Fixed-beam eutectic machine

Abstract

The utility model relates to the technical field of eutectic equipment, in particular to a fixed beam eutectic machine which comprises a bearing platform, and a first sliding rail assembly, a second sliding rail assembly and a third sliding rail assembly which are arranged on the bearing platform at intervals in parallel. A first mechanical arm module is arranged on the first sliding rail assembly in a sliding mode, a second mechanical arm module is arranged on the second sliding rail assembly in a sliding mode, and a third mechanical arm module is arranged on the third sliding rail assembly in a sliding mode. A fixed beam is arranged on the bearing platform, the first sliding rail assembly is arranged on the fixed beam, and the second sliding rail assembly and the third sliding rail assembly are close to the fixed beam and are arranged at intervals with the fixed beam. According to the fixed-beam eutectic machine provided by the utility model, the layout of the plurality of slide rail assemblies is optimized, so that high working efficiency of the fixed-beam eutectic machine is realized, and meanwhile, high precision is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of eutectic device, especially relates to a fixed beam eutectic machine.

BACKGROUND

[0002] In the field of semiconductor manufacturing, microelectronic packaging and other high-precision material handling, eutectic machine is an important production equipment. Eutectic machine is mainly used to realize high-precision eutectic welding between chip and substrate or other carrier. In the traditional eutectic machine design, material handling usually relies on a single mechanical hand or slide rail system to complete; but the existing eutectic machine often cannot take into account high work efficiency and high precision.

UTILITARY MODEL CONTENT

[0003] In order to solve the technical problem that the existing eutectic machine often cannot take into account high work efficiency and high precision, the utility model provides a fixed beam eutectic machine.

[0004] The utility model solves technical problem's scheme provides a fixed beam eutectic machine, including bearing platform, and bearing platform is provided with the first slide rail assembly, second slide rail assembly and third slide rail assembly that are parallelly arranged and are spaced apart, first mechanical hand module is slidably arranged on the first slide rail assembly, second mechanical hand module is slidably arranged on the second slide rail assembly, and third mechanical hand module is slidably arranged on the third slide rail assembly, fixed beam is arranged on the bearing platform, the first slide rail assembly is located on the fixed beam, and the second slide rail assembly and the third slide rail assembly are close to the fixed beam and are spaced apart with the fixed beam.

[0005] Preferably, the fixed beam includes a column and a side support portion, the column is arranged on the bearing platform, the side support portion is arranged at an end of the column away from the bearing platform, and the side support portion is convex relative to the circumferential outer surface of the column;A space is provided between the side support portion and the bearing platform, and the second slide rail assembly and the third slide rail assembly are located in the space.

[0006] Preferably, the column is arranged close to the edge of the bearing platform, and the side support portion is convex towards the middle area of the bearing platform.

[0007] Preferably, the fixed beam is of an integral structure.

[0008] Preferably, the second slide rail assembly and the third slide rail assembly are arranged side by side along the sliding direction thereof;A gap is provided between the column and the second slide rail assembly and the third slide rail assembly, and a line drag chain is arranged on the second slide rail assembly and the third slide rail assembly respectively, and the line drag chain is arranged in the gap.

[0009] Preferably, the first mechanical hand module comprises a first movable frame and a first liftable head assembly, the first movable frame is slidably arranged on the first slide rail assembly, and the first liftable head assembly is arranged on the first movable frame; the lifting path of the first liftable head assembly is located outside the second slide rail assembly and the third slide rail assembly.

[0010] Preferably, the first slide rail assembly is parallel to the second slide rail assembly in a partial region, and the first slide rail assembly is parallel to the third slide rail assembly in a partial region.

[0011] Preferably, the carrying platform is further provided with a eutectic platform, a transfer platform, a chip loading platform and a substrate loading platform.

[0012] The substrate loading platform and the eutectic platform are arranged along the sliding path defined by the third slide rail assembly, and the third mechanical hand module is used to transfer external substrate materials between the substrate loading platform and the eutectic platform.

[0013] The chip loading platform and the transfer platform are arranged along the sliding path defined by the second slide rail assembly, and the second mechanical hand module is used to transfer external chip materials between the chip loading platform and the transfer platform.

[0014] The transfer platform and the eutectic platform are arranged along the sliding path defined by the first slide rail assembly, and the first mechanical hand module is used to transfer external chip materials between the transfer platform and the eutectic platform.

[0015] Preferably, the carrying platform is further provided with a substrate unloading platform, and the substrate unloading platform, the substrate loading platform and the eutectic platform are arranged along the sliding path defined by the third slide rail assembly.

[0016] The third mechanical hand module is provided with a substrate loading suction nozzle and a substrate unloading suction nozzle, the substrate loading suction nozzle is used to transfer external substrate materials between the substrate loading platform and the eutectic platform, and the substrate unloading suction nozzle is used to transfer external substrate materials between the eutectic platform and the substrate unloading platform.

[0017] Preferably, the carrying platform is further provided with a fourth slide rail assembly, a fifth slide rail assembly, a sixth slide rail assembly and a seventh slide rail assembly; the sliding directions of the fourth slide rail assembly, the fifth slide rail assembly, the sixth slide rail assembly and the seventh slide rail assembly are all perpendicular to the first slide rail assembly; the eutectic platform is slidably arranged on the fourth slide rail assembly, the transfer platform is slidably arranged on the fifth slide rail assembly, the chip loading platform is slidably arranged on the sixth slide rail assembly, and the substrate loading platform is slidably arranged on the seventh slide rail assembly.

