Mask sheet

Abstract

A mask sheet is fixed to a mask frame, the mask sheet including: a first section in which a plurality of holes are arranged; a second partition outside the first partition and including an edge of the mask sheet; a third partition between the first partition and the second partition and fixed to the mask frame; and a plurality of grooves disposed in the second partition.

Description

[0001] Cross Reference to Related Applications

[0002] This application claims priority to and all the benefits of Korean Patent Application No. 10-2023-0161030, filed on November 20, 2023, the entire contents of which are incorporated herein by reference. TECHNICAL FIELD

[0003] One or more embodiments relate to a deposition mask (hereinafter, a mask) which can be used to deposit a material in a specific pattern related to manufacturing a display device, and more particularly, to a fine metal mask (FMM). BACKGROUND

[0004] A display device can provide an image by emitting light through a plurality of pixels. The pixels of the display device can be implemented by forming various layers including an emission layer on a substrate. The various layers can be formed by depositing a deposition material on the substrate, and also can be formed in a specific pattern. A mask can be used to deposit the deposition material in a specific pattern. SUMMARY

[0005] A mask or a mask assembly can be manufactured by fixing (e.g., welding) a mask sheet on a mask frame. The mask sheet can include a plurality of fine openings to pass a deposition material in a specific pattern. In order to fix the mask sheet to the mask frame in a planar state, the mask sheet can be fixed to the mask frame with a tensile force applied to the mask sheet in a specific direction. In some aspects, due to the thinness of the mask sheet and the tensile force applied to the mask sheet, a wave can occur on a surface of the mask sheet.

[0006] Additional aspects will be set forth in part in the description that follows, and in part will become apparent to those skilled in the art upon examination of the following description and drawings, or can be learned by practice of the presented embodiments of the disclosure.

[0007] According to one or more embodiments, a mask sheet is fixed to a mask frame, the mask sheet including: a first zone in which a plurality of holes are arranged; a second zone outside the first zone and including an edge of the mask sheet; a third zone between the first zone and the second zone and fixed to the mask frame; and a plurality of grooves arranged in the second zone.

[0008] According to one or more embodiments, in a plan view, the mask sheet can include a short side and a long side longer than the short side, wherein the plurality of grooves can extend in a direction in which the short side extends.

[0009] According to one or more embodiments, the first sub-zone can include a first sub-sub-zone overlapping the plurality of holes and a second sub-sub-zone surrounding the first sub-sub-zone, and a length of at least one of the plurality of grooves in the direction in which the short side extends can be greater than a length of the first sub-zone in the direction in which the short side extends.

[0010] According to one or more embodiments, the plurality of grooves can include a first groove disposed in a first surface of the mask sheet and a second groove disposed in a second surface of the mask sheet opposite the first surface.

[0011] According to one or more embodiments, at least one of a depth of the first groove and a depth of the second groove can be equal to or less than half of a thickness of the mask sheet.

[0012] According to one or more embodiments, the first groove and the second groove can be respectively provided as a plurality of first grooves and a plurality of second grooves, and the plurality of first grooves can be alternately disposed with the plurality of second grooves.

[0013] According to one or more embodiments, the first groove can be provided as a plurality of first grooves, and a space between adjacent first grooves of the plurality of first grooves can be equal to a width of each of the plurality of first grooves.

[0014] According to one or more embodiments, the plurality of grooves can be disposed in a grid form.

[0015] According to one or more embodiments, a method of manufacturing a mask assembly includes preparing a mask frame including an opening located at a center and preparing a mask sheet including a first zone in which a plurality of holes are disposed, aligning the mask frame and the mask sheet with each other such that the opening included in the mask frame and the first zone included in the mask sheet overlap each other, tensioning the mask sheet in one direction by applying a tension force to the mask sheet, fixing the mask sheet to the mask frame, and removing a second zone of the mask sheet protruding beyond an edge of the mask frame, wherein the mask sheet includes a plurality of grooves disposed in the second zone.

[0016] According to one or more embodiments, in a plan view, the mask sheet can include a short side and a long side longer than the short side, and the plurality of grooves can extend in a direction in which the short side extends.

[0017] According to one or more embodiments, the first sub-region can include a first sub-sub-region overlapping the plurality of holes in the mask sheet and a second sub-sub-region surrounding the first sub-sub-region, and a length of at least one of the plurality of grooves in the direction in which the short side extends can be greater than a length of the first sub-region in the direction in which the short side extends.

[0018] According to one or more embodiments, the plurality of grooves can include a first groove disposed in a first surface of the mask sheet and a second groove disposed in a second surface of the mask sheet opposite the first surface.

[0019] According to one or more embodiments, at least one of a depth of the first groove and a depth of the second groove can be equal to or less than half of a thickness of the mask sheet.

[0020] According to one or more embodiments, the first groove and the second groove can be respectively provided as a plurality of first grooves and a plurality of second grooves, and the plurality of first grooves can be alternately disposed with the plurality of second grooves.

[0021] According to one or more embodiments, the first groove can be provided as a plurality of first grooves, and a space between adjacent first grooves of the plurality of first grooves can be equal to a width of each of the first grooves.

[0022] According to one or more embodiments, the plurality of grooves can be disposed in a grid form.

[0023] According to one or more embodiments, an apparatus for manufacturing a display device includes a mask assembly and a deposition source facing the mask assembly and configured to spray a deposition material toward the mask assembly, wherein the mask assembly manufactured by a method includes preparing a mask frame including an opening located at a center, and preparing a mask sheet including a first region in which a plurality of holes are disposed, aligning the mask frame and the mask sheet to each other such that the opening included in the mask frame and the first region included in the mask sheet overlap each other, tensioning the mask sheet in one direction by applying a tension force to the mask sheet, fixing the mask sheet to the mask frame, and removing a second region of the mask sheet protruding beyond an edge of the mask frame, wherein the mask sheet includes a plurality of grooves disposed in the second region.

[0024] According to one or more embodiments, in a plan view, the mask sheet can include a short side and a long side longer than the short side, and the plurality of grooves can extend in a direction in which the short side extends.

[0025] According to one or more embodiments, the plurality of grooves can include a first groove disposed in a first surface of the mask sheet, and a second groove disposed in a second surface of the mask sheet opposite to the first surface.

[0026] According to one or more embodiments, the plurality of grooves can be arranged in a grid form. BRIEF DESCRIPTION OF DRAWINGS

[0027] The above and other aspects, features, and advantages of certain embodiments of the present disclosure will be more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0028] Figure 1 is a cross-sectional view of an apparatus for manufacturing a display device according to an embodiment;

[0029] Figure 2 is an exploded perspective view of a mask assembly according to an embodiment;

[0030] Figure 3A is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment;

[0031] Figure 3B is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment;

[0032] Figure 3C is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment;

[0033] Figure 3D is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment;

[0034] Figure 3E is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment;

[0035] Figure 4 is a plan view of a mask sheet according to an embodiment;

[0036] Figure 5 is a plan view of a mask sheet according to another embodiment;

[0037] Figure 6 is a plan view of a mask sheet according to another embodiment;

[0038] Figure 7 is a cross-sectional view of a mask sheet according to an embodiment;

[0039] Figure 8 is a cross-sectional view of a mask sheet according to another embodiment;

[0040] Figure 9is a cross-sectional view of a mask sheet according to another embodiment;

[0041] Figure 10 is a cross-sectional view of a mask sheet according to another embodiment;

[0042] Figure 11 is a cross-sectional view of a mask sheet according to another embodiment;

[0043] Figure 12 is a plan view of a display device manufactured using an apparatus for manufacturing a display device according to an embodiment; and

[0044] Figure 13 is a cross-sectional view of the display device of Figure 12 taken along line XIII-XIII' of Figure 12 . DETAILED DESCRIPTION

[0045] Reference will now be made in detail embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In some aspects, the embodiments can have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are described herein, by way of example only, with reference to the attached figures, to explain aspects of the description. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Throughout this disclosure, the expression "at least one of a, b, and c" indicates only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or variations thereof.

