Silicon wafer feeding device

Abstract

The utility model discloses a silicon wafer feeding device which comprises a frame body and a pull basket, the top of the frame body is fixedly connected with a linear motor, one side of a moving part of the linear motor is fixedly connected with a connecting plate, the top of the connecting plate is fixedly connected with a hydraulic cylinder, and one end of a hydraulic rod of the hydraulic cylinder penetrates through the connecting plate and is fixedly connected with a mounting plate. Two guide grooves are formed in the top of the mounting plate, two clamping frames are slidably connected into the two guide grooves through key grooves, a power assembly for driving the clamping frames to move is arranged at the top of the mounting plate, and two clamping blocks are fixedly connected to the outer walls of the two sides of the pull basket. According to the feeding device, the pulling basket cannot shake easily in the pulling-up process, silicon wafers in the pulling basket are prevented from being collided, the use safety of the feeding device is improved, auxiliary supporting can be conducted on the pulling basket when the pulling basket is pulled up, the pulling basket is pulled up more stably, and the use stability of the feeding device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer processing, especially to a silicon wafer feeding device. BACKGROUND

[0002] Silicon wafer is a kind of semiconductor material, mainly used for manufacturing various semiconductor devices and integrated circuits, and can be single crystal silicon wafer or polycrystalline silicon wafer, wherein single crystal silicon wafer is widely used due to its complete lattice structure and good semiconductor performance.

[0003] At present, some silicon wafers on the market are placed in a pull basket during feeding, and then a lifting mechanism is used to pull up the pull basket, thereby realizing the feeding of the silicon wafer. However, the existing lifting mechanism is usually hung on both sides of the pull basket, and the hanging plate and the pull basket are prone to shaking during transportation, which causes the silicon wafers in the pull basket to collide and be damaged. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the shortcomings in the prior art and provides a silicon wafer feeding device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A silicon wafer feeding device, comprising a frame body and a pull basket, the top of the frame body is fixedly connected with a linear motor, one side of the moving part of the linear motor is fixedly connected with a connecting plate, the top of the connecting plate is fixedly connected with a hydraulic cylinder, one end of the hydraulic cylinder hydraulic rod is fixedly connected with a mounting plate through the connecting plate, two guide grooves are formed in the top of the mounting plate, two clamping frames are slidably connected in the two guide grooves through key grooves, the top of the mounting plate is provided with a power assembly for driving the clamping frame to move, two clamping blocks are fixedly connected with the outer wall on both sides of the pull basket, a plurality of sliding holes are formed in the top of the mounting plate, a pressing frame is slidably connected in adjacent two sliding holes, a tension spring is sleeved with the pressing frame on the position above the mounting plate, and the two ends of the tension spring are fixed with the pressing frame and the mounting plate, respectively, and the two sides of the mounting plate are provided with a supporting assembly for assisting the support of the pull basket.

[0007] As a further scheme of the utility model, the power assembly comprises two fixed plates, the two fixed plates are fixedly connected with the top of the mounting plate, a servo motor is fixedly connected with one side of each of the two fixed plates, and a bidirectional screw rod is connected with the output shaft of the servo motor through the fixed plate key, and the bidirectional screw rod passes through the two clamping frames and is threadedly engaged with the two clamping frames.

[0008] As a further scheme of the utility model, the two fixed plates are one-to-one corresponding with the two guide grooves.

[0009] As a further scheme of the utility model, the support assembly comprises two pull frames, the two pull frames are arranged on the two sides of the mounting plate respectively, connecting rods are rotationally connected to the two sides of the two pull frames, and the connecting rods are rotationally connected with the adjacent clamping frames.

[0010] As a further scheme of the utility model, the top of the mounting plate is fixedly connected with telescopic rods at the positions on the two sides, and one end of the telescopic rod telescopic part is fixed with the pull frame.

[0011] As a further scheme of the utility model, the length of the pull frame is greater than the length of the clamping frame, and the pull frame is fixedly connected with rubber pads on one side.

