Ultrasonic cleaning equipment

Abstract

The ultrasonic cleaning equipment comprises a groove body, a reinforcing structure and a vibration mechanism, the groove body comprises a first containing space and a first opening communicated with the first containing space, the inner wall of one side of the first containing space is defined as a vibration side, an embedding groove is formed in the vibration side, and the first opening is communicated with the first containing space. The minimum distance between the inner wall, facing the first containing space side, of the caulking groove and the outer surface of the groove body is smaller than a first preset value, the reinforcing structure is arranged in the caulking groove, the vibration mechanism is arranged on the outer surface of the groove body and comprises a vibration face, and the vibration face vibrates in a controlled mode. According to the ultrasonic cleaning equipment, due to the design of the caulking groove and the reinforcing structure, the structural strength is enhanced while the vibration side of the groove body meets the ultrasonic cleaning effect, and therefore the problems that in the prior art, due to the fact that the thickness of a panel is reduced, the water pressure resistance is reduced, and the panel is fractured are effectively solved; and therefore, the reliability and durability of the cleaning equipment are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a cleaning equipment, especially relate to an ultrasonic cleaning equipment. BACKGROUND

[0002] With the rapid development of technology, the application field of electronic chemicals is increasingly wide, and along with the rapid expansion of domestic semiconductor, electronic and other industrial chains, its demand increases significantly. In the large-scale integrated circuit (IC) manufacturing process, RCA cleaning, wet etching and other processes need to use a large amount of electronic grade chemical liquid, which usually includes acid, alkali and organic solvent and other corrosive, acidic or strong oxidizing chemicals. In the process of dispensing and using these chemicals, different materials, different capacity containers and pipe fittings are usually needed, among which 200L capacity Drum and matching DIP TUBE insertion pipe are widely used. Since the DIP TUBE insertion pipe needs to be used repeatedly, cleaning becomes an important link to ensure process stability and cleanliness.

[0003] At present, ultrasonic cleaning technology is widely used in the cleaning of DIPTUBE insertion pipe due to its good cleaning effect, no dead angle, low cost and other advantages. Usually, the effective penetration thickness of ultrasonic wave is 4mm, and in order to achieve ideal cleaning effect, the thickness of the cleaning tank panel in the existing equipment usually needs to be milled to 4mm under the premise of fully considering the matching of panel thickness and effective penetration depth of ultrasonic wave.

[0004] However, since the panel thickness is thinned, its water pressure resistance performance decreases, especially when the peak value of water pressure fluctuation exceeds the bearing range of the panel, the panel is easy to break. Moreover, in actual operation, the owner may also further increase the water pressure due to wrong operation (such as full opening of hand valve), which leads to damage of the cleaning equipment. Therefore, it is urgent to provide an ultrasonic cleaning equipment to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing an ultrasonic cleaning equipment which can optimize vibration transmission effect and improve panel structure strength.

[0006] The utility model solves the above problems by the technical scheme that an ultrasonic cleaning equipment comprises:

[0007] The tank body comprises a first containing space and a first opening in communication with the first containing space, one side inner wall of the first containing space is defined as a vibration side, the vibration side is provided with a recess, and the minimum distance from the inner wall of the recess towards the first containing space side to the outer surface of the tank body is less than a first preset value.

[0008] The reinforcing structure is arranged in the recess.

[0009] A vibration mechanism is arranged on the outer surface of the groove body, and includes a vibration surface that is controlled to vibrate. The vibration surface is arranged opposite to the embedding groove, and a gap is left between the vibration surface and the groove body. The gap is filled with a vibration medium to transmit mechanical vibration generated by the vibration surface to the vibration side of the groove body.

[0010] Preferably, the embedding groove includes an inner side wall and an inner bottom wall. The inner side wall is perpendicular to the vibration side, and the inner side wall is perpendicular to the inner bottom wall. The minimum distance between the inner side wall and the edge of the vibration side in the embedding groove is less than a second preset value.

[0011] The reinforcing structure includes a reinforcing unit arranged at the inner bottom wall of the embedding groove. The reinforcing unit includes a first end portion and a second end portion. The first end portion and the second end portion are arranged on one side of the inner side wall. The first end portion extends to the other side of the inner side wall in a first direction to form a first reinforcing segment. The second end portion extends to the other side of the inner side wall in a second direction to form a second reinforcing segment.

