AFM probe repairing and fixing device
By designing a probe fixing device for AFM probes, the problems of convenience and stability in repairing AFM probes within FIB equipment were solved, achieving stable fixing and efficient repair of probe groups.
Patent Information
- Application Number
- CN202422878144.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-23
- Publication Date
- 2025-10-21
- Estimated Expiration
- 2034-11-23
AI Technical Summary
How to place AFM probes within FIB devices for repair at the nanoscale without damaging them, thereby improving the convenience and stability of tip repair.
A probe fixing device for AFM probes was designed, including components such as a base, stepped groove, soft pad, fixing cover plate and limiting rod. These components fix the AFM probe assembly on the base, preventing position movement during the repair process and improving stability and convenience.
This achieves stable fixation of the AFM probe within the FIB device, improving the convenience and efficiency of tip repair and preventing probe assembly displacement and damage during the repair process.
Smart Images
Figure CN223461599U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of fixing devices, in particular to a fixing device for repairing an AFM probe. BACKGROUND
[0002] With the advanced process of IC entering the nanometer scale, the transistor density per unit area is also increased, and how to accurately locate the failure point under the nanometer scale becomes a very challenging topic. Among them, the nanometer probe based on the atomic force microscope (AFM) with high spatial resolution is an indispensable measurement tool.
[0003] The current AFM probe group includes a needle tip, a cantilever, and a power supply and signal connector. The needle tip is mainly used for actual testing and contacts the sample. The cantilever mainly supports the needle tip and has elasticity, and will have high-frequency vibration when used in the Taping Mode of the AFM. There are some sensors and signal lines on both sides of the cantilever, which are not completely flat. The power supply and signal connector are connected to the power supply and are equipped with signal communication devices. In actual electrical testing, one to several needles may be used at a time according to actual needs.
[0004] The needle tip of a normal probe is approximately triangular. The needle tip of a used probe may be blunt or deformed. Once the needle tip is blunt or deformed, the entire probe cannot be used again. Therefore, a focused ion beam microscope (FIB) is often used as a very precise nanometer structure processing tool to repair the nanometer probe in actual use.
[0005] However, since the size of the needle tip of the nanometer probe is small, it will be damaged by slight touching. Therefore, how to place the nanometer probe in the FIB device for repair without damaging the nanometer probe is a very important topic. CONTENT OF THE INVENTION
[0006] In order to improve the convenience of repairing the needle tip, the present application provides a fixing device for repairing an AFM probe.
[0007] The fixing device for repairing an AFM probe provided by the present application adopts the following technical scheme:
[0008] The fixing device for repairing an AFM probe comprises a base for fixing an AFM probe group, a stepped groove is formed on one side of the top surface of the base, the AFM probe group comprises a needle tip, a cantilever, and an electrical connector, the cantilever is fixedly connected to one side of the electrical connector, the needle tip is fixedly connected to the detection surface of the cantilever, a first soft pad is arranged on the top surface of the base, the cantilever is arranged on the top surface of the first soft pad, the electrical connector is inserted into the stepped groove, and the base is provided with a fixed cover plate for pressing the AFM probe group.
[0009] By adopting the technical scheme, when the AFM probe group is sent to the FIB device for repair, the AFM probe group needs to be fixed by using the fixing device first, for this, the AFM probe group is placed on the top surface of the first soft pad, and at the same time, the electrical connector is inserted into the stepped groove, and at this time, the needle tip faces upward, then the fixing cover plate is pressed on the top surface of the cantilever, at this time, the AFM probe group is fixed on the base, avoiding the movement of the AFM probe group during repair, and further facilitating the convenience of needle tip repair.
[0010] Optionally, the fixing cover plate comprises a cover pressing part, and two flexible side parts are arranged on the two sides of the cover pressing part respectively, and the two flexible side parts are located on the two sides of the base respectively.
[0011] By adopting the technical scheme, the flexible side part is flexible and can be bent, and when the cover pressing part is pressed on the cantilever, the two flexible side parts are bent inward, so that the flexible side part abuts against the two sides of the base, at this time, the AFM probe group is fixed on the base, and further the stability of the AFM probe group is improved.
[0012] Optionally, the inner side of the flexible side part is provided with a contact point.
[0013] By adopting the technical scheme, the surface charge accumulated in the processing process is guided to the base ground through the contact point, which is beneficial.
