Dust collecting device for low-pressure diffusion furnace and low-pressure diffusion furnace

Abstract

The dust collecting device comprises a dust collecting module and a filtering module, the dust collecting module comprises a dust collecting barrel, an opening of the dust collecting barrel is an air inlet hole, the air inlet hole is connected with a first pipeline, an air outlet hole is formed in the side face of the dust collecting barrel, and the air outlet hole is connected with a second pipeline. And the air outlet hole is sequentially connected with the filtering module and the second pipeline. Through the integrated design of the dust collecting module and the filtering module, the dust collecting module is used for receiving common bulk dust, and the filtering module is used for capturing sheet-shaped condensation or dust, so that the sheet-shaped condensation or dust is prevented from falling into the vacuum pump to cause downtime of the pump body, the service life of the vacuum pump is prolonged, and the working efficiency of a machine table is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a dust collecting device for low pressure diffusion furnace and low pressure diffusion furnace. BACKGROUND

[0002] Low pressure diffusion furnace is a kind of equipment for diffusion process in semiconductor manufacturing process, by carrying out diffusion process under lower pressure, can improve the selectivity and uniformity of reaction, reduce the occurrence of side reaction, thereby obtain higher quality film and more accurate doping effect.Low pressure diffusion furnace is usually configured single pump body for extracting vacuum or pressure control.In the working process, a large amount of tail gas will be generated, these tail gas will flow into subsequent vacuum pipeline along the airflow direction.The matter of tail gas will condense into block shape and drop or produce sticky phenomenon, and then when flowing into vacuum pump, it will cause the abnormal speed of pump suction force and even cause downtime phenomenon.To avoid condensation or dust drop causing abnormal stop of vacuum pump, heating belt and dust collecting barrel device are generally arranged in vacuum pipeline, to stabilize the discharge stability of rear-end pipeline, but if sheet-shaped condensation or dust product is generated, it is easy to be sucked into vacuum pump by gravity, which will cause jamming phenomenon.This will inevitably reduce the overall use efficiency of low pressure diffusion furnace machine, and delay production.

[0003] To solve the above problems, it is necessary to provide a dust collecting device capable of long-term use, which can simultaneously receive dust and sheet-shaped product, thereby prolonging the maintenance and replacement cycle and improving the overall production efficiency of low pressure diffusion furnace. UTILITY MODEL CONTENTS

[0004] The utility model discloses a dust collecting device for low pressure diffusion furnace to solve all or partial problems of prior art.

[0005] To achieve the above purpose, the utility model provides a dust collecting device for low pressure diffusion furnace, including dust collecting module and filter module, the dust collecting module includes dust collecting barrel, the opening of dust collecting barrel is gas inlet hole, the gas inlet hole is connected first pipeline, the side surface of dust collecting barrel is provided with gas outlet hole, the gas outlet hole is connected filter module and second pipeline in proper order.The existing dust collecting device can generally only receive general bulk dust, and sheet-shaped condensation or dust product is easy to be taken to pump body by vacuum pump suction force, causing vacuum pump downtime, the integrated design of dust collecting module and filter module is carried out in the scheme, general bulk dust is received by dust collecting module, sheet-shaped condensation or dust product is captured by filter module, thereby preventing sheet-shaped condensation or dust product from falling into vacuum pump and causing pump body downtime.

[0006] A plurality of heating devices are arranged in the middle of the first pipe and at one end close to the air inlet hole.

[0007] The heating device is a heating belt or a heating sheet.

[0008] The filter module comprises a filter screen with a mesh size of 5-3000 mesh.

[0009] The filter screen is attached to the support frame.

[0010] The filter module comprises a plurality of filter screens with gradually decreasing mesh sizes from the air outlet hole to the second pipe.

[0011] The filter screen is made of nylon or stainless steel.

[0012] The filter screen is circular and matches the shape of the air outlet hole.

[0013] The filter module further comprises a fixed plate, and the filter screen is installed in the hollow position in the middle of the fixed plate.