[0046] As the description allows various changes and numerous embodiments, specific embodiments will be shown in the drawings and described in the written description in detail. The effects and features of one or more embodiments and methods of achieving the effects and features of one or more embodiments will become apparent from the following detailed description of one or more embodiments with reference to the attached drawings. However, the embodiments can have different forms and should not be construed as being limited to the description set forth herein.

[0047] One or more embodiments will be described in greater detail herein with reference to the accompanying drawings. Those elements or those that correspond to each other are given the same reference numerals regardless of the figure number, and redundant descriptions thereof are omitted.

[0048] Although terms such as "first" and "second" can be used to describe various elements, such elements should not be limited to the above terms. The above terms are used to distinguish one element from another.

[0049] Unless the context clearly indicates otherwise, as used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well.

[0050] It will be understood that the terms "comprises" and "comprising", when used in this specification, set out that existence of stated features or elements but do not preclude the presence or addition of one or more other features or elements.

[0051] It will also be understood that when a layer, region or element is referred to as being on another layer, region or element, it can be directly on the other layer, region or element or intervening layers, regions or elements can also be present. In other words, for example, a layer, region or element can be present on another layer, region or element without directly contacting the other layer, region or element.

[0052] The size of elements in the figures can be exaggerated or reduced for the sake of explanation. For example, since the size and thickness of elements in the figures are arbitrarily shown for the ease of explanation, the following embodiments are not limited thereto.

[0053] The first direction DR1, the second direction DR2 and the third direction DR3 are not limited to three directions of a rectangular coordinate system, and can be interpreted in a broader sense. For example, the first direction DR1, the second direction DR2 and the third direction DR3 can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0054] When the embodiments can be implemented differently, a certain process sequence can be performed differently from the described sequence. For example, two processes described in succession can be performed substantially simultaneously or in an order opposite to the described sequence. The term "substantially" as used herein refers to approximately or virtually.

[0055] Figure 1 is a cross-sectional view of an apparatus 100 for manufacturing a display device according to an embodiment.

[0056] Referring to Figure 1 The apparatus 100 can include a chamber 110, a first support 120, a second support 130, a deposition source 140, a mask assembly 150, a magnetic force portion 160, a vision portion 170, and a pressure controller 180.

[0057] The chamber 110 can include a space therein, and a portion of the chamber 110 can be open. In some aspects, a gate valve 110-1 can be installed at the open portion of the chamber 110. In this example case, the open portion of the chamber 110 can be opened or closed according to the operation of the gate valve 110-1.

[0058] The first support 120 can support the display substrate D. For example, the display substrate D can be seated on the first support 120. In an embodiment, the first support 120 can be in the form of a plate fixed inside the chamber 110. In another embodiment, the first support 120 can be in the form of a shuttle linearly movable in the chamber 110, and the display substrate D can be seated on the first support 120. In another embodiment, the first support 120 can include an electrostatic chuck or an adhesive chuck disposed in the chamber 110, and the electrostatic chuck or the adhesive chuck can be fixed to the chamber 110 or capable of being raised and lowered in the chamber 110. Hereinafter, for convenience, an example case in which the first support 120 is in the form of a plate fixed inside the chamber 110 will be mainly described.

[0059] The mask assembly 150 can be seated on the second support 130. In some aspects, the second support 130 can be disposed inside the chamber 110. The second support 130 can support fine adjustment of the position of the mask assembly 150. In an embodiment, the second support 130 can include separate drivers or alignment units for moving the mask assembly 150 in different directions. In another embodiment, the second support 130 can be in the form of a shuttle movable in one or more different directions. In this example case, the mask assembly 150 can be seated on the second support 130, and the second support 130 can transfer the mask assembly 150. For example, the second support 130 can move out of the chamber 110, the mask assembly 150 can be seated on the second support 130, and then the second support 130 can enter the chamber 110 from outside the chamber 110.

[0060] The first support 120 and the second support 130 can be integrally formed with each other. In this example case, the first support 120 and the second support 130 can include a movable shuttle. In some aspects, the first support 120 and the second support 130 can include a structure that fixes the mask assembly 150 and the display substrate D such that the display substrate D is seated on the mask assembly 150, and the first support 120 and the second support 130 can linearly move the display substrate D and the mask assembly 150 at the same time.

[0061] Hereinafter, for convenience, an example case in which the first support 120 and the second support 130 are different from each other and disposed at different positions and an example case in which the first support 120 and the second support 130 are disposed inside the chamber 110 will be mainly described.

[0062] The deposition source 140 can face the mask assembly 150. In some aspects, a deposition material can be contained in the deposition source 140, and the deposition material can be evaporated or sublimated by heating the deposition material. The deposition source 140 can be fixed inside the chamber 110, or can be disposed inside the chamber 110 to be linearly movable in one direction. Hereinafter, an example case in which the deposition source 140 is fixed inside the chamber 110 will be mainly described.

[0063] The mask assembly 150 can include a mask frame 151, a first support bar 152, a second support bar 153, and a tension sheet 154. The first support bar 152 and the second support bar 153 can also be referred to as support members.

[0064] The magnetic force portion 160 can be disposed inside the chamber 110 to face the display substrate D. In some aspects, the magnetic force portion 160 can apply a magnetic force to the tension sheet 154, thereby pressing the mask assembly 150 toward the display substrate D. In particular, the magnetic force portion 160 can prevent the tension sheet 154 from sagging downward, and can also bring the tension sheet 154 into close contact with the display substrate D. In some aspects, the apparatus 100 can maintain the magnetic force portion 160 according to a consistent distance between the tension sheet 154 and the display substrate D with respect to a length direction of the tension sheet 154.

[0065] The vision portion 170 can be installed at the chamber 110, and can capture a position of the display substrate D and a position of the mask assembly 150. In some aspects, the vision portion 170 can include a camera for capturing an image of the display substrate D and an image of the mask assembly 150. The position of the display substrate D and the position of the mask assembly 150 can be identified based on the images captured by the vision portion 170, and based on the images, the first support 120 can fine-tune the position of the display substrate D or the second support 130 can fine-tune the position of the mask assembly 150. Hereinafter, an example case in which the second support 130 fine-tunes the position of the mask assembly 150 to align the position of the display substrate D and the position of the mask assembly 150 with each other will be mainly described. The term "fine-tune" can refer to adjustment based on a predetermined increment.

[0066] The pressure controller 180 can be connected to the chamber 110, and can be configured to control an internal pressure of the chamber 110. For example, the pressure controller 180 can adjust the internal pressure of the chamber 110 to a level equal to or similar to (e.g., within a threshold amount of) a pressure level of atmospheric pressure. In some aspects, the pressure controller 180 can adjust the internal pressure of the chamber 110 to a level equal to or similar to (e.g., within a threshold amount of) a pressure level of a vacuum state.

[0067] The pressure controller 180 can include a connection pipe 181 connected to the chamber 110 and a pump 182 installed at the connection pipe 181. In some aspects, based on the operation of the pump 182, external air can flow in through the connection pipe 181, or gas inside the chamber 110 can be guided to the outside through the connection pipe 181.

[0068] The above-described apparatus 100 can be used to manufacture the display apparatus described herein. First, in an example in which the pressure controller 180 adjusts the internal pressure of the chamber 110 to a level equal to or similar to (e.g., within a threshold amount of) the pressure level of atmospheric pressure, the gate valve 110-1 can operate to open the open portion of the chamber 110.

