Novel adsorption assembly

Abstract

The novel adsorption assembly comprises a suction cup, a connecting pipe, a cup seat and a valve body, the suction cup comprises an adsorption face and a vacuum air channel, the vacuum air channel comprises a first air inlet and a first air outlet, the first air inlet is formed in the adsorption face, and the first air outlet is formed in the side, away from the adsorption face, of the suction cup. One end of the connecting pipe is connected with the first air outlet in the suction cup, and a through hole is formed in the cup base. According to the adsorption assembly, due to the fact that the valve pipe and the valve sleeve are matched, the on-off state of the air channel is controlled through the relative position of the first communicating hole and the second communicating hole, the elastic force deviating from the direction of the disc base is provided for the connecting rod in combination with the elastic piece, and rapid switching between the working state and the non-working state of the suction disc is achieved; the response speed and the reliability of the adsorption assembly are improved, it is ensured that the vacuum air channel is automatically closed when the suction cup is in the non-working state, unplanned adsorption is avoided, and the wafer positioning safety and the adsorption precision are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a sucking disc, especially a novel adsorption assembly. BACKGROUND

[0002] With the rapid development of semiconductor industry, as core material, the precision requirement of wafer surface treatment is higher and higher. Because of the unevenness of wafer surface, in order to ensure the stability and flatness of wafer in subsequent processing, the concave-convex surface of wafer needs to be pulled to the same plane. This planarization operation usually relies on the adsorption assembly on the bearing table, and through the vacuum adsorption mode, each point on the wafer surface is fixed on a relatively flat reference surface, so as to realize the accurate adjustment of wafer surface.

[0003] At present, the common adsorption assembly is usually composed of a sucking disc, a connecting pipe and an adsorption system. The sucking disc is arranged on the bearing surface of the bearing table and connected with the vacuum pump through the vacuum air duct. When the sucking disc starts adsorption, the vacuum pump provides suction force through the connecting pipe, and cooperates with the driving mechanism to pull the concave-convex surface of the wafer to the reference plane.

[0004] However, in the use process of the existing adsorption assembly, the vacuum air duct is always in a connected state, which is easy to cause the sucking disc to be accidentally adsorbed on some positions on the wafer surface when it is not moved to the target position, and is easy to cause the adsorption system to appear unexpected adsorption in the wafer positioning stage, thereby affecting the effect of wafer planarization. Therefore, a novel adsorption assembly needs to be proposed to solve the above problems. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a novel adsorption assembly which realizes the quick switching of the sucking disc between the working state and the non-working state through the linkage design of the valve body, the valve sleeve and the elastic piece, and effectively prevents the adsorption error.

[0006] The utility model solves the above problems by adopting the following technical scheme: a novel adsorption assembly is used for the planar adsorption of a workpiece, comprising:

[0007] The sucking disc comprises an adsorption surface and a vacuum air duct, the vacuum air duct comprises a first air inlet and a first air outlet, the first air inlet is arranged at the adsorption surface, and the first air outlet is arranged on the side of the sucking disc away from the adsorption surface.

[0008] The connecting pipe is a telescopic pipe, one end of the connecting pipe is connected with the first air outlet on the sucking disc.

[0009] The disc seat is provided with a through hole, the through hole comprises a second air inlet and a second air outlet, the other end of the connecting pipe is connected with the side of the disc seat where the second air inlet is arranged, and the second air inlet is located within the cage range of the end of the connecting pipe.

[0010] The valve body comprises:

[0011] A valve pipe is arranged on one side of the disc seat where the second air inlet is formed, and an insertion opening is formed on the end of the valve pipe away from the disc seat. The valve pipe is located inside the connecting pipe and communicates with the through hole. A first communication hole is formed on the side of the valve pipe.

[0012] A valve sleeve is movably sleeved on the outside of the valve pipe. A second communication hole is formed on the side of the valve sleeve. The end of the valve sleeve away from the valve pipe is connected with the suction disc.

[0013] A connecting rod is connected with the valve sleeve at one end and movably inserted into the insertion opening at the other end.

