Raw material proportioning equipment for processing and producing photoresist

Abstract

The utility model discloses photoresist processing and production raw material proportioning equipment, which comprises a supporting component, a material distribution component, a material distribution component, a material distribution component, a material distribution component and a material distribution component, and the cleaning component comprises an external threaded rod, an upper rotating disc, a lower rotating disc, an internal threaded ring, a transverse plate, a vertical plate, a cleaning ring and a scraping ring, the lower rotating disc is connected to the middle of the top end of the paired supporting seat, the upper rotating disc is connected to the upper surface of the lower rotating disc, and the external threaded rod is rotationally connected between the upper rotating disc and the lower rotating disc. The problems that when the device is used, materials are usually loaded into a first loading box and a second loading box respectively, some materials are attached to the inner walls of the first loading box and the second loading box when the weighed materials are used in the later period, so that certain deviation exists among the proportions of various raw materials, the phenomenon of uneven mixing exists, and the mixing efficiency is high are solved. And the requirements of photoresist production on high precision and high efficiency cannot be met.

Description

Technical Field

[0001] This utility model relates to the field of photoresist processing technology, and in particular to a raw material proportioning device for photoresist processing production. Background Technology

[0002] Photoresist has extremely important applications in high-tech fields such as semiconductor manufacturing, and its quality and performance have a critical impact on the precision and reliability of the final product.

[0003] A search of publication number CN221333952U reveals a mixing device for preparing black photoresist, relating to the field of photoresist preparation and mixing technology. This device addresses the problem that existing photoresist preparation methods often involve mixing one sample at a time, requiring cleaning after each mixing before proceeding to the next, necessitating machine downtime for cleaning and resulting in low mixing efficiency. The device includes: a rotating column at the lower end of a central column; a connecting plate welded to the upper end of the central column; a feeding hopper at one end of the connecting plate; a first force-bearing plate on one side of the rotating column; a second force-bearing plate on the other side of the rotating column; a first loading box and a second loading box above the first and second force-bearing plates, respectively; and weighing devices between the first and second force-bearing plates and the first and second loading boxes, respectively; and a variable frequency motor located inside the central column, with a motor shaft at one end.

[0004] However, when the above-mentioned device is used, the materials are usually loaded into the first and second loading boxes respectively. When the weighed materials are used later, some materials will adhere to the inner walls of the first and second loading boxes, resulting in a certain deviation between the proportions of various raw materials and uneven mixing. This cannot meet the requirements of high precision and high efficiency in photoresist production. Therefore, it is necessary to provide a raw material proportioning device for photoresist processing and production to meet the requirements of high precision and high efficiency in photoresist production. Utility Model Content

[0005] The purpose of this invention is to provide a raw material proportioning device for photoresist processing and production, in order to solve the problem mentioned in the background art. In the above-mentioned device, materials are usually loaded into the first and second loading boxes respectively. However, when the weighed materials are used later, some materials will adhere to the inner walls of the first and second loading boxes, resulting in a certain deviation between the proportions of various raw materials and uneven mixing. This cannot meet the high precision and high efficiency requirements of photoresist production.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0007] This utility model relates to a raw material proportioning device for photoresist processing and production, comprising:

[0008] A support component, the support component including a mating support base, a support plate and a support ring;

[0009] The cleaning component includes an external threaded rod, an upper turntable, a lower turntable, an internal threaded ring, a horizontal plate, a vertical plate, a cleaning ring, and a scraper ring. The lower turntable is connected to the middle of the top of the mating support base. The upper turntable is connected to the upper surface of the lower turntable. The external threaded rod is rotatably connected between the upper and lower turntables. The internal threaded ring is connected to the outer surface of the external threaded rod. The horizontal plate is circumferentially connected to the outer surface of the internal threaded ring. The vertical plate is symmetrically connected to one end of the bottom of the horizontal plate. The cleaning ring is connected to the bottom of the vertical plate. The scraper is fixedly connected to the middle of the outer surface of the cleaning ring.

[0010] Furthermore, it also includes a fixing component, which includes a docking groove, a docking plate, a moving groove, a fixing ring, and a moving rod. The docking groove is provided on the inner side of the bottom of the upright plate, the docking plate is connected to the top of the cleaning plate, and the docking block is inserted into the inside of the docking groove.