[0069] After opening the open portion of the chamber 110, the display substrate D can be inserted into the chamber 110 from the outside of the chamber 110. In some aspects, the display substrate D can be inserted into the chamber 110 in various ways. For example, the display substrate D can be inserted into the chamber 110 from the outside of the chamber 110 by a mechanical arm or other robotic equipment disposed outside the chamber 110. In another embodiment, in an example in which the first support 120 is in the form of a shuttle, the first support 120 can be carried out of the chamber 110 from the inside of the chamber 110, and then the display substrate D can be placed on the first support 120 by a separate mechanical arm or robotic equipment disposed outside the chamber 110, and the first support 120 can be inserted into the chamber 110 from the outside of the chamber 110. Hereinafter, for convenience, an example case in which the display substrate D is inserted into the chamber 110 from the outside of the chamber 110 by a mechanical arm disposed outside the chamber 110 will be mainly described.

[0070] As described herein, the mask assembly 150 can be disposed inside the chamber 110. In another embodiment, in the same or similar manner as the display substrate D, the mask assembly 150 can be inserted into the chamber 110 from the outside of the chamber 110. Hereinafter, for convenience, an example case in which only the display substrate D is inserted into the chamber 110 from the outside of the chamber 110 and the mask assembly 150 is disposed inside the chamber 110 will be mainly described.

[0071] In another embodiment, the first support 120 and the second support 130 can be in the form of a shuttle, and the display substrate D and the mask assembly 150 can be fixed thereon, and then can be inserted into the chamber 110 from the outside of the chamber 110.

[0072] When the display substrate D is inserted into the chamber 110, the display substrate D can be placed on the first support 120. In some aspects, the vision portion 170 can capture the position of the display substrate D and the position of the mask assembly 150. In particular, the vision portion 170 can capture an image of the first alignment mark of the display substrate D and an image of the second alignment mark of the mask assembly 150.

[0073] Based on the captured image of the first alignment mark and the captured image of the second alignment mark, the position of the display substrate D and the position of the mask assembly 150 can be identified. In some aspects, the apparatus 100 can include a separate controller configured to identify the position of the display substrate D and the position of the mask assembly 150.

[0074] Once the position of the display substrate D and the position of the mask assembly 150 are identified, the second support 130 can fine tune the position of the mask assembly 150.

[0075] After fine tuning the position of the mask assembly 150, the deposition source 140 can operate to spray deposition material toward the mask assembly 150 (e.g., in the first direction), and the deposition material having passed through the plurality of openings in the stretch sheet 154 can be deposited on the display substrate D. In some aspects, the pump 182 can draw gas from inside the chamber 110 and discharge the gas to the outside, thereby maintaining the internal pressure of the chamber 110 at a level equal to or similar to (e.g., within a threshold amount) a pressure level of a vacuum state.

[0076] The apparatus 100 can deposit the deposition material onto the display substrate D by passing the deposition material through the openings arranged in a deposition area (not shown). In some aspects, the mask assembly 150 can provide a deposition area equal to or similar to (e.g., within a threshold amount) a designed deposition area.

[0077] The above operations can be repeatedly performed on a plurality of display substrates D. In some aspects, when the amount of deposition on the plurality of display substrates D becomes equal to a preset amount of deposition, the apparatus 100 can stop operating, and the mask assembly 150 can be withdrawn from the chamber 110.

[0078] Figure 2 is an exploded perspective view of a mask assembly 150 according to an embodiment.

[0079] Referring to Figure 2 , the mask assembly 150 can include a mask frame 151, a first support rod 152, a second support rod 153, and a stretch sheet 154.

[0080] The mask frame 151 can have a plurality of frames connected to each other and forming an inner space of the mask frame 151. In an embodiment, the mask frame 151 can be in the form of a frame having one opening 151-1 in the center. In another embodiment, the mask frame 151 can be in the form of a grid, such as taking the example of a window frame including a plurality of openings. Hereinafter, an example case in which the mask frame 151 includes one opening 151-1 in the center will be mainly described. In some aspects, one side (or long side) of the mask frame 151 can have a length greater than that of the other side (or short side) of the mask frame 151. In an embodiment, one side of the mask frame 151 extending in the second direction DR2 can be defined as a long side of the mask frame 151, and one side of the mask frame 151 extending in the third direction DR3 can be defined as a short side of the mask frame 151. The long side of the mask frame 151 can have a length greater than that of the short side of the mask frame 151.

[0081] The mask frame 151 can include a first groove 151-2 and a second groove 151-3 in a surface (e.g., a surface facing the first direction DR1) of the mask frame 151. In an example, the first groove 151-2 and the second groove 151-3 do not penetrate the mask frame 151 in the first direction DR1 and can be arranged at regular intervals. For example, the first groove 151-2 can include a plurality of first grooves 151-2, can be spatially connected to the opening 151-1 of the mask frame 151, and can be arranged in the third direction DR3. Similarly, the second groove 151-3 can include a plurality of second grooves 151-3, can be spatially connected to the opening 151-1 of the mask frame 151, and can be arranged in the second direction DR2. The first groove 151-2 and the second groove 151-3 can provide a space in which both ends of each of the first support bar 152 and the second support bar 153 can be inserted into the mask frame 151 so that the first support bar 152 and the second support bar 153 are fixed to the mask frame 151. The first groove 151-2 can penetrate the mask frame 151 in the second direction DR2. The second groove 151-3 can penetrate the mask frame 151 in the third direction DR3.

[0082] The first support bars 152 and the second support bars 153 can be disposed on the mask frame 151. In some aspects, each of the first support bars 152 and the second support bars 153 can be provided as a plurality, and the plurality of first support bars 152 can be disposed on the mask frame 151 separately from each other, and the plurality of second support bars 153 can be disposed on the mask frame 151 separately from each other. For example, the plurality of first support bars 152 can be spaced apart in parallel with one edge of the stretch sheet 154, and the plurality of second support bars 153 can be spaced apart in parallel with the other edge of the stretch sheet 154. In an embodiment, the first support bars 152 can extend in the second direction DR2, and can be arranged in the third direction DR3. The first support bars 152 can be parallel to the long side of the mask frame 151.

[0083] The second support bars 153 can extend in the third direction DR3, and can be arranged in the second direction DR2. The second support bars 153 can be parallel to the short side of the mask frame 151. In another embodiment, the first support bars 152 can be omitted, and the second support bar 153 (or the plurality of second support bars 153) can be disposed on the mask frame 151. In another embodiment, the second support bars 153 can be omitted, and the first support bar 152 (or the plurality of first support bars 152) can be disposed on the mask frame 151.

[0084] In an embodiment, both ends of the first support bars 152 can be inserted into the first grooves 151-2, and thus can be fixed to the mask frame 151, and both ends of the second support bars 153 can be inserted into the second grooves 151-3, and thus can be fixed to the mask frame 151. In some aspects, both side surfaces of the first support bars 152 can be coplanar with both side surfaces of the mask frame 151. For example, the side surface of the first support bars 152 facing the second direction DR2 can be coplanar with the side surface of the mask frame 151 facing the second direction DR2. Similarly, both side surfaces of the second support bars 153 can be coplanar with both side surfaces of the mask frame 151. For example, the side surface of the second support bars 153 facing the third direction DR3 can be coplanar with the side surface of the mask frame 151 facing the third direction DR3. In another embodiment, the first grooves 151-2 and the second grooves 151-3 can be omitted, and the first support bars 152 and / or the second support bars 153 can be directly disposed (e.g., welded) on the upper surface of the mask frame 151 facing the first direction DR1. Although Figure 2 Four first support bars 152 and seven second support bars 153 are illustrated, but one or more embodiments are not necessarily limited to the quantity of the first support bars 152 and the second support bars 153.

