Electrode block assembly and graphite boat discharge electrode

Abstract

The utility model provides an electrode block assembly and a graphite boat discharge electrode. The electrode block assembly comprises an electrode connecting piece and an electrode block, an electrode block base and a supporting rod hoop are respectively arranged on the electrode connecting piece; a clamping groove is formed in the electrode block base, and the electrode block is detachably connected to the clamping groove; the top surface of the electrode block is rectangular; and the support rod hoop is used for fixing the electrode block assembly to a preset position, so that the top surface of the electrode block is in contact with the graphite boat for discharging. A blocky electrode block base is changed into the electrode block base with the clamping groove, traditional plug-in type contact discharge of an electrode block and the electrode block base is changed into electrode block embedded type locking discharge, the contact mode of the electrode block and the electrode block base is changed, the shape of the top face of the electrode block is optimized, the contact area of the electrode block and a graphite boat can be increased, and therefore the electrode block can be conveniently and rapidly discharged. The contact effect of the electrode block and the graphite boat is improved, uneven coating caused by poor contact of the electrode block is reduced, and meanwhile the service life of the electrode block can be prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of plasma, in particular to an electrode block assembly and a graphite boat discharge electrode. BACKGROUND

[0002] PECVD (Plasma Enhanced Chemical Vaper Deposition) is a plasma enhanced chemical vapor deposition technology. In this technology, a glow discharge is generated on the cathode of a process chamber (i.e. a sample placing tray) by using a low-temperature plasma at a low pressure. The sample is heated to a predetermined temperature by the glow discharge (or another heating body), and then a proper amount of process gas is introduced. These gases undergo a series of chemical reactions and plasma reactions, and finally form a solid thin film on the surface of the sample. Radio Frequency Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) is a kind of plasma enhanced chemical vapor deposition technology, and its characteristic is that the plasma is generated by ionization of gas under the action of a radio frequency alternating electric field at a high vacuum degree. According to the different coupling forms of the radio frequency electric field, it can be divided into radio frequency inductive coupling and radio frequency capacitive coupling. The principle is that under the action of a high-frequency or direct-current electric field, the source gas is ionized to form a plasma. The substrate is immersed in the plasma or placed below the plasma. The reaction particles adsorbed on the surface of the substrate are bombarded by high-energy electrons, and the chemical reaction generates a solid film. Graphite boat discharge electrodes are usually used in the process of plasma chemical vapor deposition, including radio frequency plasma chemical vapor deposition.

[0003] Currently, there are two connection modes for the connection of the electrode base and the electrode block of the graphite boat discharge electrode. In one connection mode, the electrode block has a hole, the electrode base has a pin, and the pin is inserted into the hole to contact the discharge. The disadvantage of this scheme is that the electrode block hole and the electrode base pin often fail to make good contact, causing high-frequency sparking when the discharge glow is on. The electrode base pin also often breaks when the electrode block is replaced, resulting in a long maintenance time and affecting production. In the second connection mode, there is no electrode block. In the no-electrode-block discharge mode, the electrode block and the base are integrated. The disadvantage of this scheme is that when the electrode is replaced, the furnace tube needs to be lowered to room temperature, and the electrode base support rod needs to be removed. Frequent temperature changes increase the probability of furnace tube damage and increase production costs.

[0004] It should be noted that the above content is not necessarily prior art, and is not used to limit the patent protection scope of the present application. SUMMARY

[0005] In view of the deficiencies of the prior art, the purpose of the present application is to provide an electrode block assembly and a graphite boat discharge electrode. The block-shaped electrode block base is changed to an electrode block base with a clamping groove, the traditional electrode block and electrode block base plug-in contact discharge is changed to electrode block embedded locking discharge, the contact mode of the electrode block and the electrode block base is changed, and the shape of the top surface of the electrode block is optimized. Through the rectangular top surface of the electrode block and the graphite boat contact discharge, the contact area of the electrode block and the graphite boat can be increased, the contact effect of the electrode block and the graphite boat can be improved, the uneven coating caused by poor contact of the electrode block can be reduced, the service life of the electrode block can be extended from less than 3 months to more than 1 year, the electrode block assembly can be easily cleaned and maintained, has high reuse value and low damage risk, and is beneficial to increasing the yield of battery pieces and reducing the production cost of battery pieces.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] An electrode block assembly comprises an electrode connecting piece and an electrode block, the electrode connecting piece is respectively provided with an electrode block base and a support rod clamp, the electrode block base is provided with a clamping groove, the electrode block is detachably connected to the clamping groove, and the top surface of the electrode block is rectangular.

