Horizontal electrode cooling structure

Abstract

The utility model relates to a horizontal electrode cooling structure. The device comprises an upper electrode group and a lower electrode group which are arranged up and down, each of the upper electrode group and the lower electrode group comprises a plurality of horizontal and parallel sub-electrode frames arranged up and down, a circulating flow channel is arranged in each sub-electrode frame, and each sub-electrode frame is provided with a first connector and a second connector; two ends of the circulating runner are respectively communicated with the first joint and the second joint; the first joints of the upper electrode group and the lower electrode group are connected to the communicating pipeline so as to communicate the upper electrode group with the lower electrode group; the second joints of the lower electrode groups are connected to a water inlet pipeline, and the second joints of the upper electrode groups are connected to a water outlet pipeline; cooling liquid flows in from the water inlet pipeline, flows through the lower electrode assembly, flows through the upper electrode assembly through the communicating pipeline and flows out from the water outlet pipeline. Cooling liquid enters from the lower end and flows out from the upper end, the upper electrode set and the lower electrode set can be completely cooled, the cooling effect is uniform, and the problem that the temperature difference between the upper electrode set and the lower electrode set is too large is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor etching machine especially relates to a horizontal electrode cooling structure. BACKGROUND

[0002] The electrode plays a vital role in the semiconductor etching machine, they are not only responsible for generating and controlling the plasma, also affect the efficiency, precision and controllability of the etching process; the temperature of the electrode will continue to rise in the semiconductor etching process, and then lead to the reduction of etching efficiency and precision.

[0003] The horizontal electrode is one of them, which is usually the upper and lower stacked electrode frame structure, generally the cooling liquid is passed in from one side and passed out from the other side, but due to the influence of gravity on the cooling liquid, the cooling is mainly concentrated on the lower electrode frame, and the cooling effect of the upper electrode frame is poor, resulting in a large temperature difference between the upper and lower electrode frames, affecting the working stability of the electrode. UTILITY MODEL CONTENT

[0004] In order to overcome the above problems, the utility model provides a horizontal electrode cooling structure, and the utility model solves the technical problems thereof by adopting the technical scheme of:

[0005] A horizontal electrode cooling structure, comprising an upper electrode group and a lower electrode group arranged in an upper and lower position, the upper electrode group and the lower electrode group each comprising a plurality of horizontally arranged and mutually parallel sub-electrode frames arranged in an upper and lower position, each of the sub-electrode frames being provided with a circulating flow channel, each of the sub-electrode frames being provided with a first connector and a second connector, and the two ends of the circulating flow channel being respectively connected to the first connector and the second connector; the first connectors of the upper electrode group and the lower electrode group are connected to a connecting pipeline to connect the upper electrode group and the lower electrode group; the second connectors of the lower electrode group are connected to a water inlet pipeline, and the second connectors of the upper electrode group are connected to a water outlet pipeline; the cooling liquid flows in from the water inlet pipeline, flows through the lower electrode group, enters the upper electrode group through the connecting pipeline and flows through the upper electrode group, and then flows out from the water outlet pipeline.

[0006] Further, the circulating flow channel is arranged in an "S" shape in the electrode frame to make the cooling liquid flow through the entire electrode frame.

[0007] Further, the water inlet pipeline, the water outlet pipeline and the connecting pipeline are each made of metal material.

[0008] Further, the water inlet pipeline is provided with a water inlet head, the water outlet pipeline is provided with a water outlet head, the water inlet head and the water outlet head are each a quick connector and are each connected to a cooling liquid circulating device.

[0009] Further, the number of sub-electrode frames in the upper electrode group and the lower electrode group is greater than or equal to 2 and less than or equal to 8.

[0010] Further, the sub-electrode frames of the upper electrode group and the lower electrode group are arranged equidistantly in up-down direction.

[0011] Further, the upper electrode group is located directly above the lower electrode group, and the distance between the upper electrode group and the lower electrode group is equal to the distance between the sub-electrode frames.

[0012] Further, the water inlet pipe and the water outlet pipe are an integral total pipe, and a partition layer is arranged in the middle of the total pipe to form the water inlet pipe and the water outlet pipe.