[0085] The stretchers 154 can include at least one stretcher 154. In an example in which the stretchers 154 include at least two stretchers 154, the at least two stretchers 154 can be stretched in one direction (e.g., the third direction DR3), and can be arranged in another direction (e.g., the second direction DR2). In this example case, one edge of the stretchers 154 stretched in the third direction DR3 can be understood as a long edge of the stretchers 154, and one edge of the stretchers 154 stretched in the second direction DR2 can be understood as a short edge of the stretchers 154. In an embodiment, the first support bars 152 stretched in the second direction DR2 can cross the plurality of stretchers 154, and the second support bars 153 stretched in the third direction DR3 can overlap two stretchers 154 adjacent to each other at the same time.

[0086] The stretchers 154 can include at least one hole 154H. For example, a plurality of holes 154H can be formed in the stretchers 154 in a length direction (e.g., the third direction DR3) of the stretchers 154. In some aspects, the plurality of holes 154H can be spaced apart from each other at a certain distance in one direction (e.g., the second direction DR2), and can penetrate the stretchers 154. In an embodiment, some holes 154H in the stretchers 154 can overlap the first support bars 152.

[0087] The stretchers 154 can be coupled to the mask frame 151. For example, the stretchers 154 can be welded on an upper surface (or a surface facing the first direction DR1) of the mask frame 151. Each of the stretchers 154 can be in direct contact with or spaced apart from other stretchers 154 (e.g., adjacent stretchers 154). In an example in which each of the stretchers 154 is spaced apart from other stretchers 154, a portion of the second support bars 153 can be exposed in a separate area.

[0088] One edge of the stretchers 154 and one edge of the mask frame 151 can be in contact with each other. In an embodiment, an edge of the stretchers 154 stretched in the second direction DR2 (e.g., a short edge of the stretchers 154) and an edge of the mask frame 151 stretched in the second direction DR2 (e.g., a long edge of the mask frame 151) can be in contact with each other and can be coplanar with each other.

[0089] The alignment bars 155 can be disposed on one side of the outermost stretch sheet 154 among the plurality of stretch sheets 154. In an embodiment, one alignment bar 155 extending in the third direction DR3 can be disposed on one side of the outermost stretch sheet 154 in the second direction DR2 among the plurality of stretch sheets 154 in the second direction DR2. In some aspects, one alignment bar 155 extending in the third direction DR3 can be disposed on one side of the outermost stretch sheet 154 in the direction opposite to the second direction DR2 among the plurality of stretch sheets 154 in the direction opposite to the second direction DR2. The alignment bars 155 can be in direct contact with the stretch sheets 154 or separated from the stretch sheets 154. The alignment bars 155 can be used as the second alignment marks of the mask assembly 150 described herein with reference to FIG. 1. Figure 1 The alignment bars 155 can be disposed on one side of the outermost stretch sheet 154 among the plurality of stretch sheets 154. In an embodiment, one alignment bar 155 extending in the third direction DR3 can be disposed on one side of the outermost stretch sheet 154 in the second direction DR2 among the plurality of stretch sheets 154 in the second direction DR2. In some aspects, one alignment bar 155 extending in the third direction DR3 can be disposed on one side of the outermost stretch sheet 154 in the direction opposite to the second direction DR2 among the plurality of stretch sheets 154 in the direction opposite to the second direction DR2. The alignment bars 155 can be in direct contact with the stretch sheets 154 or separated from the stretch sheets 154. The alignment bars 155 can be used as the second alignment marks of the mask assembly 150 described herein with reference to FIG. 1.

[0090] Figure 3A is a perspective view of operations in a process of a method of manufacturing a mask assembly according to an embodiment.

[0091] Referring to Figure 3A , the method can include coupling the second support bars 153 to the mask frame 151. The second support bars 153 can include a plurality of second support bars 153, and each of the plurality of second support bars 153 can be disposed parallel to the short side (or the side extending in the third direction DR3) of the mask frame 151. After disposing each of the plurality of second support bars 153, the method can include overlapping each of the plurality of second support bars 153 with a respective second groove 151-3 of the mask frame 151, and then, pushing the second support bars 153 into the respective second grooves 151-3 in a direction opposite to the first direction DR1. In an embodiment, the second grooves 151-3 can be shaped such that the width of the second grooves 151-3 (e.g., the length of the second grooves 151-3 in the second direction DR2) is equal to the width of the second support bars 153. In the current operation of the process, the second support bars 153 can protrude out of the mask frame 151. In an embodiment, the method can include welding the second support bars 153 to the second grooves 151-3. In another embodiment, different from that shown in Figure 3A , the second grooves 151-3 can be omitted, and the method can include welding the second support bars 153 to the upper surface of the mask frame 151 facing the first direction DR1.

[0092] Figure 3B is a perspective view of operations in a process of a method of manufacturing a mask assembly according to an embodiment.

[0093] Referring to Figure 3B , the method can include disposing the plurality of stretch sheets 154 on the mask frame 151 in the second direction DR2. Figure 3AThe first support bars 152 are structurally provided in the embodiment shown in FIG. 1. The first support bars 152 can be coupled to the mask frame 151. The first support bars 152 can include a plurality of first support bars 152, and the method can include arranging each of the plurality of first support bars 152 parallel to a long side (or a side extending in the second direction DR2) of the mask frame 151. After arranging each of the plurality of first support bars 152, the method can include overlapping each of the plurality of first support bars 152 with a respective first recess 151-2 of the mask frame 151, and then pushing the first support bars 152 into the respective first recesses 151-2 in a direction opposite to the first direction DR1. In an embodiment, the first recesses 151-2 can be shaped such that a width (e.g., a length of the first recess 151-2 in the third direction DR3) of the first recess 151-2 is equal to a width of the first support bar 152. A depth (or a length in the first direction DR1) of the first recess 151-2 can be smaller than a depth (or a length in the first direction DR1) of the second recess 151-3.

[0094] Accordingly, the first support bars 152 can be positioned relative to the second support bars 153 in the first direction DR1. The first support bars 152 can cross the second support bars 153, and a portion of the first support bars 152 can overlap a portion of the second support bars 153. The first support bars 152 and the second support bars 153 can cross each other and define a plurality of holes 151H. In a current operation of the process, each of the first support bars 152 and the second support bars 153 can protrude out of the mask frame 151. In an embodiment, the first support bars 152 can additionally be welded to the first recesses 151-2. In another embodiment, the first support bars 152 can be omitted, and the second support bars 153 can be welded to the second recesses 151-3. Figure 3B Differently from what is shown in FIG. 1, the first recesses 151-2 can be omitted, and the first support bars 152 can be welded on an upper surface of the mask frame 151 facing the first direction DR1.

[0095] Figure 3C is a perspective view of operations in a process of a method of manufacturing a mask assembly according to an embodiment.

[0096] Referring to Figure 3C , the method can include disposing the mask sheet 156 to Figure 3BThe method can include disposing the mask sheet 156 onto the mask frame 151 while the mask sheet 156 is being pulled tight, for example, by applying a particular force in one direction (e.g., the third direction DR3 and the opposite direction of the third direction DR3) to remain flat. The mask sheet 156 can include a plurality of holes 156H separated from each other. The mask sheet 156 can be aligned with the mask frame 151 such that the holes 156H in the mask sheet 156 and the holes 151H defined by the first support bar 152 and the second support bar 153 (refer to FIG. 1) overlap each other, and the method can include welding the mask sheet 156 to the mask frame 151. For example, the mask sheet 156 can be welded to the mask frame 151 in an area where the mask frame 151 and the mask sheet 156 overlap each other. Figure 3B ) overlap each other, and the method can include welding the mask sheet 156 to the mask frame 151. For example, the mask sheet 156 can be welded to the mask frame 151 in an area where the mask frame 151 and the mask sheet 156 overlap each other.