[0008] The support rod clamp is used to fix the electrode block assembly to a predetermined position, so that the top surface of the electrode block is in contact with the graphite boat for discharge.

[0009] In some embodiments, a lengthening rod connecting piece is further included, the lengthening rod connecting piece is provided with a connecting hole, and the lengthening rod connecting piece is connected with a radio frequency power supply connection wire lengthening rod through the connecting hole.

[0010] The lengthening rod connecting piece is arranged at one end of the electrode connecting piece, and the electrode block base is arranged at the other end of the electrode connecting piece.

[0011] In some embodiments, the lengthening rod connecting piece, the electrode block base and the support rod clamp are respectively welded on the electrode connecting piece.

[0012] In some embodiments, the electrode block is a cuboid; and / or

[0013] The electrode block is provided with an electrode block auxiliary taking-out hole.

[0014] In some embodiments, the clamping groove is provided with a first fixing hole, the electrode block is provided with a second fixing hole matched with the first fixing hole, and the clamping groove and the electrode block are detachably connected through the first fixing hole, the second fixing hole and a bolt and nut assembly.

[0015] In some embodiments, the electrode block base is provided with an electrode block dismounting slot.

[0016] In some embodiments, the inner side wall of the support rod clamp is provided with a clamp anti-rotation slot.

[0017] In some embodiments, the side wall of the support rod clamp is provided with a clamp locking hole penetrating the side wall of the support rod clamp.

[0018] In some embodiments, the inner side wall of the clamp locking hole is provided with an internal thread.

[0019] The application also provides a graphite boat discharge electrode comprising the above electrode block assembly.

[0020] In the technical solution of the application, the block-shaped electrode block base is changed into an electrode block base provided with a clamping slot, the traditional electrode block and electrode block base plug-in contact discharge is changed into an electrode block embedded locking discharge, the contact mode of the electrode block and the electrode block base is changed, the shape of the top surface of the electrode block is optimized, the contact area of the electrode block and the graphite boat is increased through the rectangular top surface of the electrode block for contact discharge with the graphite boat, the contact effect of the electrode block and the graphite boat is improved, the non-uniformity of the film caused by poor contact of the electrode block is reduced, the service life of the electrode block is extended from less than 3 months to more than 1 year, the electrode block assembly is easy to clean and maintain, has high reuse value and low damage risk, and is beneficial to increasing the yield of battery pieces and reducing the production cost of battery pieces. BRIEF DESCRIPTION OF DRAWINGS

[0021] In the drawings, like reference numerals refer to like elements throughout the various drawings. The drawings are not necessarily to scale, emphasis instead being placed on illustrating principles of the application. It should be understood that the drawings only depict some embodiments of the application and should not be considered as limiting the scope of the application.

[0022] Figure 1 FIG. 1 is a structural schematic diagram of an electrode block assembly according to an embodiment of the application.

[0023] In the drawings, like reference numerals refer to like elements throughout the various drawings. The drawings are not necessarily to scale, emphasis instead being placed on illustrating principles of the application. It should be understood that the drawings only depict some embodiments of the application and should not be considered as limiting the scope of the application. DETAILED DESCRIPTION

[0024] Embodiments of the present application are described in detail below with reference to examples shown in the attached drawings. In the drawings, the size and relative sizes of layers, regions, elements, and the like can be exaggerated for clarity. Like or similar elements or components throughout the figures are denoted with like reference numbers, and, as such, their function can be referred to throughout. The examples described below are intended to be illustrative and are not intended to limit the scope of the present application. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other under the condition of no conflict.