[0011] Furthermore, a movable groove is provided on one side of the inner surface of the docking groove, a movable rod is connected to the upper part of one side of the outer surface of the docking block, the movable rod is movably connected inside the movable groove, and a fixing ring is connected to the outer surface of the movable rod and is tightly attached to the lower part of one side of the upright plate.

[0012] Furthermore, the outer surface of the mating support base is circumferentially connected with support plates, and support rings are welded to the outside of the support plates.

[0013] Furthermore, it also includes anti-corrosion components, which include a filling barrel, an anti-corrosion inner liner, extension blocks, positioning holes, positioning rods, insert rings, bottom rings, slots, and flow meters. The filling barrel is fixedly connected to the inner surface of the support ring, and the anti-corrosion inner liner is fitted to the inner surface of the filling barrel. Extension blocks are equidistantly connected to the upper surface of the anti-corrosion inner liner. Positioning holes are opened inside the extension blocks. A positioning rod is connected to the top of the filling barrel. The extension blocks are suspended from the top of the filling barrel, and the positioning rod is inserted into the positioning hole.

[0014] Furthermore, the bottom ring is connected to the bottom of the inner surface of the filling barrel, the top of the filling barrel has a slot, and the bottom of the anti-corrosion inner liner is connected to a plug ring, which is inserted into the slot.

[0015] Compared with the prior art, the advantages of the present invention are:

[0016] This invention comprises an internal threaded ring, a horizontal plate, a vertical plate, a cleaning ring, and a scraper ring. Raw materials are loaded into the interior of a material container. A motor rotates the upper and lower turntables, causing the external threaded rod to rotate simultaneously. The internal threaded ring moves up and down due to the rotation of the external threaded rod, while the scraper ring, which adheres to the inner wall of the material container, scrapes away any residual raw materials by moving up and down. This allows for the complete utilization of the paired raw materials, improves the uniformity of mixing multiple materials, and meets the high precision and high efficiency requirements of photoresist production.

[0017] Based on the aforementioned beneficial effects, by providing an anti-corrosion inner liner inside the filling barrel, installing the anti-corrosion inner liner on the inner wall of the filling barrel, inserting a ring into the slot, suspending an extension block at the top of the filling barrel, and inserting a positioning rod into the positioning hole to fix the anti-corrosion inner liner, when the proportioned raw materials are loaded into the filling barrel, the proportioned raw materials will directly contact the inner anti-corrosion inner liner to prevent the raw materials from reacting chemically with the tank. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the overall proportioning support base of this utility model;

[0020] Figure 2 This is a schematic diagram of the proportioning support base after the disassembly of the material filling hopper of this utility model;

[0021] Figure 3 This is a schematic diagram of the interior of the material loading hopper of this utility model.

[0022] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0023] 11. Support base; 12. Support plate; 13. Support ring;

[0024] 21. External threaded rod; 22. Upper turntable; 23. Lower turntable; 24. Internal threaded ring; 25. Horizontal plate; 26. Vertical plate; 27. Cleaning ring; 28. Scraper ring;

[0025] 31. Connecting groove; 32. Connecting plate; 33. Moving groove; 34. Fixing ring; 35. Moving rod;

[0026] 41. Filling hopper; 42. Corrosion-resistant inner liner; 43. Extension block; 44. Positioning hole; 45. Positioning rod; 46. Insert ring; 47. Bottom ring; 48. Slot; 49. Flow meter. Detailed Implementation

[0027] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0028] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0030] Please see Figure 1 , Figure 2 As shown, this embodiment is a raw material proportioning device for photoresist processing and production, comprising:

[0031] The support component includes a support base 11, a support plate 12, and a support ring 13;

[0032] The cleaning component includes an external threaded rod 21, an upper turntable 22, a lower turntable 23, an internal threaded ring 24, a horizontal plate 25, a vertical plate 26, a cleaning ring 27, and a scraper ring 28. The lower turntable 23 is connected to the middle of the top of the support base 11. The upper turntable 22 is connected to the upper surface of the lower turntable 23. The external threaded rod 21 is rotatably connected between the upper turntable 22 and the lower turntable 23. The internal threaded ring 24 is connected to the outer surface of the external threaded rod 21. The horizontal plate 25 is circumferentially connected to the outer surface of the internal threaded ring 24. The vertical plate 26 is symmetrically connected to one end of the bottom of the horizontal plate 25. The cleaning ring 27 is connected to the bottom of the vertical plate 26. The scraper is fixedly connected to the middle of the outer surface of the cleaning ring 27.