[0014] An elastic member is arranged in the valve pipe, and the connecting rod is connected with the valve pipe through the elastic member to provide elastic force away from the disc seat for the connecting rod.

[0015] When the suction disc is in the working state, the valve sleeve moves towards the disc seat to make the first communication hole and the second communication hole coincide, so that the inside of the connecting pipe communicates with the through hole. When the suction disc is in the non-working state, the valve sleeve moves away from the disc seat to make the second communication hole and the first communication hole misaligned, so that the first communication hole is closed.

[0016] Preferably, the valve pipe is arranged on the side of the disc seat facing the suction disc. An embedding groove is also formed on the side of the disc seat facing the suction disc. The embedding groove is arranged in alignment with the end of the valve sleeve facing the disc seat, and the shape and size of the embedding groove are adapted to the end of the valve sleeve facing the disc seat.

[0017] The depth of the embedding groove is configured to make the first communication hole and the second communication hole communicate when the end of the valve pipe facing the disc seat abuts against the inner wall of the side of the embedding groove facing the valve pipe.

[0018] Preferably, the shape and size of the first communication hole are the same as those of the second communication hole.

[0019] The depth of the embedding groove is configured to make the first communication hole and the second communication hole align when the end of the valve sleeve facing the disc seat abuts against the inner wall of the side of the embedding groove facing the valve sleeve.

[0020] Preferably, the connecting pipe is a flexible pipe.

[0021] Preferably, the relative positions of the connecting pipe and the valve sleeve are configured to leave a gap between the inner wall of the connecting pipe and the outer surface of the valve sleeve when the end of the connecting pipe connected with the chuck and the end of the connecting pipe connected with the chuck seat move relatively.

[0022] The embodiment of the present application has the following beneficial effects:

[0023] The adsorption assembly adopts the cooperation design of the valve pipe and the valve sleeve, uses the relative positions of the first communication hole and the second communication hole to control the on-off state of the air passage, and combines the elastic member to provide the elastic force of the connecting rod away from the chuck seat direction, so that the quick switching of the chuck between the working state and the non-working state is realized, the response speed and the reliability of the adsorption assembly are improved, the vacuum air passage is automatically closed in the non-working state of the chuck, the unexpected adsorption is avoided, the safety and the adsorption precision of the wafer positioning are improved. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a schematic sectional view of the adsorption assembly in the non-working state according to an embodiment of the present application.

[0025] Figure 2 is a schematic sectional view of the adsorption assembly in the working state according to an embodiment of the present application.

[0026] Wherein: 100, adsorption assembly; 110, chuck; 111, adsorption surface; 112, vacuum air passage; 120, connecting pipe; 130, chuck seat; 131, through hole; 132, embedding groove; 140, valve body; 141, valve pipe; 1411, first communication hole; 142, valve sleeve; 1421, second communication hole; 143, connecting rod; 144, elastic member. DETAILED DESCRIPTION

[0027] The specific embodiments of the present application will be further described in detail below in combination with the drawings and the embodiments. The following embodiments are used to illustrate the present application, but not to limit the scope of the present application.

[0028] In the description of the present application, it needs to be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the scope of protection of the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" and the like can be explicitly or implicitly included one or more. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0029] In the description of the present application, it needs to be understood that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0030] Figure 1 is a schematic sectional view of the adsorption assembly in a non-working state in an embodiment of the present application; Figure 2 is a schematic sectional view of the adsorption assembly in a working state in an embodiment of the present application.

[0031] As Figures 1 to 2 shown. A novel adsorption assembly 100 is provided in a preferred embodiment of the present application to adsorb target objects. The target objects can be wafers and other product materials having adsorbable flat surfaces, which are not specifically limited here and are determined according to actual conditions.

[0032] The adsorption assembly 100 includes a suction cup 110, which includes an adsorption surface 111 and a vacuum air duct 112. The vacuum air duct 112 includes a first air inlet and a first air outlet. The first air inlet is provided at the adsorption surface 111, and the first air outlet is provided at the side of the suction cup 110 away from the adsorption surface 111.

