Vacuum chuck integrated water cooling device

Abstract

The utility model particularly relates to a vacuum suction cup integrated water cooling device which comprises a ceramic base, an annular vacuum suction cup and a circular vacuum suction cup, an annular suction cup groove, a circular suction cup groove and an annular partition wall are arranged at the upper end of the ceramic base, and a first air channel and a second air channel are arranged in the annular suction cup groove and the circular suction cup groove respectively. The ceramic base is provided with a cooling water flow channel and a plurality of through air holes, and the through air holes are communicated with the first air channel or the second air channel; the cooling water flow channel is located below the annular suction cup groove and the circular suction cup groove. The first air passage and the second air passage are respectively communicated with the plurality of through air holes to form an air circulation passage, so that a product is conveniently adsorbed and fixed; the ceramic base is internally provided with the cooling water flow channel, the cooling water flow channel is located below the annular vacuum suction cup and the circular vacuum suction cup, cooling water flows in the ceramic base, the vacuum suction cups can be cooled in the working process, the temperature is effectively controlled, and the service life of a product is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of sucking disc, concretely relates to a vacuum sucking disc integrated water cooling device. BACKGROUND

[0002] The vacuum adsorption technology used by the vacuum sucking disc is an advantageous technology that can replace the traditional mechanical clamping mode, and is widely used in the fields of semiconductors, panel displays and optics. However, the existing vacuum sucking disc often has a high temperature in the use process, which causes the vacuum sucking disc and the workpiece to be prone to deformation, affects the processing yield and the reliability of the product, and adversely affects the service life of the vacuum sucking disc. In order to achieve the purpose of cooling, the vacuum sucking disc in the prior art often has an additional cooling device outside the vacuum sucking disc, which often has problems such as complex structure, inconvenience to use, and uneven temperature distribution during product processing, and needs to be further improved. SUMMARY

[0003] In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the utility model is to provide a vacuum sucking disc integrated water cooling device, which is provided with an annular sucking disc groove and a circular sucking disc groove, and is provided with a first air duct and a second air duct in the annular sucking disc groove and the circular sucking disc groove, respectively. The first air duct and the second air duct are respectively communicated with a plurality of through air holes to form a gas flow channel, which is convenient for adsorbing and fixing the product. The lower part of the first air duct and the second air duct is provided with a cooling water flow channel. The cooling water flows in the ceramic base, which helps to realize the cooling of the vacuum sucking disc in the working process, effectively controls the temperature, and prolongs the service life of the product. The vacuum sucking disc integrated water cooling device forms a gas flow channel and a cooling water flow channel that are independent of each other in the ceramic base, has a compact structure, and is highly practical.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum sucking disc integrated water cooling device, which comprises a ceramic base, an annular vacuum sucking disc and a circular vacuum sucking disc. The upper end of the ceramic base is provided with an annular sucking disc groove, a circular sucking disc groove surrounding the outer periphery of the annular sucking disc groove, and an annular partition wall between the annular sucking disc groove and the circular sucking disc groove. The annular vacuum sucking disc is arranged in the annular sucking disc groove, and the circular vacuum sucking disc is arranged in the circular sucking disc groove. The annular sucking disc groove and the circular sucking disc groove are respectively provided with a first air duct and a second air duct.

[0005] The ceramic base is provided with a cooling water flow channel and a plurality of through air holes penetrating through the ceramic base from bottom to top. The through air holes are located below the first air duct or the second air duct and are communicated with the first air duct or the second air duct. The cooling water flow channel is located below the annular sucking disc groove and the circular sucking disc groove. The cooling water flow channel is provided with a water inlet and a water outlet.

[0006] Further, the annular suction cup groove is provided with a plurality of first protrusions arranged at intervals, a plurality of first air channel segments are formed between adjacent first protrusions and between the first protrusions and the inner wall of the annular suction cup groove, and the plurality of first air channel segments are interconnected to form a first air channel.

[0007] Further, the first protrusions are fan ring-shaped protrusions, a plurality of the first protrusions form a plurality of protrusion groups arranged radially from inside to outside of the ceramic base, each protrusion group includes a plurality of fan ring-shaped protrusions arranged in an annular array at intervals, and first air channel segments are formed between adjacent fan ring-shaped protrusions.