[0025] It should be understood that when an element or layer is referred to as being "on", "adjacent", "connected to" or "coupled to" another element or layer, it can be directly on, adjacent, connected or coupled to the other element or layer, or one or more intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on", "directly adjacent", "directly connected to", or "directly coupled to" another element or layer, then there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application. Similarly, a second element, component, region, layer or section discussed below could be termed a first element, component, region, layer or section without departing from the teachings of the present application.

[0026] In the present application, unless specifically defined otherwise, the terms "mounting", "connected", "connecting", "fixed", and the like, should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless specifically defined otherwise. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0027] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," or "includes" and / or "including" when used herein, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. The following description and drawings are illustrative of the application and are not to be construed as limiting the application.

[0028] The electrode block assembly provided by the application changes the contact mode of the electrode block and the electrode block base by changing the electrode block base with a clamping groove and inserting the traditional electrode block and electrode block base into the discharge, and embedding the electrode block into the locking discharge. The shape of the top surface of the electrode block 9 is optimized. The rectangular top surface of the electrode block 9 is in contact with the graphite boat for discharge, which can increase the contact area of the electrode block 9 and the graphite boat, improve the contact effect of the electrode block 9 and the graphite boat, reduce the uneven coating caused by poor contact of the electrode block 9, extend the service life of the electrode block 9 from less than 3 months to more than 1 year, and facilitate cleaning and maintenance of the electrode block assembly, has high reuse value, low risk of furnace tube damage, and is beneficial to increasing the yield of battery pieces and reducing the production cost of battery pieces.

[0029] The electrode block assembly provided by the embodiment of the application comprises an electrode connecting piece 2 and an electrode block 9. The electrode connecting piece 2 is provided with an electrode block base 3 and a support rod clamp 7. The electrode block base 3 is provided with a clamping groove 03, and the electrode block 9 is detachably connected to the clamping groove 03. The top surface of the electrode block 9 is rectangular.

[0030] The support rod clamp 7 is used to fix the electrode block assembly to a predetermined position, so that the top surface of the electrode block 9 is in contact with the graphite boat for discharge.

[0031] In the embodiment of the present application, the electrode connecting piece 2 is movably connected or welded between the electrode block base 3 and the support rod clamp 7, and the connection stability of the electrode connecting piece 2 and other structures needs to be maintained; the electrode connecting piece 2 can be a long strip structure, a rod structure, a plate structure or other regular or irregular structures, and the structure of the electrode connecting piece 2 can be set according to actual needs; the electrode block base 3 is used to place and fix the electrode block 9, the clamping groove 03 of the electrode block base 3 matches the electrode block 9, the electrode block 9 is placed in the clamping groove 03 with the top surface upward, and the top surface of the electrode block 9 is used to contact and discharge with the graphite boat; the top surface of the electrode block 9 is rectangular, and the other side surfaces of the electrode block 9 can be appropriately set according to actual needs and matched with the clamping groove 03; the support rod clamp 7 is used to connect with the circular support rod in the graphite boat discharge electrode, and plays a role of fixing the electrode block assembly. It should be noted that the electrode block 9 is made of a material with good electrical conductivity, which can be copper, aluminum or other conductive materials, and is used to contact and discharge with the graphite boat; the electrode block base 3 is made of a high-temperature-resistant insulating material, which can be one or more of high-temperature-resistant special ceramics, high-temperature-resistant engineering plastics, etc.

[0032] In the embodiment of the present application, the block-shaped electrode block base is changed to an electrode block base with a clamping groove 03, the traditional electrode block and electrode block base insertion type contact discharge is changed to an electrode block embedded type locking discharge, the contact mode of the electrode block and the electrode block base is changed, the shape of the top surface of the electrode block 9 is optimized, the rectangular top surface of the electrode block 9 contacts and discharges with the graphite boat, the contact area of the electrode block 9 and the graphite boat can be increased, the contact effect of the electrode block 9 and the graphite boat can be improved, the non-uniformity of the film caused by poor contact of the electrode block 9 can be reduced, at the same time, the service life of the electrode block 9 can be extended from less than 3 months to more than 1 year, the electrode block assembly can be easily cleaned and maintained, has high reuse value and low risk of furnace tube damage, is beneficial to increasing the yield of battery pieces and reducing the production cost of battery pieces.