[0012] The first direction and the second direction are both parallel to the inner bottom wall.

[0013] Preferably, a preset included angle exists between the orthographic projection profile of the first direction on the inner bottom wall and the orthographic projection profile of the second direction on the inner bottom wall. The preset included angle is in a range of 60 degrees to 120 degrees.

[0014] Preferably, one end of the first reinforcing segment away from the first end portion is arranged coincidentally with one end of the second reinforcing segment away from the second end portion.

[0015] Preferably, the reinforcing structure includes a plurality of reinforcing units. The reinforcing units are arranged in sequence along the groove length direction of the embedding groove.

[0016] Preferably, the first end portion of the reinforcing unit is connected with the second end portion of an adjacent reinforcing unit.

[0017] Preferably, the reinforcing structure includes a plurality of reinforcing units. The reinforcing units are divided into a first unit group and a second unit group. The reinforcing units in the first unit group and the reinforcing units in the second unit group are arranged in sequence along the groove length direction of the embedding groove. The first unit group and the second unit group are arranged in mirror image.

[0018] Preferably, the first end of the reinforcing unit in the first unit group is connected with the second end of the reinforcing unit in the adjacent first unit group, and the first end of the reinforcing unit in the second unit group is connected with the second end of the reinforcing unit in the adjacent second unit group.

[0019] The reinforcing unit in the first unit group is connected with the reinforcing unit in the second unit group at the mirror image.

[0020] Preferably, the vibration mechanism further comprises:

[0021] The mounting seat is arranged outside the tank body, and comprises a receiving groove, a second opening in communication with the receiving groove, and a mounting opening in communication with the receiving groove, the second opening is arranged towards the tank body, and the second opening is fitted with the outer surface of the tank body, the mounting seat is further provided with a liquid inlet valve and a liquid outlet valve in communication with the receiving groove.

[0022] The sound generating assembly is connected with the mounting seat, the vibration surface is located at one side of the sound generating assembly, the vibration surface is arranged at the mounting opening to form a second receiving space by the vibration surface, the inner wall of the receiving groove and the outer surface of the tank body, and the projection profile of the embedding groove on the vibration side overlaps with the projection profile of the second receiving space on the vibration side.

[0023] Preferably, the sound generating assembly further comprises a vibrator, the vibrator is controlled to vibrate, the vibrator is connected with the vibration surface to make the vibration surface vibrate, and the projection profile of the vibrator on the vibration side overlaps with the projection profile of the reinforcing structure on the vibration side.

[0024] The beneficial effects of the embodiment in the utility model

[0025] The ultrasonic cleaning equipment adopts the design of the embedding groove and the reinforcing structure, the vibration side of the tank body is enhanced in structural strength while meeting the ultrasonic cleaning effect, the problem of the decrease of water pressure resistance and the rupture caused by the thinning of the panel thickness in the prior art is effectively solved, and the reliability and durability of the cleaning equipment are improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a schematic structural diagram of an embodiment in the utility model.

[0027] Figure 2 is a schematic exploded view of an embodiment in the utility model.

[0028] Figure 3 is a schematic structural diagram of a tank body in an embodiment in the utility model.

[0029] Figure 4 is a schematic cross-sectional view of the groove body in an embodiment of the present application.

[0030] Figure 5 is a schematic cross-sectional view of an embodiment of the present application.

[0031] Figure 6 is a schematic enlarged view of part A in the description of the present application. Figure 5

[0032] Wherein: 100, groove body; 110, vibration side; 111, groove; 1111, inner side wall; 1112, inner bottom wall; 120, first accommodating space; 130, first opening; 200, reinforcing structure; 210, first reinforcing segment; 220, second reinforcing segment; 300, vibration mechanism; 310, mounting seat; 311, accommodating groove; 312, second opening; 313, mounting port; 320, sound production assembly; 321, vibration surface; 322, sealing element. DETAILED DESCRIPTION

[0033] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second" and the like are only used for description purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0035] ​In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "linking" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] As shown in the preferred embodiment of the present application, a cleaning device is provided for cleaning target objects, which can be pipettes, test tubes, pipettes, etc., without specific limitation, according to the actual situation. Figures 1-4

[0037] In order to ensure the normal operation of the cleaning device, the side of the groove 100 which is thinned by milling should be prevented from being damaged in vibration, therefore, in the present embodiment, a reinforcing structure 200 is arranged in the groove 111 at an inner wall of the groove 100 to enhance the strength of the groove 111.