[0012] As a further scheme of the utility model, the top of the mounting plate is fixedly connected with multiple guide rods, and the guide rods pass through the connecting plate.

[0013] As a further scheme of the utility model, two slide rods are fixedly connected in the frame body, and the slide rods pass through the connecting plate.

[0014] The utility model discloses the beneficial effects are:

[0015] 1. The utility model discloses a clamping frame and a pressing frame are arranged, the clamping frame pulls the basket up through the clamping block, at this moment, the pressing frame will be extruded to the basket under the action of the tension spring, at this moment, the basket is clamped under the cooperation of the pressing frame and the clamping frame, so that the basket can not easily shake in the process of pulling up, the collision of the silicon wafer in the basket is prevented, and the safety of the feeding device is improved.

[0016] 2. The utility model discloses a support assembly, which can assist in supporting the basket during the process of pulling up the basket, so that the basket can be pulled up more stably, and the stability of the feeding device is improved. DRAWINGS

[0017] Fig. 1 A three-dimensional structure schematic view of a silicon wafer feeding device is provided for the utility model;

[0018] Fig. 2 A partial sectional structure schematic view of a silicon wafer feeding device is provided for the utility model;

[0019] Fig. 3 A partial enlarged structure schematic view of a silicon wafer feeding device is provided for the utility model.

[0020] In the figure: 1, frame body; 2, slide bar; 3, connecting plate; 4, hydraulic cylinder; 5, guide rod; 6, mounting plate; 7, linear motor; 8, pull basket; 9, clamping block; 10, tension spring; 11, telescopic rod; 12, pull frame; 13, servo motor; 14, clamping frame; 15, pressing frame; 16, bidirectional screw; 17, guide groove; 18, connecting rod; 19, rubber pad; 20, jack. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The described embodiments are only some of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0022] Referring to Figs. 1-3 A silicon wafer feeding device, comprising a frame body 1 and a pull basket 8, the top of the frame body 1 is fixed with a linear motor 7 through bolts, one side of the moving part of the linear motor 7 is fixed with a connecting plate 3 through bolts, the top of the connecting plate 3 is fixed with a hydraulic cylinder 4 through bolts, one end of the hydraulic rod of the hydraulic cylinder 4 passes through the connecting plate 3 and is fixed with a mounting plate 6 through bolts, the top of the mounting plate 6 is provided with two guide grooves 17, two clamping frames 14 are slidably connected in the two guide grooves 17 through key grooves, the top of the mounting plate 6 is provided with a power assembly for driving the clamping frame 14 to move, two clamping blocks 9 are welded on the outer walls of the two sides of the pull basket 8, so that the clamping blocks 9 are hung on the clamping frames 14 to drive the pull basket 8 to move upwards, a plurality of slide holes are formed in the top of the mounting plate 6, a pressing frame 15 is slidably connected in each two adjacent slide holes, the hydraulic cylinder 4 is started to extend, the hydraulic cylinder 4 will push the mounting plate 6 to move downwards, the mounting plate 6 will drive the clamping frame 14 to move downwards and drive the pressing frame 15 to move downwards through the tension spring 10, at this time, the pull basket 8 will enter between the plurality of clamping frames 14, and the plurality of clamping frames 14 will be symmetrically located on the two sides of the pull basket 8;

