Wet process table with wall-mounted drying function

Abstract

The utility model discloses a wet process table with a wall-mounted drying function, and relates to the technical field of semiconductor processing, and the wet process table comprises a wet process table body and a drying device; the wet process table body is provided with an operation chamber; an etching groove is formed in the bottom of the operation chamber; a material moving robot is mounted in the operation cavity; the drying device is installed on the side face of the operation cavity. The material moving robot is used for moving the workpiece into the etching groove for etching; the material moving robot is further used for moving the workpieces in the etching groove into the drying device to be dried. The drying device is mounted on the side surface of the operation chamber, and a wall-mounted design is adopted, so that the problem of space occupation caused by the fact that the drying device and the etching groove are distributed on the same horizontal plane is effectively avoided. According to the vertical space utilization mode, more space can be vacated for the arrangement of the etching groove on the premise that the overall size of the machine table is not increased, so that the higher space utilization rate is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a wet bench with wall-hung drying. BACKGROUND

[0002] In the wet etching process, the application of automatic equipment significantly improves the efficiency and consistency of wafer processing. A typical automatic wet etching machine transfers the wafer or basket through a mechanical hand, immerses it in an etching tank containing etching solution for cleaning and etching, and then transfers it to a drying tank for drying. For example, a wafer slicing etching device and method are disclosed in Chinese patent application CN120341141A.

[0003] As shown in the above-mentioned patent disclosure, the existing drying tank and etching tank are distributed on the same horizontal plane. Although this distribution method makes the transfer path of the wafer or basket relatively simple, it occupies the distribution space of the etching tank, resulting in a reduction in the number of etching tanks and a decrease in the efficiency of simultaneous etching. If the number of etching tanks is increased, the size of the machine needs to be expanded, resulting in an increase in the manufacturing and maintenance costs of the machine.

[0004] Therefore, there is an urgent need to provide a solution to achieve higher etching efficiency in a limited space while controlling the manufacturing and maintenance costs of the machine. CONTENT OF THE INVENTION

[0005] Therefore, the purpose of the present application is to provide a wet bench with wall-hung drying, which can achieve higher etching efficiency in a limited space while controlling the manufacturing and maintenance costs of the machine.

[0006] To achieve the above technical purpose, the present application provides a wet bench with wall-hung drying, which comprises a wet bench body and a drying device.

[0007] The wet bench body has a working chamber.

[0008] The etching tank is arranged at the bottom of the working chamber.

[0009] A material transfer robot is installed in the working chamber.

[0010] The drying device is installed on the side of the working chamber.

[0011] The material transfer robot is used to transfer the workpiece to the etching tank for etching.

[0012] The material transfer robot is also used to transfer the workpiece in the etching tank to the drying device for drying.

[0013] Further, the drying device comprises a device body and a drying mechanism.

[0014] The device body is provided with a drying cavity;

[0015] The drying cavity has a first communication port communicating with the outside of the device body and allowing the workpiece to pass through;

[0016] The drying mechanism is installed in the drying cavity for drying the workpiece located in the drying cavity.

[0017] Further, a sealing cover is installed on the first communication port;

[0018] A switch cover mechanism is installed on the device body;

[0019] The switch cover mechanism is connected to the sealing cover for controlling the opening or closing movement of the sealing cover.

[0020] Further, a sealing cover is installed on the first communication port;

[0021] The material moving robot is also used to grab the sealing cover to drive the opening or closing movement of the sealing cover.

[0022] Further, the device body is also provided with a waiting cavity;

[0023] The waiting cavity has a second communication port communicating with the outside of the device body and allowing the workpiece to pass through.

[0024] Further, the drying device also includes a conveying mechanism;

[0025] The device body is also provided with a third communication port communicating the waiting cavity and the drying cavity;

[0026] The conveying mechanism is installed on the device body and spans the waiting cavity, the third communication port and the drying cavity, for conveying the workpiece in the waiting cavity to the drying cavity through the third communication port.

[0027] Further, the waiting cavities are multiple and arranged in sequence;

[0028] The adjacent waiting cavities are communicated through a fourth communication port;

[0029] The waiting cavity closest to the drying cavity is communicated with the drying cavity through the third communication port;

[0030] The conveying mechanism spans the drying cavity, the third communication port, each of the waiting cavities and the fourth communication port, and can sequentially convey the workpiece in the waiting cavities to the drying cavity.

[0031] Further, a shielding member is installed on the third communication port;

[0032] The shielding member is a normally closed type shielding member capable of being opened by the pushing of the workpiece.

[0033] Further, a shielding member is installed on the third communication port;

[0034] A shielding member driving mechanism is installed on the device body;

[0035] The shielding member driving mechanism is connected with the shielding member, and is used to drive the shielding member to open or close.

[0036] Further, the drying mechanism comprises a drying head;

[0037] The drying head has an air inlet and an air outlet;

[0038] The air inlet is connected to a hot air source through an air inlet pipe.

[0039] Further, the drying mechanism further comprises a connecting rod mechanism and a connecting rod driver;

[0040] The drying head is rotatably installed on the side wall of the drying cavity;

[0041] The connecting rod driver connects the drying head through the connecting rod mechanism, and is used to drive the drying head to swing through the connecting rod mechanism.