[0038] In the prior art, the inner wall of one side of the groove 100 is milled to form the groove 111, so that the strength of the groove 111 is reduced. During the operation of the cleaning device, the groove 111 is easily deformed and damaged under the combined action of vibration and liquid pressure of the cleaning liquid in the groove 100, which affects the normal use of the cleaning device. Therefore, the opening of the groove 111 has a great influence on the service life of the cleaning device.

[0039] In the present embodiment, unlike the prior art, the reinforcing structure 200 is arranged in the milled groove 111 to enhance the structural strength of the groove 111 while meeting the ultrasonic cleaning effect, thereby reducing the probability of deformation and damage of the groove 111.

[0040] ​Specifically, the cleaning device comprises a tank body 100, a reinforcing structure 200 and a vibration mechanism 300, wherein the tank body 100 comprises a first accommodating space 120 and a first opening 130 in communication with the first accommodating space 120, a side inner wall of the first accommodating space 120 is defined as a vibration side 110, the vibration side 110 is provided with a recess 111, and the minimum distance from the inner wall of the recess 111 towards the outer surface of the tank body 100 is less than a first preset value. The reinforcing structure 200 is fixedly arranged in the recess 111. The vibration mechanism 300 is mounted on the outer surface of the tank body 100, and the vibration mechanism 300 comprises a vibration surface 321 which is controlled to vibrate, the vibration surface 321 is arranged opposite to the recess 111, and a gap is left between the vibration surface 321 and the tank body 100, and the gap is filled with a vibration medium to transmit the mechanical vibration generated by the vibration surface 321 to the vibration side 110 of the tank body 100.

[0041] Wherein:

[0042] The first accommodating space 120 in the tank body 100 is used for placing the aforementioned target object, and the first opening 130 in communication with the first accommodating space 120 is used for taking and placing the target object. When the target object is a long pipe such as a pipette, the tank body 100 is embodied as a rectangular box body, and the length of the rectangular box body should be greater than the length of the target pipe, and in order to facilitate the taking and placing of the long pipe, the first opening 130 can be provided on one side of the rectangular box body composed of a width and a height. The vibration side 110 is a side of the inner wall of the tank body 100 which is passively vibrated under the action of the vibration mechanism 300, and the recess 111 is provided at the vibration side 110, so that the overall deformation of the vibration side 110 can be enhanced to achieve better cleaning effect. The shape of the recess 111 can be selected from shapes such as rectangle and circle, and for example, as shown in Figure 3 When the vibrator in the vibration mechanism 300 is 40HZ, the first preset value is at most 4mm, because the vibration wave of the 40HZ vibrator can generally penetrate a plate thickness of at most 4mm. It can be understood that when the vibrator in the vibration mechanism 300 is selected to be a vibrator of other frequency, the first preset value should be adapted to the plate thickness which can be penetrated by the vibration wave of the vibrator. Further, in order to ensure that the tank body 100 has sufficient strength, the material of the tank body 100 can be selected to be a 10mm thick PP plate in specific manners.

[0043] The reinforcing structure 200 is located in the recess 111, and the connecting relationship between the reinforcing structure 200 and the recess 111 can be embodied as fixed connection and integral forming. The fixed connection can be selected from connection manners such as welding, and the integral forming can be achieved by milling, that is, the reinforcing structure 200 is formed in the recess 111 at the same time when the recess 111 is milled.

[0044] The vibration mechanism 300 includes a vibration surface 321, which can be embodied as a vibration surface of an ultrasonic transducer in a specific manner. The vibration surface 321 is an area where the transducer converts electrical signals into mechanical vibrations and propagates the vibrations in the form of sound waves. The vibration surface 321 directly contacts the cleaning liquid and transmits the sound wave energy to the liquid through vibration, thereby generating a cavitation effect. Because the vibration surface 321 directly contacts the material, it can affect the cleaning effect. Therefore, a gap is left between the vibration surface 321 and the tank body 100, and a vibration medium is filled in the gap. The vibration medium can be a liquid in a specific manner, so as to vibrate the vibration side 110 of the tank body 100 through water-isolated vibration, thereby transmitting mechanical vibrations to the inside of the tank body 100.