[0033] Specifically, one side of the suction cup 110 is configured as the adsorption surface 111. The suction cup 110 should be made of a material with high elasticity and flexibility, so that the adsorption surface 111 of the suction cup 110 can be fully attached to the adsorbed surface 111 of the target object. Therefore, the material of the suction cup 110 is usually selected to be rubber or polyurethane material with high elasticity and flexibility, so as to ensure good sealing effect.

[0034] The adsorption surface 111 is usually a concave bowl-shaped surface, and the edge profile is circular. The first air inlet is arranged at the adsorption surface 111, and specifically can be arranged at the center of the adsorption surface 111. The second air inlet is arranged on the side of the suction cup 110 away from the adsorption surface 111, and is arranged opposite to the first air inlet.

[0035] The adsorption assembly 100 comprises a connecting pipe 120 connected with the suction cup 110. The connecting pipe 120 is a telescopic pipe to adapt to the valve body 140 and to meet the movement requirement of the valve sleeve 142. One end of the connecting pipe 120 is connected with the first air outlet on the suction cup 110, so that the inside of the connecting pipe 120 is communicated with the bowl-shaped space structure of the adsorption surface 111. When the adsorption assembly 100 is in working state, the air between the adsorption surface 111 and the adsorbed surface 111 of the target object is extracted through the connecting pipe 120.

[0036] The adsorption assembly 100 further comprises a disc seat 130 connected with the connecting pipe 120. The disc seat 130 is provided with a through hole 131 comprising a second air inlet and a second air outlet. The other end of the connecting pipe 120 is connected with the side of the disc seat 130 where the second air inlet is arranged, and the second air inlet is located within the range of the end cover of the connecting pipe 120.

[0037] Specifically, the shape of the disc seat 130 is embodied as a disc, a rectangular disc or a special-shaped disc in specific ways. Taking the disc as an example, the second air inlet is arranged at the center of one side of the disc, and the second air outlet is arranged at the center of the other side of the disc. The second air inlet and the second air outlet on the two sides of the disc are communicated to form the through hole 131 in the disc seat 130. The end of the connecting pipe 120 away from the suction cup 110 is connected with the side of the disc seat 130 where the second air inlet is arranged. A sealing element is installed at the connection position, and the second air inlet is located in the port of the connection end of the connecting pipe 120 and the disc seat 130, that is, the end projection contour of the connecting pipe 120 and the disc seat 130 on the side of the disc seat 130 where the second air inlet is arranged covers the outside of the second air inlet contour. It can be understood that the through hole 131 can be connected with a vacuum generating device (not shown in the figure) through a pipeline.

[0038] In order to prevent the chuck 110 from being adsorbed before being moved to the target position, the through hole 131 in the chuck seat 130 and the vacuum air duct 112 in the chuck 110 need to be in a blocked state, so in the embodiment, the adsorption assembly 100 further comprises a valve body 140 arranged on the side of the chuck seat 130 where the second air inlet is arranged, and the second air inlet is arranged inside the connection position of the valve body 140 and the chuck seat 130, so as to control the communication state of the connecting pipe 120 and the through hole 131 through the valve body 140, so that the chuck 110 is in a non-working state before being moved to the target position, and only when the chuck 110 is moved to the target position, the chuck 110 can be adsorbed on the adsorption surface 111 of the workpiece.

[0039] The valve body 140 comprises a valve pipe 141 connected with the chuck seat 130.

[0040] Among them, the external shape of the valve pipe 141 is embodied in a specific way as a circular pipe or a square pipe, etc., taking the square pipe as an example, as shown in Figure 1 The two ends of the valve pipe 141 are both arranged as openings, one end of the valve pipe 141 is fixedly connected with the side of the chuck seat 130 where the second air inlet is arranged, and the opening at the end of the valve pipe 141 away from the chuck seat 130 is a socket. At this time, the valve pipe 141 is located inside the connecting pipe 120, and the valve pipe 141 is in communication with the through hole 131, and the side of the valve pipe 141 is provided with a first communication hole 1411, so that the inside of the connecting pipe 120 is in communication with the inside of the through hole 131 through the first communication hole 1411.