[0014] The utility model also provides a low pressure diffusion furnace, including the dust collection device for low pressure diffusion furnace described in any one technical scheme, another end of first pipe is connected process chamber, another end of second pipe is connected vacuum pump. After the special gas reaction in the process chamber is completed, the fine and scattered dust generated enters the air inlet hole of the dust collecting barrel through the pipe and directly falls into the dust collecting barrel under the influence of gravity.

[0015] Compared with the prior art, the utility model has the main beneficial effects that: by arranging the filter module on one side of the dust collecting module, the sheet-shaped condensate or dust is captured by the filter module and falls into the dust collecting module together with the general fine dust, thereby preventing the sheet-shaped condensate or dust from falling into the vacuum pump and causing the pump body to be down. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a dust collection device for low pressure diffusion furnace provided by the utility model embodiment 1.

[0017] Figure 2 is a multi-stage filter screen structure schematic diagram provided by the embodiment 2 of the utility model;

[0018] Figure 3 is a filter module structure schematic diagram provided by the embodiment 3 of the utility model;

[0019] Figure 4 is the installation position schematic diagram of the dust collecting device in the low pressure diffusion furnace equipment provided by the utility model.

[0020] Reference signs:

[0021] 1, first pipeline; 2, dust collecting module; 3, filter module; 4, second pipeline; 5, heating device; 6, dust collecting barrel; 7, filter screen; 8, support frame; 9, fixed plate; 10, process chamber; 11, vacuum pump. DETAILED DESCRIPTION

[0022] The preferred embodiments of the utility model are described in detail below in combination with the drawings, so that the advantages and features of the utility model can be more easily understood by the person skilled in the art, and the protection scope of the utility model is more clearly and explicitly defined.

[0023] Embodiment 1

[0024] The utility model provides a dust collecting device for low pressure diffusion furnace. Figure 1 As shown in the figure, the dotted line is the gas flow direction. The dust collecting device includes a dust collecting module 2 and a filter module 3. The dust collecting module 2 includes a dust collecting barrel 6. The upper surface of the dust collecting barrel 6 is provided with an air inlet hole. The air inlet hole is connected to a first pipeline 1. The side surface of the dust collecting barrel 6 is provided with an air outlet hole. The air outlet hole is connected to the filter module 3 and a second pipeline 4 in sequence. Figure 4 is the installation position schematic diagram of the dust collecting device in the low pressure diffusion furnace equipment provided by the utility model, as Figure 4 The dust collecting device is connected to a process chamber 10 and a vacuum pump 11 through a first pipeline 1 and a second pipeline 4 respectively. The main function of the dust collecting device is to process the dust discharged from the process chamber 10. The dust generated after the special gas in the process chamber 10 reacts is collected in the dust collecting barrel 6, so as to avoid the dust entering the vacuum pump 11 in the rear part and avoid the abnormal jamming of the vacuum pump 11 during the process operation, thereby prolonging the service life of the vacuum pump 11.

[0025] In this embodiment, the height of the dust bucket 6 is greater than the diameter of the second pipe 4. A heating device 5 is also provided in the middle of the first pipe 1 and near one end of the air inlet. The design of the heating device prevents the gas in the pipeline from condensing and reduces the formation of flaky condensates. The heating device is a heating belt or a heating plate. A support frame 8 is provided at one end of the air outlet of the dust bucket 6, and the filter module 3 includes a circular filter screen 7 with a pore size of 5 to 3000 meshes and a material of nylon or stainless steel. The filter screen 7 is fixedly connected to the dust bucket 6 through the support frame 8, which is convenient for later disassembly and replacement of the filter screen.

[0026] When the dust collecting device is working, after the reaction of the special gas in the process chamber 10 is completed, the generated dust enters the dust collecting device through the air inlet (i.e., along the vacuum pump) along with the gas. Figure 1 The air enters in the direction of the dotted arrow in the middle and upper part of the air, and then contacts the filter 7. The flake-shaped condensation or dust is captured by the filter 7, and the fine dust falls directly into the dust collecting bucket 6 under the influence of gravity. The rest of the gas is discharged along the exhaust port (i.e. along the Figure 1 In this embodiment, the dust collecting module 2 and the filtering module 3 are integrated. The dust collecting module 2 receives general loose dust, and the filtering module 3 captures flake-like condensation or dust, thereby preventing flake-like condensation or dust from falling into the vacuum pump 11 and causing the pump to shut down.