[0018] Compared with the prior art, the fixed beam eutectic machine has the following advantages:

[0019] 1. The fixed beam eutectic machine provided by the utility model embodiment realizes high working efficiency and high precision of the fixed beam eutectic machine by optimizing the layout of the plurality of slide rail assemblies. Specifically, the first slide rail assembly, the second slide rail assembly and the third slide rail assembly are arranged at intervals, and the first mechanical hand module, the second mechanical hand module and the third mechanical hand module are arranged to slide respectively, so that the mechanical hand modules can slide independently on the respective slide rail assemblies, the independence between the slide rail assemblies and the corresponding mechanical hand modules is ensured, the mutual interference is reduced, the vibration generated by the first mechanical hand module, the second mechanical hand module and the third mechanical hand module when working on the corresponding slide rail assemblies cannot be transmitted to other slide rail assemblies, and the operation precision of the mechanical hand modules is greatly improved; the fixed beam structure can provide a more stable support structure for the first mechanical hand module; at the same time, the three slide rail assemblies are arranged in parallel to optimize the mechanical hand module operation process of the eutectic machine during the eutectic process, ensure the efficiency, and occupy a small space; so that the fixed beam eutectic machine realizes high working efficiency and high precision at the same time.

[0020] 2. In the utility model embodiment, the structural strength of the eutectic machine is strengthened through the design of the fixed beam, the mutual interference between the slide rail assemblies is reduced through the design of the avoidance space, and sufficient installation space is provided for the second slide rail assembly and the third slide rail assembly, the outward protruding design of the side support part can better cooperate the first slide rail assembly with the second slide rail assembly and the third slide rail assembly, so as to facilitate the cooperation of the three slide rail assemblies to improve the working efficiency of the fixed beam eutectic machine.

[0021] 3. In the utility model embodiment, the edge setting of the stand column optimizes the spatial layout of the stand column and the side support part, and further improves the space utilization and compactness of the structure of the fixed beam eutectic machine.

[0022] 4. In the utility model embodiment, the integral structure improves the rigidity and stability of the fixed beam, can further ensure the working precision and stability of the first mechanical hand module, and effectively reduces the wear and loosening problems of the fixed beam in long-term use.

[0023] 5. In the utility model embodiment, the side-by-side arrangement of the second slide rail assembly and the third slide rail assembly solves the mutual interference problem of the mechanical hand modules on the slide rail assemblies when running, the gap design provides installation space for the line drag chain; improves the independence of the slide rail assemblies and the layout rationality of the line drag chain, reduces the interference, and improves the precision and stability of the eutectic machine.

[0024] 6. The utility model embodiment, the first liftable binding head assembly's lifting path with the second slide rail component and the third slide rail component's location is staggered setting, can avoid avoiding the first liftable binding head assembly with other slide rail component interference occurs in the lifting process.

[0025] 7. The utility model embodiment, through the first slide rail component's partial area with the second slide rail component and the third slide rail component's partial area juxtaposition setting, make first manipulator module and second manipulator module on partial area can work more closely, reduced mutual interference and still improved the coordination of operation, simultaneously optimized the space layout of eutectic machine, improved space utilization.

[0026] 8. The utility model embodiment, through setting eutectic platform, transfer platform, chip loading platform and substrate loading platform on the bearing platform, and for each platform configuration corresponding manipulator module and slide rail component, ensure the efficient transfer of material between each platform;At the same time, let each platform along the corresponding slide path arrangement design not only optimizes the space layout of eutectic machine, improves the efficiency of material circulation, still reduces the interference between each other through the independent operation of each manipulator module, further improves the precision and production efficiency of eutectic machine.

[0027] 9. The utility model embodiment, through setting substrate unloading platform on the bearing platform, and setting substrate loading suction nozzle and substrate unloading suction nozzle on the third manipulator module, so that the third manipulator module can complete unloading and loading in single back and forth movement, ensure the efficient transfer of substrate material before and after eutectic. This design not only optimizes the space layout of eutectic machine, improves the efficiency of material circulation.

[0028] 10. The utility model embodiment, through setting multiple slide rail components, so that each platform can slide in the direction perpendicular to the first slide rail component;Each platform does not interfere with each other when sliding, independent sliding, reduces the mutual interference between each platform, ensures the independent operation of each platform, improves the accuracy and fluency of operation;Also improve the mobile flexibility of each platform, so that the cooperation progress between each platform and each manipulator module is higher;Through the slide rail component layout in the vertical direction, so that each platform is more compact in space;Each slide rail component controls the corresponding platform respectively, simplifies the control logic of each platform, so that the control system can more conveniently coordinate the sliding of each platform, reduces the complexity of control system, improves the reliability and maintenance convenience of control system.

DRAWINGS

[0029] Figure 1 It is the structure schematic of the utility model embodiment provides eutectic machine Figure 1 .

[0030] Figure 2 is a structure schematic diagram of a die bonder provided by an embodiment of the present application. Figure 2 .