[0014] Optionally, the bottom surface of the cover pressing part is provided with a second soft pad.
[0015] By adopting the technical scheme, under the action of the second soft pad, it is beneficial to avoid damage to the cantilever when the cover pressing part is pressed.
[0016] Optionally, the top surface of the cover pressing part is slidably provided with a limiting group, the limiting group comprises two sliding blocks, the two sliding blocks are slidably arranged on the cover pressing part, the top surface of the sliding block is provided with a limiting rod, the two limiting rods form a limiting space of the AFM probe group, the bottom end of the limiting rod extends below the cover pressing part, the top surface of the base and the first soft pad is provided with a plurality of insertion grooves, the limiting rod is inserted into the insertion groove, and the sliding block is provided with a lifting assembly for driving the limiting rod to lift.
[0017] By adopting the technical scheme, the cantilever is limited in the limiting space by the two limiting rods, which is beneficial to further improve the stability of the AFM probe group fixed on the base.
[0018] Optionally, the lifting assembly comprises a stand arranged on the top surface of the sliding block, and the limiting rod is arranged in the stand, a spring is sleeved on the side wall of the limiting rod, one end of the spring is fixedly connected with the side wall of the limiting rod, and the other end of the spring is fixedly connected with the inner top wall of the stand.
[0019] By adopting the above technical scheme, when the limiting rod is driven to rise, the limiting rod compresses the spring, at this time, the limiting rod is driven to slide through the sliding block, so that the limiting space is adapted to the width of the cantilever, then the limiting rod is loosened, at this time, the spring releases the elastic force and drives the limiting rod to move downward and be inserted into the slot, thereby the stability of the AFM probe group being limited in the limiting space is improved.
[0020] Optionally, the sliding block is provided with a guide block on each side, and the top surface of the cover pressing part is provided with a sliding hole penetrating through, and the sliding block is arranged in the sliding hole through the guide blocks on the two sides.
[0021] By adopting the above technical scheme, under the action of the guide blocks, the stability of the sliding block sliding along the width direction of the cover pressing part is improved.
[0022] Optionally, the AFM probe group is provided with at least two groups.
[0023] By adopting the above technical scheme, the at least two groups of AFM probe groups are fixed on the base, and the efficiency of the needle tip repair is improved.
[0024] In summary, the present application has the following beneficial technical effects:
[0025] When the AFM probe group is sent into the FIB device for repair, the AFM probe group needs to be fixed by using the fixing device first, for this, the AFM probe group is placed on the top surface of the first soft pad, and at the same time, the electrical connector is inserted into the stepped slot, and at this time, the needle tip faces upward, then the fixing cover plate is pressed on the top surface of the cantilever, at this time, the AFM probe group is fixed on the base, the position of the AFM probe group is prevented from moving during the repair process, and the convenience of the needle tip repair is improved. BRIEF DESCRIPTION OF DRAWINGS
[0026] Figure 1 is a structural schematic view of the AFM probe group of the present application;
[0027] Figure 2 is a front view of the needle repair fixing device of the AFM probe of the present application;
[0028] Figure 3 is a side view of the needle repair fixing device of the AFM probe of the present application;
[0029] Figure 4 is Figure 3Enlarged view of part A.
[0030] Explanation of reference numerals: 1, base; 2, needle tip; 3, cantilever; 4, electrical connector; 5, stepped slot; 6, first soft pad; 7, fixed cover plate; 8, cover pressing portion; 9, flexible side portion; 10, contact point; 11, second soft pad; 12, sliding block; 13, limiting rod; 14, insertion slot; 15, stand; 16, spring; 17, guide block; 18, sliding hole; 19, AFM probe set. DETAILED DESCRIPTION
[0031] The following description will be made in conjunction with the accompanying drawings. Figures 1-4 The present application is further described in detail.
[0032] Reference will be made to Figure 1 and Figure 2 A needle fixing device for an AFM probe includes a base 1. The base 1 is used to fix an AFM probe set 19. An important application of AFM probe technology is scanning capacitance microscopy, which can observe two-dimensional doping images and distinguish N-type and P-type regions to effectively analyze faults caused by abnormal distribution of doping. The AFM probe set 19 includes a needle tip 2, a cantilever 3, and an electrical connector 4. The electrical connector 4 is fixed to one end of the cantilever 3. One side of the cantilever 3 is a detection surface. The needle tip 2 is fixed to the detection surface of the cantilever 3. The electrical connector 4, the cantilever 3, and the needle tip 2 are electrically connected. A stepped slot 5 is formed on one side of the top surface of the base 1. The electrical connector 4 is inserted into the stepped slot 5. The base 1 is fixedly connected with a first soft pad 6. The cantilever 3 abuts against the top surface of the first soft pad 6. The base 1 is also provided with a fixed cover plate 7. The fixed cover plate 7 is used to fix and press the AFM probe set 19 on the base 1.