[0013] The utility model discloses the beneficial effect has:

[0014] The structure includes the upper electrode group and the lower electrode group arranged in up-down direction, and the upper electrode group and the lower electrode group all include a plurality of horizontal and mutually parallel sub-electrode frames arranged in up-down direction, the sub-electrode frame all is provided with circulation flow channel, and the sub-electrode frame all is provided with first joint and second joint, and the circulation flow channel both ends are connected with first joint and second joint respectively;The first joint of the upper electrode group and the lower electrode group is all connected to the intercommunication pipe to intercommunicate the upper electrode group and the lower electrode group;The second joint of the lower electrode group is all connected to the water inlet pipe, and the second joint of the upper electrode group is all connected to the water outlet pipe;Cooling liquid flows in by the water inlet pipe, flows through the lower electrode group and then flows through the upper electrode group through the intercommunication pipe, and then flows out by the water outlet pipe;Cooling liquid enters by the lower end and flows out by the upper end, can completely cool the upper electrode group and the lower electrode group, and the cooling effect is uniform, and the problem that the temperature difference of the upper electrode group and the lower electrode group is too large does not appear. BRIEF DESCRIPTION OF DRAWINGS

[0015] The utility model will be further described in connection with the drawings and specific embodiment, wherein:

[0016] Figure 1 It is the perspective view of one embodiment of electrode cooling structure;

[0017] Figure 2 It is the perspective view of another embodiment of electrode cooling structure;

[0018] Figure 3 It is the section view of sub-electrode frame.

[0019] Figure number mark:

[0020] 100, the upper electrode group;101, the lower electrode group;102, the sub-electrode frame;103, circulation flow channel;104, first joint;105, second joint;106, intercommunication pipe;107, water inlet pipe;108, water outlet pipe;109, water inlet head;110, water outlet head. DETAILED DESCRIPTION

[0021] In order to better understand the purpose, structure and function of the utility model, specific embodiments of the utility model "a horizontal electrode cooling structure" are described in further detail below with reference to the drawings.

[0022] Referring to Figure 2 and Figure 3 In the embodiment, the electrode cooling structure comprises an upper electrode group 100 and a lower electrode group 101 arranged in an up-down position, the upper electrode group 100 is located directly above the lower electrode group 101, the upper electrode group 100 and the lower electrode group 101 each comprise a plurality of horizontally arranged and mutually parallel sub-electrode frames 102 arranged in an up-down position, a circulating flow channel 103 is arranged in each sub-electrode frame 102, a first connector 104 and a second connector 105 are arranged on each sub-electrode frame 102, and the two ends of the circulating flow channel 103 are respectively connected to the first connector 104 and the second connector 105; the first connectors 104 of the upper electrode group 100 and the lower electrode group 101 are connected to a connecting pipeline 106 to connect the upper electrode group 100 and the lower electrode group 101; the second connectors 105 of the lower electrode group 101 are connected to a water inlet pipeline 107, and the second connectors 105 of the upper electrode group 100 are connected to a water outlet pipeline 108; the cooling liquid flows in from the water inlet pipeline 107, flows through the lower electrode group 101, enters the upper electrode group 100 through the connecting pipeline 106 and flows through the upper electrode group 100, and then flows out from the water outlet pipeline 108; the cooling liquid flows in from the lower end of the electrode and flows out from the upper end of the electrode, and the cooling liquid will not only gather in the sub-electrode frames 102 at the bottom due to the action of gravity, so that all the sub-electrode frames 102 can be cooled well, and the temperature difference between the upper and lower sub-electrode frames 102 is prevented from being large to affect the stability of the electrode.

[0023] It should be noted that, in the embodiment, as preferred, the water inlet pipeline 107, the water outlet pipeline 108 and the connecting pipeline 106 are each made of a metal material to increase the strength of the water inlet pipeline 107, the water outlet pipeline 108 and the connecting pipeline 106.

[0024] Further referring to Figure 3 In the embodiment, the circulating flow channel 103 is arranged in an "S" shape in the electrode frame, so that the cooling liquid can flow through the entire electrode frame to achieve the maximum cooling contact area; and the circulating flow channel 103 has only one outlet and one inlet, so that the cooling liquid can only flow in one direction along the "S" line in the circulating flow channel 103 to ensure the stability of the cooling liquid.

[0025] Further referring to Figure 2 In the embodiment, the water inlet pipeline 107 is provided with a water inlet head 109, and the water outlet pipeline 108 is provided with a water outlet head 110, the water inlet head 109 and the water outlet head 110 are quick connectors and are each connected to a cooling liquid circulating device to control the circulation speed of the cooling liquid, thereby controlling the cooling effect of the electrode, and facilitating the disassembly and installation of the cooling circulating device.

[0026] More specifically, it should be noted that in the present embodiment, the number of sub-electrode frames 102 in the upper electrode group 100 and the lower electrode group 101 should be less than or equal to 8, at least 2, and preferably 8; because the sub-electrode frames 102 of the upper electrode group 100 / lower electrode group 101 are also arranged horizontally and parallel in the up-down position, if the number of sub-electrode frames 102 of the upper electrode group 100 / lower electrode group 101 is too large, it will cause the cooling liquid to be affected by gravity and not to pass through the uppermost sub-electrode frame 102 well, resulting in the cooling liquid mainly concentrating in the lower few sub-electrode frames 102, which will cause the upper electrode group 100 / lower electrode group 101 to have a large temperature difference between the upper and lower sub-electrode frames 102; through experimental verification, when the number of sub-electrode frames 102 of the upper electrode group 100 / lower electrode group 101 is selected to be 8, it can not only achieve the effect of setting multiple sub-electrode frames 102 to improve the efficiency of the electrode, but also will not cause the problem of large temperature difference between the upper and lower sub-electrode frames 102 in the upper electrode group 100 / lower electrode group 101; therefore, the number of sub-electrode frames 102 in the upper electrode group 100 and the lower electrode group 101 is preferably greater than or equal to 2 and less than or equal to 8, and preferably 8.