[0045] Further, when the target object is a long pipe such as a dip tube, the vibration surface 321 of the vibration mechanism 300 is also configured to be rectangular to adapt to the tank body 100. It can be understood that the vibration mechanism 300 should also include an ultrasonic generator (not shown in the figure) and a controller (not shown in the figure), which are all prior art and will not be described in detail here.

[0046] The ultrasonic cleaning device has the design of opening the embedding groove 111 in the vibration side 110 and arranging the reinforcing structure 200 in the embedding groove 111, so that the vibration side 110 of the tank body 100 has both the ultrasonic cleaning effect and the structural strength. Therefore, the problem of the decrease in water pressure resistance and the rupture caused by the thinning of the panel thickness in the prior art is effectively solved, and the reliability and durability of the cleaning device are improved.

[0047] The principle of ultrasonic cleaning is cavitation effect generated by water-isolated vibration, and the essence of vibration is the deformation of the vibration side 110 of the tank body 100 caused by ultrasonic impact. The cleaning effect is positively correlated with the deformation of the vibration side 110. Therefore, in order to enhance the cleaning effect of the cleaning device, the size of the embedding groove 111 at the vibration side 110 can be expanded to increase the overall deformation and improve the cleaning effect. Therefore, in some embodiments, as shown in FIG. 1B, the embedding groove 111 includes an inner side wall 1111 and an inner bottom wall 1112. The inner side wall 1111 is perpendicular to the vibration side 110, and the inner side wall 1111 is perpendicular to the inner bottom wall 1112. The minimum distance between the inner side wall 1111 and the edge of the vibration side 110 in the embedding groove 111 is less than a second predetermined value. Figure 4

[0048] The smaller the second predetermined value is, the larger the size of the embedding groove 111 is. The size of the second predetermined value should be determined according to the actual use, which should include the vibration frequency of the vibration surface 321 of the sound generating assembly 320 and the material strength of the tank body 100.

[0049] ​In the embodiment, since the inner side wall 1111 of the embedded groove 111 is perpendicular to the inner bottom wall 1112, and the minimum distance between the inner side wall 1111 and the edge of the vibration side 110 is set to be less than the second preset value, the problem that the cleaning effect is limited due to insufficient deformation of the vibration side 110 in the prior art is effectively solved, and the cavitation effect is enhanced by expanding the deformation range of the vibration side 110, thereby improving the cleaning efficiency and effect of the cleaning equipment.

[0050] When the maximum strain of the vibration side 110 of the groove body 100 exceeds a certain threshold value, the vibration side 110 will be broken, therefore, in order to reduce the maximum strain of the vibration side 110, a reinforcing structure 200 is arranged in the embedded groove 111, the reinforcing structure 200 includes a reinforcing unit, the reinforcing unit is arranged at the inner bottom wall 1112 of the embedded groove 111, the reinforcing unit includes a first end and a second end, the first end and the second end are arranged on one side of the inner side wall 1111, the first end extends to the other side of the inner side wall 1111 along a first direction to form a first reinforcing segment 210, and the second end extends to the other side of the inner side wall 1111 along a second direction to form a second reinforcing segment 220.

[0051] When the embedded groove 111 is a rectangular groove, the first direction and the second direction form an angle with the groove length direction and the groove width direction of the embedded groove 111.

[0052] In the embodiment, since the reinforcing structure 200 is arranged in the embedded groove 111, and the first reinforcing segment 210 and the second reinforcing segment 220 extend in a specific direction to enhance the internal support of the embedded groove 111, the problem that the vibration side 110 is broken due to excessive strain after being stressed in the prior art is effectively solved, thereby uniformly dispersing the stress of the vibration side 110, improving the overall strength and durability of the groove body 100, and ensuring the stability of the cleaning effect.

[0053] In order to make the deformation of the vibration side 110 at the embedded groove 111 as uniform as possible, the first direction and the second direction are both parallel to the inner bottom wall 1112. Since the first direction and the second direction are both arranged to be parallel to the inner bottom wall 1112 of the embedded groove 111, the problem that the deformation distribution of the vibration side 110 at the embedded groove 111 is uneven in the prior art, thereby affecting the stability of the cleaning effect, is effectively solved, thereby realizing the uniformity of the deformation of the vibration side 110, and improving the cleaning effect and stability of the ultrasonic cleaning equipment.