[0097] Since the mask sheet 156 can be welded and fixed to the mask frame 151 while being pulled tight, the mask frame 151 can be bent or deformed by receiving a force from the mask sheet 156. In some aspects, the first support bar 152 and the second support bar 153 can support the mask frame 151, which can prevent the mask frame 151 from being deformed. The mask sheet 156 can include a plurality of mask sheets 156, and the method can include arranging the plurality of mask sheets 156 in one direction (e.g., the second direction DR2) and welding and fixing the plurality of mask sheets 156 to the mask frame 151.

[0098] A portion of the mask sheet 156 can protrude beyond an area welded to the mask frame 151, for example, protrude beyond the mask frame 151. For example, a portion of the mask sheet 156 can protrude beyond an edge of the mask frame 151 extending in the third direction DR3 in the second direction DR2. Alternatively, a portion of the mask sheet 156 can protrude beyond an edge of the mask frame 151 extending in the second direction DR2 in a direction opposite to the third direction DR3.

[0099] The groove 156G of the mask sheet 156 can be arranged in the protruding portion of the mask sheet 156 as described herein. In other words, the mask sheet 156 can be welded and fixed to the mask frame 151 and can include the groove 156G arranged in an outer area of the mask frame 151.

[0100] The method can include tensioning the mask sheet 156 in a certain direction (e.g., the third direction DR3 and a direction opposite to the third direction DR3), and welding the mask sheet 156 to the mask frame 151. Accordingly, a wave that extends in the tensioned direction (e.g., the third direction DR3) can occur on the mask sheet 156. Due to the wave, in an example in which the mask sheet 156 is fixed to the mask frame 151, the mask sheet 156 can have a curved shape in a direction perpendicular to the tensioned direction (e.g., the first direction DR1). The curved shape described herein can cause deformation of the hole 156H of the mask sheet 156, and as a result, the deposition quality can be deteriorated. The groove 156G in the mask sheet 156 can prevent or reduce the wave caused by the tensioning force to be formed in the area in which the hole 156H of the mask sheet 156 is disposed.

[0101] Figure 3D is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment.

[0102] Referring to Figure 3D , the method can include disposing alignment bars 155 on the structure of the embodiment shown in Figure 3C . The alignment bars 155 can extend in one direction (e.g., the third direction DR3), and can be disposed on both sides of the plurality of mask sheets 156. For example, the method can include disposing the alignment bars 155 in the second direction DR2 and a direction opposite to the second direction DR2 with respect to the plurality of mask sheets 156. In the embodiment, a portion of the alignment bars 155 can protrude outside the mask frame 151 in the current operation of the process. For example, a portion of the alignment bars 155 can extend beyond the edge of the mask frame 151 facing the third direction DR3 and / or the edge of the mask frame 151 facing the opposite direction of the third direction DR3. The method can include welding the alignment bars 155 and fixing the alignment bars 155 to the mask frame 151.

[0103] Figure 3E is a perspective view of an operation in a process of a method of manufacturing a mask assembly according to an embodiment.

[0104] Referring to Figure 3D and Figure 3EThe method can include cutting or removing a portion of the mask sheet 156. For example, the method can include cutting the mask sheet 156 along a long side of the mask frame 151 or along the second direction DR2. Accordingly, a portion of the mask sheet 156 that forms the groove 156G can be removed and does not constitute a portion of the mask assembly 150. It can be appreciated that the stretched sheet 154 is obtained by removing the portion of the mask sheet 156 that forms the groove 156G. It can be appreciated that the hole 156H in the mask sheet 156 and the hole 154H in the stretched sheet 154 are referred to as the same hole. After the cutting, an edge of the short side of the stretched sheet 154 can coincide with an edge of the long side of the mask frame 151.

[0105] The method can include cutting off (removing) a portion of each of the first support bar 152, the second support bar 153, and the alignment bar 155 that protrudes beyond the mask frame 151. For example, a portion of the first support bar 152 that protrudes beyond the mask frame 151 toward the second direction DR2 or a portion of the first support bar 152 that protrudes beyond the mask frame 151 toward an opposite direction of the second direction DR2 can be cut off and removed. A portion of the second support bar 153 that protrudes beyond the mask frame 151 toward the third direction DR3 or a portion of the second support bar 153 that protrudes beyond the mask frame 151 toward an opposite direction of the third direction DR3 can be cut off and removed. Similarly, a portion of the alignment bar 155 that protrudes beyond the mask frame 151 toward the third direction DR3 or a portion of the alignment bar 155 that protrudes beyond the mask frame 151 toward an opposite direction of the third direction DR3 can be cut off and removed.

[0106] Accordingly, one surface (e.g., a surface facing the third direction DR3) of the second support bar 153, the stretched sheet 154, and the alignment bar 155 can be coplanar with one surface (e.g., a surface facing the third direction DR3) of the mask frame 151. One surface (e.g., a surface facing the second direction DR2) of the first support bar 152 can be coplanar with one surface (e.g., a surface facing the second direction DR2) of the mask frame 151.

[0107] In an embodiment, the method can include cutting the second support bar 153, the alignment bar 155, and the mask sheet 156 at the same time. In an embodiment, the method can include cutting the first support bar 152, the second support bar 153, the alignment bar 155, and the mask sheet 156 at the same time.

[0108] Figure 4 is a plan view of a mask sheet 156 according to an embodiment.

[0109] Reference Figure 4The mask sheet 156 may include a first zone Z1, a second zone Z2, and a third zone Z3 between the first zone Z1 and the second zone Z2. The first zone Z1 may be in the center of the mask sheet 156 and may be a zone where the holes 156H of the mask sheet 156 are arranged.

[0110] The second partition Z2 may include an edge of the mask sheet 156 and may be arranged outside the first partition Z1. In an embodiment, the second partition Z2 may include a plurality of second partitions Z2, for example, two second partitions Z2. The two second partitions Z2 may be on one side of the first partition Z1 in the third direction DR3 and on one side of the first partition Z1 in the direction opposite to the third direction DR3, respectively. The edge of the mask sheet 156 in the third direction DR3 or in the direction opposite to the third direction DR3 may be in the second partition Z2. When the mask sheet 156 is welded to the mask frame 151 (reference Figure 2 ), the clamping point for tightening the mask sheet 156 may be in the second zone Z2. The second zone Z2 may be a portion that is cut and removed after the mask sheet 156 is welded to the mask frame 151. Therefore, the second zone Z2 may exist in the mask sheet 156, but may not exist in the stretch sheet 154 (refer to FIG. Figure 2 ), this is because the mask sheet 156 is welded and fixed to the mask frame 151 (reference Figure 2 ).

[0111] The third zone Z3 may be located between the first zone Z1 and the second zone Z2. In other words, the first zone Z1 and the second zone Z2 may be separated from each other by the third zone Z3. The third zone Z3 may overlap with the mask frame 151 and be welded to the mask frame 151 when the mask sheet 156 is fixed to the mask frame.

[0112] The mask sheet 156 may include a plurality of grooves 156G arranged in the second zone Z2. The grooves 156G may be arranged in each of the second zones Z2 on both sides of the first zone Z1. The grooves 156G may be separated from each other. The degree of separation between each groove 156G (i.e., the distance between the grooves 156G) may be constant. The width of each groove 156G may be constant. In an embodiment, the grooves 156G may have a stripe shape in which the length in the second direction DR2 is greater than the length in the third direction DR3.

[0113] The mask sheet 156 can include a long side extending in the third direction DR3 and a short side extending in the second direction DR2. The grooves 156G can extend in the short side direction (e.g., the second direction DR2) of the mask sheet 156. At least one of the plurality of grooves 156G can cross the mask sheet 156 in the second direction DR2. For example, a length of one of the plurality of grooves 156G in the second direction DR2 can be equal to a length of the mask sheet 156 in the second direction DR2.

[0114] Figure 5 is a plan view of a mask sheet 156 according to another embodiment.