[0008] Further, the second protrusions include a plurality of middle protrusions and a plurality of outer peripheral protrusions surrounding the plurality of middle protrusions, the plurality of middle protrusions are arranged in an annular array at intervals, the plurality of outer peripheral protrusions are arranged in an annular array at intervals, the middle protrusions have a fan-shaped cross section, and the outer peripheral protrusions have a fan ring-shaped cross section.

[0009] Further, the cooling water flow channel includes a first cooling flow channel and a second cooling flow channel, the first cooling flow channel and the second cooling flow channel are symmetrically arranged in a lower portion of the ceramic base, and the first cooling flow channel and the second cooling flow channel are repeatedly bent in the ceramic base.

[0010] Further, the first cooling flow channel is provided with a first water inlet and a first water outlet, the first water inlet penetrates the ceramic base upward from the first cooling flow channel, and the first water outlet is formed in the peripheral side wall of the ceramic base; the second cooling flow channel is provided with a second water inlet and a second water outlet, the second water inlet penetrates the ceramic base upward from the second cooling flow channel, and the second water outlet is formed in the peripheral side wall of the ceramic base.

[0011] Further, the first water inlet is arranged in a middle portion of the first cooling flow channel, the number of the first water outlets is two, and the two first water outlets are arranged at a leading end and a trailing end of the first cooling flow channel, respectively; the second water inlet is arranged in a middle portion of the second cooling flow channel, the number of the second water outlets is two, and the two second water outlets are arranged at a leading end and a trailing end of the second cooling flow channel, respectively.

[0012] Further, the first cooling flow channel and the second cooling flow channel are arranged on the edge of the ceramic base, and the first cooling flow channel and the second cooling flow channel are provided with flow channel connecting holes extending downward, and the flow channel connecting holes are communicated with the first water outlet or the second water outlet.

[0013] Further, the edge of the ceramic base is provided with a plurality of positioning holes extending from top to bottom, and the outer circumferential sidewall of the ceramic base is provided with a plurality of mounting holes.

[0014] Further, the ceramic base is circular or polygonal in cross section.

[0015] The vacuum chuck integrated water cooling device has the following advantages: the vacuum chuck integrated water cooling device is provided with an annular chuck groove and a circular chuck groove, and a first air channel and a second air channel are arranged in the annular chuck groove and the circular chuck groove respectively, the first air channel and the second air channel are communicated with a plurality of through air holes respectively, a gas circulation channel is formed, and the product can be conveniently adsorbed and fixed; the ceramic base is provided with a cooling water flow channel, the cooling water flow channel is located below the annular vacuum chuck and the circular vacuum chuck, the cooling water flows in the ceramic base, the vacuum chuck and the workpiece can be cooled, the temperature can be effectively controlled, the vacuum chuck and the workpiece can be effectively prevented from deforming in the working process, the service life of the vacuum chuck is prolonged, and the finished product rate of processing is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a three-dimensional structure schematic view of the vacuum chuck integrated water cooling device.

[0017] Figure 2 is a three-dimensional structure schematic view of the ceramic base.

[0018] Figure 3 is a top view of the ceramic base.

[0019] Figure 4 is a sectional view of the ceramic base.

[0020] Figure 5 is a structure schematic view of the cooling water flow channel in the ceramic base.

[0021] Figure 6 is a partial structure sectional view of the cooling water flow channel in the ceramic base.

[0022] Figure 7 is a connection structure schematic view of the flow channel connecting hole and the first water outlet.

[0023] The figures are marked as follows: 1. Ceramic base; 11. Annular suction cup groove; 111. First protrusion; 12. Circular suction cup groove; 121. Middle protrusion, 122. Peripheral protrusion; 13. Through air hole; 14. First air duct; 15. Second air duct; 16. Annular partition wall; 17. Outer ring wall; 18. First cooling channel; 181. First water inlet; 182. First water outlet; 183. Channel connecting hole; 19. Second cooling channel; 191. Second water inlet; 192. Second water outlet; 20. Mounting hole; 21. Positioning hole; 2. Annular vacuum suction cup; 3. Circular vacuum suction cup. DETAILED DESCRIPTION

[0024] In order to facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and drawings. The contents mentioned in the embodiments are not intended to limit the present invention.

