Carrying seat device for SEM test piece plasma cleaning
By designing the carrier plate and hand rod connection assembly of the carrier device, the adaptability problem of different plasma cleaning equipment is solved, the upright placement of samples and multi-sample cleaning are achieved, and the cleaning effect and efficiency are improved.
Patent Information
- Application Number
- CN202422878123.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-23
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2034-11-23
AI Technical Summary
The carrier design of existing plasma cleaning equipment cannot adapt to the cavity design of equipment from different brands, resulting in difficulty in placing samples and poor cleaning effects. In particular, the samples cannot be placed upright, which affects the cleaning effect.
A carrier device for plasma cleaning of SEM specimens is designed, which includes a carrier plate and a handle. The handle and the carrier plate are fixed by a connecting component. The carrier plate is provided with a accommodating groove for upright placement of the sample, which is suitable for plasma cleaning equipment with different opening forms.
It improves the plasma cleaning effect, adapts to the opening forms of different plasma cleaning equipment, realizes the upright placement of samples and simultaneous cleaning of multiple samples, and improves cleaning efficiency and equipment applicability.
Smart Images
Figure CN223465296U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of plasma cleaning carriers, and in particular to a carrier device for SEM sample plasma cleaning. BACKGROUND
[0002] Plasma, also known as ionized plasma, is a state of matter different from solid, liquid and gas. Plasma surface treatment is achieved by adjusting the power or voltage of the plasma and introducing different gases to achieve the following application purposes: plasma surface cleaning, plasma etching, plasma surface activation and plasma assisted plating.
[0003] Before observing the SEM sample, it is usually necessary to use a plasma cleaning device to clean the surface of the sample. The cavity opening mode of the current plasma cleaning device can be divided into bell jar type, top opening type or side opening type. After using plasma cleaning, since the sample surface contaminants have been removed, when the sample is taken out from the cavity, other sources of pollution must be avoided, and the sample should be placed in the SEM for observation without touching.
[0004] When using the existing SEM stage to carry the sample, due to the shape of the stage, it cannot be placed vertically in the plasma device for cleaning, resulting in poor plasma cleaning effect. In addition, different brands of plasma devices have different cavity design opening modes, such as bell jar type or top opening type or side opening type. This often causes difficulty in placing the sample in the cavity. CONTENT OF THE INVENTION
[0005] In order to adapt to different plasma devices and improve the plasma cleaning effect of SEM samples, the present application provides a carrier device for SEM sample plasma cleaning.
[0006] The carrier device for SEM sample plasma cleaning provided by the present application adopts the following technical scheme:
[0007] The carrier device for SEM sample plasma cleaning includes a carrier disc, the top surface of the carrier disc is provided with a receiving groove for inserting and placing the SEM sample, the carrier disc is connected and installed with a hand lever, and the carrier disc is provided with a connecting assembly for fixedly connecting the hand lever.
[0008] By adopting the technical scheme, when the SEM sample needs to be cleaned by plasma, the hand rod is first fixedly connected with the carrier disc through the connecting assembly, then the SEM sample is inserted into the accommodating groove on the carrier disc, then the carrier disc is placed in the plasma cleaning equipment through the hand rod, and finally the plasma cleaning is performed, and under the action of the accommodating groove, the SEM sample is placed vertically, so that the plasma cleaning effect of the SEM sample is improved, and the hand rod is connected and fixed through the connecting assembly, so that the hand rod takes and places the carrier disc, and the plasma cleaning equipment of any opening form is suitable.
[0009] Optionally, the number of the accommodating grooves is at least two.
[0010] By adopting the technical scheme, through the at least two accommodating grooves, the plurality of SEM samples can be placed and cleaned by plasma at the same time, and the efficiency of the plasma cleaning is improved.
[0011] Optionally, the connecting assembly comprises a fixing seat arranged at an end corner of the carrier disc, one end of the hand rod is provided with a first threaded stud, and a screw groove is formed in the side wall of the fixing seat, and the first threaded stud is threadedly connected with the screw groove.
[0012] By adopting the technical scheme, when the hand rod needs to be installed, the hand rod is threadedly connected with the fixing seat through the first threaded stud, so that the convenience of disassembling and assembling the hand rod and the carrier disc is improved.