[0115] Referring to Figure 5 , the grooves 156G can not cross the mask sheet 156 in the second direction DR2. Expressed in another way, in some embodiments, the end portions of the grooves 156G can be spaced apart from the boundaries of the mask sheet 156.

[0116] The first zone Z1 can include a 1-1 zone Z1-1 overlapping the hole 156H of the mask sheet 156 and a 1-2 zone Z1-2 surrounding the 1-1 zone Z1-1. In an embodiment, the 1-2 zone Z1-2 can be contiguous with the third zone Z3, and the 1-1 zone Z1-1 can be separated from the third zone Z3 due to the 1-2 zone Z1-2. In some cases, the terms 1-1 zone Z1-1 and 1-2 zone Z1-2 can be referred to as sub-zones of the first zone Z1.

[0117] A length of the 1-1 zone Z1-1 in the second direction DR2 can be defined as a first length L1. A length of the groove 156G in the second direction DR2 can be defined as a second length L2. The second length L2 can be equal to or greater than the first length L1.

[0118] Figure 6 is a plan view of a mask sheet according to another embodiment.

[0119] Referring to Figure 6 , the grooves 156G in the mask sheet 156 can have a grid form. Expressed in another way, the grooves 156G in the mask sheet 156 can be arranged in a grid form.

[0120] In an embodiment, the size of each grid can be the same. In an embodiment, each grid can have a square shape in which a length in the second direction DR2 is equal to a length in the third direction DR3. In another embodiment, unlike the square shape shown in Figure 6 , the shape of each grid can be circular or elliptical.

[0121] Figure 7 is a cross-sectional view of a mask sheet 156 according to an embodiment.

[0122] Figure 7 may be a cross-sectional view of the embodiment taken along a line A-A' of the embodiment. Figure 4

[0123] Referring to Figure 7 , the plurality of grooves 156G in the mask sheet 156 can include a first groove 156G-1 and a second groove 156G-2. The first groove 156G-1 can be disposed in a first surface (e.g., an upper surface or a surface facing a first direction DR1) of the mask sheet 156. The second groove 156G-2 can be disposed in a second surface (e.g., a lower surface or a surface facing a direction opposite to the first direction DR1) of the mask sheet 156.

[0124] In an embodiment, the first groove 156G-1 can include a 1-1 groove 156G-1A, a 1-2 groove 156G-1B, and a 1-3 groove 156G-1C. In an embodiment, the second groove 156G-2 can include a 2-1 groove 156G-2A, a 2-2 groove 156G-2B, and a 2-3 groove 156G-2C. Although three first grooves 156G-1 and three second grooves 156G-2 are shown, this is an example, and one or more embodiments are not limited to such a quantity. Figure 7

[0125] In an embodiment, the first groove 156G-1 can be alternately disposed with the second groove 156G-2. In an embodiment, the 2-1 groove 156G-2A can be disposed between the 1-1 groove 156G-1A and the 1-2 groove 156G-1B. In an embodiment, the 2-2 groove 156G-2B can be disposed between the 1-2 groove 156G-1B and the 1-3 groove 156G-1C. In an embodiment, the 1-2 groove 156G-1B can be disposed between the 2-1 groove 156G-2A and the 2-2 groove 156G-2B. In an embodiment, the 1-3 groove 156G-1C can be disposed between the 2-2 groove 156G-2B and the 2-3 groove 156G-2C.

[0126] A depth of the 1-1 groove 156G-1A can be defined as a first depth D1. A depth of the 1-2 groove 156G-1B can be defined as a second depth D2. A depth of the 1-3 groove 156G-1C can be defined as a third depth D3. A depth of the 2-1 groove 156G-2A can be defined as a fourth depth D4. A depth of the 2-2 groove 156G-2B can be defined as a fifth depth D5. A depth of the 2-3 groove 156G-2C can be defined as a sixth depth D6.

[0127] ​​In an embodiment, the depths of each of the grooves 156G can be the same. For example, the first depth D1, the second depth D2, the third depth D3, the fourth depth D4, the fifth depth D5, and the sixth depth D6 can be equal to each other. Each of the grooves 156G can have the same depth, and thus, the tensile force applied in the third direction DR3 can be uniformly dispersed between the grooves 156G. In another embodiment, the first depth D1, the second depth D2, and the third depth D3 can be equal to each other, and the fourth depth D4, the fifth depth D5, and the sixth depth D6 can be equal to each other, but the first depth D1 and the fourth depth D4 can be different from each other. In an example, the first depth D1, the second depth D2, and the third depth D3 can be different from the fourth depth D4, the fifth depth D5, and the sixth depth D6.

[0128] In an embodiment, each of the first depth D1, the second depth D2, the third depth D3, the fourth depth D4, the fifth depth D5, and the sixth depth D6 can be equal to or less than half of the thickness T1 of the mask sheet 156. In other words, the first groove 156G-1 and the second groove 156G-2 can each be separated from the center line CL of the mask sheet 156. Each of the first depth D1, the second depth D2, the third depth D3, the fourth depth D4, the fifth depth D5, and the sixth depth D6 can be equal to or less than half of the thickness T1 of the mask sheet 156, and thus, the durability of the mask sheet 156 can be obtained.

[0129] A width (or a length in the third direction DR3) of the 1-1 groove 156G-1A can be defined as a first width W1. A width (or a length in the third direction DR3) of the 1-2 groove 156G-1B can be defined as a second width W2. A width (or a length in the third direction DR3) of the 1-3 groove 156G-1C can be defined as a third width W3. A width (or a length in the third direction DR3) of the 2-1 groove 156G-2A can be defined as a fourth width W4. A width (or a length in the third direction DR3) of the 2-2 groove 156G-2B can be defined as a fifth width W5. A width (or a length in the third direction DR3) of the 2-3 groove 156G-2C can be defined as a sixth width W6.

[0130] In an embodiment, the widths of each of the grooves 156G can be the same. For example, the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be equal to each other. Each of the grooves 156G can have the same width, and thus, the tensile force applied in the third direction DR3 can be evenly dispersed between the grooves 156G. In another embodiment, the first width W1, the second width W2, and the third width W3 can be equal to each other, and the fourth width W4, the fifth width W5, and the sixth width W6 can be equal to each other, but the first width W1 and the fourth width W4 can be different from each other. In an example, the first width W1, the second width W2, and the third width W3 can be different from the fourth width W4, the fifth width W5, and the sixth width W6.

[0131] A space between the 1-1 groove 156G-1A and the 1-2 groove 156G-1B can be defined as a first space S1. A space between the 1-2 groove 156G-1B and the 1-3 groove 156G-1C can be defined as a second space S2. A space between the 2-1 groove 156G-2A and the 2-2 groove 156G-2B can be defined as a third space S3. A space between the 2-2 groove 156G-2B and the 2-3 groove 156G-2C can be defined as a fourth space S4.

[0132] In an embodiment, the first space S1, the second space S2, the third space S3, and the fourth space S4 can be equal to each other. In an embodiment, the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6, and the first space S1, the second space S2, the third space S3, and the fourth space S4 can each be the same.

[0133] Figure 8 is a cross-sectional view of a mask sheet 156 according to another embodiment.

[0134] Figure 8 may be a cross-sectional view of another embodiment taken along Figure 4 line A-A' of the mask sheet 156.

[0135] Referring to Figure 8The first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be different from the first space S1, the second space S2, the third space S3, and the fourth space S4. In an embodiment, each of the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be smaller than each of the first space S1, the second space S2, the third space S3, and the fourth space S4. For example, the first width W1, the second width W2, and the third width W3 of the first groove 156G-1 can be smaller than the first space S1 and the second space S2, which are spaces between the first grooves 156G-1. The fourth width W4, the fifth width W5, and the sixth width W6 of the second groove 156G-2 can be smaller than the third space S3 and the fourth space S4, which are spaces between the second grooves 156G-2.