[0033] When the motor runs, the upper turntable 22 and the lower turntable 23 rotate, which drives the external threaded rod 21 to rotate simultaneously. The internal threaded ring 24 moves up and down through the rotation of the external threaded rod 21, while the scraper ring 28 is attached to the inner wall of the loading barrel 41 and scrapes off the residual raw materials on the inner wall of the loading barrel 41 by moving up and down.

[0034] It also includes a fixing component, which includes a docking groove 31, a docking plate 32, a moving groove 33, a fixing ring 34 and a moving rod 35. The docking groove 31 is provided on the inner side of the bottom of the upright plate 26, the docking plate 32 is connected to the top of the cleaning plate, and the docking block is inserted into the inside of the docking groove 31.

[0035] Insert the docking plate 32 into the docking groove 31 so that the cleaning ring 27 is installed at the bottom of the upright plate 26.

[0036] A movable groove 33 is provided on one side of the inner surface of the docking groove 31. A movable rod 35 is connected to the upper part of one side of the outer surface of the docking block. The movable rod 35 is movably connected inside the movable groove 33. A fixing ring 34 is connected to the outer surface of the movable rod 35 and is tightly attached to the lower part of one side of the upright plate 26.

[0037] After the docking plate 32 is inserted into the docking groove 31, the moving rod 35 is simultaneously embedded in the moving groove 33. Then, the fixing ring 34 is fixed to the outside of the moving rod 35 to reinforce the cleaning ring 27 after installation.

[0038] Support plates 12 are equidistantly connected to the outer circumference of the support base 11, and support rings 13 are welded to the outside of the support plates 12.

[0039] The filling barrel 41 is fixed inside the support ring 13, and the support plate 12 and the support ring 13 can support the filling barrel 41.

[0040] The working principle is as follows: First, the mating plate 32 is inserted into the mating groove 31, while the moving rod 35 is simultaneously embedded in the moving groove 33, so that the cleaning ring 27 is installed at the bottom of the upright plate 26. Then, the fixing ring 34 is fixed to the outside of the moving rod 35 to reinforce the installed cleaning ring 27. The motor runs, causing the upper turntable 22 and the lower turntable 23 to rotate, which drives the external thread rod 21 to rotate simultaneously. The internal thread ring 24 moves up and down through the rotation of the external thread rod 21, while the scraping ring 28 is attached to the inner wall of the material barrel 41. By moving up and down, it scrapes off the residual raw materials on the inner wall of the material barrel 41, which can fully utilize the paired raw materials, improve the uniformity of mixing multiple raw materials, and meet the requirements of high precision and high efficiency in photoresist production.

[0041] Please see Figure 1 , Figure 3As shown, this embodiment, based on the above embodiment, also includes an anti-corrosion component. The anti-corrosion component includes a filling barrel 41, an anti-corrosion inner liner 42, an extension block 43, a positioning hole 44, a positioning rod 45, a plug ring 46, a bottom ring 47, a slot 48, and a flow meter 49. The filling barrel 41 is fixedly connected to the inner surface of the support ring 13. The anti-corrosion inner liner 42 is fitted to the inner surface of the filling barrel 41. Extension blocks 43 are equidistantly connected to the upper surface of the anti-corrosion inner liner 42. Positioning holes 44 are opened inside the extension blocks 43. The positioning rod 45 is connected to the top of the filling barrel 41. The extension blocks 43 are suspended from the top of the filling barrel 41 and the positioning rod 45 is inserted into the positioning hole 44.

[0042] The anti-corrosion inner liner 42 is installed on the inner wall of the filling tank 41. When the raw materials are filled into the filling tank 41, the raw materials will come into direct contact with the anti-corrosion inner liner 42 to prevent the raw materials from reacting chemically with the tank.

