Target material fixing device and coating machine

Abstract

The utility model discloses a target material fixing device and film plating machine, including film plating machine body, fixed disk, fixed ring, fixed clamping block, spacing ring and drive component, fixed disk is fixed installation in the film plating machine body, fixed ring is fixed installation on fixed disk upper surface, spacing ring is fixed installation in fixed ring; a driving assembly used for driving three sets of fixing clamping blocks to rotate to clamp and fix a target material on the upper surface of a fixing ring is arranged in the coating machine body, a servo motor is started to drive a lead screw to rotate, and the lead screw drives a moving module to move up and down in a limiting ring through threads; and anti-skid rubber sheets on the side faces of the three sets of fixed clamping blocks are close to the center point of the movable top disc, then the target material in the containing groove is clamped and fixed through the three sets of fixed clamping blocks, and the target material in the containing groove can be disassembled and assembled through forward and reverse rotation of a servo motor. Therefore, the target material coating efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a target material fixing technology field of coating machine, concretely is a target material fixing device and coating machine. BACKGROUND

[0002] Coating machine, especially vacuum coating machine, is a kind of equipment for preparing film under vacuum condition, is widely used in multiple fields, adopts plasma technology, and prepares high-purity metal film, compound film and the like in vacuum environment. Coating process includes evaporation coating and sputtering coating, the former makes surface component evaporate and settle on substrate surface by heating target material, and the latter makes surface component sputter and deposit on substrate surface by bombarding target material with electron or high-energy laser;Target material of coating machine refers to target material bombarded by high-energy particles in coating process, and is used to form various functional films on substrate;Existing target material needs to use fixed frame to fix the position of target material when processing, but the existing fixed frame dismounting process is more troublesome, needs to twist multiple groups of bolts to dismount target material, is very inconvenient and leads to the reduction of coating machine working efficiency;

[0003] Through the search, in the prior art, the publication number is: CN202543306U, a target material fixing structure is disclosed, including: a target material shell, including a shell main body and at least one cover, the shell main body has a containing space, the cover is configured on one side of the containing space and constitutes an opening;A target material is arranged in the containing space of the shell main body of the target material shell;A target material fixing assembly is arranged in the containing space of the shell main body and fixes the target material;And an insulating part is arranged in the containing space of the shell main body, and the target material fixing assembly and the shell main body of the target material shell are insulated;Wherein, the edge of the cover of the target material shell constituting the opening is one of the following shapes: a chamfered shape (for example, an arc-shaped chamfered shape), a shape with multiple notches or a chamfered shape with multiple notches;

[0004] The above-mentioned patent exists when using not easy to dismount the material, dismounting is very inconvenient and leads to the reduction of coating machine working efficiency;Therefore we need to put forward a kind of target material fixing device and coating machine. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a kind of target material fixing device and coating machine, by starting servo motor driving screw rod rotation, screw rod is moved module in the inside of limit ring by thread and moves up and down, to drive fixed clamping block and rotating block relative fixed ring rotation, further by three groups of fixed clamping block, the target material in the inside of placing groove is clamped and fixed, to solve the problem raised in the above background technology.

[0006] In order to achieve the above object, the utility model provides the following technical scheme: a target material fixing device and a coating machine, including coating machine body, fixed disc, fixed ring, fixed clamping block, limit ring and drive assembly, the fixed disc is fixedly installed in the inside of coating machine body, the fixed ring is fixedly installed on the upper surface of fixed disc, the limit ring is fixedly installed in the inside of fixed ring, the fixed clamping block is provided with three groups, three groups the fixed clamping block rotation is arranged in the inside of fixed ring;

[0007] The inside of the coating machine body is provided with a drive assembly for driving the three fixed clamping blocks to rotate and clamping the target material on the upper surface of the fixed ring;

[0008] The drive assembly includes a servo motor, a lead screw and a moving module, the servo motor is bolted to the bottom end in the coating machine body, and the lead screw is keyed to the output end of the servo motor.

[0009] Preferably, the moving module includes a moving top disc, a connecting column, a moving bottom disc and a limiting structure, the connecting column is fixedly installed between the moving top disc and the moving bottom disc, the moving top disc, the connecting column and the moving bottom disc are all slidingly arranged in the inside of the limit ring, and the lead screw is threaded through the moving top disc, the connecting column and the moving bottom disc.