[0033] When the AFM probe set 19 is sent to a FIB device for repair of the needle tip 2, the AFM probe set 19 needs to be fixed by using the fixing device. Therefore, the AFM probe set 19 is first placed on the top surface of the first soft pad 6. In this process, the electrical connector 4 is inserted into the stepped slot 5, and the needle tip 2 faces outward. Then, the fixed cover plate 7 is pressed on the base 1. At this time, the fixed cover plate 7 uses its own gravity to press the cantilever 3 on the top surface of the first soft pad 6, thereby completing the fixation of the AFM probe set 19.
[0034] Reference will be made to Figure 2 and Figure 3 To improve the stability of the fixed cover plate 7, the fixed cover plate 7 includes a cover pressing portion 8. Flexible side portions 9 are fixedly connected to both sides of the cover pressing portion 8. The flexible side portions 9 are flexible and can be bent.
[0035] When the cover pressing portion 8 presses the cantilever 3, the flexible side portions 9 on both sides of the cover pressing portion 8 are bent inward. At this time, the flexible side portions 9 abut against the side wall of the base 1, and the fixed cover plate 7 is fixedly pressed on the base 1.
[0036] Referring to Figure 3 The inner side of the pressing part 8 is fixedly connected with a contact 10, which is used to contact with the side wall of the base 1, so as to guide the surface charge accumulated by the AFM probe group 19 to the ground of the base 1 during the repair of the needle tip 2.
[0037] Referring to Figure 3 The bottom surface of the pressing part 8 is also fixedly connected with a second soft pad 11, which is used to protect the cantilever 3 from being damaged by the pressing of the fixed cover plate 7.
[0038] Referring to Figure 3 and Figure 4 In order to further fix the AFM probe group 19 on the base 1, the top surface of the pressing part 8 is slidably installed with a limiting group, and the limiting group is provided with two groups, each of which includes two sliding blocks 12. The two sliding blocks 12 are respectively slidably installed on the pressing part 8, and the top surfaces of the two sliding blocks 12 are respectively liftably installed with limiting rods 13, the bottom ends of which extend below the pressing part 8, and the two limiting rods 13 form a limiting space for the cantilever 3. The top surface of the base 1 is provided with a plurality of insertion grooves 14, which are linearly arranged along the width direction of the base 1.
[0039] In addition, in order to improve the stability of the lifting of the limiting rod 13, the sliding block 12 is installed with a lifting assembly, which includes a stand 15 fixedly connected to the top surface of the sliding block 12. The limiting rod 13 is liftably installed in the stand 15, and the top end of the limiting rod 13 extends above the stand 15. The side wall of the limiting rod 13 is sleeved with a spring 16, one end of which is fixedly connected with the inner top wall of the stand 15, and the other end of which is fixedly connected with the side wall of the limiting rod 13.
[0040] When the limiting rod 13 is pulled upward, the limiting rod 13 compresses the spring 16, and the limiting rod 13 is separated from the insertion groove 14. At this time, the size of the limiting space is adjusted according to the width of the cantilever 3, so that the cantilever 3 is placed in the limiting space. Then, the limiting rod 13 is released, the spring 16 releases the elastic force, and drives the limiting rod 13 to move downward, at this time the limiting rod 13 is inserted into the insertion groove 14.
[0041] Referring to Figure 3 and Figure 4 In order to improve the stability of the sliding of the sliding block 12 on the pressing part 8, the two sides of the sliding block 12 are respectively fixedly connected with guide blocks 17. The top surface of the pressing part 8 is provided with a sliding hole 18, which is provided along the width direction of the pressing part 8, and the sliding block 12 slides in the sliding hole 18 through the guide blocks 17 on both sides.
[0042] The guide blocks 17 are used for guiding the sliding of the sliding block 12, which is conducive to improving the convenience of adjusting the size of the limiting space.
