Efficient water circulation type cooling backboard structure

Abstract

The utility model discloses an efficient water circulation type cooling backboard structure which comprises an anti-attachment plate, a backboard body is arranged on the side portion of the anti-attachment plate, a plurality of internal cooling water channels are formed in the backboard body, the two sides of the backboard body are connected with a left side water storage tank and a right side water storage tank respectively, a left side water cooling assembly is arranged on the left side water storage tank, and a right side water cooling assembly is arranged on the right side water storage tank. According to the efficient water circulation type cooling backboard structure, the multiple internal cooling water channels are formed in the backboard body, water solutions circulate in the multiple internal cooling water channels, heat is carried away through the water solutions, and therefore the purpose of rapid cooling is achieved; one group of cooling water enters from the left side, the other group of cooling water enters from the right side and the two groups of cooling water simultaneously, so that the problem of large temperature difference of the backboard body can be avoided, and the cooling speed is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coated equipment prevent the cooling technology field of plate, especially, relate to a kind of high-efficiency water circulation type cooling backplate structure. BACKGROUND

[0002] Coated equipment target material cooling rapid cooling needs to use water cooling plate, coated target material is through magnetron sputtering, multiple arc ion plating or other types of coating system under appropriate process condition sputtering on substrate to form various functional thin film sputtering source, the top of water cooling plate is equipped with prevent the plate.

[0003] The side of prevent the plate is equipped with backplate for water cooling, and the backplate is used to cool and dissipate heat for prevent the plate, and the cooling and heat dissipation on the backplate are mostly in the mode of circulating water cooling, but the traditional cooling mode is mostly water inlet at one end and water outlet at the other end for cooling, since the temperature of water inlet at one end is low, with continuous heat absorption and cooling, the temperature of the rear is high, which causes a large temperature difference between the two sides of the backplate at this time, affecting the use performance, and therefore a high-efficiency water circulation type cooling backplate structure is proposed. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides a high-efficiency water circulation type cooling backplate structure to solve the above problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A high-efficiency water circulation type cooling backplate structure, comprising a prevent plate, a backplate body is arranged on the side of the prevent plate, a plurality of internal cooling water channels are formed in the backplate body, left and right side water storage tanks are connected to the two sides of the backplate body respectively, a left side water cooling assembly is arranged on the left side water storage tank, a right side water cooling assembly is arranged on the right side water storage tank, the left and right side water cooling assemblies are located at one side of the backplate body, and a blowing heat dissipation assembly is arranged at one side of the backplate body.

[0007] Preferably, the left side water cooling assembly comprises a left side water pump fixedly installed on the left side water storage tank, a left side cooling water pipe is connected to the left side water pump, a left side communication pipe is connected to one end of the left side cooling water pipe, a plurality of left side water outlet pipes are connected to one end of the left side communication pipe, and one end of the left side water outlet pipe is connected to the backplate body in communication.

[0008] Preferably, a plurality of left side water outlet holes and left side water inlet holes are formed in the backplate body, the left side water outlet holes and the left side water inlet holes are connected to the internal cooling water channels in communication, the plurality of left side water outlet pipes are connected to the plurality of left side water outlet holes in communication respectively, a plurality of left side water inlet pipes are connected to one side of the left side water storage tank in communication respectively, and the plurality of left side water inlet pipes are connected to the plurality of left side water inlet holes in communication respectively.

[0009] Preferably, the right water cooling assembly comprises a right water pump fixedly installed on the right water storage tank, and a right cooling water pipe connected to the right water pump, one end of the right cooling water pipe being connected with a right communication pipe, one end of the right communication pipe being connected with a plurality of right water outlet pipes, and the plurality of right water outlet pipes being communicated with the back plate body.

[0010] Preferably, one side of the back plate body is provided with a plurality of right water outlet holes and right water inlet holes, the plurality of right water outlet holes being arranged in a staggered manner with the plurality of left water outlet holes, the plurality of right water outlet pipes being respectively communicated with the plurality of right water outlet holes, and one side of the right water storage tank being connected with a plurality of right water inlet pipes, one end of the plurality of right water inlet pipes being respectively communicated with the plurality of right water inlet holes.

[0011] Preferably, the left water tank water supplement pipe and the right water tank water supplement pipe are arranged on the left water storage tank and the right water storage tank respectively.

[0012] Preferably, the air blowing and heat dissipating assembly comprises a plurality of supporting legs fixedly installed on one side of the back plate body, and air blowing fans connected to the plurality of supporting legs.