[0043] The bottom ring 47 is connected to the bottom of the inner surface of the filling barrel 41. The top of the filling barrel 41 is provided with a slot 48. The bottom of the anti-corrosion inner liner 42 is connected with a plug ring 46, which is inserted into the slot 48.

[0044] After the anti-corrosion inner liner 42 is installed inside the filling barrel 41, the insert ring 46 is simultaneously inserted into the slot 48 for fixation.

[0045] The working principle is as follows: First, the anti-corrosion inner liner 42 is installed on the inner wall of the loading tank 41, the insert ring 46 is inserted into the inside of the slot 48, and the extension block 43 is suspended from the top of the loading tank 41. The positioning rod 45 is inserted into the inside of the positioning hole 44 to fix the anti-corrosion inner liner 42. When the proportioned raw materials are loaded into the inside of the loading tank 41, the proportioned raw materials will directly contact the anti-corrosion inner liner 42 inside to prevent the raw materials from reacting chemically with the tank.

[0046] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0047] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A raw material proportioning device for photoresist processing and production, characterized in that, include: The support component includes a mating support base (11), a support plate (12), and a support ring (13). The cleaning component includes an external threaded rod (21), an upper turntable (22), a lower turntable (23), an internal threaded ring (24), a horizontal plate (25), a vertical plate (26), a cleaning ring (27), and a scraper (28). The lower turntable (23) is connected to the middle of the top of the mating support base (11). The upper turntable (22) is connected to the upper surface of the lower turntable (23). The external threaded rod (21) is rotatably connected between the upper turntable (22) and the lower turntable (23). The internal threaded ring (24) is connected to the outer surface of the external threaded rod (21). The horizontal plate (25) is circumferentially connected to the outer surface of the internal threaded ring (24). The vertical plate (26) is symmetrically connected to one end of the bottom of the horizontal plate (25). The cleaning ring (27) is connected to the bottom of the vertical plate (26). The scraper is fixedly connected to the middle of the outer surface of the cleaning ring (27).

2. The photoresist processing raw material proportioning equipment according to claim 1, characterized in that, It also includes a fixing component, which includes a docking groove (31), a docking plate (32), a moving groove (33), a fixing ring (34) and a moving rod (35). The bottom inner side of the upright plate (26) is provided with a docking groove (31), the docking plate (32) is connected to the top of the cleaning plate, and the docking block is inserted into the docking groove (31).

3. The photoresist processing raw material proportioning equipment according to claim 2, characterized in that, A movable groove (33) is provided on one side of the inner surface of the docking groove (31). A movable rod (35) is connected to the upper part of the outer surface of the docking block. The movable rod (35) is movably connected inside the movable groove (33). A fixing ring (34) is connected to the outer surface of the movable rod (35) and is tightly attached to the lower part of the side of the upright plate (26).

4. The photoresist processing raw material proportioning equipment according to claim 1, characterized in that, The outer surface of the paired support base (11) is circumferentially connected with support plates (12), and support rings (13) are welded to the outside of the support plates (12).

5. The photoresist processing raw material proportioning equipment according to claim 1, characterized in that, It also includes anti-corrosion components, which include a loading barrel (41), an anti-corrosion inner liner (42), an extension block (43), a positioning hole (44), a positioning rod (45), a plug ring (46), a bottom ring (47), a slot (48), and a flow meter (49). The loading barrel (41) is fixedly connected to the inner surface of the support ring (13), and the anti-corrosion inner liner (42) is fitted to the inner surface of the loading barrel (41). The upper surface of the anti-corrosion inner liner (42) is circumferentially connected with extension blocks (43), and the interior of the extension block (43) is provided with a positioning hole (44). The top of the loading barrel (41) is connected with a positioning rod (45), and the extension block (43) is suspended from the top of the loading barrel (41) and the positioning rod (45) is inserted into the interior of the positioning hole (44).

6. The photoresist processing raw material proportioning equipment according to claim 5, characterized in that, The bottom ring (47) is connected to the bottom of the inner surface of the filling barrel (41). The top of the filling barrel (41) is provided with a slot (48). The bottom of the anti-corrosion inner liner (42) is connected with a plug ring (46), which is inserted into the slot (48).

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