[0043] It is worth mentioning that, see Figure 3 Figure 3 The number of AFM probe groups 19 is provided with at least two groups. In this embodiment, the number of AFM probe groups 19 is provided with two groups, and the two groups of AFM probe groups 19 are arranged along the width direction of the base 1.
[0044] By repairing the tips 2 of the two groups of AFM probe groups 19 at the same time, the repair efficiency can be improved.
[0045] The working principle of the needle fixing device of the AFM probe:
[0046] When the AFM probe group 19 is sent into the FIB device for repairing the tip 2, the fixing device needs to be used to fix the AFM probe group 19. Therefore, the AFM probe group 19 is first placed on the top surface of the first soft pad 6. In this process, the electrical connector 4 is inserted into the stepped groove 5, and the tip 2 is directed.
[0047] Then the fixing cover plate 7 is pre-pressed on the base 1, and then the limiting rod 13 is pulled up. After the limiting rod 13 is separated from the insertion slot 14, the limiting rod 13 is moved to make the limiting space adapt to the cantilever 3. Then the limiting rod 13 is loosened, and under the action of the spring 16, the limiting rod 13 is inserted into the insertion slot 14, and the cantilever 3 is limited in the limiting space. Finally, the two sides of the flexible side 9 are tightened inward. At this time, the fixing cover plate 7 fixes the AFM probe group 19 on the base 1, and the fixing of the AFM probe group 19 is completed.
[0048] As described above, the AFM probe group 19 is fixed on the base 1 by the fixing cover plate, which is conducive to improving the convenience of repairing the tip 2.
[0049] The above are the preferred embodiments of the present application, which do not limit the protection scope of the present application. Therefore, any equivalent changes made on the basis of the structure, shape and principle of the present application should be covered within the protection scope of the present application.
Claims
1. A tip-repairing fixture for an AFM probe, comprising a base (1) for fixing a set (19) of AFM probes, characterized in that: The top surface of the base (1) is provided with a stepped groove (5), the AFM probe group (19) comprises a needle tip (2), a cantilever (3) and an electrical connector (4), the cantilever (3) is fixedly connected to one side of the electrical connector (4), the needle tip (2) is fixedly connected to the detection surface of the cantilever (3), the top surface of the base (1) is provided with a first soft pad (6), the cantilever (3) is arranged on the top surface of the first soft pad (6), the electrical connector (4) is inserted into the stepped groove (5), and the base (1) is provided with a fixed cover plate (7) for pressing the AFM probe group (19).
2. The device according to claim 1, wherein: The fixed cover plate (7) comprises a cover pressing part (8), both sides of the cover pressing part (8) are respectively provided with a flexible side part (9), and the two flexible side parts (9) are respectively located on both sides of the base (1).
3. The device of claim 2, wherein: The inner side of the flexible side part (9) is provided with a contact point (10).
4. The device of claim 2, wherein: The bottom surface of the cover pressing part (8) is provided with a second soft pad (11).
5. The device of claim 2, wherein: The top surface of the cover pressing part (8) is slidably provided with a limiting group, the limiting group comprises two sliding blocks (12), the two sliding blocks (12) are respectively slidably arranged on the cover pressing part (8), the top surface of the sliding block (12) is provided with a limiting rod (13), two limiting rods (13) form a limiting space of the AFM probe group (19), the bottom end of the limiting rod (13) extends below the cover pressing part (8), the top surface of the base (1) and the first soft pad (6) is collectively provided with a plurality of insertion grooves (14), the limiting rod (13) is inserted into the insertion groove (14), and the sliding block (12) is provided with a lifting assembly for driving the limiting rod (13) to lift.
6. The device of claim 5, wherein: The lifting assembly comprises a stand (15), the stand (15) is arranged on the top surface of the sliding block (12), the limiting rod (13) is arranged in the stand (15), the side wall of the limiting rod (13) is sleeved with a spring (16), one end of the spring (16) is fixedly connected with the side wall of the limiting rod (13), and the other end of the spring (16) is fixedly connected with the inner top wall of the stand (15).
7. The device of claim 5, wherein: Both sides of the sliding block (12) are respectively provided with a guide block (17), the top surface of the cover pressing part (8) is provided with a sliding hole (18), and the sliding block (12) is slidably arranged in the sliding hole (18) through the guide blocks (17) on both sides.
8. The device of claim 1, wherein: The AFM probe group (19) is provided with at least two groups.