[0013] Compared with the prior art, the high-efficiency water circulation type cooling back plate structure has the advantages that: the back plate body is provided with a plurality of internal cooling water channels, and water solution flows in the plurality of internal cooling water channels, so that the heat is carried away by the water solution, thereby achieving the purpose of rapid cooling; the plurality of internal cooling water channels are divided into two groups, one group being cooled by water from the left side and the other group being cooled by water from the right side, so that the problem of large temperature difference of the back plate body can be avoided, and the cooling speed is fast.

[0014] When cooling, the left water cooling assembly is arranged, the water solution in the back plate body enters from the left side to achieve the effect of circulating cooling, the right water cooling assembly is arranged, the water solution in the back plate body enters from the right side to achieve the effect of circulating cooling, the left cooling water pipe and the right cooling water pipe are long and are arranged in a curved manner, the air blowing and heat dissipating assembly is arranged to generate rapid air blowing to cool the long cooling water pipes, thereby achieving the effect of high-efficiency cooling, and the heat emitted from the back plate body is also carried away by the air blowing, so that the heat dissipation effect is good. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a three-dimensional structure schematic view of the utility model;

[0016] Figure 2 It is a sectional structure schematic view of the utility model;

[0017] Figure 3 It is a three-dimensional structure schematic view of the left water cooling assembly of the utility model;

[0018] Figure 4 It is a three-dimensional structure schematic view of the right water cooling assembly of the utility model.

[0019] In the figure: 1, the anti-plate; 2, the back plate body; 3, the internal cooling water channel; 4, the left side water storage tank; 5, the left side water pump; 6, the left side cooling water pipe; 7, the left side communication pipe; 8, the left side water outlet pipe; 9, the left side water outlet hole; 10, the left side water inlet hole; 11, the left side water inlet pipe; 12, the left side water tank water replenishing pipe; 13, the right side water storage tank; 14, the right side water pump; 15, the right side cooling water pipe; 16, the right side communication pipe; 17, the right side water outlet pipe; 18, the right side water outlet hole; 19, the right side water inlet hole; 20, the right side water inlet pipe; 21, the right side water tank water replenishing pipe; 22, the blowing fan; 23, the supporting leg. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] Embodiment: Refer to Figures 1-4 An efficient water circulation type cooling back plate structure, comprising an anti-plate 1, the side of the anti-plate 1 is provided with a back plate body 2, a plurality of internal cooling water channels 3 are formed in the back plate body 2, a plurality of internal cooling water channels 3 are arranged on the back plate body 2, and water solution flows through the plurality of internal cooling water channels 3. The water solution carries away heat, so that the purpose of rapid cooling is achieved. The back plate body 2 is connected with a left side water storage tank 4 and a right side water storage tank 13 on the two sides, respectively. A left side water cooling assembly is arranged on the left side water storage tank 4, and a right side water cooling assembly is arranged on the right side water storage tank 13. The left side water cooling assembly and the right side water cooling assembly are located on one side of the back plate body 2. A blowing heat dissipation assembly is arranged on one side of the back plate body 2. A left side water tank water replenishing pipe 12 is arranged on the left side water storage tank 4, and a right side water tank water replenishing pipe 21 is arranged on the right side water storage tank 13. The left side water tank water replenishing pipe 12 and the right side water tank water replenishing pipe 21 can replenish water in the water tank, respectively.

[0022] Specifically, the left water cooling assembly includes a left water pump 5 fixedly installed on the left water storage tank 4, the left water pump 5 is connected with a left cooling water pipe 6, one end of the left cooling water pipe 6 is connected with a left communication pipe 7, one end of the left communication pipe 7 is connected with a plurality of left water outlet pipes 8, one end of the left water outlet pipe 8 is connected with the back plate body 2, a plurality of left water outlet holes 9 and left water inlet holes 10 are formed in the back plate body 2, the left water outlet hole 9 and the left water inlet hole 10 are connected with the internal cooling water channel 3, the plurality of left water outlet pipes 8 are connected with the plurality of left water outlet holes 9 respectively, one side of the left water storage tank 4 is connected with a plurality of left water inlet pipes 11, the plurality of left water inlet pipes 11 are connected with the plurality of left water inlet holes 10 respectively, the left water pump 5 on the left water cooling assembly operates, the water solution in the back plate body 2 will enter the left water storage tank 4 through the left water outlet pipe 8, the left communication pipe 7 and the left cooling water pipe 6, and the circulation cooling effect is realized.