[0013] Optionally, the number of the screw grooves is at least two.
[0014] By adopting the technical scheme, the hand rod is threadedly connected with different screw grooves, so that the holding position of the hand rod can be changed, and the plasma cleaning equipment of any opening form is suitable.
[0015] Optionally, the connecting assembly comprises a connecting seat arranged at an end corner of the carrier disc, a swing groove is formed in the side wall of the connecting seat, a connecting barrel is hingedly arranged in the swing groove, one end of the hand rod is provided with a second threaded stud, the hand rod is threadedly connected with the connecting barrel through the second threaded stud, and the connecting seat is provided with a fixing member for fixing the connecting barrel.
[0016] By adopting the technical scheme, the installation direction is adjusted through the swing connecting barrel, the connecting barrel is fixed at the current position through the fixing member, the hand rod is threadedly connected with the connecting barrel through the second threaded stud when the installation direction is adjusted, the hand rod is connected and fixed with the carrier disc through the connecting barrel at this time, and the convenience of disassembling and assembling the hand rod is improved, and the applicability of the hand rod to the plasma cleaning equipment of any opening form is improved.
[0017] Optionally, the fixing member is a protrusion, the protrusion is arranged on two symmetrical sides of the connecting barrel, the connecting seat is provided with at least two groups of positioning grooves based on the groove wall of the swing groove, and the protrusion is clamped with the positioning grooves.
[0018] By adopting the above technical scheme, when the protrusion is clamped in one group of the positioning grooves, the connecting barrel is fixed at the current position, the fixed position of the hand rod is adjusted by clamping the protrusion in different groups of the positioning grooves, and then the applicability of the hand rod to any open-cover type plasma cleaning equipment is improved.
[0019] Optionally, the top surface of the carrier disc is provided with a first gasket.
[0020] By adopting the above technical scheme, under the action of the first gasket, it is beneficial to avoid scratches on the surface of the carrier disc on the SEM sample.
[0021] Optionally, the groove wall of the accommodating groove is provided with a second gasket.
[0022] By adopting the above technical scheme, under the action of the second gasket, it is beneficial to avoid scratches on the groove wall of the accommodating groove on the SEM sample.
[0023] In summary, the present application has the following beneficial technical effects:
[0024] When the SEM sample needs to be cleaned by plasma, the hand rod is first fixedly connected with the carrier disc through the connecting assembly, then the SEM sample is inserted into the accommodating groove on the carrier disc, then the carrier disc is placed in the plasma cleaning equipment through the hand rod, and finally the plasma cleaning is performed. Under the action of the accommodating groove, the SEM sample is beneficially placed vertically, so as to improve the plasma cleaning effect of the SEM sample, and the hand rod is connected and fixed through the connecting assembly, so as to take and place the carrier disc, which is beneficial to adapt to any open-cover type plasma cleaning equipment. BRIEF DESCRIPTION OF DRAWINGS
[0025] Figure 1 is a front view of a carrier seat device for SEM sample plasma cleaning according to an embodiment of the present application;
[0026] Figure 2 is a top view of a carrier disc and a fixing seat according to an embodiment of the present application;
[0027] Figure 3 is a front sectional view of a carrier seat device for SEM sample plasma cleaning according to an embodiment of the present application;
[0028] Figure 4 is a structural schematic view of a connecting barrel according to the present application.
[0029] Explanation of reference signs: 1, carrier disc; 2, SEM sample; 3, abutting part; 4, plug-in part; 5, accommodating groove; 6, hand lever; 7, fixing seat; 8, first stud; 9, screw groove; 10, first gasket; 11, second gasket; 12, connecting seat; 13, swing groove; 14, connecting cylinder; 15, second stud; 16, protrusion; 17, positioning groove. DETAILED DESCRIPTION
[0030] The following will be described in detail in combination with the accompanying drawings. Figures 1-4 The present application will be further described in detail.