[0042] Further, the drying mechanism further comprises a connecting rod mechanism;

[0043] The drying head is rotatably installed on the side wall of the drying cavity;

[0044] The connecting rod mechanism is connected between the drying head and the conveying mechanism, and can move with the conveying mechanism when the conveying mechanism operates, and drive the drying head to swing.

[0045] Further, the conveying mechanism comprises a conveying belt body and a conveying motor;

[0046] The output shaft of the conveying motor is connected with the driving shaft in the conveying belt body.

[0047] Further, the connecting rod mechanism comprises a first fixing member, a second fixing member and a connecting rod member;

[0048] The first fixing member is fixed at the rotation connection end of the drying head;

[0049] The second fixing member is fixed at one end of the driving shaft or the driven shaft of the conveying belt body;

[0050] The first end of the connecting rod member is hinged at a position on the first fixing member with a first distance from the rotation center line of the rotation connection end.

[0051] The second end of the connecting rod is hingedly connected to a position on the second fixing member that is a second distance from the rotation center line of the driving shaft or the driven shaft;

[0052] The connecting rod is used to convert rotation of the second fixing member into oscillation of the first fixing member.

[0053] Further, the conveying mechanism further comprises a limiting frame;

[0054] The limiting frame is arranged on the conveying surface of the conveying belt body and is provided with a limiting groove arranged along the conveying direction of the conveying belt body;

[0055] The workpiece is in contact with the conveying surface through the limiting groove;

[0056] The limiting groove is used to limit displacement of the workpiece in a direction perpendicular to the conveying direction.

[0057] Further, the waiting cavity is provided with a stop mechanism;

[0058] The stop mechanism has a stop portion capable of switching movement between a stop position and a release position;

[0059] When the stop portion is in the stop position, the stop portion can be in contact with the workpiece to stop movement of the workpiece towards the drying cavity.

[0060] Further, the workpiece is a carrier carrying a wafer, comprising a side frame and a bottom frame;

[0061] The bottom frame is vertically connected to the bottom of the first side surface of the side frame and is provided with a first clamping groove for clamping the bottom edge of the wafer;

[0062] The first side surface of the side frame is fixed with a limiting column above the two side positions of the bottom frame, respectively;

[0063] The limiting column and the bottom frame form an accommodating area for accommodating the wafer;

[0064] The limiting column is provided with a second clamping groove for the side edge of the wafer to pass through.

[0065] Further, the top of the second side surface opposite to the first side surface of the side frame is fixed with a clamping block for being gripped by the material moving robot.

[0066] From the above technical solutions, it can be seen that the wet process platform with wall-mounted drying designed by the present application has the following beneficial effects:

[0067] 1. By installing the drying device on the side of the working chamber, a wall-mounted design is adopted, effectively avoiding the space occupation problem caused by the horizontal distribution of the drying device and the etching tank. This vertical space utilization method can provide more space for the arrangement of the etching tank without increasing the overall size of the machine, thereby realizing higher space utilization.

[0068] 2. Since the drying device no longer occupies the horizontal distribution space of the etching tank, more etching tanks can be accommodated in the limited working chamber. This directly improves the simultaneous processing capacity of the wet etching process, thereby improving the overall production efficiency.

[0069] 3. Compared with the traditional scheme of increasing the number of etching tanks by expanding the size of the machine, the present application does not need to expand the floor area of the machine, thereby avoiding the increase of material, manufacturing and maintenance costs caused by the increase of the size of the machine. BRIEF DESCRIPTION OF DRAWINGS

[0070] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0071] Figure 1 It is a perspective view of a wet bench with wall-mounted drying provided in the present application;

[0072] Figure 2 It is a perspective view of a drying device of a wet bench with wall-mounted drying provided in the present application;

[0073] Figure 3 It is a top view of a drying device of a wet bench with wall-mounted drying provided in the present application;

[0074] Figure 4 It is a sectional view of a drying device of a wet bench with wall-mounted drying provided in the present application;

[0075] Figure 5 It is a first perspective view of a drying device of a wet bench with wall-mounted drying provided in the present application without the device body;

[0076] Figure 6 It is a second perspective view of a drying device of a wet bench with wall-mounted drying provided in the present application without the device body;

[0077] Figure 7 It is a perspective view of a conveying mechanism of a drying device of a wet bench with wall-mounted drying provided in the present application;

[0078] Figure 8 An application state diagram of a connecting rod mechanism of a drying device with a wet bench with a wall-mounted drying device provided in the present application;

[0079] Figure 9 A perspective view of a workpiece carrying a wafer of a drying device with a wet bench with a wall-mounted drying device provided in the present application;

[0080] In the figure: 100, drying device; 1, device main body; 11, drying cavity; 111, first communication port; 12, waiting cavity; 121, second communication port; 13, sealing cover; 14, partition; 15, third communication port; 16, fourth communication port; 17, shielding piece; 18, protective cover; 2, drying mechanism; 21, drying head; 211, air inlet; 212, air outlet; 22, connecting rod mechanism; 221, first fixing piece; 222, connecting rod piece; 223, second fixing piece; 3, conveying mechanism; 31, conveying motor; 321, conveying frame; 322, driving shaft; 323, driven shaft; 324, transmission belt; 325, chain wheel; 33, limiting frame; 331, limiting groove; 4, carrier; 41, side frame; 42, bottom frame; 421, first clamping groove; 43, limiting column; 431, second clamping groove; 44, clamping block; 5, wafer; 6, stop mechanism; 61, stop portion; 200, wet bench body; 201, working chamber; 202, material moving robot; 203, etching groove. DETAILED DESCRIPTION

[0081] The technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0082] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0083] In the description of the embodiments of the present application, it should be noted that unless specifically defined and limited, the terms "mount", "connect", "connect" should be understood in a broad sense, for example, it can be fixedly connected, or it can be replaceably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0084] The embodiments of the present application disclose a wet bench with wall-mounted drying.