[0027] Further referring to Figure 2 In the present embodiment, the sub-electrode frames 102 of the upper electrode group 100 and the lower electrode group 101 are arranged equidistantly in the up-down direction, to ensure the uniformity of the cooling effect and the stability of the electrode operation.

[0028] Further referring to Figure 1 In another embodiment, the distance between the upper electrode group 100 and the lower electrode group 101 is equal to the distance between the sub-electrode frames 102, so that the upper electrode group 100 and the lower electrode group 101 combine to form a large electrode group that is symmetrical in the up-down and left-right directions, further improving the working efficiency of the electrode and increasing the space utilization rate, and without the problem of large temperature difference between the upper and lower sub-electrode frames 102 caused by too many layers of sub-electrode frames 102. More specifically, in order to strengthen the stability of the electrode cooling structure, the water inlet pipe 107 and the water outlet pipe 108 are an integral metal main pipe, a partition layer is arranged in the middle of the main pipe to form the water inlet pipe 107 and the water outlet pipe 108, and the main pipe and the communication pipe 106 are arranged symmetrically in the left-right direction, so that the stability of the motor cooling structure can be improved, and the space utilization rate can also be improved.

[0029] It can be understood that the utility model is described through some embodiments, and the person skilled in the art knows that various changes or equivalent replacements can be made to these features and embodiments without departing from the spirit and scope of the utility model. In addition, these features and embodiments can be modified to adapt to specific conditions and materials under the guidance of the utility model without departing from the spirit and scope of the utility model. Therefore, the utility model is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of the present application belong to the scope protected by the utility model.

[0030] In the description of the utility model, it needs to be explained that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

Claims

1. A horizontal electrode cooling structure characterized by comprising: The upper electrode group (100) and the lower electrode group (101) are provided with a plurality of horizontal and parallel sub-electrode frames (102) arranged in up-down positions, and each of the sub-electrode frames (102) is provided with a circulating flow channel (103), and each of the sub-electrode frames (102) is provided with a first connector (104) and a second connector (105), and the two ends of the circulating flow channel (103) are communicated with the first connector (104) and the second connector (105) respectively; the first connectors (104) of the upper electrode group (100) and the lower electrode group (101) are connected to a connecting pipeline (106) to connect the upper electrode group (100) and the lower electrode group (101); the second connectors (105) of the lower electrode group (101) are connected to a water inlet pipeline (107), and the second connectors (105) of the upper electrode group (100) are connected to a water outlet pipeline (108); the cooling liquid flows into the water inlet pipeline (107), flows through the lower electrode group (101), enters the upper electrode group (100) through the connecting pipeline (106), and then flows out of the water outlet pipeline (108).

2. The horizontal electrode cooling structure according to claim 1, wherein The circulating flow channel (103) is arranged in an "S" shape in the electrode frame to make the cooling liquid flow through the entire electrode frame.

3. The horizontal electrode cooling structure according to claim 1, wherein The water inlet pipeline (107), the water outlet pipeline (108) and the connecting pipeline (106) are all made of metal materials.

4. The horizontal electrode cooling structure according to claim 1, wherein The water inlet pipeline (107) is provided with a water inlet head (109), and the water outlet pipeline (108) is provided with a water outlet head (110), and the water inlet head (109) and the water outlet head (110) are quick connectors and are connected with a cooling liquid circulating device.

5. The horizontal electrode cooling structure according to claim 1, wherein The number of sub-electrode frames (102) in the upper electrode group (100) and the lower electrode group (101) is greater than or equal to 2 and less than or equal to 8.

6. A horizontal electrode cooling structure according to any one of claims 1 to 5, wherein The sub-electrode frames (102) of the upper electrode group (100) and the lower electrode group (101) are arranged at equal distances in up-down positions.

7. The horizontal electrode cooling structure according to claim 6, wherein The upper electrode group (100) is located directly above the lower electrode group (101), and the distance between the upper electrode group (100) and the lower electrode group (101) is equal to the distance between the sub-electrode frames (102).

8. The horizontal electrode cooling structure according to claim 7, wherein The water inlet pipeline (107) and the water outlet pipeline (108) are an integrated main pipeline, and a partition layer is arranged in the middle of the main pipeline to form the water inlet pipeline (107) and the water outlet pipeline (108).

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