[0025] like Figures 1-7 As shown, a vacuum suction cup integrated water cooling device includes a ceramic base 1, an annular vacuum suction cup 2 and a circular vacuum suction cup 3. The upper end of the ceramic base 1 is provided with an annular suction cup groove 11, a circular suction cup groove 12 surrounding the outer periphery of the annular suction cup groove 11, and an annular partition wall 16 located between the annular suction cup groove 11 and the circular suction cup groove 12. The annular vacuum suction cup 2 is disposed in the annular suction cup groove 11, and the circular vacuum suction cup 3 is disposed in the circular suction cup groove 12. A first air channel 14 and a second air channel 15 are respectively provided in the annular suction cup groove 11 and the circular suction cup groove 12.

[0026] The ceramic base 1 is provided with a cooling water flow channel and a plurality of through-holes 13 that extend from bottom to top through the ceramic base 1. The through-holes 13 are located below the first air channel 14 or the second air channel 15 and are connected to the first air channel 14 or the second air channel 15. The cooling water flow channel is located below the annular suction cup groove 11 and the circular suction cup groove 12 and is provided with a water inlet and a water outlet. The through-holes 13 extend upward from the bottom of the ceramic base 1 to the bottom of the first air channel 14 or the second air channel 15, and extend from bottom to top through the area of ​​the ceramic base 1 not provided with the cooling water flow channel.

[0027] The vacuum chuck integrated water cooling device is characterized in that: the ceramic base 1 is internally provided with a cooling water flow channel; the cooling water flow channel is located below the annular vacuum chuck 2 and the circular vacuum chuck 3; cooling water flows in the ceramic base 1, and the vacuum chuck and the workpiece can be cooled, the temperature can be effectively controlled, the vacuum chuck and the workpiece can be effectively prevented from deforming in the working process, the service life of the vacuum chuck is prolonged, and the finished product rate of processing is improved.

[0028] Further, the annular chuck groove 11 is provided with a plurality of first protruding parts 111 which are arranged at intervals, a plurality of first air channel sections which are in communication with each other are formed between adjacent first protruding parts 111 and between the first protruding parts 111 and the inner wall of the annular chuck groove 11; the circular chuck groove 12 is provided with a plurality of second protruding parts which are arranged at intervals, a plurality of second air channel sections which are in communication with each other are formed between adjacent second protruding parts and between the second protruding parts and the inner wall of the circular chuck groove 12.

[0029] In the embodiment, a plurality of first air channel sections are in communication with each other to form the first air channel 14, a plurality of second air channel sections are in communication with each other to form the second air channel 15, the annular vacuum chuck 2 and the circular vacuum chuck 3 are respectively shielded above the first air channel 14 and the second air channel 15 and are respectively in abutment with the first protruding parts 111 and the second protruding parts, which helps to improve the airtightness of the first air channel 14 and the second air channel 15 and improve the use performance of the vacuum chuck and the product processing yield.

[0030] Further, the first protruding parts 111 are all fan ring-shaped protrusions, a plurality of the first protruding parts 111 are divided into a plurality of protrusion groups which are arranged in the radial direction of the ceramic base 1 from inside to outside in sequence, each protrusion group includes a plurality of fan ring-shaped protrusions which are arranged in an annular array at intervals, and a first air channel section is formed between adjacent fan ring-shaped protrusions.

[0031] Further, the second protruding part comprises a plurality of middle protruding parts 121 and a plurality of outer peripheral protruding parts 122 surrounding the plurality of middle protruding parts 121, the plurality of middle protruding parts 121 are arranged in an annular array, the plurality of outer peripheral protruding parts 122 are arranged in an annular array, the middle protruding part 121 has a fan-shaped cross section, and the outer peripheral protruding part 122 has a fan ring-shaped cross section. The second air passage 15 is symmetrically arranged in the circular chuck groove 12 about the center line of the circular chuck groove 12, facilitating processing and use.

