal height of the first slide rail assembly is higher than the horizontal heights of the second slide rail assembly and the third slide rail assembly; the first manipulator module is located between the second manipulator module and the third manipulator module.

8. The fixed beam eutectic machine according to claim 5, characterized in that: The carrying platform is also provided with a eutectic platform, a transfer platform, a chip loading platform and a substrate loading platform; The substrate loading platform and the eutectic platform are arranged along a sliding path defined by the third slide rail assembly, and the third manipulator module is used to transfer external substrate materials between the substrate loading platform and the eutectic platform; The chip loading platform and the transfer platform are arranged along a sliding path defined by the second slide rail assembly, and the second manipulator module is used to transfer external chip materials between the chip loading platform and the transfer platform; The transfer platform and the eutectic platform are arranged along a sliding path defined by the first slide rail assembly, and the first manipulator module is used to transfer external chip materials between the transfer platform and the eutectic platform.

9. The fixed beam eutectic machine according to claim 8, characterized in that: A substrate unloading platform is further provided on the carrying platform, and the substrate unloading platform, the substrate loading platform and the eutectic platform are arranged along a sliding path defined by the third slide rail assembly; The third robot module is provided with a substrate loading nozzle and a substrate unloading nozzle. The substrate loading nozzle is used to transfer external substrate materials between the substrate loading platform and the eutectic platform; the substrate unloading nozzle is used to transfer external substrate materials between the eutectic platform and the substrate unloading platform.

10. The fixed beam eutectic machine according to claim 8, characterized in that: The carrying platform is also provided with a fourth slide rail assembly, a fifth slide rail assembly, a sixth slide rail assembly and a seventh slide rail assembly; the sliding directions of the fourth slide rail assembly, the fifth slide rail assembly, the sixth slide rail assembly and the seventh slide rail assembly are all perpendicular to the first slide rail assembly; the eutectic platform is slidably provided on the fourth slide rail assembly, the transfer platform is slidably provided on the fifth slide rail assembly, the chip loading platform is slidably provided on the sixth slide rail assembly, and the substrate loading platform is slidably provided on the seventh slide rail assembly.

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