[0041] The valve body 140 comprises a valve sleeve 142 movably connected with the valve pipe 141. The side of the valve sleeve 142 is provided with a second communication hole 1421, and the end of the valve sleeve 142 away from the valve pipe 141 is connected with the chuck 110.

[0042] The shape of the valve sleeve 142 is embodied as a pipe in a specific way, the valve sleeve 142 movably sleeves the outside of the valve pipe 141, one end of the valve sleeve 142 is arranged as an opening, and the other end is arranged as a closed end, and the shape and size of the inside space of the valve sleeve 142 are matched with the shape and size of the outside of the valve pipe 141, when the external shape of the valve pipe 141 is a square pipe, the inside shape of the valve sleeve 142 is a square groove. Taking the inside shape of the valve sleeve 142 as a square groove as an example, as shown in Figure 2 When the valve sleeve 142 sleeves the outside of the valve pipe 141, under the limitation of the square structure, the valve sleeve 142 can only move along the axial direction of the valve pipe 141. And when the valve pipe 141 is a square pipe, the second communication hole 1421 and the first communication hole 1411 are arranged on the same side, so that after the valve sleeve 142 moves to a specific position relative to the valve pipe 141, the second communication hole 1421 can be in communication with the first communication hole 1411, so that the connecting pipe 120 and the through hole 131 on the chuck seat 130 are in communication.

[0043] The valve body 140 further comprises a connecting rod 143 and an elastic member 144. One end of the connecting rod 143 is connected with the valve sleeve 142, and the other end of the connecting rod 143 is movably inserted into the socket at one end of the valve pipe 141. The elastic member 144 is arranged in the valve pipe 141, and the connecting rod 143 is connected with the valve pipe 141 through the elastic member 144 to provide the connecting rod 143 with elastic force away from the disc seat 130.

[0044] The connecting rod 143 is embodied in a specific manner as a round rod, a square rod, etc. Taking the round rod as an example, as shown in FIG. 2, one end of the connecting rod 143 is inserted into the valve sleeve 142 and connected with the center of the closed end of the valve sleeve 142, and the other end of the connecting rod 143 is movably inserted into the socket. The elastic member 144 is embodied in a specific manner as a spring, which is located in the valve pipe 141. One end of the spring is fixedly connected with the valve pipe 141, and the other end of the spring is connected with the connecting rod 143 inserted into the valve pipe 141 through the socket to provide the connecting rod 143 with elastic force away from the valve pipe 141. Figure 2

[0045] The adsorption assembly 100 in the embodiment has a working state and a non-working state. When the adsorption assembly 100 is in the working state (i.e., the adsorption disc 110 is in the working state), the valve sleeve 142 moves towards the disc seat 130 to overlap the first communication hole 1411 and the second communication hole 1421, so that the inside of the connecting pipe 120 is communicated with the through hole 131. When the adsorption assembly 100 is in the non-working state (i.e., the adsorption disc 110 is in the non-working state), the valve sleeve 142 moves away from the disc seat 130 to be arranged in a staggered manner with the first communication hole 1411 and the second communication hole 1421, so that the first communication hole 1411 is closed.

[0046] The embodiment adopts the cooperation design of the valve pipe 141 and the valve sleeve 142, uses the relative positions of the first communication hole 1411 and the second communication hole 1421 to control the on-off state of the air passage, and combines the elastic member 144 to provide the connecting rod 143 with elastic force away from the disc seat 130, so as to realize the rapid switching of the adsorption disc 110 between the working state and the non-working state, improve the response speed and reliability of the adsorption assembly 100, ensure that the vacuum air passage 112 is automatically closed when the adsorption disc 110 is in the non-working state, avoid unexpected adsorption, and improve the safety and adsorption precision of wafer positioning.