[0032] Further, the cooling water flow channel comprises a first cooling flow channel 18 and a second cooling flow channel 19, the first cooling flow channel 18 and the second cooling flow channel 19 are symmetrically arranged in the lower part of the ceramic base 1, and the first cooling flow channel 18 and the second cooling flow channel 19 are repeatedly bent in the ceramic base 1. In this embodiment, the first cooling flow channel 18 and the second cooling flow channel 19 form two independent and symmetrically arranged cooling flow channels, which are helpful to uniformly cool the vacuum chuck as a whole, make the temperature distribution in the vacuum chuck more balanced, and improve the product processing yield.

[0033] Further, the first cooling flow channel 18 is provided with a first water inlet 181 and a first water outlet 182, the first water inlet 181 is upwardly penetrated through the ceramic base 1 by the first cooling flow channel 18, and the first water outlet 182 is arranged on the outer peripheral side wall of the ceramic base 1; the second cooling flow channel 19 is provided with a second water inlet 191 and a second water outlet 192, the second water inlet 191 is upwardly penetrated through the ceramic base 1 by the second cooling flow channel 19, and the second water outlet 192 is arranged on the outer peripheral side wall of the ceramic base 1.

[0034] Further, the first water inlet 181 is arranged in the middle of the first cooling flow channel 18, the number of the first water outlet 182 is two, and the two first water outlets 182 are arranged at the head end and the tail end of the first cooling flow channel 18 respectively; the second water inlet 191 is arranged in the middle of the second cooling flow channel 19, the number of the second water outlet 192 is two, and the two second water outlets 192 are arranged at the head end and the tail end of the second cooling flow channel 19 respectively.

[0035] The vacuum chuck of the embodiment forms two cooling flow channels inside the ceramic base 1, the two flow channels are symmetrical relative to the center line of the ceramic base 1, each cooling flow channel is communicated with the water inlet and the two water outlets, so that the flow rate of each cooling flow channel in the ceramic base is uniform, the overall uniform cooling during the working process of the product is realized, which helps to realize the internal flow and temperature balance of the product. The vacuum chuck integrated with the water cooling device can effectively prevent deformation of the vacuum chuck during the working process by adopting the cooling flow channel, prolong the service life of the working contact part of the vacuum chuck, improve the processing yield of the finished product, and can process products at a specific temperature. The vacuum chuck integrated with the water cooling device has simple structure, less processing steps and strong practicability.

[0036] Further, the first end and the second end of the first cooling flow channel 18 and the first end and the second end of the second cooling flow channel 19 are arranged at the edge of the ceramic base 1, and the first end and the second end of the first cooling flow channel 18 and the first end and the second end of the second cooling flow channel 19 are provided with flow channel connecting holes 183 extending downward, and the lower ends of the flow channel connecting holes 183 are communicated with the corresponding first water outlet 182 or second water outlet 192. The first cooling flow channel 18 can be tortuously extended from one region of the outer peripheral side wall of the ceramic base 1 to another region of the outer peripheral side wall of the ceramic base 1; the second cooling flow channel 18 can also be tortuously extended from one region of the outer peripheral side wall of the ceramic base 1 to another region of the outer peripheral side wall of the ceramic base 1. In the embodiment, the tortuously extended paths of the first cooling flow channel 18 and the first cooling flow channel 19 are both semicircular or substantially semicircular.

[0037] Further, the edge of the ceramic base 1 is provided with a plurality of positioning holes 21 extending from top to bottom, and the outer peripheral side wall of the ceramic base 1 is provided with a plurality of mounting holes 20. Due to the arrangement of the positioning holes 21 and the mounting holes 20, the vacuum chuck integrated with the water cooling device can be accurately positioned and connected with external equipment or workpieces.

[0038] Further, the cross section of the ceramic base 1 is circular or polygonal, such as square, regular hexagon, etc. Preferably, the cross section of the ceramic base 1 is circular, which is convenient for processing and use.

[0039] The above embodiment is a preferred implementation scheme of the present application, in addition to this, the present application can also be realized in other ways, without departing from the concept of the present application, any obvious replacement within the protection scope of the present application.