[0136] The fourth width W4 can overlap the first space S1 and can be smaller than the first space S1. The fifth width W5 can overlap the second space S2 and can be smaller than the second space S2. The second width W2 can overlap the third space S3 and can be smaller than the third space S3. The third width W3 can overlap the fourth space S4 and can be smaller than the fourth space S4.

[0137] Accordingly, the first grooves 156G-1 and the second grooves 156G-2 can be separated from each other in the third direction DR3. In the example in which the width of each groove 156G is smaller than the space between the grooves 156G, the durability of the mask sheet 156 can be further obtained.

[0138] Figure 9 is a cross-sectional view of a mask sheet according to another embodiment.

[0139] Figure 9 may be a cross-sectional view of another embodiment taken along Figure 4 line A-A' of

[0140] Referring to Figure 9The first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be different from the first space S1, the second space S2, the third space S3, and the fourth space S4. In an embodiment, each of the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be greater than each of the first space S1, the second space S2, the third space S3, and the fourth space S4. For example, the first width W1, the second width W2, and the third width W3 of the first groove 156G-1 can be greater than the first space S1 and the second space S2, which are spaces between the first grooves 156G-1. The fourth width W4, the fifth width W5, and the sixth width W6 of the second groove 156G-2 can be greater than the third space S3 and the fourth space S4, which are spaces between the second grooves 156G-2.

[0141] The fourth width W4 can overlap the first space S1 and can be greater than the first space S1. The fifth width W5 can overlap the second space S2 and can be greater than the second space S2. The second width W2 can overlap the third space S3 and can be greater than the third space S3. The third width W3 can overlap the fourth space S4 and can be greater than the fourth space S4.

[0142] Accordingly, the first grooves 156G-1 and the second grooves 156G-2 can overlap each other in the first direction DR1. For example, the 1-1 groove 156G-1A can overlap the 2-1 groove 156G-2A. The 1-2 groove 156G-1B can overlap the 2-1 groove 156G-2A and the 2-2 groove 156G-2B. The 1-3 groove 156G-1C can overlap the 2-2 groove 156G-2B and the 2-3 groove 156G-2C. The 2-1 groove 156G-2A can overlap the 1-1 groove 156G-1A and the 1-2 groove 156G-1B. The 2-2 groove 156G-2B can overlap the 1-2 groove 156G-1B and the 1-3 groove 156G-1C. The 2-3 groove 156G-2C can overlap the 1-3 groove 156G-1C. In the example in which the width of each groove 156G is greater than the space between the grooves 156G, the ability to disperse the tensile force applied to the mask sheet 156 can be further improved.

[0143] Figure 10 is a cross-sectional view of a mask sheet 156 according to another embodiment.

[0144] Figure 10 may be a cross-sectional view of another embodiment taken along line A-A' of Figure 4 ​

[0145] Reference Figure 10 The grooves 156G in the mask sheet 156 can have a tapered shape.

[0146] Hereinafter, the "upper side" of the groove 156G can refer to a side adjacent to the surface of the mask sheet 156. The "lower side" of the groove 156G can refer to a side opposite to the "upper side" and adjacent to the center line CL of the mask sheet 156. For example, the upper side of the first groove 156G-1 can refer to a side adjacent to the upper surface of the mask sheet 156 facing the first direction DR1, and the lower side of the first groove 156G-1 can refer to a side adjacent to the center line CL of the mask sheet 156. The upper side of the second groove 156G-2 can refer to a side adjacent to the lower surface of the mask sheet 156 facing a direction opposite to the first direction DR1, and the lower side of the second groove 156G-2 can refer to a side adjacent to the center line CL of the mask sheet 156. Accordingly, the upper side of the first groove 156G-1 and the upper side of the second groove 156G-2 can be separated from each other by the thickness T1 of the mask sheet 156.

[0147] In an embodiment, the width (e.g., the first width W1, the second width W2, and the third width W3) of the upper side of the first groove 156G-1 can be greater than the width of the respective lower side of the first groove 156G-1. In an embodiment, the width (e.g., the fourth width W4, the fifth width W5, and the sixth width W6) of the upper side of the second groove 156G-2 can be greater than the width of the respective lower side of the second groove 156G-2.

[0148] In another embodiment, the width (e.g., the first width W1, the second width W2, and the third width W3) of the upper side of the first groove 156G-1 can be smaller than the width of the respective lower side of the first groove 156G-1. In another embodiment, the width (e.g., the fourth width W4, the fifth width W5, and the sixth width W6) of the upper side of the second groove 156G-2 can be smaller than the width of the respective lower side of the second groove 156G-2.

[0149] In an embodiment, each of the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6 can be equal to the first space S1, the second space S2, the third space S3, and the fourth space S4. In an embodiment, the space between adjacent ones of the plurality of first grooves 156G-1 can be equal to the width of each of the plurality of first grooves 156G-1. Accordingly, the width of the lower side of each of the plurality of first grooves 156G-1 and the width of the lower side of each of the second grooves 156G-2 can be smaller than the first space S1, the second space S2, the third space S3, and the fourth space S4.

[0150] Figure 11 is a cross-sectional view of a mask sheet according to another embodiment.

[0151] Figure 11 may be a cross-sectional view of another embodiment taken along a line A-A' of Figure 4

[0152] Referring to Figure 11 The groove 156G in the mask sheet 156 can have a substantially semicircular shape. In some aspects, the diameter of each semicircle can be the same as the first width W1, the second width W2, the third width W3, the fourth width W4, the fifth width W5, and the sixth width W6.

[0153] In another embodiment, the cross-sectional shape of the groove 156G can be modified differently, for example, to a semioval shape, a triangle, an N-sided polygon (where N is a natural number of 5 or more), or an hourglass shape.

[0154] Figure 12 is a plan view of a display device 20 manufactured using an apparatus for manufacturing a display device according to an embodiment. Figure 13 is a cross-sectional view of the display device 20 of Figure 12 taken along a line XIII-XIII' of Figure 12

[0155] Referring to Figure 12 and 13 The display device 20 can have a display area DA defined on the base 21 and a non-display area NDA arranged around the display area DA. The light emitting element 28 can be arranged in the display area DA, and a power supply wiring (not shown) can be arranged in the non-display area NDA. In some aspects, a pad portion C can be arranged in the non-display area NDA.

[0156] A plurality of deposited material patterns can be arranged in the display area DA. In some aspects, the display area DA can have an atypical shape.

[0157] The display device 20 can include a display base D, an intermediate layer 28-2 disposed on the display base D, and an opposite electrode 28-3 disposed on the intermediate layer 28-2. In some aspects, the display device 20 can include a thin film encapsulation layer E disposed on the opposite electrode 28-3.

[0158] The display base D can include the base 21, a thin film transistor TFT, a via layer 27, and a pixel electrode 28-1.

[0159] The base 21 can include a plastic material or a metal material. In some aspects, the base 21 can include polyimide (PI).

[0160] ​​A thin film transistor TFT can be provided over the substrate 21, the via layer 27 can cover the thin film transistor TFT, and the light emitting element 28 can be provided over the via layer 27.

[0161] A buffer layer 22 including an organic compound and / or an inorganic compound can also be provided on the upper surface of the substrate 21, and the buffer layer 22 can contain SiO x (x ≥ 1) and / or SiN x (x ≥ 1).

[0162] After the active layer 23 is provided on the buffer layer 22 in a specific pattern, the active layer 23 can be buried by the gate insulating layer 24. The active layer 23 can include a source region 23-1 and a drain region 23-3. The active layer 23 can also include a channel region 23-2 between the source region 23-1 and the drain region 23-3 in one step.

[0163] The active layer 23 can contain various materials. In an embodiment, the active layer 23 can contain an inorganic semiconductor material, such as amorphous silicon or crystalline silicon, for example. In another embodiment, the active layer 23 can contain an oxide semiconductor. In another embodiment, the active layer 23 can contain an organic semiconductor material. However, for convenience, examples in which the active layer 23 is formed of amorphous silicon will be mainly described herein.

