Ion source mounting structure

Abstract

The utility model relates to the technical field of ion source installation, in particular to an ion source installation structure which comprises a main body, an installation plate and a fixing shaft, the installation plate is arranged on the main body, a sleeve is arranged on the installation plate, one end of the fixing shaft penetrates through the installation plate to be connected with the sleeve in an inserted mode, a groove is formed in the fixing shaft, and the fixing shaft is arranged in the groove. Through the arrangement of the fixed shaft, the mounting plate, the balls, the baffle and other components, when the fixed shaft is mounted at a set designated position, when the main body is mounted, the fixed shaft penetrates through the mounting plate, the fixed shaft component is inserted into the sleeve, and after one end of the mounting plate is in contact with one end of the fixed shaft, the balls fall into the groove, so that the main body is mounted. And then the baffle component is driven to move, the baffle slides on the sleeve, the balls are limited, and the balls are prevented from moving again, so that the effect of conveniently fixing the main body is achieved, dismounting is conducted through reverse operation, and the purpose of improving the mounting and dismounting efficiency is achieved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of ion source installation, in particular to an ion source installation structure. BACKGROUND

[0002] The ion source is a device for ionizing neutral atoms or molecules and extracting ion beam current from the same, and is one of key components of various mass spectrometers, ion implanters, ion beam etching devices and the like. The ion source functions to convert sample molecules into ions, so that the ions can be accelerated and separated by using electric and magnetic fields, and thus the composition and structure of the sample can be analyzed according to the mass-to-charge ratio of the ions.

[0003] In the prior art, when the ion source is installed, a worker needs to use a screwdriver or wrench to pass a fixing bolt through an ion source body mounting hole and fix the fixing bolt at a mounting position, and at least two fixing bolts need to be cooperatively fixed, so that the whole installation process is relatively complicated. In order to solve the problem of complicated installation process and low installation efficiency in the prior art, the application is provided with a clamping structure, so that the worker does not need to use various tools for installation, and the purpose of convenient installation and improved work efficiency is achieved. CONTENT OF THE INVENTION

[0004] In order to simplify the installation steps and improve the installation efficiency, the application provides an ion source installation structure.

[0005] The ion source installation structure provided by the application adopts the following technical scheme: comprising a main body, a mounting plate and a fixing shaft, the mounting plate is arranged on the main body, a sleeve is arranged on the mounting plate, one end of the fixing shaft is inserted into the sleeve through the mounting plate, a groove is arranged on the fixing shaft, a guide hole is arranged on the sleeve, a ball is arranged in the guide hole, and a baffle is slidably arranged on the outer ring of the sleeve.

[0006] Optionally, a plurality of guide holes are arranged, the plurality of guide holes are uniformly distributed around the axis of the sleeve, and the ball is arranged in each guide hole.

[0007] Optionally, a fixed plate is fixedly arranged on the sleeve, a tension spring is arranged between the fixed plate and the baffle, one end of the tension spring is arranged on the fixed plate, and the other end of the tension spring is arranged on the baffle.

[0008] Optionally, the fixed plate is arranged in the shape of an "L"-shaped cylinder, the tension spring is arranged between the fixed plate and the sleeve, and the baffle and the fixed plate are slidably arranged.

[0009] Optionally, a limiting block is arranged on the fixed plate, a limiting groove is arranged on the baffle at a position corresponding to the limiting block, and the limiting block and the limiting groove are slidably arranged.

[0010] Optionally, a plurality of the limiting blocks and the limiting grooves are uniformly distributed around the axis of the baffle.

[0011] Optionally, one end of the fixed shaft close to the baffle is chamfered, and both ends of the groove are chamfered.