Claims

1. A vacuum chuck integrated water cooling device, characterized by: The ceramic base is provided with an annular chuck groove, a circular chuck groove surrounding the outer periphery of the annular chuck groove, and an annular partition wall between the annular chuck groove and the circular chuck groove; the annular chuck groove and the circular chuck groove are respectively provided with a first air channel and a second air channel; the annular vacuum chuck is arranged in the annular chuck groove and above the first air channel, and the circular vacuum chuck is arranged in the circular chuck groove and above the second air channel; The ceramic base is provided with a cooling water flow channel and a plurality of through air holes penetrating the ceramic base from bottom to top, the through air holes are below the first air channel or the second air channel and communicate with the first air channel or the second air channel; the cooling water flow channel is below the annular chuck groove and the circular chuck groove, and is provided with a water inlet and a water outlet.

2. The vacuum chuck integrated water cooling device according to claim 1, characterized in that: The annular chuck groove is provided with a plurality of first protrusions arranged at intervals, and a plurality of first air channel sections are formed between adjacent first protrusions and between the first protrusions and the inner wall of the annular chuck groove; the circular chuck groove is provided with a plurality of second protrusions arranged at intervals, and a plurality of second air channel sections are formed between adjacent second protrusions and between the second protrusions and the inner wall of the circular chuck groove.

3. The vacuum chuck integrated water cooling device according to claim 2, characterized in that: The first protrusions are fan ring-shaped protrusions, and a plurality of the first protrusions are a plurality of protrusion groups arranged radially from inside to outside of the ceramic base, each protrusion group includes a plurality of fan ring-shaped protrusions arranged in an annular array at intervals, and a first air channel section is formed between adjacent fan ring-shaped protrusions.

4. The vacuum chuck integrated water cooling device according to claim 2, wherein: The second protrusions include a plurality of middle protrusions and a plurality of outer peripheral protrusions surrounding the plurality of middle protrusions, the plurality of middle protrusions are arranged in an annular array at intervals, the plurality of outer peripheral protrusions are arranged in an annular array at intervals, the cross section of the middle protrusion is fan-shaped, and the cross section of the outer peripheral protrusion is fan ring-shaped.

5. The vacuum chuck integrated water cooling device according to claim 1, wherein: The cooling water flow channel includes a first cooling flow channel and a second cooling flow channel, the first cooling flow channel and the second cooling flow channel are symmetrically arranged in the lower part of the ceramic base; the first cooling flow channel and the second cooling flow channel are repeatedly bent in the ceramic base.

6. The vacuum chuck integrated water cooling device according to claim 5, characterized in that: The first cooling flow channel is provided with a first water inlet and a first water outlet, the first water inlet penetrates the ceramic base upward from the first cooling flow channel, and the first water outlet is formed on the outer peripheral side wall of the ceramic base; the second cooling flow channel is provided with a second water inlet and a second water outlet, the second water inlet penetrates the ceramic base upward from the second cooling flow channel, and the second water outlet is formed on the outer peripheral side wall of the ceramic base.

7. The vacuum chuck integrated water cooling device according to claim 6, characterized in that: The first water inlet is arranged in the middle of the first cooling flow channel, the number of the first water outlets is two, and the two first water outlets are arranged at the beginning and the end of the first cooling flow channel respectively; the second water inlet is arranged in the middle of the second cooling flow channel, the number of the second water outlets is two, and the two second water outlets are arranged at the beginning and the end of the second cooling flow channel respectively.

8. The vacuum chuck integrated water cooling device according to claim 7, characterized in that: The first cooling flow channel and the second cooling flow channel are arranged on the edge of the ceramic base, and the first cooling flow channel and the second cooling flow channel are provided with flow channel connecting holes extending downward, and the lower ends of the flow channel connecting holes are communicated with the corresponding first water outlet or second water outlet.

9. The vacuum chuck integrated water cooling device according to claim 1, wherein: The edge of the ceramic base is provided with a plurality of positioning holes extending from top to bottom, and the outer circumferential sidewall of the ceramic base is provided with a plurality of mounting holes.

10. The vacuum chuck integrated water cooling device according to claim 1, wherein: The cross section of the ceramic base is circular or polygonal.

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