[0033] In the optional embodiment, a lengthening rod connecting piece 1 is further included; the lengthening rod connecting piece 1 is provided with a connecting hole 01, and the lengthening rod connecting piece 1 is connected with a radio frequency power supply connection line lengthening rod through the connecting hole 01;

[0034] In the optional embodiment, a lengthening rod connecting piece 1 is further included; the lengthening rod connecting piece 1 is provided with a connecting hole 01, and the lengthening rod connecting piece 1 is connected with a radio frequency power supply connection line lengthening rod through the connecting hole 01;

[0035] In an optional embodiment, the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 are respectively welded on the electrode connector 2. In the embodiment, the electrode connector 2 is movably connected with the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 through the connector, which is convenient to disassemble and assemble. However, the connection stability of the electrode connector 2 with each structure is not enough. The welding mode can make the connection stability of the electrode connector 2 with each structure higher, thereby improving the mechanical stability of the electrode block assembly.

[0036] In an optional embodiment, the electrode block 9 is a cuboid; and / or

[0037] The electrode block 9 is provided with an electrode block auxiliary taking-out hole 10.

[0038] In the embodiment, the electrode block 9 is a cuboid, and the clamping groove 03 of the electrode block base 3 is also a cuboid structure matched with the electrode block 9, which is simple and relatively stable in structure, thereby improving the mechanical stability of the electrode block assembly. In the embodiment, the electrode block 9 is placed in the clamping groove 03, and therefore the electrode block auxiliary taking-out hole 10 is arranged at the exposed position of the electrode block 9 relative to the clamping groove 03 (for example, the electrode block 9 is placed in the clamping groove 03 with the top surface upward, and therefore the electrode block auxiliary taking-out hole 10 is arranged at the top surface of the electrode block 9, as shown in Figure 1 The electrode block auxiliary taking-out hole 10 can be provided with an internal thread, which is convenient to take out the electrode block 9 through a threaded rod.

[0039] In an optional embodiment, the clamping groove 03 is provided with a first fixing hole 5, and the electrode block 9 is provided with a second fixing hole 11 matched with the first fixing hole 5; the clamping groove 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11, and a bolt and nut assembly. In the embodiment, the electrode block 9 is embedded in the clamping groove 03, and then the electrode block 9 is fixed in the clamping groove 03 through the bolt and nut assembly, thereby improving the mechanical stability of the electrode block assembly, improving the contact effect of the electrode block 9 with the graphite boat, and further reducing the non-uniformity of the coating caused by poor contact of the electrode block 9. It should be noted that the inner side walls of the first fixing hole 5 and the second fixing hole 11 can be provided with the same internal thread hole, or the first fixing hole 5 and the second fixing hole 11 can not be provided with the internal thread, which can be connected and fixed through the bolt and nut assembly.

[0040] In an optional embodiment, the clamping groove 03 is provided with an electrode block disassembling assisting groove 4. In the embodiment, the electrode block 9 is not easy to disassemble after being subjected to high temperature and discharge for a long time. The electrode block disassembling assisting groove 4 is added to the clamping groove 03, which is convenient to pry the electrode block 9 with a flat screwdriver. The depth of the electrode block disassembling assisting groove 4 can be 1-3 mm.