[0031] Example I:
[0032] Referring to Figure 1 and Figure 2 , the carrier device for plasma cleaning of SEM test pieces comprises a carrier disc 1. The carrier disc 1 is used for carrying an SEM sample 2. In the art, the SEM sample 2 comprises an abutting part 3 and a plug-in part 4 fixed to the bottom surface of the abutting part 3. The abutting part 3 has various shapes, such as a circular plate shape, a wedge shape, etc. The top surface of the carrier disc 1 is provided with an accommodating groove 5, and the plug-in part 4 is plugged into the accommodating groove 5. The carrier disc 1 is connected with a hand lever 6, and the carrier disc 1 is moved by the hand lever 6. The carrier disc 1 is also provided with a connecting assembly for fixedly connecting the hand lever 6 with the carrier disc 1.
[0033] When the SEM sample 2 needs to be plasma cleaned, first, the installation position of the hand lever 6 is selected according to the opening form of the plasma cleaning equipment, and at the same time, the hand lever 6 is fixedly connected with the carrier disc 1 through the connecting assembly. Then, the plug-in part 4 of the SEM sample 2 is plugged into the accommodating groove 5, and then the carrier disc 1 with the SEM sample 2 placed thereon is placed in the plasma cleaning equipment through the hand lever 6, and finally, plasma cleaning is performed.
[0034] Referring to Figure 2 In order to simultaneously plasma clean multiple SEM samples 2, the number of accommodating grooves 5 is at least two. In this embodiment, the number of accommodating grooves 5 is three, and each accommodating groove 5 can simultaneously accommodate multiple SEM samples 2.
[0035] Specifically, referring to Figure 1 , the connecting assembly comprises a fixing seat 7 fixedly installed at the corner position of the carrier disc 1. One end of the hand lever 6 is coaxially fixedly connected with a first stud 8, and the side wall of the fixing seat 7 is provided with a screw groove 9, and the first stud 8 is threadedly connected with the screw groove 9.
[0036] It is worth mentioning that, referring to Figure 2 , the number of screw grooves 9 is at least two. In this embodiment, the number of screw grooves 9 is two, one of which is located at the top surface of the fixing seat 7, and the other is located at the side wall of the fixing seat 7.
[0037] When the hand lever 6 is needed to be installed, first of all, according to the opening cover type of the plasma cleaning equipment, the installation position of the hand lever 6 is selected, that is, the selection of the screw groove 9. Then the hand lever 6 is screwed with the fixed seat 7 through the first screw post 8, at this time the user can drive the carrier to move through the hand lever 6.
[0038] Referring to Figure 1 and Figure 2 In order to avoid scratching the SEM sample 2 during plasma cleaning, the top surface of the carrier disc 1 is fixedly connected with the first gasket 10, and the groove wall of the accommodating groove 5 is fixedly connected with the second gasket 11.
[0039] Working principle of the carrier seat device for plasma cleaning of SEM test pieces:
[0040] When the SEM sample 2 needs to be plasma cleaned, first of all, according to the opening cover type of the plasma cleaning equipment, the installation position of the hand lever 6 is selected, that is, the selection of the screw groove 9. Then the hand lever 6 is screwed with the fixed seat 7 through the first screw post 8, then the plug-in part 4 of the SEM sample 2 is plugged into the accommodating groove 5, then the carrier disc 1 with the SEM sample 2 placed therein is placed in the plasma cleaning equipment through the hand lever 6, and finally the plasma cleaning is carried out.
[0041] Example two:
[0042] The difference between example one and example two is that the structure of the connecting assembly is different.
[0043] Specifically, referring to Figure 3 and Figure 4 The connecting assembly comprises a connecting seat 12, the connecting seat 12 is fixedly installed at the end corner position of the carrier disc 1, the side wall of the connecting seat 12 is provided with a swing groove 13, and the swing groove 13 is hingedly connected with a connecting cylinder 14. One end of the hand lever 6 is coaxially fixedly connected with a second screw post 15, and the second screw post 15 is screwed with one end of the connecting cylinder 14 away from the hinged end.