[0012] To sum up, the present application has the following beneficial technical effects:

[0013] 1. The utility model discloses a fixed shaft, mounting plate, ball, baffle and other components are set, the fixed shaft is installed in the designated position setting, when installing the main body, the fixed shaft is passed through the mounting plate, makes the fixed shaft component insert into the sleeve, when the one end of mounting plate and the one end of fixed shaft contact, the ball falls into the recess now, then drive baffle component moves, and the baffle slides on the sleeve and limits the ball, prevents the ball from moving again, thereby realizes the effect that the main body is conveniently fixed, and through reverse operation is disassembled, reaches the purpose that improves installation and disassembly efficiency.

[0014] 2. The utility model discloses a limiting block, limiting groove, tension spring, fixed plate and other components are set, in the working process, through the mutual cooperation between limiting block component and limiting groove component, the baffle component moves while the limiting block component slides in the limiting groove component, thereby the moving direction of baffle component is limited, prevents the baffle component from rotating, improves the stability in the working process, and through the mutual cooperation between tension spring component and fixed plate component, thereby the tension of baffle component is added, avoids the baffle component from sliding on the sleeve, thereby influences the limiting of ball, improves the stability of connection. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the whole structure schematic diagram in the embodiment of the application.

[0016] Figure 2 It is the partial sectional view in the embodiment of the application.

[0017] Figure 3 It is the embodiment of the application Figure 2 The enlarged schematic diagram of A in the middle;

[0018] Figure 4 It is the explosion diagram in the embodiment of the application.

[0019] Fig. 1, main body; 2, mounting plate; 3, fixed shaft; 4, recess; 5, sleeve; 6, guide hole; 7, ball; 8, fixed plate; 9, baffle; 10, tension spring; 11, limiting block; 12, limiting groove. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings Figures 1-4Further details of the present application are described below.

[0021] The embodiment of the present application discloses an ion source mounting structure. Figure 1 , Figure 2 , Figure 3 As shown in the drawings, the ion source mounting structure comprises a main body 1, a mounting plate 2 and a fixing shaft 3, the fixing shaft 3 is fixedly installed at a specified position on an equipment, the mounting plate 2 is arranged on the main body 1, a sleeve 5 is arranged on the mounting plate 2, one end of the fixing shaft 3 is inserted into the sleeve 5 through the mounting plate 2, a groove 4 is arranged on the fixing shaft 3, and the end of the fixing shaft 3 close to a baffle 9 is chamfered, so that the diameter of the end of the fixing shaft 3 is smaller than the diameter of the sleeve 5, the fixing shaft 3 is inserted into the sleeve 5, and the convenience during installation is improved.

[0022] As shown in the drawings, Figure 3 , Figure 4 both ends of the groove 4 are chamfered, a guide hole 6 is arranged on the sleeve 5, a ball 7 is arranged in the guide hole 6, a plurality of guide holes 6 are arranged, the ball 7 is arranged in each guide hole 6, the plurality of guide holes 6 are uniformly distributed around the axis of the sleeve 5, the sleeve 5 is connected with the fixing shaft 3, the stress points of the fixing shaft 3 are increased, the connection stability between the fixing shaft 3 and the sleeve 5 is improved, and the shaking phenomenon caused by uneven stress is prevented.

[0023] As shown in the drawings, Figure 4 a baffle 9 is slidably arranged on the outer ring of the sleeve 5, a fixing plate 8 is fixedly installed on the sleeve 5, a limiting block 11 is installed on the fixing plate 8, a limiting groove 12 is arranged on the baffle 9 at the corresponding position of the limiting block 11, the limiting block 11 and the limiting groove 12 are slidably arranged, the limiting block 11 slides in the limiting groove 12 while the baffle 9 slides on the sleeve 5, the moving direction of the baffle 9 is guided and limited, the baffle 9 is prevented from rotating, and the stability during the working process of the device is improved.

[0024] In the embodiment, a plurality of limiting blocks 11 and limiting grooves 12 are arranged, the contact area between the baffle 9 and the fixing plate 8 is increased, the plurality of limiting blocks 11 and limiting grooves 12 are uniformly distributed around the axis of the baffle 9, the stress between the baffle 9 and the fixing plate 8 is uniform, and the sliding stability between the baffle 9 and the fixing plate 8 is improved.