[0085] Please refer to Figure 1 An embodiment of a wet bench with wall-mounted drying provided in the embodiments of the present application includes:

[0086] The wet bench body 200 and the drying device 100.

[0087] The wet bench body 200 is designed with an existing machine table structure, which has a work chamber 201 inside, and a material moving robot 202 (such as a multi-axis manipulator) is installed in the work chamber 201. Specifically, it can be installed at the top or the side wall position of the work chamber 201.

[0088] The bottom of the work chamber 201 is provided with at least one etching groove 203, and the etching groove 203 has etching liquid therein for etching work.

[0089] The drying device 100 is installed on the side of the work chamber 201 in a wall-mounted manner, such as screws, buckles, etc. to achieve fastening, and the specific implementation is not limited. The drying device 100 is used to realize drying work.

[0090] The material moving robot 202 is used to move the workpiece into the etching groove 203 for etching, and the material moving robot 202 is also used to move the workpiece in the etching groove 203 into the drying device 100 for drying.

[0091] The other specific structures of the wet bench body 200 are not described in detail.

[0092] The workpiece of the present application can be directly referred to as a wafer 5, or it can be referred to as a carrier 4 (flower basket frame) carrying the wafer 5.

[0093] The wet bench with wall-mounted drying designed in the present application has the following beneficial effects:

[0094] 1. By installing the drying device 100 on the side of the working chamber 201, a wall-mounted design is adopted, effectively avoiding the space occupation problem caused by the horizontal distribution of the drying device 100 and the etching tank 203. This vertical space utilization method can provide more space for the arrangement of the etching tank 203 without increasing the overall size of the machine, thereby realizing higher space utilization.

[0095] 2. Since the drying device 100 no longer occupies the horizontal distribution space of the etching tank 203, more etching tanks 203 can be accommodated in the limited working chamber 201. This directly improves the simultaneous processing capacity of the wet etching process, thereby improving the overall production efficiency.

[0096] 3. Compared with the way of increasing the number of etching tanks 203 by expanding the size of the machine in the traditional scheme, the present application does not need to expand the floor area of the machine, thereby avoiding the increase of material, manufacturing and maintenance costs caused by the increase of the size of the machine.

[0097] The above is an embodiment one of a wet etching table with wall-mounted drying provided by the embodiments of the present application, and the following is an embodiment two of a wet etching table with wall-mounted drying provided by the embodiments of the present application, please refer to Figures 1 to 9 .

[0098] Based on the scheme of the above embodiment one:

[0099] Further, as shown in Figure 4 and Figure 5 , the drying device 100 includes a device body 1 and a drying mechanism 2.

[0100] The device body 1 is provided with a drying cavity 11, and the drying cavity 11 has a first communication port 111 communicating with the outside of the device body 1 and allowing the workpiece to pass through, and the first communication port 111 can be arranged at the top position; the drying mechanism 2 is installed in the drying cavity 11 for drying the workpiece located in the drying cavity 11.

[0101] A drain port can be arranged at the bottom of the drying cavity 11. When the moisture on the surface of the workpiece is dried, part of the condensed water droplets will flow to the bottom of the drying cavity 11, and the drain port can timely drain these moisture to avoid secondary pollution of the workpiece caused by accumulated water. Moreover, the drain port is also connected with a drain pipeline to guide the water to the waste water collection place of the wet etching table.

[0102] Further, as shown in Figures 2 to 4 , a sealing cover 13 is installed on the first communication port 111 for blocking the heat loss of the inside of the drying cavity 11 to ensure the drying efficiency. The sealing cover 13 can be made of a material with good heat insulation performance to further reduce heat loss and improve drying efficiency. At the same time, the edge of the sealing cover 13 can also be provided with a sealing rubber strip to further enhance the sealing effect and prevent heat leakage.

[0103] There are two ways to control the opening and closing of the sealing cover 13:

[0104] Method one: The device body 1 is installed with a switch cover mechanism (not shown in the figure), which is connected to the sealing cover 13 and used to control the opening and closing movement of the sealing cover 13. The design of the switch cover mechanism can include a rotary motor and a connecting block connected to the output shaft of the rotary motor and the sealing cover 13. The rotary motor drives the sealing cover 13 to flip and move, realizing opening and closing.

[0105] Method two: The sealing cover 13 is directly covered on the first communication port 111, and the material moving robot 202 is also used to grab the sealing cover 13 to drive the sealing cover 13 to open or close. The sealing cover 13 can be provided with a handle for the material moving robot 202 to grab, so as to realize the opening and sealing of the first communication port 111.

[0106] The switch cover mechanism of method one uses a rotary motor to drive it, which has the advantage of independent automatic control and can accurately control the opening and closing angle and time of the sealing cover 13. It is suitable for scenarios that need to frequently open and close the sealing cover 13, and can effectively improve the efficiency of the drying work. However, this method requires additional installation of rotary motor and connecting block and other components, increasing the cost and complexity of the device, and the maintenance and repair work is relatively cumbersome.