[0031] Figure 3 is a schematic diagram of arrangement of three slide rail assemblies under a front view angle of the die bonder provided by an embodiment of the present application.

[0032] Figure 4 is a structure schematic diagram of a die bonder provided by an embodiment of the present application. Figure 3 .

[0033] Figure 5 is a side schematic diagram of a die bonder provided by an embodiment of the present application (omitting part of structure).

[0034] Figure 6 is a structure schematic diagram of a first mechanical hand module of a die bonder provided by an embodiment of the present application.

[0035] Figure 7 is a structure schematic diagram of a second mechanical hand module of a die bonder provided by an embodiment of the present application.

[0036] Figure 8 is a structure schematic diagram of a third mechanical hand module of a die bonder provided by an embodiment of the present application.

[0037] Figure 9 is a structure schematic diagram of a die bonder provided by an embodiment of the present application (omitting part of structure). Figure 4 .

[0038] Figure 10 is a working path schematic diagram of each mechanical hand module in a die bonder provided by an embodiment of the present application.

[0039] Figure 11 is a top view of a transfer platform in a die bonder provided by an embodiment of the present application.

[0040] Explanation of figure mark:

[0041] 100, die bonder;

[0042] 1, bearing platform; 11, fixed beam; 111, stand column; 112, support part; 113, avoiding space; 1131, gap; 12, die bonder platform; 13, transfer platform; 14, chip loading platform; 15, substrate loading platform; 16, substrate unloading platform; 17, substrate loading warehouse platform; 171, loading layer; 18, substrate unloading warehouse platform; 181, unloading layer;

[0043] 2. First slide rail assembly; 21. Line drag chain; 3. Second slide rail assembly; 31. First support frame; 4. Third slide rail assembly; 41. Second support frame; 5. First robot module; 51. First movable frame; 52. First liftable head assembly; 6. Second robot module; 61. Second movable frame; 62. Second liftable head assembly; 621. Chip loading nozzle; 7. Third robot module; 71. Third movable frame; 72. Third liftable head assembly; 721. Substrate loading nozzle; 722. Substrate unloading nozzle; 8. Vision module. [Specific implementation method]

[0044] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and implementation examples. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0045] It should be noted that the terms "first" and "second" in the description and claims of the present utility model are used to distinguish different objects rather than to describe a specific order.

[0046] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0047] In this utility model, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the utility model and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0048] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0049] In addition, the terms "mounting", "arrangement", "provided with", "connected", "linked" should be understood broadly. For example, it can be fixed connection, detachable connection, or integral structure; it can be mechanical connection, or electrical connection; it can be directly linked, or indirectly linked through intermediate media, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0050] Please refer to Figure 1 The utility model first embodiment provides a kind of eutectic machine 100 for realizing the high-precision eutectic welding between chip and substrate or other carrier;Eutectic machine 100 includes bearing platform 1, bearing platform 1 is provided with first slide rail assembly 2, second slide rail assembly 3 and third slide rail assembly 4 that are spaced apart and parallelly arranged;First mechanical hand module 5 is slidably arranged on first slide rail assembly 2, second mechanical hand module 6 is slidably arranged on second slide rail assembly 3, and third mechanical hand module 7 is slidably arranged on third slide rail assembly 4.

[0051] It can be understood that the utility model embodiment provides a kind of eutectic machine 100 by the parallel and spaced arrangement between three slide rail assemblies, not only optimizes the operation process of mechanical hand assembly, improves the efficiency and precision of eutectic machine 100, but also further enhances the stability and reliability of equipment by reducing the mutual interference between each component.Specifically, by making three slide rail assemblies parallel to optimize the mechanical hand module operation process of eutectic machine 100 in eutectic process, ensure efficiency, and the space occupied is small;At the same time, let three slide rails be spaced apart, avoid direct contact of slide rail, so as to reduce the interference of mechanical hand module operation process to other mechanical hands, thereby greatly improving the operation precision of mechanical hand module.

[0052] Specifically, bearing platform 1 is the basic component of eutectic machine 100, and the top surface of bearing platform 1 provides a stable support surface, which is the installation basis of mechanical hand assembly and other work platforms;Stable bearing platform 1 helps to improve the precision and service life of the whole eutectic machine 100.

[0053] Specifically, first slide rail assembly 2, second slide rail assembly 3 and third slide rail assembly 4 are respectively installed on bearing platform 1, for realizing accurate guidance when first mechanical hand assembly slides, which is beneficial to ensure the accuracy of corresponding material transfer.

[0054] It should be noted that the materials to be transferred in die bonder generally include substrate and chip;In some processes, it also includes welding material.

[0055] Please continue to refer to Figure 1As a feasible implementation manner, the first manipulator module 5, the second manipulator module 6 and the third manipulator module 7 are respectively provided with the vision module 8.

[0056] Understandably, the embodiment of the utility model through setting the vision module 8 on the manipulator module, make the vision module 8 and manipulator module synchronous motion on the slide rail assembly, can guarantee the consistency between vision module 8 and manipulator module, to further enhance the operation precision of manipulator module.