[0027] Example 2

[0028] The utility model provides a dust collection device for a low-pressure diffusion furnace. The basic structure of the dust collection device in this embodiment is similar to that of embodiment 1, except that the filter module 3 includes multiple filter screens 7, and the mesh size of the multiple filter screens 7 gradually decreases from the side of the air outlet to the side of the second pipe 4. Figure 2 . In Example 1, the filter module 3 is a single filter screen 7, which has limited ability to capture and filter sheet-like condensation or dust. In this embodiment, the filter module 3 is improved. The filter module 3 includes multiple filter screens 7, and the mesh size of the filter screens gradually decreases from the side of the air outlet to the side of the second pipe 4, so as to achieve effective filtering and isolation of sheet-like condensation or dust. In this embodiment, the number of filter screens 7 is 2. In other embodiments, the number of filter screens 7 can be set as needed.

[0029] Example 3

[0030] The utility model provides a dust collecting device for low pressure diffusion furnace, the basic structure of dust collecting device in this embodiment is similar with embodiment 1, the difference is that filter module 3 still includes fixed plate 9, single or multiple filter screen 7 is installed on the hollow position of fixed plate 9 middle part, fixed plate 9 is movably installed on the inner wall of the air outlet, the installation mode of fixed plate here is various, for example, can be clamped in the inner wall of air outlet, or with air outlet screw joint fixed, is not limited. Figure 3 In embodiment 1, filter screen 7 is fixedly connected with dust collecting barrel 6 through support frame 8.

[0031] The utility model also provides a low pressure diffusion furnace, including dust collecting device for low pressure diffusion furnace described in any one technical scheme, the other end of first pipeline is connected process chamber, the other end of second pipeline is connected vacuum pump.

[0032] The above-mentioned is only the embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or equivalent process conversion using the contents of the utility model specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection range of the utility model.

Claims

1. A dust collecting device for a low-pressure diffusion furnace, characterized by comprising: The dust collecting device comprises a dust collecting module and a filtering module, the dust collecting module comprises a dust collecting barrel, an air inlet hole is arranged on the dust collecting barrel, the air inlet hole is connected with a first pipeline, an air outlet hole is arranged on the side of the dust collecting barrel, and the air outlet hole is sequentially connected with the filtering module and a second pipeline.

2. A dust collecting device for a low pressure diffusion furnace according to claim 1, characterized in that: A plurality of heating devices are further arranged on the middle part of the first pipeline and one end close to the air inlet hole.

3. A dust collection device for a low pressure diffusion furnace as defined in claim 2, characterized in that: The heating device is a heating belt or a heating sheet.

4. A dust collecting device for a low pressure diffusion furnace according to claim 1, characterized in that: The filtering module comprises a filtering screen, and the aperture of the filtering screen is 5-3000 mesh.

5. A dust collection device for a low pressure diffusion furnace as defined in claim 4, wherein: The air outlet hole of the dust collecting barrel is fixedly connected with a support frame, and the filtering screen is attached to the support frame.

6. A dust collection device for a low pressure diffusion furnace according to claim 4, characterized in that: The filtering module comprises a plurality of filtering screens, and the mesh size of the plurality of filtering screens gradually decreases from one side of the air outlet hole to the other side of the second pipeline.

7. A dust collection device for a low pressure diffusion furnace as defined in claim 4, wherein: The material of the filtering screen is nylon or stainless steel.

8. A dust collecting device for a low pressure diffusion furnace according to claim 4, characterized in that: The shape of the filtering screen is circular and is matched with the shape of the air outlet hole.

9. A dust collecting device for a low pressure diffusion furnace according to claim 4 or 6, characterized in that: The filtering module further comprises a fixed plate, the filtering screen is installed on the hollow position of the middle part of the fixed plate, and the fixed plate is movably installed on the inner wall of the air outlet hole.

10. A low pressure diffusion furnace characterized by comprising: The dust collecting device for the low-pressure diffusion furnace comprises the dust collecting device according to any one of claims 1-9, the other end of the first pipeline is connected with a process chamber, and the other end of the second pipeline is connected with a vacuum pump.

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