[0054] In some embodiments, as Figure 4As shown, in order to make the vibration side 110 of the groove body 100 guarantee its structural strength while meeting the ultrasonic cleaning effect, the preset included angle between the orthographic projection profile of the first direction on the inner bottom wall 1112 and the orthographic projection profile of the second direction on the inner bottom wall 1112 should be set between 60 degrees and 120 degrees. Moreover, one end of the first reinforcing section 210 away from the first end portion is arranged coincidentally with one end of the second reinforcing section 220 away from the second end portion, when the number of reinforcing units is several, each reinforcing unit is arranged in sequence along the groove length direction of the embedding groove 111, and the first end portion of the reinforcing unit is connected with the second end portion of the adjacent reinforcing unit, so that each reinforcing unit is connected as a whole. At this time, according to the test, when the preset included angle is 120°, the average deformation amount of the groove body 100 is 0.13505, when the preset included angle is 90°, the average deformation amount of the groove body 100 is 0.1401, and when the preset included angle is 60°, the average deformation amount of the groove body 100 is 0.12631. Therefore, when each reinforcing unit is arranged in sequence along the groove length direction of the embedding groove 111, the angle of the preset included angle is selected as 60°, which is the best, and at this time, the average deformation amount of the vibration side 110 is the smallest.

[0055] In some embodiments, in order to ensure the structural strength of the vibration side 110 of the tank body 100 while meeting the ultrasonic cleaning effect, the first direction on the inner bottom wall 1112 has a preset angle with the second direction on the inner bottom wall 1112, and the preset angle is in the range of 60 degrees to 120 degrees. In addition, the first end of the first reinforcing segment 210 away from the first end portion is coincidentally arranged with the first end of the second reinforcing segment 220 away from the second end portion, the number of reinforcing units is several, the several reinforcing units are divided into a first unit group and a second unit group, each reinforcing unit in the first unit group and each reinforcing unit in the second unit group are sequentially arranged along the groove length direction of the embedding groove 111, the first unit group and the second unit group are mirror image arranged, the first end portion of the reinforcing unit in the first unit group is connected with the second end portion of the reinforcing unit in the adjacent first unit group, so that each reinforcing unit in the first unit group is connected as a whole, the first end portion of the reinforcing unit in the second unit group is connected with the second end portion of the reinforcing unit in the adjacent second unit group, so that each reinforcing unit in the second unit group is also connected as a whole. Furthermore, the reinforcing unit in the first unit group is connected with the reinforcing unit in the mirror image second unit group, so that the first unit group and the second unit group are connected as a whole. According to the test, when the preset angle is 120°, the average deformation of the tank body 100 is 0.13669, when the preset angle is 90°, the average deformation of the tank body 100 is 0.13505, and when the preset angle is 60°, the average deformation of the tank body 100 is 0.13706. Therefore, when each reinforcing unit is sequentially arranged along the groove length direction of the embedding groove 111 and the first unit group and the second unit group are mirror image arranged, the angle of the preset angle is 60°, which is the best, and the average deformation of the vibration side 110 is the smallest.

[0056] In summary, the number of reinforcing units in the embedding groove 111 is several, and the several reinforcing units are sequentially arranged along the groove length direction of the embedding groove 111, and the preset angle between the first direction and the second direction is 60°, so that the average deformation of the vibration side 110 is the smallest. Therefore, when the design method of the reinforcing structure 200 is selected, the embedding groove 111 can have a larger size, and the structural strength of the vibration side 110 can be ensured while the ultrasonic cleaning effect is optimized, which meets the technical requirements of efficient cleaning and equipment reliability.