[0044] In addition, in order to facilitate the fixation of the connecting cylinder 14 in the swing groove 13, the connecting seat 12 is further provided with a fixing piece, which is a protrusion 16. The protrusion 16 is fixedly connected to the symmetrical two sides of the connecting cylinder 14, and the connecting cylinder 14 is tightly swing-connected with the swing groove 13 through the protrusion 16. The connecting seat 12 is provided with a positioning groove 17 based on the groove wall of the swing groove 13, and the number of the positioning grooves 17 is at least two groups. In this embodiment, the number of the positioning grooves 17 is two groups, and the protrusion 16 is clamped with the positioning grooves 17. When the protrusion 16 is clamped with one of the positioning grooves 17, the connecting cylinder 14 is vertically arranged. When the protrusion 16 is clamped with the other group of positioning grooves 17, the connecting cylinder 14 is horizontally arranged.
[0045] Working principle of the carrier seat device for plasma cleaning of SEM test pieces:
[0046] When the SEM sample 2 needs to be cleaned by plasma, first, the installation position of the hand lever 6, i.e. the position of the connecting cylinder 14, is selected according to the opening mode of the plasma cleaning equipment, and the connecting cylinder 14 is fixed at the current position under the clamping action of the protrusion 16 and the positioning groove 17. Then the hand lever 6 is screwed with the connecting cylinder 14 through the first stud 8, and then the plug-in part 4 of the SEM sample 2 is plugged into the accommodating groove 5, and then the carrier 1 with the SEM sample 2 is placed in the plasma cleaning equipment through the hand lever 6, and finally the plasma cleaning is performed.
[0047] In summary, under the action of the accommodating groove 5, the SEM sample 2 is placed vertically, thereby improving the plasma cleaning effect of the SEM sample 2, and the hand lever 6 is connected and fixed by the connecting assembly, so as to take and place the carrier 1, which is suitable for any plasma cleaning equipment with any opening mode.
[0048] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, and therefore: any equivalent changes made according to the structure, shape and principle of the present application shall be covered within the protection scope of the present application.
Claims
1. A carrier device for plasma cleaning of SEM specimens, comprising a carrier plate (1), characterized in that: The top surface of the carrier disc (1) is provided with a containing groove (5) for inserting and placing the SEM sample (2), the carrier disc (1) is connected and installed with a hand rod (6), and the carrier disc (1) is provided with a connecting assembly for fixedly connecting the hand rod (6).
2. The apparatus according to claim 1, wherein: The number of the containing grooves (5) is at least two.
3. The apparatus of claim 1 wherein: the apparatus further comprises a plurality of said SEM specimen plasma cleaning holders. The connecting assembly comprises a fixing seat (7) arranged at an end corner of the carrier disc (1), one end of the hand rod (6) is provided with a first stud (8), a screw groove (9) is formed in the side wall of the fixing seat (7), and the first stud (8) is threadedly connected with the screw groove (9).
4. The apparatus of claim 3 wherein: The number of the screw grooves (9) is at least two.
5. The apparatus of claim 1 wherein: the apparatus further comprises a plurality of said SEM specimen plasma cleaning holders. The connecting assembly comprises a connecting seat (12) arranged at an end corner of the carrier disc (1), an oscillation groove (13) is formed in the side wall of the connecting seat (12), a connecting cylinder (14) is hingedly arranged in the oscillation groove (13), one end of the hand rod (6) is provided with a second stud (15), the hand rod (6) is threadedly connected with the connecting cylinder (14) through the second stud (15), and the connecting seat (12) is provided with a fixing member for fixing the connecting cylinder (14).
6. A holder apparatus for plasma cleaning of an SEM specimen according to claim 5, wherein: The fixing member is a protrusion (16) arranged on the two symmetrical sides of the connecting cylinder (14), at least two groups of positioning grooves (17) are formed in the groove wall of the oscillation groove (13) based on the connecting seat (12), and the protrusion (16) is clamped with the positioning grooves (17).
7. The apparatus of claim 1 wherein: the apparatus further comprises a plurality of electrodes; and the plurality of electrodes are configured to be electrically coupled to a power supply. The top surface of the carrier disc (1) is provided with a first gasket (10).
8. The apparatus of claim 1 wherein: the apparatus further comprises a plurality of SEM specimen plasma cleaning holders. The groove wall of the containing groove (5) is provided with a second gasket (11).