[0010] Preferably, the limiting structure includes an extension column and a clamping plate, the extension column is fixedly connected to the lower surface of the moving bottom disc, the clamping plate is provided with a plurality of groups, and the plurality of groups of clamping plates are fixedly installed on the outer arc surface of the extension column.

[0011] Preferably, the side of the three groups of fixed clamping blocks close to the moving top disc is fixedly connected with a rotating block, and the three groups of fixed clamping blocks are rotationally arranged in the inside of the fixed ring through the corresponding rotating blocks.

[0012] Preferably, the corresponding faces of the moving top disc and the moving bottom disc are fixedly installed with a limiting ring, and the side faces of the three groups of rotating blocks are provided with a limiting groove corresponding to the limiting ring.

[0013] Preferably, the inside of the fixed ring is provided with a rotating groove corresponding to the three groups of fixed clamping blocks and rotating blocks, and the corresponding faces of the three groups of fixed clamping blocks are fixedly provided with an anti-skid rubber sheet.

[0014] Preferably, the upper surface of the fixed ring is provided with a placing groove corresponding to the target material, and a plurality of groups of heat dissipation holes are provided in the inside of the fixed ring.

[0015] Preferably, the inside of the limit ring is provided with a moving groove corresponding to the moving bottom disc and the extension column, and the lead screw is rotationally threaded through the fixed disc, the fixed ring and the limit ring.

[0016] Preferably, the target material fixing device and the coating device are fixedly installed at the top end of the coating machine body, and the fixing disc is located below the coating device.

[0017] Preferably, the coating machine body is provided with a machine door on the side, and a display screen and an observation window are fixedly arranged on the side of the coating machine body.

[0018] Compared with the prior art, the coating machine body has the following beneficial effects:

[0019] The servo motor is started to drive the screw rod to rotate, the screw rod drives the moving module to move up and down inside the limiting ring through the thread, so as to drive the fixed clamping blocks and the rotating blocks to rotate inside the fixed ring, the anti-skid rubber sheets on the sides of the three fixed clamping blocks are close to the center point of the moving top disc, and then the target material inside the placing groove is clamped and fixed through the three fixed clamping blocks, and the target material inside the placing groove can be disassembled through forward and reverse rotation of the servo motor, so that the efficiency of target material coating is improved.

[0020] Other features and advantages of the present application will be described in the following description, and some of them will become apparent from the description, or will be understood from the practice of the application. The purpose and other advantages of the present application can be achieved and obtained through the structures indicated in the specification and the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is an overall structure schematic view of the coating machine body of the present application;

[0022] Figure 2 It is an internal structure schematic view of the coating machine body of the present application;

[0023] Figure 3 It is an internal structure explosion view of the coating machine body of the present application;

[0024] Figure 4 It is an explosion view of the moving module of the present application.

[0025] In the drawing, 1 is a coating machine body, 2 is a display screen, 3 is an observation window, 4 is a machine door, 5 is a coating device, 6 is a fixing disc, 7 is a servo motor, 8 is a fixed ring, 9 is a fixed clamping block, 10 is a placing groove, 11 is a rotating groove, 12 is a rotating block, 13 is a heat dissipation hole, 14 is a limiting ring, 15 is a moving groove, 16 is a moving top disc, 17 is a clamping groove, 18 is a screw rod, 19 is an anti-skid rubber sheet, 20 is a connecting column, 21 is a limiting ring, 22 is a clamping plate, 23 is a moving bottom disc, and 24 is a limiting groove. DETAILED DESCRIPTION

[0026] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of the present application.

[0027] Please refer to Figures 1 to 4 The present application provides a technical solution:

[0028] A target material fixing device and a coating machine, comprising a coating machine body 1, a fixing disc 6, a fixing ring 8, a fixing clamp block 9, a limiting ring 14 and a driving assembly, the fixing disc 6 is fixedly installed inside the coating machine body 1, the fixing ring 8 is fixedly installed on the upper surface of the fixing disc 6, the limiting ring 14 is fixedly installed inside the fixing ring 8, the fixing clamp block 9 is provided with three groups, the three groups of fixing clamp blocks 9 are rotationally arranged inside the fixing ring 8, the upper surface of the fixing ring 8 is provided with a placing groove 10 corresponding to the target material, and a plurality of groups of heat dissipation holes 13 are through-provided inside the fixing ring 8, the placing groove 10 is arranged to place the target material, and the plurality of groups of heat dissipation holes 13 are arranged to improve the heat dissipation effect of the target material.