[0025] As shown in the drawings, Figure 2 , Figure 3 a tension spring 10 is arranged between the fixing plate 8 and the baffle 9, one end of the tension spring 10 is installed on the fixing plate 8, the other end of the tension spring 10 is installed on the baffle 9, the fixing plate 8 is arranged in the shape of a "L" shaped cylinder, the tension spring 10 is arranged between the fixing plate 8 and the sleeve 5, the fixing plate 8 protects the tension spring 10, the tension spring 10 is prevented from being affected by the outside world, and the baffle 9 and the fixing plate 8 are slidably arranged.

[0026] The implementation principle of the ion source mounting structure embodiment of the present application is as follows: when the main body 1 needs to be mounted, first, the position of the main body 1 is fixed by one hand, and the other hand drives the baffle 9 to move, the baffle 9 drives the tension spring 10 to stretch and store energy, and when the baffle 9 reaches the preset position, it stops, then one finger is pressed against the main body 1 to limit the position of the main body 1 and the baffle 9, then the hand that fixes the main body 1 is released, and the fixing shaft 3 is aligned with the sleeve 5, then the main body 1 is moved to the fixing shaft 3 on the equipment, so that the fixing shaft 3 passes through the mounting plate 2 and is inserted into the sleeve 5, when the mounting plate 2 reaches the preset position, the ball 7 falls into the groove 4, then the finger that limits the baffle 9 is released, at this time the tension spring 10 releases the force to drive the baffle 9 to reset, and the reset baffle 9 limits the position of the ball 7, so as to achieve the effect of conveniently fixing the main body 1, and the main body 1 is conveniently disassembled by reverse operation.

[0027] The above are preferred embodiments of the present application, and do not limit the protection scope of the present application, therefore: equivalent changes made according to the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. An ion source mounting structure comprising a main body (1), a mounting plate (2), a fixing shaft (3), characterized in that: The mounting plate (2) is arranged on the main body (1), a sleeve (5) is arranged on the mounting plate (2), one end of the fixing shaft (3) is inserted into the sleeve (5) through the mounting plate (2), a recess (4) is arranged on the fixing shaft (3), a guide hole (6) is arranged on the sleeve (5), a ball (7) is arranged in the guide hole (6), and a baffle (9) is slidingly arranged on the outer ring of the sleeve (5).

2. An ion source mounting structure according to claim 1, wherein: The guide hole (6) is provided with a plurality of guide holes (6) which are uniformly distributed around the axis of the sleeve (5), and the guide hole (6) is provided with the ball (7).

3. The ion source mounting structure of claim 1, wherein: The sleeve (5) is fixedly provided with a fixed plate (8), a tension spring (10) is arranged between the fixed plate (8) and the baffle (9), one end of the tension spring (10) is arranged on the fixed plate (8), and the other end of the tension spring (10) is arranged on the baffle (9).

4. An ion source mounting structure according to claim 3, wherein: The fixed plate (8) is arranged as an "L" shaped cylinder, the tension spring (10) is arranged between the fixed plate (8) and the sleeve (5), and the baffle (9) is slidingly arranged with the fixed plate (8).

5. The ion source mounting structure of claim 3, wherein: The fixed plate (8) is provided with a limiting block (11), the baffle (9) at the corresponding position of the limiting block (11) is provided with a limiting groove (12), and the limiting block (11) and the limiting groove (12) are slidingly arranged.

6. An ion source mounting structure according to claim 5, wherein: The limiting block (11) and the limiting groove (12) are provided with a plurality of limiting blocks (11) and limiting grooves (12) which are uniformly distributed around the axis of the baffle (9).

7. The ion source mounting structure of claim 1, wherein: The end of the fixing shaft (3) close to the baffle (9) is chamfered, and the two ends of the recess (4) are chamfered.

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