[0164] The active layer 23 can be formed by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and patterning the polycrystalline silicon layer. The active layer 23 can have the source region 23-1 and the drain region 23-3 doped with impurities based on the type of thin film transistor, such as a driving thin film transistor (not shown) or a switching thin film transistor (not shown), for example.

[0165] The interlayer insulating layer 26 corresponding to the active layer 23 and burying the gate electrode 25 can be provided on the upper surface of the gate insulating layer 24. After a contact hole H1 is formed in the interlayer insulating layer 26 and the gate insulating layer 24, a source electrode 27-1 and a drain electrode 27-2 can be provided on the interlayer insulating layer 26 to contact the source region 23-1 and the drain region 23-3, respectively.

[0166] The via layer 27 is provided on the thin film transistor TFT, and a pixel electrode 28-1 of the light emitting element 28 is provided on the via layer 27. The pixel electrode 28-1 contacts the drain electrode 27-2 of the thin film transistor TFT through a via H2 in the via layer 27. The via layer 27 can be formed of a single layer or two or more layers of inorganic materials and / or organic materials. The via layer 27 can be a planarization layer having a flat upper surface regardless of a curve in the lower layer of the via layer 27, or can be curved along the curve in the lower layer of the via layer 27.

[0167] After the pixel electrode 28-1 is disposed on the via layer 27, the pixel-defining layer 29 can be formed of an organic material and / or an inorganic material. The pixel-defining layer 29 can cover the pixel electrode 28-1 and the via layer 27, and can have an opening that exposes the pixel electrode 28-1.

[0168] The intermediate layer 28-2 and the counter electrode 28-3 are disposed on the pixel electrode 28-1. In an embodiment, the counter electrode 28-3 can be disposed to span the entire surface of the display substrate D, in which case the counter electrode 28-3 can be disposed on the intermediate layer 28-2 and the pixel-defining layer 29. Hereinafter, for convenience, an example case in which the counter electrode 28-3 is disposed on the intermediate layer 28-2 and the pixel-defining layer 29 will be mainly described.

[0169] The pixel electrode 28-1 can serve as an anode and the counter electrode 28-3 can serve as a cathode, and the polarities of the pixel electrode 28-1 and the counter electrode 28-3 can be reversed.

[0170] The pixel electrode 28-1 and the counter electrode 28-3 are insulated from each other by the intermediate layer 28-2, and voltages of different polarities are applied to the intermediate layer 28-2 to cause light emission from the organic emission layer.

[0171] The intermediate layer 28-2 can include an organic emission layer. As another alternative example, the intermediate layer 28-2 can include an organic emission layer, and the intermediate layer 28-2 can further include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. The present embodiment is not limited thereto, and the intermediate layer 28-2 can include an organic emission layer, and can further include various other functional layers (not shown).

[0172] In some aspects, the intermediate layer 28-2 can be formed by the apparatus 100 for manufacturing a display device described herein (refer to Figure 1 ). The intermediate layer 28-2 can include a plurality of intermediate layers 28-2, and the plurality of intermediate layers 28-2 can be formed across the display area DA. In some aspects, the plurality of intermediate layers 28-2 can be separated from each other in the display area DA.

[0173] One unit pixel is composed of a plurality of sub-pixels, and the plurality of sub-pixels can emit light of various colors. For example, the plurality of sub-pixels can include sub-pixels that respectively emit red light, green light, and blue light, and can include sub-pixels that emit red light, green light, blue light, and white light (not shown).

[0174] The sub-pixel described herein can include one intermediate layer 28-2. In some aspects, in an example of forming one sub-pixel, the intermediate layer 28-2 can be formed by the apparatus for manufacturing a display device described herein.

[0175] The thin film encapsulation layer E can include a plurality of inorganic layers, or can include inorganic layers and organic layers. The organic layer of the thin film encapsulation layer E can be formed of a polymer, and more particularly, can be a single layer or a plurality of layers (a laminate) formed of one of polyethylene terephthalate, polyimide, polycarbonate, epoxy resin, polyethylene, and polyacrylate. The inorganic layer of the thin film encapsulation layer E can be a single layer or a plurality of layers (a laminate) including a metal oxide or a metal nitride. More particularly, the inorganic layer can include one of SiN x (x≥1), Al2O3, SiO x (x≥1), and TiO2. The outermost layer of the thin film encapsulation layer E can be an inorganic layer for preventing moisture from penetrating into the light emitting element.

[0176] The thin film encapsulation layer E can include at least one sandwich structure having at least one organic layer between at least two inorganic layers. As another example, the thin film encapsulation layer E can include at least one sandwich structure having at least one inorganic layer between at least two organic layers. As another example, the thin film encapsulation layer E can include a sandwich structure having at least one organic layer between at least two inorganic layers and a sandwich structure having at least one inorganic layer between at least two organic layers.

[0177] According to one or more embodiments described above, a mask sheet can be implemented in which a wave that can occur on the mask sheet due to a tensile force when the mask sheet is fixed to a mask frame can be reduced. In some aspects, embodiments of the disclosure support implementing a method of manufacturing a mask assembly by which the wave described herein can be reduced. However, one or more embodiments described herein are not limited thereto.

[0178] Example aspects of methods and processes supported by aspects of the disclosure are described herein. In the description of the methods and processes herein, the operations can be performed in a different order than shown and / or described, or the operations can be performed at different times or in different orders. Certain operations can also be omitted from the flowcharts, one or more operations can be repeated, or additional operations can be added.

[0179] Embodiments of the disclosure support one or more processes (methods) that support the features and embodiments described herein. Descriptions of elements “can be disposed,” “can be formed,” and the like include processes (methods) and techniques for disposing, forming, positioning, and modifying elements according to example aspects described herein.

[0180] It should be understood that the embodiments described herein are to be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as being applicable to other similar features or aspects in other embodiments. While one or more embodiments have been described with reference to the attached figures, it will be apparent to those of ordinary skill in the art that various changes in form and details can be made therein without departing from the spirit and scope as defined by the following claims.

Claims

1. A mask sheet, characterized by, The mask sheet is fixed to a mask frame, and the mask sheet includes: a first zone in which a plurality of holes are arranged; a second zone outside the first zone and including an edge of the mask sheet; a third zone between the first zone and the second zone and fixed to the mask frame; and a plurality of grooves arranged in the second zone.

2. The mask sheet according to claim 1, characterized by In a plan view, the mask sheet includes a short side and a long side longer than the short side, wherein the plurality of grooves extend in a direction in which the short side extends.

3. The mask sheet according to claim 2, characterized by The first zone includes a first sub-zone overlapping the plurality of holes and a second sub-zone surrounding the first sub-zone, wherein a length of at least one of the plurality of grooves in the direction in which the short side extends is greater than a length of the first sub-zone in the direction in which the short side extends.

4. The mask sheet according to claim 1, wherein The plurality of grooves includes: a first groove arranged in a first surface of the mask sheet; and a second groove arranged in a second surface of the mask sheet opposite the first surface.

5. The mask sheet according to claim 4, characterized by At least one of a depth of the first groove and a depth of the second groove is equal to or less than half of a thickness of the mask sheet.

6. The mask sheet according to claim 4, wherein The first groove and the second groove are respectively provided as a plurality of first grooves and a plurality of second grooves, wherein the plurality of first grooves are arranged alternately with the plurality of second grooves.

7. The mask sheet according to claim 4, wherein The first groove is provided as a plurality of first grooves, wherein a space between adjacent first grooves of the plurality of first grooves is equal to a width of each of the plurality of first grooves.

8. The mask sheet according to claim 1, wherein The plurality of grooves are arranged in a grid form.

Images