[0041] In an optional embodiment, a hoop anti-rotation groove 8 is arranged on the inner side wall of the support rod hoop 7. In the embodiment of the present application, the use of a circular support rod hoop 7 is likely to cause relative rotation between the circular support rod hoop 7 and the circular support rod. The arrangement of the hoop anti-rotation groove 8 can effectively prevent the relative rotation between the support rod hoop 7 and the circular support rod, and the mechanical stability is higher. The shape of the hoop anti-rotation groove 8 arranged on the inner side wall of the support rod hoop 7 can be arranged according to actual needs, which can play the role of anti-rotation. In order to further reduce the probability of relative rotation between the support rod hoop 7 and the circular support rod, an angular column or other shape of the protruding structure can be arranged on the outer side wall of the circular support rod, so as to further reduce the probability of relative rotation between the support rod hoop 7 and the circular support rod.

[0042] In an optional embodiment, a hoop locking hole 6 is arranged on the side wall of the support rod hoop 7, and the hoop locking hole 6 penetrates the side wall of the support rod hoop 7. In the embodiment of the present application, the arrangement of the hoop locking hole 6 can place a suitable locking structure, such as a rod body, etc., in the hoop locking hole 6, which is used to lock the support rod hoop 7 and the circular support rod in the furnace tube, prevent the support rod hoop 7 from being deformed and displaced for a long time under high temperature, and further improve the mechanical stability of the electrode block assembly.

[0043] In an optional embodiment, an inner thread is arranged on the inner side wall of the hoop locking hole 6. It is convenient to place a suitable locking structure, such as a rod body, etc., in the hoop locking hole 6. The locking structure has an outer thread matched with the inner thread of the hoop locking hole 6, which is used to lock the support rod hoop 7 and the circular support rod in the furnace tube, facilitate replacement of the locking structure, better locking effect, prevent the support rod hoop 7 from being deformed and displaced for a long time under high temperature, and further improve the mechanical stability of the electrode block assembly.

[0044] The present application also provides a graphite boat discharge electrode comprising the above-mentioned electrode block assembly. The graphite boat discharge electrode can be used in a radio frequency plasma chemical vapor deposition device, and can also be used in other types of plasma enhanced chemical vapor deposition devices.

[0045] The following specific embodiments further illustrate the present application, but should not be construed as limiting the present application. Modifications or replacements of the methods, steps or conditions of the present application, without departing from the spirit and essence of the present application, all belong to the scope of the present application. Specific embodiments

[0047] Embodiment 1

[0048] A graphite boat discharge electrode comprises an electrode block assembly. As shown in Figure 1As shown, the electrode block assembly includes an electrode coupling 2 and an electrode block 9; an extension rod connector 1 is provided at one end of the electrode coupling 2, and an electrode block base 3 is provided at the other end; a support rod clamp 7 is also provided on the electrode coupling 2; the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 are detachably connected to the electrode coupling 2 by a bolt and nut assembly; the extension rod connector 1 is connected to the extension rod of the RF power supply connection line through the connection hole 01, and the electrode coupling 2 is a long strip structure;

[0049] The electrode block 9 is detachably connected to the card slot 03; the electrode block 9 is in the shape of a cuboid, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of high-temperature resistant special ceramics;

[0050] An electrode block auxiliary removal hole 10 is provided on the electrode block 9; a first fixing hole 5 is provided in the slot 03, and a second fixing hole 11 matching the first fixing hole 5 is provided on the electrode block 9; the slot 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; an electrode block auxiliary disassembly groove 4 is provided on the slot 03, and the depth of the electrode block auxiliary disassembly groove 4 is 2 mm; a clamp anti-rotation groove 8 is provided on the inner side wall of the support rod clamp 7; a clamp locking hole 6 is provided on the side wall of the support rod clamp 7, and the clamp locking hole 6 penetrates the side wall of the support rod clamp 7; an internal thread is provided on the inner side wall of the clamp locking hole 6.

[0051] The method of using the electrode block assembly is as follows: the extension rod connector 1 is connected to the extension rod of the RF power supply connection line, the electrode block 9 is placed in the slot 03, and the bolt and nut assembly is installed to make the slot 03 and the electrode block 9 detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; the electrode block assembly is fixed to the circular support rod in the furnace tube through the support rod clamp 7, so that the rectangular top surface of the electrode block 9 can contact the graphite boat for discharge.