[0057] Understandably, the scheme also includes the control module, the first manipulator module 5, the second manipulator module 6, the third manipulator module 7 are electrically connected with control module, to realize the accurate control of each manipulator module;

[0058] The vision module 8 on each manipulator module is also electrically connected with the control module;Understandably, the control module controls the movement of the manipulator module in real time through electrical connection, and the manipulator module can perform accurate material transfer operation according to the predetermined path and speed by sending instructions through the control module;The control module can adjust the action of the corresponding manipulator module in real time according to the information fed back by the vision module 8, and through real-time monitoring and correction, the dynamic response capability and precision of the eutectic machine 100 in the operation process are improved.

[0059] Comprehensive above scheme, the utility model discloses an embodiment of a kind of eutectic machine 100, which is provided with mutually spaced and parallel first slide rail assembly 2, second slide rail assembly 3 and third slide rail assembly 4 on the bearing platform 1, and each slide rail assembly is configured with the manipulator module with vision module 8, which realizes high precision and high efficiency of manipulator module in the eutectic process.

[0060] Please continue to refer to Figure 1 As a feasible implementation manner, the bearing platform 1 is provided with a fixed beam 11, the first slide rail assembly 2 is arranged on the fixed beam 11, and the second slide rail assembly 3 and the third slide rail assembly 4 are arranged close to the fixed beam 11 and spaced apart from the fixed beam 11.

[0061] Understandably, in the embodiments of the utility model, the fixed beam 11 structure is adopted for the die bonder, that is, the fixed beam 11 for installing the slide rail does not move, compared with the existing gantry type die bonder 100, the fixed beam type die bonder can further reduce vibration and improve the precision of the equipment; moreover, the fixed beam 11 provides a stable mounting base for the first slide rail assembly 2; the structural stability of the first slide rail assembly 2 is improved, and the stability and operation precision of the first mechanical hand module 5 in the sliding process are further ensured; by setting the second slide rail assembly 3 and the third slide rail assembly 4 close to the fixed beam 11, the spatial layout of the whole equipment can be optimized, the equipment is more compact, space is saved, the compact design helps to improve the integration of the equipment and facilitate efficient operation in limited space; although the second slide rail assembly 3 and the third slide rail assembly 4 are kept at a distance from the fixed beam 11, the setting close to the fixed beam 11 helps to realize the coordinated work between the mechanical hand modules.

[0062] Please combine Figure 1 And Figure 2 As a feasible implementation manner, the fixed beam 11 includes a column 111 and a side support part 112, the column 111 is arranged on the bearing platform 1, the side support part 112 is arranged at one end of the column 111 away from the bearing platform 1, and the side support part 112 is convex relative to the circumferential outer surface of the column 111; the side support part 112 and the bearing platform 1 are provided with an avoidance space 113, and the second slide rail assembly 3 and the third slide rail assembly 4 are located in the avoidance space 113.

[0063] Understandably, in the embodiments of the utility model, the structural strength of the die bonder 100 is strengthened through the design of the fixed beam 11, and the mutual interference between the slide rail assemblies is reduced through the design of the avoidance space 113, thereby improving the precision and stability of the die bonder 100.

[0064] As a feasible implementation manner, the fixed beam 11 is an integral structure formed integrally; understandably, the integral structure improves the rigidity and stability of the fixed beam 11, can further ensure the working precision and stability of the first mechanical hand module 5, and effectively reduces the wear and loosening problems of the fixed beam 11 in long-term use; at the same time, the integral structure can ensure the accuracy of the size in the manufacturing process, and reduce the vibration and noise caused by the connection problems between parts, so that more stable support can be provided when the slide rail assembly is installed, and the overall precision of the die bonder 100 is further improved.

[0065] As a feasible implementation, the side support part 112 is vertically arranged with the column 111. An installation end face is arranged at an end of the side support part 112 away from the column 111, and the first sliding rail assembly 2 is arranged on the installation end face, which is perpendicular to the top surface of the bearing platform 1. It can be understood that the vertically arranged installation end face ensures that the installation basis of the first sliding rail assembly 2 is more stable, reduces the shaking and deviation of the sliding rail assembly during operation, and improves the stability of the sliding rail assembly.

[0066] As a feasible implementation, the column 111 is arranged close to the edge of the bearing platform 1, and the side support part 112 is outwardly convex towards the middle area of the bearing platform 1. It can be understood that the edge arrangement of the column 111 optimizes the spatial layout of the column 111 and the side support part 112, and further improves the space utilization and compactness of the structure of the eutectic machine 100.

[0067] Please refer to Figure 2 , the bearing platform 1 is further provided with a first support frame 31 and a second support frame 41 arranged at intervals, the second sliding rail assembly 3 is arranged on the first support frame 31, and the third sliding rail assembly 4 is arranged on the second support frame 41.

[0068] It can be understood that by arranging the first support frame 31 and the second support frame 41, independent and stable support is provided for the second sliding rail assembly 3 and the third sliding rail assembly 4. The deformation or shaking problem caused by the excessive length or weight of the sliding rail assembly is reduced, thereby improving the structural stability of the entire eutectic machine 100.

[0069] As a feasible implementation, the second sliding rail assembly 3 is arranged on the top surface of the first support frame 31, and the third sliding rail assembly 4 is arranged on the top surface of the second support frame 41.

[0070] It can be understood that by arranging the sliding rail assembly on the top surface of the support frame, the spatial layout of the sliding rail assembly is optimized.