[0029] In the present embodiment, as shown in Figure 3 The inside of the coating machine body 1 is provided with a driving assembly for driving the three groups of fixing clamp blocks 9 to rotate to clamp and fix the target material on the upper surface of the fixing ring 8; the driving assembly comprises a servo motor 7, a lead screw 18 and a moving module, the servo motor 7 is bolted to the bottom end inside the coating machine body 1, and the lead screw 18 is key-connected to the output end of the servo motor 7, the lead screw 18 is driven to rotate by starting the servo motor 7, the lead screw 18 drives the moving module to move up and down, thereby driving the three groups of fixing clamp blocks 9 to approach or move away from the target material inside the placing groove 10, and then the three groups of fixing clamp blocks 9 clamp or loosen the target material inside the placing groove 10.

[0030] Further preferably, as shown in Figure 3As shown, the moving module comprises a moving top disc 16, a connecting column 20, a moving bottom disc 23 and a limiting structure, the connecting column 20 is fixedly installed between the moving top disc 16 and the moving bottom disc 23, the moving top disc 16, the connecting column 20 and the moving bottom disc 23 are all slidingly arranged inside the limiting ring 14, and the lead screw 18 is screwed through the moving top disc 16, the connecting column 20 and the moving bottom disc 23, the limiting ring 14 is internally provided with a moving groove 15 corresponding to the moving bottom disc 23 and the extending column, the lead screw 18 is rotatably threaded through the fixed disc 6, the fixed ring 8 and the limiting ring 14, the lead screw 18 is rotated to drive the moving top disc 16, the connecting column 20 and the moving bottom disc 23 to move along the lead screw 18 through the thread, and the fixed disc 6, the fixed ring 8 and the limiting ring 14 will not be rotated when the lead screw 18 is rotated, and the moving top disc 16, the connecting column 20 and the moving bottom disc 23 will move up and down inside the moving groove 15 on the inside of the limiting ring 14, so that the moving top disc 16, the connecting column 20 and the moving bottom disc 23 are limited by the moving groove 15, and the moving bottom disc 23 is prevented from moving downward excessively.

[0031] Further, as shown in Figure 4 The three groups of fixed clamping blocks 9 are fixedly connected with rotating blocks 12 on the side close to the moving top disc 16, and the three groups of fixed clamping blocks 9 are rotatably arranged inside the fixed ring 8 through the corresponding rotating blocks 12, the corresponding faces of the moving top disc 16 and the moving bottom disc 23 are fixedly installed with limiting rings 21, and the side faces of the three groups of rotating blocks 12 are provided with limiting grooves 24 corresponding to the limiting rings 21; the fixed ring 8 is internally provided with rotating grooves 11 corresponding to the three groups of fixed clamping blocks 9 and the rotating blocks 12, and the corresponding faces of the three groups of fixed clamping blocks 9 are fixedly provided with anti-skid rubber sheets 19, the three groups of rotating blocks 12 are rotatably arranged inside the rotating grooves 11, and the other ends of the rotating blocks 12 are clamped and arranged on the outer arc surface of the connecting column 20 through the limiting rings 21, and the limiting rings 21 are clamped into the limiting grooves 24 of the three groups of rotating blocks 12, so that the fixed clamping blocks 9 are driven to rotate through the rotating blocks 12 when the moving top disc 16, the connecting column 20 and the moving bottom disc 23 move up and down.

[0032] Preferably, as shown in Figure 3 and Figure 4 The limiting structure comprises an extending column and a clamping plate 22, the extending column is fixedly connected to the lower surface of the moving bottom disc 23, and the clamping plate 22 is provided with a plurality of groups, the plurality of groups of clamping plates 22 are fixedly installed on the outer arc surface of the extending column, and the limiting ring 14 is internally provided with clamping grooves 17 corresponding to the plurality of groups of clamping plates 22, and the lead screw 18 is rotatably threaded through the extending column, so that the fixed clamping blocks 9 can clamp the target material, the plurality of groups of clamping plates 22 are clamped into the clamping grooves 17 and move up and down along the clamping grooves 17, so that the moving top disc 16, the connecting column 20 and the moving bottom disc 23 will not rotate when they move with the lead screw 18.