[0023] The outer side of the pressing frame 15 is sleeved with the tension spring 10 at the position above the mounting plate 6, and the two ends of the tension spring 10 are fixed with the pressing frame 15 and the mounting plate 6 respectively, so that the cooperation of the pressing frame 15 and the clamping frame 14 clamps the pull basket 8, and the two sides of the mounting plate 6 are provided with the supporting assembly for assisting the support of the pull basket 8, when the pressing frame 15 moves downward to contact the pull basket 8, at this time, the mounting plate 6 continues to move downward, so that the relative movement between the pressing frame 15 and the mounting plate 6 is realized, and the pressing frame 15 will stretch the tension spring 10, when the clamping frame 14 moves downward to exceed the clamping block 9, the hydraulic cylinder 4 is closed, and the two clamping frames 14 are driven to move in the opposite direction by the power assembly, so that the clamping frame 14 moves to the lower side of the clamping block 9 and stops moving, at this time, the hydraulic cylinder 4 is started to shrink, the mounting plate 6 drives the clamping frame 14 to move upward, the clamping frame 14 pulls up the pull basket 8 through the clamping block 9, and the pressing frame 15 will extrude the pull basket 8 under the action force of the tension spring 10, at this time, the pull basket 8 is clamped by the cooperation of the pressing frame 15 and the clamping frame 14, so that the pull basket 8 cannot easily shake during the pulling-up process, the silicon wafer in the pull basket 8 is prevented from colliding, and the safety of the feeding device is improved.

[0024] In the utility model, the power assembly includes two fixed plates, the two fixed plates are welded on the top of the mounting plate 6, one side of the two fixed plates is fixed with the servo motor 13 through the bolt, one end of the servo motor 13 output shaft is connected with the bidirectional screw rod 16 through the fixed plate key, the bidirectional screw rod 16 passes through the two clamping frames 14 and is in screw engagement with the two clamping frames 14, the two fixed plates are one-to-one corresponding with the two guide grooves 17, the servo motor 13 is started, the servo motor 13 drives the bidirectional screw rod 16 to move, and the bidirectional screw rod 16 drives the two clamping frames 14 to move in the opposite direction along the guide groove 17.

[0025] Especially, the support assembly comprises two pull frames 12 arranged on both sides of the mounting plate 6, both sides of the two pull frames 12 are rotationally connected with connecting rods 18, and the connecting rods 18 are rotationally connected with the adjacent clamping frames 14, both sides of the pull basket 8 are provided with insertion holes 20 below the clamping blocks 9, and the pull frames 12 are insertable with the insertion holes 20, and the clamping frames 14 drive the pull frames 12 to move downward when moving downward, and when the two clamping frames 14 move in opposite directions along the guide grooves 17, the pull frames 12 are pulled to move to the pull basket 8 through the connecting rods 18, and the connecting rods 18 rotate between the pull frames 12 and the clamping frames 14, so that the pull frames 12 are inserted into the insertion holes 20 to assist supporting the pull basket 8, the pull basket 8 is pulled up more stably, and the stability of the feeding device is improved. The top of the mounting plate 6 is fixed with telescopic rods 11 at both sides through bolts, one end of the telescopic rod 11 is fixed with the pull frame 12, and the pull frame 12 is pressed to shrink the telescopic rod 11 when moving, so as to ensure that the pull frame 12 moves horizontally. The length of the pull frame 12 is greater than the length of the clamping frame 14, and the pull frame 12 is bonded with rubber pads 19 on one side. A plurality of guide rods 5 are welded on the top of the mounting plate 6, and the guide rods 5 pass through the connecting plate 3. Two slide rods 2 are fixed in the frame body 1 through bolts, and the slide rods 2 pass through the connecting plate 3.

[0026] Working principle: when it is needed to use, the hydraulic cylinder 4 is started to extend, the hydraulic cylinder 4 pushes the mounting plate 6 to move downward, the mounting plate 6 drives the clamping frames 14 to move downward and drives the pressing frames 15 to move downward through the tension springs 10, at this time, the pull basket 8 enters between the clamping frames 14, and the clamping frames 14 are symmetrically located on both sides of the pull basket 8. When the pressing frame 15 moves downward to contact the pull basket 8, the mounting plate 6 continues to move downward, so that the pressing frame 15 moves relative to the mounting plate 6, and the pressing frame 15 stretches the tension spring 10. When the clamping frame 14 moves downward to exceed the clamping block 9, the hydraulic cylinder 4 is closed, and the servo motor 13 is started. The servo motor 13 drives the bidirectional screw rod 16 to move, the bidirectional screw rod 16 drives the two clamping frames 14 to move in opposite directions along the guide grooves 17, and the clamping frames 14 stop moving after moving below the clamping blocks 9. At this time, the hydraulic cylinder 4 is started to shrink, the mounting plate 6 drives the clamping frames 14 to move upward, the clamping frames 14 pull up the pull basket 8 through the clamping blocks 9, and the pressing frame 15 extrudes the pull basket 8 under the action of the tension spring 10. At this time, the pull basket 8 is clamped by the cooperation of the pressing frame 15 and the clamping frame 14, so that the pull basket 8 does not easily shake during pulling up, preventing the silicon wafers in the pull basket 8 from colliding, and improving the safety of the feeding device.