[0071] Please continue to refer to Figure 1 As a feasible implementation, the second sliding rail assembly 3 and the third sliding rail assembly 4 are arranged side by side along the sliding direction thereof.

[0072] It can be understood that in the embodiments of the utility model, by arranging the second sliding rail assembly 3 and the third sliding rail assembly 4 side by side along the sliding direction thereof, the spatial layout of the eutectic machine 100 is optimized, the operation between the sliding rail assemblies is more coordinated, and the possibility of mutual interference is reduced.

[0073] Specifically, the side-by-side arrangement optimizes the spatial layout of the eutectic machine 100, so that the device occupies less horizontal space, improving the space utilization efficiency; the side-by-side arrangement reduces the interference between the two slide rail assemblies during sliding, so that the mechanical hand assembly slides on the slide rail more smoothly, improving the operation efficiency and accuracy of the slide rail assembly; at the same time, the side-by-side arrangement makes it easier to coordinate between the slide rail assemblies, reducing the complexity of the control system.

[0074] It should be noted that the side-by-side arrangement of the second slide rail assembly 3 and the third slide rail assembly 4 along their sliding direction can also be understood as the side-by-side arrangement of the second slide rail assembly 3 and the third slide rail assembly 4 on the same axis. Due to the difference in model between the second slide rail assembly 3 and the third slide rail assembly 4, the deviation caused by this reason should not be considered as different axes, and still belongs to the scope of the present application.

[0075] Please refer to Figure 3 As a feasible implementation manner, the first slide rail assembly 2 is arranged side by side with the second slide rail assembly 3 in a partial region, and the first slide rail assembly 2 is arranged side by side with the third slide rail assembly 4 in a partial region.

[0076] It can be understood that, in the embodiment of the present application, by arranging the first slide rail assembly 2 side by side with the second slide rail assembly 3 and the third slide rail assembly 4 in a partial region, the first mechanical hand module 5 and the second mechanical hand module 6 can work more closely in the partial region, reducing mutual interference and improving operation coordination, while optimizing the spatial layout of the eutectic machine 100 and improving the space utilization rate.

[0077] Specifically, the side-by-side arrangement allows the first slide rail assembly 2 and the second slide rail assembly 3 to share space in a partial region, reducing spatial interference; the side-by-side arrangement allows the first slide rail assembly 2 and the third slide rail assembly 4 to share space in a partial region, reducing spatial interference.

[0078] When performing motion control, the mechanical hand modules can be controlled to move in the same direction at the same time to achieve avoidance, and based on the parallel arrangement of the three slide rail assemblies, this motion control mode is very simple to implement.

[0079] Please continue to refer to Figure 3 As a feasible implementation manner, the horizontal height of the first slide rail assembly 2 is higher than the horizontal height of the second slide rail assembly 3 and the third slide rail assembly 4; the first mechanical hand module 5 is located between the second mechanical hand module 6 and the third mechanical hand module 7.

[0080] It can be understood that this height difference reduces the interference of the first mechanical hand module 5 with the second and third slide rail assemblies 3 and 4 during horizontal movement, improves the operation safety and stability of the equipment, and ensures the smooth operation; this positional relationship enables the first mechanical hand module 5 to coordinate operations between the second and third mechanical hand modules 6 and 7; improves the coordination of internal operations of the eutectic machine 100.

[0081] Please refer to Figure 4 As a feasible implementation, the eutectic machine 100 is also provided with a line drag chain 21 for cooperation with the first slide rail assembly 2, which is arranged on the top surface of the fixed beam 11.

[0082] It can be understood that the line drag chain 21 can effectively protect the cables on the first slide rail assembly 2 from being damaged during the sliding of the mechanical hand module; the line drag chain 21 is arranged on the top surface of the fixed beam 11, avoiding the cables hanging around the slide rail assembly and reducing the interference of the cables with the sliding of the mechanical hand module.

[0083] Please refer to Figures 3 to 5 As a feasible implementation, the second and third slide rail assemblies 3 and 4 are arranged side by side along their sliding directions; a gap 1131 is arranged between the upright column 111 and the second and third slide rail assemblies 3 and 4, and the second and third slide rail assemblies 3 and 4 are respectively provided with line drag chains 21 arranged in the gap 1131.

[0084] It can be understood that the side-by-side arrangement of the second and third slide rail assemblies 3 and 4 solves the problem of mutual interference of the mechanical hand modules on the slide rail assemblies during operation, and the gap 1131 provides installation space for the line drag chain 21; improves the independence of the slide rail assemblies and the rationality of the layout of the line drag chain 21, reduces interference, and improves the precision and stability of the eutectic machine 100.

[0085] Please refer to Figure 6 As a feasible implementation, the first mechanical hand module 5 includes a first movable frame 51 and a first liftable head assembly 52, the first movable frame 51 is slidably arranged on the first slide rail assembly 2, the first liftable head assembly 52 is arranged on the first movable frame 51, and the first vision module 8 is arranged on the side surface of the first liftable head assembly 52. It can be understood that the first movable frame 51 can slide on the first slide rail assembly 2, and the first liftable head assembly 52 can be lifted on the first movable frame 51, greatly improving the operation flexibility of the mechanical hand module; the first vision module 8 is arranged on the side surface of the first liftable head assembly 52 to detect the position and state of the material in real time, and through the real-time position feedback provided by the vision module 8, the accuracy of the head assembly during operation is ensured, and the operation precision of the eutectic machine 100 is improved.