[0052] Example 2

[0053] A graphite boat discharge electrode, including an electrode block assembly. Figure 1 As shown, the electrode block assembly includes an electrode coupling 2 and an electrode block 9; an extension rod connector 1 is provided at one end of the electrode coupling 2, and an electrode block base 3 is provided at the other end; a support rod clamp 7 is also provided on the electrode coupling 2; the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 are respectively welded to the electrode coupling 2; the extension rod connector 1 is connected to the extension rod of the RF power supply connection line through the connection hole 01, and the electrode coupling 2 is a long strip structure;

[0054] The electrode block 9 is detachably connected to the card slot 03; the electrode block 9 is in the shape of a cuboid, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of high-temperature resistant special ceramics;

[0055] An electrode block auxiliary removal hole 10 is provided on the electrode block 9; a first fixing hole 5 is provided in the slot 03, and a second fixing hole 11 matching the first fixing hole 5 is provided on the electrode block 9; the slot 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; an electrode block auxiliary disassembly groove 4 is provided on the slot 03, and the depth of the electrode block auxiliary disassembly groove 4 is 2 mm; a clamp anti-rotation groove 8 is provided on the inner side wall of the support rod clamp 7; a clamp locking hole 6 is provided on the side wall of the support rod clamp 7, and the clamp locking hole 6 penetrates the side wall of the support rod clamp 7; an internal thread is provided on the inner side wall of the clamp locking hole 6.

[0056] Example 3

[0057] A graphite boat discharge electrode, including an electrode block assembly. Figure 1 As shown, the electrode block assembly includes an electrode coupling 2 and an electrode block 9; an extension rod connector 1 is provided at one end of the electrode coupling 2, and an electrode block base 3 is provided at the other end; a support rod clamp 7 is also provided on the electrode coupling 2; the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 are respectively welded to the electrode coupling 2; the extension rod connector 1 is connected to the extension rod of the RF power supply connection line through the connection hole 01, and the electrode coupling 2 is a long strip structure;

[0058] The electrode block 9 is detachably connected to the card slot 03; the electrode block 9 is in the shape of a cuboid, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of high-temperature resistant special ceramics;

[0059] An electrode block auxiliary removal hole 10 is provided on the electrode block 9; a first fixing hole 5 is provided in the clamping slot 03, and a second fixing hole 11 matching the first fixing hole 5 is provided on the electrode block 9; the clamping slot 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; a clamp anti-rotation groove 8 is provided on the inner side wall of the support rod clamp 7; a clamp locking hole 6 is provided on the side wall of the support rod clamp 7, and the clamp locking hole 6 penetrates the side wall of the support rod clamp 7; an internal thread is provided on the inner side wall of the clamp locking hole 6.

[0060] Example 4

[0061] A graphite boat discharge electrode comprises an electrode block assembly. Figure 1 As shown in the figure, the electrode block assembly comprises an electrode connecting piece 2 and an electrode block 9; one end of the electrode connecting piece 2 is provided with an extension rod connecting piece 1, and the other end is provided with an electrode block base 3; a support rod clamp 7 is further arranged on the electrode connecting piece 2; the extension rod connecting piece 1, the electrode block base 3 and the support rod clamp 7 are respectively welded on the electrode connecting piece 2; the extension rod connecting piece 1 is connected with the extension rod of the radio frequency power supply connecting line through the connecting hole 01; the electrode connecting piece 2 is in a strip-shaped structure.

[0062] The electrode block 9 is detachably connected in the clamping groove 03; the electrode block 9 is in a cuboid shape, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of special ceramic with high temperature resistance.

[0063] The electrode block 9 is provided with an electrode block auxiliary taking-out hole 10; the clamping groove 03 is provided with a first fixing hole 5, and the electrode block 9 is provided with a second fixing hole 11 matched with the first fixing hole 5; the clamping groove 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and a bolt and nut assembly; the clamping groove 03 is provided with an electrode block disassembling assisting groove 4, and the depth of the electrode block disassembling assisting groove 4 is 2 mm; the sidewall of the support rod clamp 7 is provided with a clamp locking hole 6 penetrating the sidewall of the support rod clamp 7; the inner sidewall of the clamp locking hole 6 is provided with an internal thread.