[0057] In order to further improve the cleaning equipment in this application, in some embodiments, as Figure 1 、 Figure 2 、 Figure 5 and Figure 6As shown, the vibration mechanism 300 further comprises a mounting base 310 mounted outside the tank body 100, the mounting base 310 comprising a receiving groove 311, a second opening 312 communicating with the receiving groove 311, and a mounting opening 313 communicating with the receiving groove 311, the second opening 312 being arranged towards the tank body 100 and being fitted with the outer surface of the tank body 100, and the mounting base 310 being provided with a liquid inlet valve and a liquid outlet valve communicating with the receiving groove 311. The sound generating assembly 320 is connected with the mounting base 310, the vibration surface 321 being located at one side of the sound generating assembly 320, the vibration surface 321 being arranged at the mounting opening 313 to form a second receiving space through the vibration surface 321, the inner wall of the receiving groove 311 and the outer surface of the tank body 100, and the projection profile of the embedded groove 111 on the vibration side 110 overlapping the projection profile of the second receiving space on the vibration side 110.

[0058] The mounting base 310 is embodied as a rectangular frame in a specific manner for connecting the sound generating assembly 320 with the tank body 100, and making the vibration surface 321 of the sound generating assembly 320 and the surface of the tank body 100 have the aforementioned gap. It can be understood that, in order to improve the utilization rate of mechanical vibration transmission to the vibration side 110, the vibration surface 321 should be arranged opposite to the vibration side 110, i.e. the mounting base 310 is fixedly mounted on the side of the tank body 100 corresponding to the inner wall of the side where the embedded groove 111 is arranged.

[0059] In the embodiment, since the sound generating assembly 320 is connected with the outer surface of the tank body 100 through the mounting base 310, and the second receiving space is formed through the vibration surface 321, the inner wall of the receiving groove 311 and the outer surface of the tank body 100, the problem of low mechanical vibration transmission efficiency caused by the loose combination of the vibration mechanism 300 and the tank body 100 in the prior art is effectively solved, and the effect of efficient mechanical vibration energy transmission to the vibration side 110 is achieved, thereby improving the cleaning efficiency and structural stability of the ultrasonic cleaning equipment.

[0060] In order to prevent the vibration medium in the gap from leaking from the gap between the vibration surface 321 and the mounting base 310, a sealing member 322 is mounted on the inner wall of the receiving groove 311 of the mounting base 310 close to the sound generating assembly 320 to block the gap between the vibration surface 321 and the mounting base 310.

[0061] Further, when the position of the sonotrode in the sound generating assembly 320 changes in the orthographic projection of the vibration side 110, the average deformation of the vibration side 110 also changes, and based on this, in some embodiments, the sound generating assembly 320 further comprises a sonotrode (not shown in the figure) that is controlled to vibrate, the sonotrode being connected to the vibration surface 321 to make the vibration surface 321 vibrate, and the orthographic projection profile of the sonotrode in the vibration side 110 overlaps the orthographic projection profile of the reinforcement structure 200 in the vibration side 110.

[0062] Specifically, according to the test, when the orthographic projection profile of the sonotrode in the vibration side 110 does not overlap the orthographic projection profile of the reinforcement structure 200 in the vibration side 110, the average deformation of the vibration side 110 of the tank 100 is 0.10396, and when the sonotrode is aligned with the connection between the first reinforcement segment 210 and the second reinforcement segment 220 in the reinforcement unit, the average deformation of the vibration side 110 of the tank 100 is 0.10835. Therefore, in order to further reduce the average deformation of the vibration side 110, the orthographic projection profile of the sonotrode in the vibration side 110 can be made to coincide with the orthographic projection profile of the connection between the first reinforcement segment 210 and the second reinforcement segment 220 in the reinforcement unit in the vibration side 110.

[0063] In the embodiment, since the sonotrode is designed to coincide with the orthographic projection profile of the connection between the first reinforcement segment 210 and the second reinforcement segment 220 in the reinforcement unit in the vibration side 110, the problem of large average deformation of the vibration side 110 caused by improper cooperation between the position of the sonotrode and the reinforcement structure 200 in the prior art is effectively solved, and the average deformation of the vibration side 110 is significantly reduced by optimizing the vibration transmission path, thereby improving the cleaning effect and structural stability of the cleaning equipment.

[0064] The above described in the specification of the present application is only an example of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, as long as they do not deviate from the content of the specification of the present application or exceed the scope defined by the claims, and should belong to the protection scope of the present application.