[0047] ​To enable the second communication hole 1421 to be accurately aligned with the first communication hole 1411, in some embodiments, the valve pipe 141 is installed on the side of the disc seat 130 facing the suction disc 110, and the disc seat 130 also has an embedding groove 132 on the side facing the suction disc 110, which is aligned with the end of the valve sleeve 142 facing the disc seat 130, and the shape and size of the embedding groove 132 are adapted to the end of the valve sleeve 142 facing the disc seat 130, and the depth of the embedding groove 132 is configured to enable the first communication hole 1411 to communicate with the second communication hole 1421 when the end of the valve sleeve 142 facing the disc seat 130 abuts against the inner wall of the embedding groove 132 facing the valve sleeve 142.

[0048] In this embodiment, the valve pipe 141 is installed on the side of the disc seat 130 facing the suction disc 110, and the embedding groove 132 aligned with the valve sleeve 142 is formed on this side, and the shape and size of the embedding groove 132 are adapted to the valve sleeve 142, and the depth of the embedding groove 132 is configured to enable the first communication hole 1411 to accurately connect with the second communication hole 1421 when the valve sleeve 142 abuts against the inner wall of the embedding groove 132, thereby effectively solving the problem of unstable air passage connection caused by inaccurate connection between the valve sleeve 142 and the valve pipe 141 in the prior art, and further achieving the accuracy and reliability of air passage control in the suction assembly 100, and improving the suction effect of the suction disc 110 in the working state and the stability of the system.

[0049] To further provide the communication between the first communication hole 1411 and the second communication hole 1421, in some embodiments, the shape and size of the first communication hole 1411 are the same as those of the second communication hole 1421, and the depth of the embedding groove 132 is configured to enable the first communication hole 1411 to be aligned with the second communication hole 1421 when the end of the valve sleeve 142 facing the disc seat 130 abuts against the inner wall of the embedding groove 132 facing the valve sleeve 142, i.e., the first communication hole 1411 and the second communication hole 1421 are completely coincident at this time.

[0050] In this embodiment, the first communication hole 1411 and the second communication hole 1421 have the same shape and size, and the depth of the embedding groove 132 is accurately configured to enable the first communication hole 1411 to be completely coincident with the second communication hole 1421 when the end of the valve sleeve 142 facing the disc seat 130 abuts against the inner wall of the embedding groove 132, thereby effectively solving the problem of poor air flow caused by incomplete or inaccurate connection of the air flow passage in the prior art, and further achieving smooth communication between the first communication hole 1411 and the second communication hole 1421, and ensuring the stability of the air flow and the reliability of the suction effect of the suction assembly 100 in the working process.

[0051] In order to adapt the connecting pipe 120 to the movement of the suction cup 110 relative to the disc seat 130, in some embodiments, the connecting pipe 120 can be selected as a flexible pipe.

[0052] Further, in order to avoid the second communication hole 1421 being blocked by the inner wall of the connecting pipe 120 after the movement of the suction cup 110 relative to the disc seat 130, thereby affecting the air flow communication between the second communication hole 1421 and the connecting pipe 120, in some embodiments, the relative positions of the connecting pipe 120 and the valve sleeve 142 are configured such that when the connecting end of the connecting pipe 120 connected with the suction cup 110 and the connecting end of the connecting pipe 120 connected with the disc seat 130 move relatively, a gap is left between the inner wall of the connecting pipe 120 and the outer surface of the valve sleeve 142 (i.e. the second communication hole 1421 on the surface of the valve sleeve 142 is in a separated state between the inner wall of the connecting pipe 120).

[0053] The present embodiment effectively solves the problem that the second communication hole 1421 can be blocked by the inner wall of the connecting pipe 120 after the movement of the suction cup 110 in the prior art, thereby realizing smooth air flow communication between the second communication hole 1421 and the connecting pipe 120, ensuring the stability of the suction system and the smoothness of the air flow passage, and avoiding unstable suction effect caused by air flow obstruction, due to the precise configuration of the relative positions of the connecting pipe 120 and the valve sleeve 142, which leaves a gap between the inner wall of the connecting pipe 120 and the outer surface of the valve sleeve 142 when the connecting end of the connecting pipe 120 connected with the suction cup 110 and the connecting end of the connecting pipe 120 connected with the disc seat 130 move relatively.