[0086] See also Figure 7 As a feasible implementation method, the second robot module 6 includes a second movable frame 61 and a second liftable binding head assembly 62 and a second vision module 8 respectively arranged on the second movable frame 61; the second movable frame 61 is slidably arranged on the second slide rail assembly 3; the second liftable binding head assembly 62 includes at least one chip loading nozzle 621, and the chip loading nozzle 621 is located on the same side of the second vision module 8; when the number of chip loading nozzles 621 on the second liftable binding head assembly 62 is greater than or equal to two, the chip loading nozzles 621 are arranged in an array on the second movable frame 61.

[0087] It can be understood that multiple chip loading nozzles 621 can process multiple chips at the same time. The chip loading nozzles 621 arranged in an array improve the efficiency of chip loading and accelerate the production speed of the eutectic machine 100.

[0088] As a feasible implementation, the chip loading nozzle 621 and the axis of the second vision module 8 are located on the same plane.

[0089] It can be understood that the axes of the chip loading nozzle 621 and the second vision module 8 are located on the same plane. This design enables the second vision module 8 to detect the position information of the chip more accurately, so that the control system can more conveniently synchronize and control the chip loading nozzle 621 and the second vision module 8, so that the chip loading nozzle 621 can complete the grasping and placement of the chip more quickly and accurately.

[0090] See also Figure 8 As a feasible implementation method, the third robot module 7 includes a third movable frame 71 and a third liftable head assembly 72 and a third vision module 8 respectively arranged on the third movable frame 71; the third liftable head assembly 72 includes a substrate loading nozzle 721 and a substrate unloading nozzle 722; the substrate loading nozzle 721 and the substrate unloading nozzle 722 are arranged in an array on the third movable frame 71, and the corresponding substrate loading nozzle 721 and substrate unloading are located on the same side of the third vision module 8.

[0091] It can be understood that the array-arranged substrate loading nozzles 721 and substrate unloading nozzles 722 improve the efficiency of substrate loading and unloading, thereby accelerating the production speed of the eutectic machine 100 .

[0092] As a feasible embodiment, the axes of the substrate loading nozzle 721, the substrate unloading nozzle 722 and the third visual module 8 are located on the same plane (eg Figure 8 (shown by the dashed line).

[0093] It can be understood that the axes of the substrate feeding nozzle 721, the substrate discharging nozzle 722 and the third vision module 8 are located on the same plane; such a design enables the third vision module 8 to more accurately detect the position information of the substrate, so that the control system can more conveniently synchronously control the substrate feeding nozzle 721, the substrate discharging nozzle 722 and the third vision module 8, so that the control system can more conveniently coordinate the movement of the substrate feeding nozzle 721 and the substrate discharging nozzle 722 and the detection of the third vision module 8, thereby improving the reliability of the control system and the convenience of maintenance.

[0094] Please continue to refer to Figure 4 As a feasible implementation manner, the carrying platform 1 is further provided with a eutectic platform 12, a transfer platform 13, a chip feeding platform 14 and a substrate feeding platform 15; the substrate feeding platform 15 and the eutectic platform 12 are arranged along the sliding path defined by the third slide rail assembly 4, and the third mechanical hand module 7 is used for transferring external substrate materials between the substrate feeding platform 15 and the eutectic platform 12; the chip feeding platform 14 and the transfer platform 13 are arranged along the sliding path defined by the second slide rail assembly 3, and the second mechanical hand module 6 is used for transferring external chip materials between the chip feeding platform 14 and the transfer platform 13; the transfer platform 13 and the eutectic platform 12 are arranged along the sliding path defined by the first slide rail assembly 2, and the first mechanical hand module 5 is used for transferring external chip materials between the transfer platform 13 and the eutectic platform 12.

[0095] It can be understood that, in the embodiment of the utility model, the eutectic platform 12, the transfer platform 13, the chip feeding platform 14 and the substrate feeding platform 15 are arranged on the carrying platform 1, and the corresponding mechanical hand module and slide rail assembly are configured for each platform, thereby ensuring the efficient transfer of materials between the platforms; meanwhile, the design of arranging the platforms along the corresponding sliding paths not only optimizes the spatial layout of the eutectic machine 100 and improves the efficiency of material circulation, but also reduces the interference between the mechanical hand modules through the independent operation of each mechanical hand module, thereby further improving the precision and production efficiency of the eutectic machine 100.

[0096] Specifically, the eutectic platform 12 is an important component on the carrying platform 1 and is the main place for eutectic operation, which provides the environment and conditions required for eutectic operation; the eutectic platform 12 is defined with a eutectic area, and the eutectic area is provided with a fixed suction hole for completing the adsorption and fixation of materials; the eutectic platform 12 is further provided with an air inlet device for introducing protective gas into the eutectic area of the eutectic platform 12; and the eutectic platform 12 is further provided with a heating assembly corresponding to the eutectic area.