[0107] Method two uses the material moving robot 202 to grab the sealing cover 13 to realize opening and closing, which has the advantage of making full use of the existing material moving robot 202 resources, without the need for additional installation of complex switch cover mechanism, reducing the cost and space occupation of the device. At the same time, the material moving robot 202 has high operation flexibility and can perform opening and closing operation of the sealing cover 13 at different positions and times according to actual needs. However, this method also has certain limitations, such as the grabbing precision and stability of the material moving robot 202 may be affected by various factors, which may cause the opening and closing of the sealing cover 13 to be not accurate enough, affecting the sealing effect of the drying cavity 11.

[0108] In actual application, appropriate sealing cover 13 opening and closing control method can be selected according to specific working scene and demand, of course, it is not limited to the above two control methods, and those skilled in the art can make appropriate changes and design based on them.

[0109] Further, when one drying cavity 11 corresponds to multiple etching slots 203, if the workpiece in the drying cavity 11 is not dried completely, and a new workpiece in the etching slot 203 is etched completely, at this time, it is necessary to continue to keep the etched workpiece in the etching slot 203, so that the etching slot 203 cannot carry out subsequent etching operation; or it is necessary to occupy the empty etching slot 203 for temporary storage, and the above-mentioned methods will all cause the utilization rate of the etching slot 203 to be limited, and cause the etching efficiency to be reduced.

[0110] In the semiconductor manufacturing process, etching and drying are two key process links. Usually, multiple etching slots 203 share one drying cavity 11 to improve the utilization rate of the equipment and optimize the process flow. However, in the actual production process, when the workpiece in the drying cavity 11 has not been dried completely, if the workpiece in a certain etching slot 203 has been etched completely, the process connection problem will occur.

[0111] Specifically, due to the occupation of the drying cavity 11, the etched workpiece cannot be immediately transferred to the drying cavity 11 for the next stage processing. In this case, the operator usually has two choices: one is to continue to keep the etched workpiece in the original etching slot 203 to wait for the drying cavity 11 to be idle, but this will cause the etching slot 203 to be unable to carry out new etching operation in time; the other is to temporarily move the etched workpiece to the empty etching slot 203 for storage, but this way not only occupies the resources of other etching slots 203, but also increases unnecessary handling operation.

[0112] The root cause of the above-mentioned problems lies in the insufficient coordination between the drying process and the etching process, especially in the configuration that multiple etching slots 203 share a single drying cavity 11, the waiting time between processes will directly affect the overall production efficiency. The reduction of the utilization rate of the etching slot 203 will cause the decline of the whole etching operation efficiency, and also increase the production cost of the unit product.

[0113] Therefore, in order to solve the above-mentioned problems, as shown in Figures 2 to 4 The device body 1 of the present application also has a waiting cavity 12; the waiting cavity 12 has a second communication port 121 which is communicated with the outside of the device body 1 and is used for the workpiece to pass through, and the second communication port 121 can be arranged at the top.

[0114] After the waiting cavity 12 is arranged, when the drying cavity 11 is occupied, the etched workpiece can first enter the waiting cavity 12 for temporary storage through the second communication port 121. The existence of the waiting cavity 12 makes the etching slot 203 be able to carry out the next round of etching operation in time after the etching of the workpiece is completed, avoids the idle of the etching slot 203 due to the waiting for the drying cavity 11 to be idle, and greatly improves the utilization rate of the etching slot 203.

[0115] The number of the waiting cavity 12 can be one or more, which is not limited and can be designed according to actual needs.

[0116] Further, as shown in Figures 3 to 5 , the drying device 100 further comprises a conveying mechanism 3; the device main body 1 is further provided with a third communication port 15 which communicates the waiting cavity 12 and the drying cavity 11; the conveying mechanism 3 is installed on the device main body 1 and spans the waiting cavity 12, the third communication port 15 and the drying cavity 11, for conveying the workpiece in the waiting cavity 12 to the drying cavity 11 through the third communication port 15.

[0117] The independent conveying mechanism 3 is designed to transport the workpiece in the waiting cavity 12 to the drying cavity 11, so that after the workpiece is placed in the waiting cavity 12 by the material transfer robot 202, the workpiece can be directly transported by the conveying mechanism 3 without being grabbed from the waiting cavity 12 and transferred to the drying cavity 11, and the material transfer robot 202 only needs to wait for the subsequent workpiece dried in the drying cavity 11 to be taken out. After the conveying mechanism 3 is designed, the material transfer robot 202 only needs to perform the steps of placing the workpiece in the waiting cavity 12 and waiting for the workpiece to be taken out from the drying cavity 11, which reduces the execution actions of the material transfer robot 202 and effectively improves the work efficiency.

[0118] Regarding the spanning installation arrangement of the conveying mechanism 3, the following can be used:

[0119] As shown in Figure 4 , the device main body 1 has a large inner cavity, the bottom of the inner cavity is provided with the conveying mechanism 3, and the position above the conveying mechanism 3 is provided with at least one partition plate 14 in the conveying direction, for separating the area above the conveying mechanism 3 into the required drying cavity 11 and at least one waiting cavity 12. The third communication port 15 is opened on the partition plate 14 between the drying cavity 11 and the waiting cavity 12, and the conveying mechanism 3 is arranged to span the waiting cavity 12, the third communication port 15 and the drying cavity 11.