[0054] Further, in order to ensure good flowability of the air flow when entering and exiting the second communication hole 1421, the gap between the inner wall of the connecting pipe 120 and the outer surface of the valve sleeve 142 needs to be comprehensively considered in terms of air flow flowability requirements, structure size and tolerance, air flow rate and suction demand, material and friction characteristics, and changes in use environment.

[0055] Based on the above factors, the specific value of the gap can usually be optimized through experimental tests or fluid dynamics simulation. According to actual requirements, the size of the gap is usually between a few millimeters and a few tens of millimeters, and is usually determined by the size of the suction assembly 100 and the requirement of air flow rate.

[0056] The above described in the specification of the present application is only an example of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, as long as they do not deviate from the content of the specification of the present application or exceed the scope defined by the claims, and should belong to the protection scope of the present application.

Claims

1. A novel adsorption assembly for planar adsorption of a workpiece, characterized in that, The application relates to a novel suction assembly. The suction assembly comprises a suction disc, a connecting pipe, a disc seat, a valve body and an elastic member. The suction disc comprises a suction surface and a vacuum air duct, the vacuum air duct comprises a first air inlet and a first air outlet, the first air inlet is arranged on the suction surface, and the first air outlet is arranged on the side of the suction disc away from the suction surface. The connecting pipe is a telescopic pipe, one end of the connecting pipe is connected with the first air outlet on the suction disc. The disc seat is provided with a through hole, the through hole comprises a second air inlet and a second air outlet, the other end of the connecting pipe is connected with the side of the disc seat provided with the second air inlet, and the second air inlet is located within the range of the end of the connecting pipe. The valve body comprises a valve pipe and a valve sleeve. The valve pipe is arranged on the side of the disc seat provided with the second air inlet, one end of the valve pipe away from the disc seat is provided with a socket, the valve pipe is located in the inside of the connecting pipe, the valve pipe is communicated with the through hole, and a first communication hole is arranged on the side of the valve pipe. The valve sleeve is movably sleeved on the outside of the valve pipe, a second communication hole is arranged on the side of the valve sleeve, and one end of the valve sleeve away from the valve pipe is connected with the suction disc. One end of the connecting rod is connected with the valve sleeve, and the other end of the connecting rod is movably inserted into the socket. The elastic member is arranged in the valve pipe, and the connecting rod is connected with the valve pipe through the elastic member to provide elastic force away from the disc seat for the connecting rod.

2. A novel adsorption assembly as claimed in claim 1, wherein, When the suction disc is in a working state, the valve sleeve moves towards the disc seat to make the first communication hole coincide with the second communication hole, so that the inside of the connecting pipe is communicated with the through hole. When the suction disc is in a non-working state, the valve sleeve moves away from the disc seat to make the second communication hole and the first communication hole be arranged in a staggered mode, so that the first communication hole is closed. The valve pipe is arranged on the side of the disc seat towards the suction disc, the side of the disc seat towards the suction disc is also provided with an embedding groove, the embedding groove is arranged in alignment with one end of the valve sleeve towards the disc seat, and the shape and size of the embedding groove are matched with one end of the valve sleeve towards the disc seat. The depth of the embedding groove is configured to make the first communication hole and the second communication hole be communicated when one end of the valve pipe towards the disc seat abuts against the inner wall of the side of the embedding groove towards the valve pipe.

3. The novel suction assembly according to claim 2, wherein the shape and size of the first communication hole are the same as the shape and size of the second communication hole.

4. A novel adsorption assembly as claimed in claim 1, wherein, The depth of the embedding groove is configured to make the first communication hole and the second communication hole be arranged in alignment when one end of the valve sleeve towards the disc seat abuts against the inner wall of the side of the embedding groove towards the valve sleeve.

5. A novel adsorption assembly as claimed in claim 4, wherein, The connecting pipe is a flexible pipe. The relative positions of the connecting pipe and the valve sleeve are configured to leave a gap between the inner wall of the connecting pipe and the outer surface of the valve sleeve when the end of the connecting pipe connected with the suction disc and the end of the connecting pipe connected with the disc seat move relatively.

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