[0097] The transfer platform 13 is used for temporarily storing or transferring materials, and the transfer platform 13 enables the materials to be transferred between different processes; the chip loading platform 14 provides an initial loading position of chip materials; and the substrate loading platform 15 provides an initial loading position of substrate materials.

[0098] Please refer to Figure 5 , as a feasible implementation manner, the carrying platform 1 is further provided with a substrate unloading platform 16, the substrate unloading platform 16, the substrate loading platform 15 and the eutectic platform 12 are arranged along a sliding path defined by the third sliding rail assembly 4; the third mechanical hand module 7 is provided with a substrate loading suction nozzle 721 and a substrate unloading suction nozzle 722, the substrate loading suction nozzle 721 is used for transferring external substrate materials between the substrate loading platform 15 and the eutectic platform 12; and the substrate unloading suction nozzle 722 is used for transferring external substrate materials between the eutectic platform 12 and the substrate unloading platform 16.

[0099] It can be understood that, in the embodiment of the utility model, by setting the substrate unloading platform 16 on the carrying platform 1, and setting the substrate loading suction nozzle 721 and the substrate unloading suction nozzle 722 on the third mechanical hand module 7, the third mechanical hand module 7 can complete unloading and loading in a single back-and-forth movement, and the efficient transfer of substrate materials before and after eutectic is ensured. This design not only optimizes the spatial layout of the eutectic machine 100, but also improves the efficiency of material circulation.

[0100] Specifically, the substrate loading platform 15 provides an initial loading position of substrate materials; and the substrate unloading platform 16 is used for receiving substrate materials that have completed the eutectic process.

[0101] Please continue to refer to Figure 9 , as a feasible implementation manner, the carrying platform 1 is further provided with a substrate loading bin platform 17 and a substrate unloading bin platform 18, the substrate loading bin platform 17 is arranged corresponding to the substrate loading platform 15; the substrate loading bin platform 17 is provided with a first lifting mechanism and a plurality of stacked loading layers 171, the first lifting mechanism is used for driving the loading layers 171 to lift, the substrate loading platform 15 is provided with a first conveying structure, the first conveying structure is used for conveying external materials located on the loading layer 171 at a corresponding height to the substrate loading platform 15; the substrate unloading bin platform 18 is provided with a second lifting mechanism and a plurality of stacked unloading layers 181, the second lifting mechanism is used for driving the loading layers 171 to lift, the substrate unloading platform 16 is provided with a second conveying structure, the second conveying structure is used for conveying external materials on the substrate unloading platform 16 to the unloading layer 181 at a corresponding height.

[0102] Please participate Figure 10 , Figure 10The dotted line A and the dotted line B represent the working route of the second mechanical arm module 6, which first sucks the un-eutectic substrate on the substrate loading platform 15 through the substrate loading suction nozzle 721; moves from the substrate loading platform 15 to the position of the eutectic platform 12 along the path shown by the dotted line A; sucks the substrate on which the eutectic is completed on the eutectic platform 12 through the substrate unloading suction nozzle 722 (if there is no substrate on the eutectic platform 12, this step is omitted); places the substrate sucked by the substrate loading suction nozzle 721 on the eutectic platform 12, and then returns to the substrate unloading platform 16 along the path shown by the dotted line D, and places the substrate on which the eutectic is completed on the substrate unloading platform 16.

[0103] The dotted line B represents the working route of the third mechanical arm module 7, which first sucks the chip from the chip loading platform 14 through the chip loading suction nozzle 621, moves to the transfer platform 13 along the path shown by the dotted line B, and places the chip on the transfer platform 13, and then returns empty.

[0104] The dotted line C represents the working route of the first mechanical arm module 5, which calibrates and sucks the chip from the transfer platform 13 through the first liftable binding head assembly 52 and the vision module 8, and then moves to the eutectic platform 12 along the dotted line C, places the chip on the corresponding position of the substrate in the eutectic platform 12, and then returns empty.

[0105] It should be noted that the running time of the four action routes can be adjusted according to the distance, the eutectic time and the sequence of the working process, so as to achieve the effect of not interfering with each other.

[0106] It can be understood that, in the embodiment of the utility model, the substrate loading warehouse platform 17 and the substrate unloading warehouse platform 18 are arranged on the bearing platform 1, and the first lifting mechanism and the second lifting mechanism, and the first conveying structure and the second conveying structure are arranged on these platforms, which ensures the high efficiency and automation of the substrate material in the loading and unloading process. This design not only improves the continuity and efficiency of the material supply and collection of the eutectic machine 100, but also reduces the manual intervention through the automation equipment, and further improves the production efficiency of the eutectic machine 100.

[0107] Please combine Figure 4 and Figure 11 As a feasible implementation manner, the first mechanical arm module 5 and / or the second mechanical arm module 6 and / or the third mechanical arm module 7 is provided with a binding head assembly and a suction nozzle detachably connected with the binding head assembly; the bearing platform 1 is further provided with a suction nozzle rack, and the suction nozzle rack is provided with suction nozzle placing positions of at least two types.

[0108] Understandably, in the embodiments of the utility model, through setting the binding head assembly and the detachable connecting suction nozzle on the mechanical hand module, and setting the suction nozzle rack on the bearing platform 1, the quick replacement of the suction nozzle is ensured. This design not only improves the flexibility and adaptability of the eutectic machine 100, but also reduces the time required for replacing the suction nozzle through reasonable setting of the position of the suction nozzle rack, and further improves the production efficiency of the eutectic machine 100.