[0120] Further, as shown in Figure 4 and Figure 5 , for example, the waiting cavity 12 is multiple and arranged in sequence, the adjacent waiting cavities 12 are communicated through the fourth communication port 16 (the fourth communication port 16 is arranged on the partition plate 14 between the adjacent waiting cavities 12); the waiting cavity 12 closest to the drying cavity 11 is communicated with the drying cavity 11 through the third communication port 15; the conveying mechanism 3 spans the drying cavity 11, the third communication port 15, each waiting cavity 12 and the fourth communication port 16, and can sequentially transport the workpiece in the waiting cavity 12 to the drying cavity 11.

[0121] The above design makes the entire drying device 100 more flexible and efficient when processing multiple workpieces. When multiple etching grooves 203 have workpieces that need to be dried after etching, these workpieces can be temporarily stored in different waiting cavities 12 in sequence. The conveying mechanism 3 will transport the workpieces in the waiting cavities 12 one by one through the third communication port 15 to the drying cavity 11 for drying.

[0122] Further, as shown in Figure 4 and Figure 5 , a shielding piece 17 is installed on the third communication port 15. The design of the shielding piece 17 is consistent with the function of the sealing cover 13, which is used to block the loss of heat inside the drying cavity 11 and ensure the drying efficiency. It can also be made of materials with good heat insulation performance, and the edges can also be provided with sealing rubber strips to enhance the sealing effect and prevent heat from leaking from the third communication port 15.

[0123] There are several ways to control the opening and closing of the shielding piece 17:

[0124] Method one: the shielding piece 17 is a normally closed type that can be opened by the push of the workpiece. The design principle is similar to the common air conditioner curtain. When a person passes through, the curtain can be pushed open and entered, and after entering, the curtain automatically closes to reduce the loss of cold air.

[0125] When the conveying mechanism 3 drives the workpiece to pass through the third communication port 15, it pushes the shielding piece 17 to open it, and after passing through, the shielding piece 17 closes itself to close the third communication port 15. The shielding piece 17 can be a double-door curtain structure or an open-door curtain structure, and the specific structure is not limited.

[0126] Method two: a special shielding piece 17 control mechanism (not shown in the figure) can be installed on the device main body 1. This mechanism is connected to the shielding piece 17 and is used to control its opening and closing movement. This control mechanism can be designed to include a linear motor and a push rod connected to the output shaft of the linear motor and the shielding piece 17. The linear movement of the linear motor drives the shielding piece 17 to translate, realizing the opening and closing of the third communication port 15.

[0127] In actual application, the appropriate shielding piece 17 opening and closing control method can be selected according to the specific working scene and requirements. Of course, it is not limited to the above two control methods, and those skilled in the art can make appropriate changes based on this design.

[0128] Further, as shown in Figure 6 , for the design of the drying mechanism 2, it includes a drying head 21, which has an air inlet 211 and an air outlet 212. The air inlet 211 is connected to the heat source through an air inlet pipe.

[0129] The drying head 21 can be a wind knife head structure, which can uniformly blow hot air to the surface of the workpiece, so that the moisture on the surface of the workpiece is quickly evaporated. The air outlet 212 of the wind knife head structure is usually designed as a long and narrow gap, so that a high-speed and uniform airflow can be formed, thereby enhancing the drying effect. During the drying process, the hot air entering from the air inlet 211 is converted into a high-speed airflow by the special structure of the wind knife head and blown out from the air outlet 212, covering the surface of the workpiece and accelerating the vaporization process of the moisture.

[0130] For the design of the air inlet pipe, a layer of heat insulation material such as rock wool or glass fiber can be wrapped outside the air inlet pipe. These materials can effectively block the emission of heat and ensure that the temperature of the hot air reaching the drying head 21 meets the drying requirements.

[0131] In terms of the source of hot air, a nitrogen gas supply source with a certain temperature is used. Nitrogen is an inert gas with stable chemical properties and is not prone to chemical reactions with the workpiece, which can avoid adverse effects such as oxidation on the workpiece during the drying process and ensure the quality of the workpiece. Moreover, nitrogen has a large heat capacity and can carry more heat, which helps to improve the drying efficiency. The nitrogen can be heated by a heating device to reach the appropriate temperature before being delivered to the drying head 21. The heating device can use electric heating or gas heating, and the specific heating method can be selected according to the actual production environment and cost requirements.

[0132] Further, as shown in Figure 8 the drying mechanism 2 also includes a connecting rod mechanism 22 and a connecting rod driver (not shown in the figure); the drying head 21 is rotatably installed on the side wall of the drying cavity 11 (specifically, the two ends of the drying head 21 have rotating shaft parts, which are fixed by bearing assemblies to realize the rotating installation of the drying head 21, and details are not described here); the connecting rod driver is connected to the drying head 21 through the connecting rod mechanism 22, and is used to drive the drying head 21 to swing through the connecting rod mechanism 22.

[0133] By driving the connecting rod mechanism 22 through the connecting rod driver, the drying head 21 can swing within the drying cavity 11, which can expand the coverage range of the hot air blown out by the drying head 21, so that each part of the workpiece can be more uniformly blown by the hot air. For example, for a larger workpiece, the swinging of the drying head 21 can ensure that the moisture on every part of its surface can be quickly dried, avoiding the occurrence of drying dead angles.