Claims

1. An ultrasonic cleaning apparatus, characterized by comprising: The ultrasonic cleaning device comprises: a groove body comprising a first accommodating space and a first opening in communication with the first accommodating space, a side inner wall of the first accommodating space being defined as a vibration side, the vibration side being provided with a recess, and a minimum distance from an inner wall of the recess towards a side of the first accommodating space to an outer surface of the groove body being less than a first preset value; a reinforcing structure arranged in the recess; and a vibration mechanism arranged on an outer surface of the groove body, the vibration mechanism comprising a vibration surface, the vibration surface being controlled to vibrate, the vibration surface being arranged opposite to the recess, a gap being left between the vibration surface and the groove body, and a vibration medium being filled in the gap to transmit mechanical vibration generated by the vibration surface to the vibration side of the groove body.

2. The ultrasonic cleaning device according to claim 1, wherein: the recess comprises an inner side wall and an inner bottom wall, the inner side wall being perpendicular to the vibration side, the inner bottom wall being perpendicular to the inner side wall, and a minimum distance from the inner side wall to an edge of the vibration side in the recess being less than a second preset value; the reinforcing structure comprises a reinforcing unit, the reinforcing unit being arranged at the inner bottom wall of the recess, the reinforcing unit comprising a first end portion and a second end portion, the first end portion and the second end portion being arranged on one side of the inner side wall, the first end portion extending to the other side of the inner side wall in a first direction to form a first reinforcing segment, and the second end portion extending to the other side of the inner side wall in a second direction to form a second reinforcing segment; wherein the first direction and the second direction are both parallel to the inner bottom wall.

3. An ultrasonic cleaning apparatus as claimed in claim 2, wherein a preset included angle between a normal projection contour of the first direction on the inner bottom wall and a normal projection contour of the second direction on the inner bottom wall is in a range of 60 degrees to 120 degrees.

4. The ultrasonic cleaning apparatus of claim 2, wherein an end of the first reinforcing segment away from the first end portion is arranged coincident with an end of the second reinforcing segment away from the second end portion.

5. An ultrasonic cleaning apparatus as claimed in any one of claims 2 to 4, wherein, the reinforcing structure comprises a plurality of reinforcing units, and the reinforcing units are arranged in sequence along a groove length direction of the recess.

6. An ultrasonic cleaning apparatus as claimed in claim 5, wherein the first end portion of the reinforcing unit is connected with the second end portion of an adjacent reinforcing unit.

7. An ultrasonic cleaning apparatus as claimed in any one of claims 2 to 4, wherein, the reinforcing structure comprises a plurality of reinforcing units, the plurality of reinforcing units are equally divided into a first unit group and a second unit group, the reinforcing units in the first unit group and the reinforcing units in the second unit group are arranged in sequence along the groove length direction of the recess, and the first unit group and the second unit group are mirror arranged.

8. The ultrasonic cleaning device according to claim 7, wherein: the first end portion of the reinforcing unit in the first unit group is connected with the second end portion of an adjacent reinforcing unit in the first unit group, and the first end portion of the reinforcing unit in the second unit group is connected with the second end portion of an adjacent reinforcing unit in the second unit group; the reinforcing unit in the first unit group is connected with the mirror arranged reinforcing unit in the second unit group.

9. The ultrasonic cleaning apparatus according to claim 1 or 2 or 3 or 4 or 6 or 8, wherein, the vibration mechanism further comprises: The mounting seat is arranged outside the groove body, and comprises a receiving groove, a second opening communicated with the receiving groove, and a mounting opening communicated with the receiving groove, the second opening is arranged towards the groove body, and the second opening is fitted with the outer surface of the groove body, the mounting seat is further provided with a liquid inlet valve and a liquid outlet valve communicated with the receiving groove; The sound production assembly is connected with the mounting seat, the vibration surface is located at one side of the sound production assembly, the vibration surface is arranged on the mounting opening, to form a second receiving space by the vibration surface, the inner wall of the receiving groove, and the outer surface of the groove body, and the projection profile of the embedding groove on the vibration side overlaps the projection profile of the second receiving space on the vibration side.

10. The ultrasonic cleaning apparatus of claim 9, wherein, The sound production assembly further comprises a vibrator, the vibrator is controlled to vibrate, the vibrator is connected with the vibration surface, to make the vibration surface vibrate, and the projection profile of the vibrator on the vibration side overlaps the projection profile of the reinforcing structure on the vibration side.

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