[0109] As a feasible implementation manner, the suction nozzle rack is arranged close to the transfer platform 13 or the chip loading platform 14; or, the suction nozzle rack is arranged on the circumferential outer side surface of the transfer platform 13. Figure 11

[0110] Understandably, in the embodiments of the utility model, through setting the suction nozzle rack close to the transfer platform 13 or the chip loading platform 14, or on the circumferential outer side surface of the transfer platform 13, the replacement of the suction nozzle becomes more convenient. This design not only improves the flexibility and adaptability of the eutectic machine 100, but also reduces the time required for replacing the suction nozzle through reasonable setting of the position of the suction nozzle rack, and further improves the production efficiency of the eutectic machine 100.

[0111] The above only describes the preferred embodiments of the utility model, and does not limit the utility model, and any modification, equivalent replacement and improvement within the principle of the utility model should be included in the protection scope of the utility model.​

Claims

1. A fixed beam eutectic machine, characterized by: It includes a carrying platform, on which are provided a first slide rail assembly, a second slide rail assembly and a third slide rail assembly which are spaced apart and parallel to each other; a first robot module is slidably provided on the first slide rail assembly, a second robot module is slidably provided on the second slide rail assembly, and a third robot module is slidably provided on the third slide rail assembly; a fixed beam is provided on the carrying platform, the first slide rail assembly is provided on the fixed beam, and the second slide rail assembly and the third slide rail assembly are close to the fixed beam and spaced apart from the fixed beam.

2. The fixed beam eutectic machine according to claim 1, characterized in that: The fixed beam includes a column and a side support portion, the column is arranged on the bearing platform, the side support portion is arranged at one end of the column away from the bearing platform, and the side support portion is convex relative to the circumferential outer surface of the column; an avoidance space is provided between the side support portion and the bearing platform, and the second slide rail assembly and the third slide rail assembly are located in the avoidance space.

3. The fixed beam eutectic machine according to claim 2, characterized in that: The columns are arranged close to the edge of the carrying platform, and the side support portions protrude toward the middle area of ​​the carrying platform.

4. The fixed beam eutectic machine according to claim 1, characterized in that: The fixed beam is an integrated structure.

5. The fixed beam eutectic machine according to claim 2, characterized in that: The second slide rail assembly and the third slide rail assembly are arranged side by side along their sliding direction; a gap is provided between the column and the second slide rail assembly and the third slide rail assembly, and a line drag chain is provided on the second slide rail assembly and the third slide rail assembly respectively, and the line drag chain is arranged in the gap.

6. The fixed beam eutectic machine according to claim 1, characterized in that: The first manipulator module includes a first movable frame and a first liftable head binding assembly. The first movable frame can be slidably set on the first slide rail assembly, and the first liftable head binding assembly is set on the first movable frame; the lifting path of the first liftable head binding assembly is located on the outside of the second slide rail assembly and the third slide rail assembly.

7. The fixed beam eutectic machine according to claim 1, characterized in that: A partial area of ​​the first slide rail assembly is parallel to the second slide rail assembly, and a partial area of ​​the first slide rail assembly is parallel to the third slide rail assembly.

8. The fixed beam eutectic machine according to claim 1, characterized in that: The carrying platform is also provided with a eutectic platform, a transfer platform, a chip loading platform and a substrate loading platform; The substrate loading platform and the eutectic platform are arranged along a sliding path defined by the third slide rail assembly, and the third manipulator module is used to transfer external substrate materials between the substrate loading platform and the eutectic platform; The chip loading platform and the transfer platform are arranged along a sliding path defined by the second slide rail assembly, and the second manipulator module is used to transfer external chip materials between the chip loading platform and the transfer platform; The transfer platform and the eutectic platform are arranged along a sliding path defined by the first slide rail assembly, and the first manipulator module is used to transfer external chip materials between the transfer platform and the eutectic platform.

9. The fixed beam eutectic machine according to claim 8, characterized in that: A substrate unloading platform is further provided on the carrying platform, and the substrate unloading platform, the substrate loading platform and the eutectic platform are arranged along a sliding path defined by the third slide rail assembly; The third robot module is provided with a substrate loading nozzle and a substrate unloading nozzle. The substrate loading nozzle is used to transfer external substrate materials between the substrate loading platform and the eutectic platform; the substrate unloading nozzle is used to transfer external substrate materials between the eutectic platform and the substrate unloading platform.

10. The fixed beam eutectic machine according to claim 8, characterized in that: The carrying platform is also provided with a fourth slide rail assembly, a fifth slide rail assembly, a sixth slide rail assembly and a seventh slide rail assembly; the sliding directions of the fourth slide rail assembly, the fifth slide rail assembly, the sixth slide rail assembly and the seventh slide rail assembly are all perpendicular to the first slide rail assembly; the eutectic platform is slidably provided on the fourth slide rail assembly, the transfer platform is slidably provided on the fifth slide rail assembly, the chip loading platform is slidably provided on the sixth slide rail assembly, and the substrate loading platform is slidably provided on the seventh slide rail assembly.

Images