[0033] It is worth noting that, as shown in Figure 1 andFigure 2 As shown, the target fixing device and the coater 5 comprising any one of the embodiments are fixedly installed at the top end of the coating machine body 1, and the fixing disc 6 is located below the coater 5. The machine door 4 is rotatably arranged on the side of the coating machine body 1, and the display screen 2 and the observation window 3 are fixedly arranged on the side of the coating machine body 1. The target inside the placing groove 10 is coated by the coater 5, the machine door 4 is arranged to facilitate the staff to take and place the target, and the display screen 2 and the observation window 3 are arranged to facilitate the staff to control the equipment inside the coating machine body 1, and at the same time, it is ensured that the staff can observe the coating process inside the coating machine body 1.

[0034] Although the embodiments of the utility model have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the utility model, and the ordinary skilled in the art can change, modify, replace and transform the above-mentioned embodiments within the scope of the utility model.

Claims

1. A target fixture, characterized by: The invention comprises a coating machine body (1), a fixed disk (6), a fixed ring (8), a fixed clamping block (9), a limiting ring (14) and a driving assembly, wherein the fixed disk (6) is fixedly mounted inside the coating machine body (1), the fixed ring (8) is fixedly mounted on the upper surface of the fixed disk (6), the limiting ring (14) is fixedly mounted inside the fixed ring (8), and the fixed clamping blocks (9) are provided in three groups, and the three groups of fixed clamping blocks (9) are rotatably arranged inside the fixed ring (8); The coating machine body (1) is internally provided with a driving assembly for driving three groups of fixed clamping blocks (9) to rotate and clamp the target material on the upper surface of the fixed ring (8); The driving assembly comprises a servo motor (7), a screw rod (18) and a moving module. The servo motor (7) is bolted to the bottom end of the coating machine body (1), and the screw rod (18) is key-connected to the output end of the servo motor (7).

2. The target fixture of claim 1, wherein: The movable module comprises a movable top plate (16), a connecting column (20), a movable bottom plate (23) and a limiting structure, wherein the connecting column (20) is fixedly installed between the movable top plate (16) and the movable bottom plate (23), the movable top plate (16), the connecting column (20) and the movable bottom plate (23) are all slidably arranged inside the limiting ring (14), and the screw rod (18) is threadedly passed through the movable top plate (16), the connecting column (20) and the movable bottom plate (23).

3. The target fixture of claim 2, wherein: The limiting structure comprises an extension column and a clamping plate (22), wherein the extension column is fixedly connected to the lower surface of the mobile chassis (23), and the clamping plates (22) are provided in a plurality of groups, wherein the plurality of groups of the clamping plates (22) are fixedly mounted on the outer arc surface of the extension column, and the limiting ring (14) is provided with clamping grooves (17) corresponding to the plurality of groups of the clamping plates (22).

4. The target fixture of claim 3, wherein: The three groups of fixed clamping blocks (9) are all fixedly connected to a rotating block (12) on one side close to the movable top plate (16), and the three groups of fixed clamping blocks (9) are all rotatably arranged inside the fixed ring (8) through the corresponding rotating blocks (12).

5. The target fixture of claim 4, wherein: Limiting rings (21) are fixedly mounted on the corresponding surfaces of the movable top plate (16) and the movable bottom plate (23), and limiting grooves (24) corresponding to the limiting rings (21) are provided on the side surfaces of the three groups of rotating blocks (12).

6. The target fixture of claim 4, wherein: The fixing ring (8) is provided with a rotation groove (11) corresponding to the three groups of fixed clamping blocks (9) and the rotation block (12), and the corresponding surfaces of the three groups of fixed clamping blocks (9) are fixedly provided with an anti-slip rubber sheet (19).

7. The target fixture of claim 1, wherein: A placement groove (10) corresponding to the target material is provided on the upper surface of the fixing ring (8), and a plurality of groups of heat dissipation holes (13) are provided through the interior of the fixing ring (8).

8. The target fixture of claim 2, wherein: A moving groove (15) corresponding to the moving chassis (23) and the extension column is provided inside the limiting ring (14), and the screw rod (18) rotates through the fixed plate (6), the fixed ring (8) and the limiting ring (14).

9. A coating machine characterized by: It comprises the target material fixing device and the coating device (5) according to any one of claims 1 to 8, wherein the coating device (5) is fixedly installed at the top end of the coating machine body (1), and the fixing plate (6) is located below the coating device (5).

10. The coater of claim 9, wherein: The film coating machine body (1) side rotation is provided with machine door (4), and the film coating machine body (1) side is fixedly provided with display screen (2) and observation window (3).

Images