[0064] Embodiment 5

[0065] A graphite boat discharge electrode comprises an electrode block assembly. Figure 1 As shown in the figure, the electrode block assembly comprises an electrode connecting piece 2 and an electrode block 9; one end of the electrode connecting piece 2 is provided with an extension rod connecting piece 1, and the other end is provided with an electrode block base 3; a support rod clamp 7 is further arranged on the electrode connecting piece 2; the extension rod connecting piece 1, the electrode block base 3 and the support rod clamp 7 are respectively welded on the electrode connecting piece 2; the extension rod connecting piece 1 is connected with the extension rod of the radio frequency power supply connecting line through the connecting hole 01; the electrode connecting piece 2 is in a strip-shaped structure.

[0066] The electrode block 9 is detachably connected in the clamping groove 03; the electrode block 9 is in a cuboid shape, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of special ceramic with high temperature resistance.

[0067] The electrode block 9 is provided with an electrode block auxiliary removal hole 10; a first fixing hole 5 is provided in the slot 03, and a second fixing hole 11 matching the first fixing hole 5 is provided on the electrode block 9; the slot 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; the slot 03 is provided with an electrode block auxiliary removal groove 4, and the depth of the electrode block auxiliary removal groove 4 is 2 mm; the inner side wall of the support rod clamp 7 is provided with a clamp anti-rotation groove 8.

[0068] Example 6

[0069] A graphite boat discharge electrode, including an electrode block assembly. Figure 1 As shown, the electrode block assembly includes an electrode coupling 2 and an electrode block 9; an extension rod connector 1 is provided at one end of the electrode coupling 2, and an electrode block base 3 is provided at the other end; a support rod clamp 7 is also provided on the electrode coupling 2; the extension rod connector 1, the electrode block base 3, and the support rod clamp 7 are respectively welded to the electrode coupling 2; the extension rod connector 1 is connected to the extension rod of the RF power supply connection line through the connection hole 01, and the electrode coupling 2 is a long strip structure;

[0070] The electrode block 9 is detachably connected to the card slot 03; the electrode block 9 is in the shape of a cuboid, and the top surface of the electrode block 9 is rectangular; the electrode block 9 is made of copper; the electrode block base 3 is made of high-temperature resistant special ceramics;

[0071] An electrode block auxiliary removal hole 10 is provided on the electrode block 9; a first fixing hole 5 is provided in the slot 03, and a second fixing hole 11 matching the first fixing hole 5 is provided on the electrode block 9; the slot 03 and the electrode block 9 are detachably connected through the first fixing hole 5, the second fixing hole 11 and the bolt and nut assembly; an electrode block auxiliary disassembly groove 4 is provided on the slot 03, and the depth of the electrode block auxiliary disassembly groove 4 is 2 mm; a clamp anti-rotation groove 8 is provided on the inner side wall of the support rod clamp 7; a clamp locking hole 6 is provided on the side wall of the support rod clamp 7, and the clamp locking hole 6 penetrates the side wall of the support rod clamp 7.

[0072] Comparative Example 1

[0073] A graphite boat discharge electrode includes an electrode block assembly, which includes an electrode block and an electrode block base, and adopts a traditional plug-in contact discharge method of the electrode block and the electrode block base.

[0074] Taking the deposition of silicon nitride as an example, in the above Examples 1-6 and Comparative Example 1, the statistical results of the electrode block life, silicon nitride deposition effect, and silicon nitride cleaning difficulty are shown in Table 1 below.