[0023] Specifically, the right water cooling assembly includes a right water pump 14 fixedly installed on the right water storage tank 13, the right water pump 14 is connected with a right cooling water pipe 15, one end of the right cooling water pipe 15 is connected with a right communication pipe 16, one end of the right communication pipe 16 is connected with a plurality of right water outlet pipes 17, the plurality of right water outlet pipes 17 are connected with the back plate body 2, a plurality of right water outlet holes 18 and right water inlet holes 19 are formed in one side of the back plate body 2, the plurality of right water outlet holes 18 are arranged in a staggered manner with the plurality of left water outlet holes 9, the plurality of right water outlet pipes 17 are connected with the plurality of right water outlet holes 18 respectively, one side of the right water storage tank 13 is connected with a plurality of right water inlet pipes 20, one end of the plurality of right water inlet pipes 20 is connected with the plurality of right water inlet holes 19 respectively, the right water pump 14 on the right water cooling assembly operates, the water solution in the back plate body 2 enters the right water storage tank 13 through the right water outlet pipe 17, the right communication pipe 16 and the right cooling water pipe 15, and the circulation cooling is realized, the plurality of internal cooling water channels 3 are divided into two groups, one group is cooled from the left water inlet, and the other group is cooled from the right water inlet, and the two groups are cooled at the same time, so that the problem of large temperature difference of the back plate body 2 can be avoided, and the cooling speed is fast.

[0024] Specifically, the blowing heat dissipation assembly includes a plurality of supporting legs 23 fixedly installed on one side of the back plate body 2, and a blowing fan 22 is connected with the plurality of supporting legs 23, the left cooling water pipe 6 and the right cooling water pipe 15 are long and are arranged in a curved manner, the blowing heat dissipation assembly is arranged, rapid blowing is generated, the long cooling water pipe is cooled, and high-efficiency cooling effect is realized, and the heat emitted from the back plate body 2 is also carried away by the blowing, so that the heat dissipation effect is good.

[0025] In use: the coating equipment needs to be cooled quickly during use, a back plate body 2 is arranged on the side of the back plate 1, a plurality of internal cooling water channels 3 are arranged on the back plate body 2, and water solution flows in the plurality of internal cooling water channels 3, so that the heat is carried away by the water solution, thereby achieving the purpose of quick cooling, the plurality of internal cooling water channels 3 are divided into two groups, one group cools from the left side, and the other group cools from the right side, the two groups cool at the same time, thereby the problem of large temperature difference of the back plate body 2 can be avoided, the cooling speed is fast, when cooling, the left water cooling assembly and the right water cooling assembly are started to run, the left water pump 5 on the left water cooling assembly runs, the water solution in the back plate body 2 is sent in from the left side to realize the effect of circulating cooling, and the right water pump 14 on the right water cooling assembly runs, the water solution in the back plate body 2 is sent in from the right side to realize the effect of circulating cooling, the left cooling water pipe 6 and the right cooling water pipe 15 are long and are arranged to be curved, the air blowing heat dissipation assembly is arranged, quick air blowing is generated to cool the long cooling water pipe, thereby realizing the effect of efficient cooling, and the heat emitted from the back plate body 2 is also carried away by the air blowing, so that the heat dissipation effect is good.

[0026] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency water circulation type cooling backboard structure comprising a backboard (1), the side portion of the backboard (1) is provided with a backboard body (2), characterized in that, The back plate body (2) is provided with a plurality of internal cooling water channels (3), and the left and right sides of the back plate body (2) are respectively connected with a left water storage tank (4) and a right water storage tank (13).

2. A high efficiency water-circulation cooling backplane structure according to claim 1, wherein, The left water cooling assembly comprises a left water pump (5) fixedly installed on the left water storage tank (4), and the left water pump (5) is connected with a left cooling water pipe (6).

3. A high efficiency water-circulation cooling backplane structure according to claim 2, wherein, The back plate body (2) is provided with a plurality of left water outlet holes (9) and left water inlet holes (10), and the left water outlet holes (9) and the left water inlet holes (10) are in communication with the internal cooling water channels (3).

4. A high efficiency water-circulation type cooling back panel structure according to claim 3, characterized in that, The right water cooling assembly comprises a right water pump (14) fixedly installed on the right water storage tank (13), and the right water pump (14) is connected with a right cooling water pipe (15).

5. A high efficiency water-circulation cooling backplane structure according to claim 4, wherein, The back plate body (2) is provided with a plurality of right water outlet holes (18) and right water inlet holes (19), and the plurality of right water outlet holes (18) are arranged in a staggered manner with the plurality of left water outlet holes (9).

6. A high efficiency water-circulation cooling backplane structure as claimed in claim 1, wherein, The left water storage tank (4) is provided with a left water tank water supplement pipe (12), and the right water storage tank (13) is provided with a right water tank water supplement pipe (21).

7. The high efficiency water-circulation cooling backplane structure of claim 1, wherein, The air blowing heat dissipation assembly comprises a plurality of supporting legs (23) fixedly installed on one side of the back plate body (2), and the plurality of supporting legs (23) are connected with an air blowing fan (22).

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