[0134] The design of the connecting rod mechanism 22 can have various forms, such as a crank rocker mechanism. Taking the crank rocker mechanism as an example, the connecting rod driver can be a motor, which drives the crank to rotate, and the crank drives the rocker to swing, and the rocker is connected to the drying head 21, thereby realizing the swinging of the drying head 21. This design can accurately control the swinging angle and frequency of the drying head 21, and can be adjusted according to the drying needs of different workpieces.

[0135] Further, as shown in Figure 8 addition to the above-mentioned manner of setting an independent linkage driver to drive the linkage mechanism 22 to swing the drying head 21, the linkage mechanism 22 can be connected between the drying head 21 and the conveying mechanism 3, and can move with the conveying mechanism 3 when the conveying mechanism 3 is running, and swing the drying head 21. This design ingeniously utilizes the power of the conveying mechanism 3, without the need for an additional power source to drive the drying head 21 to swing, further simplifying the device structure and reducing costs. When the conveying mechanism 3 is running, the linkage mechanism 22 will act with the movement of the conveying mechanism 3, and in turn swing the drying head 21.

[0136] This linkage manner not only improves energy utilization efficiency, but also makes the entire drying process more compact and efficient. The coordinated action of the conveying mechanism 3 and the drying head 21 reduces the running time and energy consumption of the equipment, and improves production efficiency. At the same time, due to the reduction of independent driving components, the failure rate and maintenance cost of the equipment are reduced.

[0137] Further, as shown in Figure 7 for the conveying mechanism 3 design, including a conveying belt body and a conveying motor 31. The conveying belt body is an existing conveying belt mechanism, including a conveying frame 321, a driving shaft 322, a driven shaft 323, and a transmission belt 324; wherein the transmission belt 324 can be a chain, and in the case of a chain, the driving shaft 322 and the driven shaft 323 are provided with sprocket wheels 325 engaged with the chain; the transmission belt 324 can also be a belt, and in the case of a belt, movement can be achieved through frictional contact with the driving shaft 322 and the driven shaft 323. Those skilled in the art can make changes and designs according to actual needs, without limitation.

[0138] The conveying motor 31 is an existing servo motor or rotary motor, and its output shaft is connected to the driving shaft 322 in the conveying belt body, which drives the transmission belt 324 to move, and in turn drives the workpiece on the transmission belt 324 to move. The conveying motor 31 is installed outside the device main body 1, and is sealed and installed through the protective cover 18 as shown in Figure 2 .

[0139] Further, as shown in Figure 8 in order to realize the linkage of the linkage mechanism 22 and the conveying mechanism 3, the linkage mechanism 22 can be designed to include a first fixing member 221, a second fixing member 223, and a linkage member 222.

[0140] The first fixing member 221 is fixed at the rotating connection end of the drying head 21; the second fixing member 223 is fixed at one end of the driving shaft 322 or the driven shaft 323 of the conveying belt body; the first end of the connecting rod member 222 is hinged at a position on the first fixing member 221 which is at a first distance from the rotating center line of the rotating connection end; the second end of the connecting rod member 222 is hinged at a position on the second fixing member 223 which is at a second distance from the rotating center line of the driving shaft 322 or the driven shaft 323; and the connecting rod member 222 is used to convert the rotation of the second fixing member 223 into the swing of the first fixing member 221.

[0141] When the conveying motor 31 drives the driving shaft 322 to rotate, the second fixing member 223 will rotate with the driving shaft 322. Since the two ends of the connecting rod member 222 are respectively hinged at the eccentric positions of the first fixing member 221 and the second fixing member 223, the rotation of the second fixing member 223 will be transmitted to the first fixing member 221 through the connecting rod member 222, so as to realize the swing of the first fixing member 221 and further drive the swing of the drying head 21.

[0142] Further, as shown in Figure 6 and Figure 7 , the conveying mechanism 3 further comprises a limiting frame 33; the limiting frame 33 is arranged on the conveying surface of the conveying belt body and is provided with a limiting groove 331 arranged along the conveying direction of the conveying belt body; the workpiece contacts the conveying surface through the limiting groove 331; and the limiting groove 331 is used to limit the displacement of the workpiece in the direction horizontal to the conveying direction.

[0143] The arrangement of the limiting frame 33 can effectively ensure the stability of the workpiece during the conveying process. When the conveying belt body drives the workpiece to move, the limiting groove 331 can prevent the workpiece from deviating or shaking in the direction vertical to the conveying direction due to various factors such as vibration, inertia, etc. during the conveying process. This is very important to ensure that the workpiece is accurately conveyed from the waiting cavity 12 to the drying cavity 11, and to avoid the workpiece from being jammed or colliding with other parts of the drying device 100 due to the deviation of the position of the workpiece.

[0144] By installing the limiting frame 33, the stability and reliability of the workpiece transportation can be improved, so as to further improve the working efficiency and operation quality of the entire drying device 100.

[0145] Further, as shown in Figure 6 and Figure 7As shown, a stop mechanism 6 is installed in the waiting chamber 12; the stop mechanism 6 includes a stop portion 61 that can switch between a stop position and a release position. When the stop portion 61 is in the stop position, it can contact and abut the workpiece, thereby preventing the workpiece from moving toward the drying chamber 11. The stop mechanism 6 can be a telescoping device, whose telescopic rod forms the stop portion 61. When the telescopic rod is extended a certain distance, it reaches the stop position, at which point it can contact and abut the workpiece, preventing it from moving toward the drying chamber 11. When the telescopic rod is retracted, the stop portion 61 is in the release position, allowing the workpiece to be smoothly conveyed toward the drying chamber 11.