[0075] Table 1

[0076]

[0077] Referring to the data of the above-mentioned embodiments 1-6 and comparative example 1, it can be seen that the block-shaped electrode block base is changed to the electrode block base with the clamping slot 03, the traditional electrode block and electrode block base insertion type contact discharge is changed to the electrode block embedded type locking discharge, the contact mode of the electrode block and the electrode block base is changed, and the shape of the top surface of the electrode block 9 is optimized. Through the rectangular top surface of the electrode block 9 and the graphite boat contact discharge, the contact area of the electrode block 9 and the graphite boat can be increased, the contact effect of the electrode block 9 and the graphite boat can be improved, the film coating unevenness caused by poor contact of the electrode block 9 can be reduced, at the same time, the service life of the electrode block 9 can be extended from less than 3 months to more than 1 year, the graphite boat discharge electrode electrode block 9 assembly can be easily cleaned and maintained, has high reuse value, and has low risk of furnace tube damage, which is beneficial to increase the yield of battery pieces and reduce the production cost of battery pieces.

[0078] The embodiment of the present application can provide a graphite boat discharge electrode including the above-mentioned electrode block assembly. The graphite boat discharge electrode also has the advantages of the above-mentioned electrode block assembly, which will not be described here.

[0079] It should be noted that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. The orientation words "inner" and "outer" refer to the inner and outer of the contour of each component itself. For example, if the devices in the drawings are inverted, the devices described as "above" or "on" other devices or structures will be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The devices can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0080] It is also need to be explained that, "one embodiment", "another embodiment", "embodiment" and the like mentioned in the present application refer to the specific features, structures or characteristics described in connection with the embodiment are included in at least one embodiment described generally in the present application. The same expression appears in several places in the specification does not necessarily refer to the same embodiment. Further, when a specific feature, structure or characteristic is described in connection with any embodiment, it is claimed that the implementation of such feature, structure or characteristic in connection with other embodiments also falls within the scope of the present application.

[0081] In the above embodiments, the description of each embodiment has its own focus, and the parts not described in detail in a certain embodiment can be referred to the relevant description of other embodiments.

[0082] It is also need to be explained that, the above is only the preferred embodiment of the present application, and does not limit the patent protection scope of the present application, and any equivalent structure or equivalent process transformation using the content of the present application specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An electrode block assembly, characterized by, The electrode block assembly comprises an electrode connecting piece, an electrode block; The electrode connecting piece is provided with an electrode block base and a support rod clamp respectively; the electrode block base is provided with a clamping groove, and the electrode block is detachably connected to the clamping groove; the top surface of the electrode block is rectangular; The support rod clamp is used to fix the electrode block assembly to a predetermined position, so that the top surface of the electrode block is in contact with the graphite boat for discharging.

2. The electrode block assembly of claim 1, wherein, The electrode block assembly further comprises an extension rod connecting piece; the extension rod connecting piece is provided with a connecting hole, and the extension rod connecting piece is connected to the extension rod of the radio frequency power supply connecting line through the connecting hole; The extension rod connecting piece is arranged at one end of the electrode connecting piece, and the electrode block base is arranged at the other end of the electrode connecting piece.

3. The electrode block assembly of claim 2, wherein, The extension rod connecting piece, the electrode block base and the support rod clamp are respectively welded to the electrode connecting piece.

4. The electrode block assembly of claim 1, wherein, The electrode block is a cuboid; and / or The electrode block is provided with an electrode block auxiliary removal hole.

5. The electrode block assembly of claim 1, wherein, The clamping groove is provided with a first fixing hole, and the electrode block is provided with a second fixing hole matched with the first fixing hole; the clamping groove and the electrode block are detachably connected through the first fixing hole, the second fixing hole and a bolt and nut assembly.

6. The electrode block assembly of claim 1, wherein, The clamping groove is provided with an electrode block disassembly assisting groove.

7. The electrode block assembly of claim 1, wherein, The inner side wall of the support rod clamp is provided with a clamp anti-rotation groove.

8. The electrode block assembly of claim 1, wherein, The side wall of the support rod clamp is provided with a clamp locking hole, and the clamp locking hole penetrates the side wall of the support rod clamp.

9. The electrode block assembly of claim 8, wherein, The inner side wall of the clamp locking hole is provided with an internal thread.

10. A graphite boat discharge electrode, characterized by, The electrode block assembly comprises an electrode block assembly according to any one of claims 1-9.

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