[0027] Finally, it should be noted that the skilled in the art can still modify the technical solutions described in the foregoing embodiments, or make equivalent replacement to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A silicon wafer loading device comprising a frame (1) and a pull basket (8), characterized in that, The top of the frame body (1) is fixedly connected with a linear motor (7), one side of the moving part of the linear motor (7) is fixedly connected with a connecting plate (3), the top of the connecting plate (3) is fixedly connected with a hydraulic cylinder (4), one end of the hydraulic rod of the hydraulic cylinder (4) penetrates through the connecting plate (3) and is fixedly connected with a mounting plate (6), two guide grooves (17) are formed in the top of the mounting plate (6), two clamping frames (14) are slidably connected in the two guide grooves (17) through key grooves, the top of the mounting plate (6) is provided with a power assembly for driving the clamping frame (14) to move, the two side outer walls of the pull basket (8) are fixedly connected with two clamping blocks (9), a plurality of slide holes are formed in the top of the mounting plate (6), adjacent two slide holes are slidably connected with a pressing frame (15), the outer side of the pressing frame (15) is sleeved with a tension spring (10) above the mounting plate (6), and the two ends of the tension spring (10) are fixedly connected with the pressing frame (15) and the mounting plate (6), and the two sides of the mounting plate (6) are provided with a supporting assembly for assisting the support of the pull basket (8).

2. The silicon wafer loading device of claim 1, wherein The power assembly comprises two fixed plates, the two fixed plates are fixedly connected to the top of the mounting plate (6), one side of each of the two fixed plates is fixedly connected with a servo motor (13), one end of the output shaft of the servo motor (13) is connected with a bidirectional screw rod (16) penetrating through the fixed plate through a key, and the bidirectional screw rod (16) penetrates through the two clamping frames (14) and is in threaded engagement with the two clamping frames (14).

3. The silicon wafer loading device of claim 2, wherein The two fixed plates correspond to the two guide grooves (17) one by one.

4. The silicon wafer loading device of claim 1, wherein The supporting assembly comprises two pull frames (12), the two pull frames (12) are arranged on the two sides of the mounting plate (6), and the two pull frames (12) are rotatably connected with connecting rods (18) on the two sides, and the connecting rods (18) are rotatably connected with adjacent clamping frames (14), and the two side outer walls of the pull basket (8) are provided with insertion holes (20) below the clamping blocks (9).

5. The silicon wafer loading device of claim 4, wherein the wafer loading device further comprises a wafer loading mechanism. The top of the mounting plate (6) is fixedly connected with telescopic rods (11) on the two sides, and one end of the telescopic part of the telescopic rod (11) is fixedly connected with the pull frame (12).

6. The silicon wafer loading device of claim 4, wherein The length of the pull frame (12) is greater than the length of the clamping frame (14), and the one side of the pull frame (12) is fixedly connected with a rubber pad (19).

7. The silicon wafer loading device of claim 1, wherein The top of the mounting plate (6) is fixedly connected with a plurality of guide rods (5), and the guide rods (5) penetrate through the connecting plate (3).

8. The silicon wafer loading device of claim 1, wherein The two slide rods (2) are fixedly connected in the frame body (1), and the slide rods (2) penetrate through the connecting plate (3).

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