[0146] The stop mechanism 6 can stabilize the spacing between adjacent workpieces, so that the conveying mechanism 3 can accurately convey the workpieces into the drying chamber 11 each time it performs a displacement conveying operation. Moreover, when the drying chamber 11 is drying a workpiece, the subsequent workpieces waiting to be dried can be stopped by the stop mechanism 6 at a suitable position in the waiting chamber 12, preventing the workpieces from entering the drying chamber 11 before they are ready, which would cause confusion in the drying process.

[0147] At the same time, the stop mechanism 6 can also play a protective role. During the operation of the conveying mechanism 3, if some unexpected situations occur, such as abnormal conveying speed, the stop mechanism 6 can stop the workpiece in time to prevent the workpieces from colliding with each other.

[0148] Of course, a detector (such as a laser detection probe, etc., without limitation) may be further designed to detect whether a workpiece accurately stays at the position of the stop portion 61 .

[0149] The stop mechanism 6 can be set on one side of the limit frame 33 at the limit groove 331. When its stop part 61 extends into the position above the limit groove 331, it can form a stop effect on the workpiece. When it retracts, it can allow the workpiece to pass smoothly.

[0150] Furthermore, if Figure 9 As shown, taking the workpiece as a carrier 4 carrying a wafer 5 as an example, it can be specifically designed to include a side frame 41 and a base frame 42; the base frame 42 is vertically connected to the bottom of the first side surface of the side frame 41, and is provided with a first card slot 421 for the bottom edge of the wafer 5 to be inserted into; the first side surface of the side frame 41 is respectively fixed with limiting columns 43 on both sides above the base frame 42; a accommodating area for accommodating the wafer 5 is formed between the limiting columns 43 and the base frame 42; the limiting columns 43 are provided with a second card slot 431 for the side edge of the wafer 5 to pass through.

[0151] Through the above design, at least one side of the wafer 5 can be maximally exposed to the drying environment, so that the hot air can fully and uniformly blow to the surface of the wafer 5, thereby significantly improving the drying effect. In addition, the clamping groove type edge limiting design can suspend the wafer 5, so that there is enough gap between the wafer 5 and the side frame 41, and the heat flows through the other side of the wafer 5, so that the heat flows smoothly around the wafer 5 and carries away the surface moisture.

[0152] The clamping groove type edge limiting design also makes the wafer 5 more stable during transportation and drying. Even if the conveyor belt body produces certain vibration during operation, the clamping groove of the limiting column 43 and the bottom frame 42 can firmly fix the wafer 5, prevent it from shifting or shaking, and ensure the position accuracy of the wafer 5 during drying. At the same time, the design of the clamping groove will not cause excessive extrusion or damage to the wafer 5, ensuring the integrity and quality of the wafer 5.

[0153] Further, as shown in Figure 9 The second side of the side frame 41 opposite to the first side has a clamping block 44 fixed on the top for the material moving robot 202 to grab.

[0154] The design of the clamping block 44 facilitates the precise grabbing and moving operation of the material moving robot 202 on the carrier 4 carrying the wafer 5. The material moving robot 202 can cooperate with the clamping block 44 through a specific grabbing mechanism to realize stable grabbing and handling of the carrier 4. This design makes the entire automated production process more smooth, reduces the possibility of manual intervention, and improves production efficiency and product quality.

[0155] In order to ensure that the material moving robot 202 can accurately grab the clamping block 44, the surface of the clamping block 44 can also be specially treated, for example, increasing the anti-skid lines or using special materials, to enhance the friction between the robot grabbing mechanism and the clamping block 44.

[0156] The above provides a detailed introduction to a wet process platform with wall-mounted drying. For those skilled in the art, according to the idea of the embodiment of the present application, the specific implementation and application range will be changed, and the above description should not be understood as a limitation of the present application.

Claims

1. A wet bench with wall-hung drying, characterized in that, The wet bench body (200) and the drying device (100) are included. The wet bench body (200) has a working chamber (201). The working chamber (201) is provided with an etching groove (203) at the bottom. The working chamber (201) is provided with a material moving robot (202). The drying device (100) is installed on the side of the working chamber (201). The material moving robot (202) is used to move the workpiece into the etching groove (203) for etching. The material moving robot (202) is also used to move the workpiece in the etching groove (203) into the drying device (100) for drying.

2. A wet bench with wall-hung drying according to claim 1, characterized in that, The drying device (100) includes a device body (1) and a drying mechanism (2). The device body (1) is provided with a drying cavity (11). The drying cavity (11) has a first communication port (111) that communicates with the outside of the device body (1) and allows the workpiece to pass through. The drying mechanism (2) is installed in the drying cavity (11) and is used to dry the workpiece in the drying cavity (11).

3. A wet bench with wall-hung drying according to claim 2, characterized in that A sealing cover (13) is installed on the first communication port (111). A switch cover mechanism is installed on the device body (1). The switch cover mechanism is connected to the sealing cover (13) and is used to control the opening and closing movement of the sealing cover (13).

4. A wet bench with wall-hung drying according to claim 2, characterized in that, A sealing cover (13) is installed on the first communication port (111). The material moving robot (202) is also used to grab the sealing cover (13) to drive the sealing cover (13) to open or close.

5. A wet bench with wall-hung drying according to claim 2, characterized in that, The device body (1) is also provided with a waiting cavity (12). The waiting cavity (12) has a second communication port (121) that communicates with the outside of the device body (1) and allows the workpiece to pass through.

6. A wet bench with wall-hung drying according to claim 5, characterized in that The drying device (100) further includes a conveying mechanism (3). The device body (1) is also provided with a third communication port (15) that communicates the waiting cavity (12) with the drying cavity (11). The conveying mechanism (3) is installed on the device body (1) and spans the waiting cavity (12), the third communication port (15), and the drying cavity (11), and is used to convey the workpiece in the waiting cavity (12) to the drying cavity (11) through the third communication port (15).

7. A wet bench with wall-hung drying according to claim 6, characterized in that The waiting cavities (12) are multiple and arranged in sequence. Adjacent waiting cavities (12) are connected by a fourth communication port (16). The waiting cavity (12) closest to the drying cavity (11) is connected to the drying cavity (11) through the third communication port (15). The conveying mechanism (3) spans the drying cavity (11), the third communication port (15), each waiting cavity (12), and the fourth communication port (16), and can sequentially convey the workpiece in the waiting cavity (12) to the drying cavity (11).

8. A wet bench with wall-hung drying according to claim 6, characterized in that, A shielding piece (17) is installed on the third communication port (15). The shielding piece (17) is a normally closed shielding piece that can be opened by the workpiece.

9. A wet bench with wall-hung drying according to claim 6, characterized in that, A shielding piece (17) is installed on the third communication port (15); A shielding piece driving mechanism is installed on the device body (1); The shielding piece driving mechanism is connected with the shielding piece (17) and is used to drive the shielding piece (17) to open or close.

10. A wet bench with wall-hung drying according to claim 6, characterized in that, The drying mechanism (2) comprises a drying head (21); The drying head (21) has an air inlet (211) and an air outlet (212); The air inlet (211) is connected to a hot air source through an air inlet pipe.

11. A wet bench with a wall-hung drying according to claim 10, characterized in that The drying mechanism (2) further comprises a connecting rod mechanism (22) and a connecting rod driver; The drying head (21) is rotatably installed on the side wall of the drying cavity (11); The connecting rod driver is connected with the drying head (21) through the connecting rod mechanism (22) and is used to drive the drying head (21) to swing through the connecting rod mechanism (22).

12. A wet bench with a wall-hung drying according to claim 10, characterized in that The drying mechanism (2) further comprises a connecting rod mechanism (22); The drying head (21) is rotatably installed on the side wall of the drying cavity (11); The connecting rod mechanism (22) is connected between the drying head (21) and the conveying mechanism (3) and can move along with the conveying mechanism (3) when the conveying mechanism (3) operates and drive the drying head (21) to swing.

13. A wet bench with a wall-hung drying according to claim 12, characterized in that The conveying mechanism (3) comprises a conveying belt body and a conveying motor (31); The output shaft of the conveying motor (31) is connected with the driving shaft (322) in the conveying belt body.

14. A wet bench with a wall-hung drying according to claim 13, characterized in that The connecting rod mechanism (22) comprises a first fixing piece (221), a second fixing piece (223) and a connecting rod piece (222); The first fixing piece (221) is fixed on the rotary connection end of the drying head (21); The second fixing piece (223) is fixed on one end of the driving shaft (322) or the driven shaft (323) of the conveying belt body; The first end of the connecting rod piece (222) is hingedly connected with the first fixing piece (221) at a position with a first distance from the rotary center line of the rotary connection end; The second end of the connecting rod piece (222) is hingedly connected with the second fixing piece (223) at a position with a second distance from the rotary center line of the driving shaft (322) or the driven shaft (323); The connecting rod piece (222) is used to convert the rotation of the second fixing piece (223) into the swing of the first fixing piece (221).

15. A wet bench with a wall-hung drying according to claim 13, characterized in that, The conveying mechanism (3) further comprises a limiting frame (33); The limiting frame (33) is installed on the conveying surface of the conveying belt body and is provided with a limiting groove (331) arranged along the conveying direction of the conveying belt body; The workpiece contacts the conveying surface through the limiting groove (331); The limiting groove (331) is used to limit the displacement of the workpiece in the direction perpendicular to the conveying direction.

16. A wet bench with a wall-hung drying according to claim 13, characterized in that, A stop mechanism (6) is installed in the waiting cavity (12); The stop mechanism (6) has a stop portion (61) capable of switching movement between a stop position and a release position; When the stop portion (61) is in the stop position, it can contact and abut against the workpiece to stop the movement of the workpiece to the direction of the drying cavity (11).

17. A wet bench with wall mounting drying according to claim 1, characterized in that, The workpiece is a carrier (4) carrying a wafer (5), comprising a side frame (41) and a bottom frame (42); The bottom frame (42) is vertically connected to the bottom of the first side of the side frame (41), and is provided with a first clamping groove (421) for clamping the bottom edge of the wafer (5); The first side of the side frame (41) is respectively fixed with a limiting column (43) at the upper two sides of the bottom frame (42); The limiting column (43) and the bottom frame (42) form a containing area for containing the wafer (5); The limiting column (43) is provided with a second clamping groove (431) for the side edge of the wafer (5) to pass through.

18. A wet bench with a wall-hung drying according to claim 17, characterized in that, The top of the second side of the side frame (41) opposite to the first side is fixed with a clamping block (44) for the material moving robot (202) to grab.

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